Patents by Inventor John Rozen
John Rozen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240090350Abstract: A grain-boundary self-aligned resistive memory structure is provided enabling the closely-packed formation of multiple, oxide-based, ReRAM elements in parallel, each with its own compliance resistor. The structure is capable of forming multiple filaments, one per element, with the aim of reducing the variability in the composite ReRAM cell.Type: ApplicationFiled: September 9, 2022Publication date: March 14, 2024Inventors: Paul Michael Solomon, Takashi Ando, Eduard Albert Cartier, John Rozen
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Publication number: 20240090352Abstract: To limit resistance variability across a resistive random-access memory (RRAM) call, the disclosure includes an RRAM cell with a resistance spreading layer within the RRAM cell between the top and bottom electrodes of the RRAM cell. The resistance spreading layer is in series with and has no impedance with a filament forming layer of the RRAM cell. The resistance spreading layer may be below the filament forming layer or the resistance spreading layer may be above the filament forming layer. The resistance spreading layer may further be in series with and has no impedance with the bottom electrode or the top electrode.Type: ApplicationFiled: September 13, 2022Publication date: March 14, 2024Inventors: Paul Michael Solomon, Takashi Ando, John Rozen, Eduard Albert Cartier
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Patent number: 11832534Abstract: Methods of forming variable-resistance devices include forming a variable-resistance layer between a first terminal and a second terminal from a material that varies in resistance based on an oxygen concentration. An electrolyte layer is formed over the variable-resistance layer from a material that is stable at room temperature and that conducts oxygen ions in accordance with an applied voltage. A conductive gate layer is formed over the electrolyte layer.Type: GrantFiled: December 23, 2020Date of Patent: November 28, 2023Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Teodor K Todorov, Douglas M. Bishop, Jianshi Tang, John Rozen
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Patent number: 11770986Abstract: A resistive switching memory stack, comprised of a bottom electrode, an oxide layer located on the bottom electrode; and a top electrode located on the oxide layer. The top electrode is comprised of a first layer, an intermediate layer located directly on the first layer, and a top layer located on top of the intermediate layer. Wherein the intermediate layer is comprised of a doped carbide active layer.Type: GrantFiled: April 22, 2021Date of Patent: September 26, 2023Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: John Rozen, Marinus Hopstaken, Yohei Ogawa, Masanobu Hatanaka, Takashi Ando, Kazuhiro Honda
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Patent number: 11646199Abstract: Embodiments of the present invention are directed to forming a sub-stoichiometric metal-oxide film using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor can include a metal and a first ligand. The second precursor can include the same metal and a second ligand. A substrate can be exposed to the first precursor during a first pulse of an ALD cycle. The substrate can be exposed to the second precursor during a second pulse of the ALD cycle. The second pulse can occur directly after the first pulse without an intervening thermal oxidant. The substrate can be exposed to the thermal oxidant during a third pulse of the ALD cycle.Type: GrantFiled: May 18, 2021Date of Patent: May 9, 2023Assignees: International Business Machines Corporation, ULVAC. Inc.Inventors: John Rozen, Martin Michael Frank, Yohei Ogawa
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Patent number: 11586899Abstract: A method of fabricating a neuromorphic device includes forming a variable-resistance layer between a first terminal and a second terminal, the variable-resistance layer varies in resistance based on an oxygen concentration in the variable-resistance layer. The method further includes forming an electrolyte layer over the variable-resistance layer that is stable at room temperature and that conducts oxygen ions in accordance with an applied voltage. The method further includes forming a gate layer over the electrolyte layer to apply a voltage on the electrolyte layer and the variable-resistance layer, the gate layer formed using an oxygen scavenging material.Type: GrantFiled: June 10, 2019Date of Patent: February 21, 2023Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Teodor Krassimirov Todorov, Jianshi Tang, Douglas M. Bishop, John Rozen, Takashi Ando
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Patent number: 11568927Abstract: An embodiment of the invention may include a memory structure. The memory structure may include a first terminal connected to a first contact. The memory structure may include a second terminal connected to a second contact and a third contact. The memory structure may include a multi-level nonvolatile electrochemical cell having a variable resistance channel and a programming gate. The memory structure may include the first contact and second contact connected to the variable resistance channel. The memory structure may include the third contact is connected to the programming gate. This may enable decoupled read-write operations of the device.Type: GrantFiled: March 30, 2021Date of Patent: January 31, 2023Assignee: International Business Machines CorporationInventors: John Rozen, Seyoung Kim, Paul Michael Solomon
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Patent number: 11569444Abstract: An embodiment of the invention may include a first electrode, a second electrode, and a multi-level nonvolatile electrochemical cell located between the first electrode and second electrode. The multi-level nonvolatile electrochemical cell may have a read path and a write path through the cell, where the read path and the write path are different.Type: GrantFiled: March 30, 2021Date of Patent: January 31, 2023Assignee: International Business Machines CorporationInventor: John Rozen
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Publication number: 20220344586Abstract: A resistive switching memory stack, comprised of a bottom electrode, an oxide layer located on the bottom electrode; and a top electrode located on the oxide layer. The top electrode is comprised of a first layer, an intermediate layer located directly on the first layer, and a top layer located on top of the intermediate layer. Wherein the intermediate layer is comprised of a doped carbide active layer.Type: ApplicationFiled: April 22, 2021Publication date: October 27, 2022Inventors: John Rozen, Marinus Hopstaken, Yohei Ogawa, Masanobu Hatanaka, Takashi Ando, Kazuhiro Honda
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Publication number: 20220328302Abstract: Embodiments of the present invention are directed to forming a ternary compound using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor includes a first metal and a first ligand. The second precursor includes a second metal and a second ligand. The second ligand is selected based on the first ligand to target a second metal uptake. A substrate is exposed to the first precursor during a first pulse of an ALD cycle and the substrate is exposed to the second precursor during a second pulse of the ALD cycle, the second pulse occurring after the first pulse. The substrate is exposed to a third precursor (e.g., an oxidant) during a third pulse of the ALD cycle. The ternary compound can include a ternary oxide film.Type: ApplicationFiled: June 28, 2022Publication date: October 13, 2022Inventors: Martin Michael Frank, John Rozen, Yohei Ogawa
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Publication number: 20220319588Abstract: An embodiment of the invention may include a memory structure. The memory structure may include a first terminal connected to a first contact. The memory structure may include a second terminal connected to a second contact and a third contact. The memory structure may include a multi-level nonvolatile electrochemical cell having a variable resistance channel and a programming gate. The memory structure may include the first contact and second contact connected to the variable resistance channel. The memory structure may include the third contact is connected to the programming gate. This may enable decoupled read-write operations of the device.Type: ApplicationFiled: March 30, 2021Publication date: October 6, 2022Inventors: John Rozen, Seyoung Kim, Paul Michael Solomon
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Publication number: 20220320426Abstract: An embodiment of the invention may include a first electrode, a second electrode, and a multi-level nonvolatile electrochemical cell located between the first electrode and second electrode. The multi-level nonvolatile electrochemical cell may have a read path and a write path through the cell, where the read path and the write path are different.Type: ApplicationFiled: March 30, 2021Publication date: October 6, 2022Inventor: John Rozen
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Patent number: 11462398Abstract: Embodiments of the present invention are directed to forming a ternary compound using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor includes a first metal and a first ligand. The second precursor includes a second metal and a second ligand. The second ligand is selected based on the first ligand to target a second metal uptake. A substrate is exposed to the first precursor during a first pulse of an ALD cycle and the substrate is exposed to the second precursor during a second pulse of the ALD cycle, the second pulse occurring after the first pulse. The substrate is exposed to a third precursor (e.g., an oxidant) during a third pulse of the ALD cycle. The ternary compound can include a ternary oxide film.Type: GrantFiled: July 17, 2019Date of Patent: October 4, 2022Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, ULVAC, INCInventors: Martin Michael Frank, John Rozen, Yohei Ogawa
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Patent number: 11455521Abstract: A neuromorphic semiconductor device includes a copper-based intercalation channel disposed on an insulative layer, a source contact and a drain contact of a substrate. A copper-based electrolyte layer is disposed on the copper-based intercalation channel and a copper-based gate electrode is disposed on the copper-based electrolyte layer.Type: GrantFiled: March 1, 2019Date of Patent: September 27, 2022Assignee: International Business Machines CorporationInventors: Teodor K. Todorov, Douglas M. Bishop, Jianshi Tang, John Rozen
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Patent number: 11362274Abstract: A laterally switching cell structure including a metal-insulator-metal stack includes an active metal oxide layer including one or more sub-stoichiometric regions. The metal oxide layer includes one or more metal-oxides deposited conformally using a mixed precursor atomic layer deposition process. A graded oxygen profile in the metal oxide layer(s) of the stack including a mirrored impurity density may be formed wherein the sub-stoichiometric region(s) include a relatively high density of impurities obtained as reaction by-products. Arrays of cell structures can be formed with no requirement for a thick active electrode, allowing for more space for a metal fill and optional selector, thereby reducing access resistance.Type: GrantFiled: January 10, 2020Date of Patent: June 14, 2022Assignees: International Business Machines Corporation, ULVAC, INC.Inventors: John Rozen, Takashi Ando, Martin M. Frank, Yohei Ogawa
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Patent number: 11195929Abstract: A gate structure for effective work function adjustments of semiconductor devices that includes a gate dielectric on a channel region of a semiconductor device; a first metal nitride in direct contact with the gate dielectric; a conformal carbide of Aluminum material layer having an aluminum content greater than 30 atomic wt. %; and a second metal nitride layer in direct contact with the conformal aluminum (Al) and carbon (C) containing material layer. The conformal carbide of aluminum (Al) layer includes aluminum carbide, or Al4C3, yielding an aluminum (Al) content up to 57 atomic % (at. %) and work function setting from 3.9 eV to 5.0 eV at thicknesses below 25 ?. Such structures can present metal gate length scaling and resistance benefit below 25 nm compared to state of the art work function electrodes.Type: GrantFiled: October 30, 2019Date of Patent: December 7, 2021Assignees: International Business Machines Corporation, ULVAC, INC.Inventors: Takashi Ando, Ruqiang Bao, Masanobu Hatanaka, Vijay Narayanan, Yohei Ogawa, John Rozen
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Patent number: 11189482Abstract: A thin film formation method includes setting a film formation subject to 200° C. or higher. A first step includes changing a first state, in which a film formation material and a carrier gas are supplied so that the film formation material collects on the film formation subject, to a second state, in which the film formation material is omitted. A second step includes changing a third state, in which a hydrogen gas and a carrier gas are supplied to reduce the film formation material, to a fourth state, in which the hydrogen gas is omitted. The film formation material is any one of Al(CxH2x+1)3, Al(CxH2x+1)2H, and Al(CxH2x+1)2Cl. The first step and the second step are alternately repeated to form an aluminum carbide film on the film formation subject such that a content rate of aluminum atoms is 20 atomic percent or greater.Type: GrantFiled: May 11, 2018Date of Patent: November 30, 2021Assignees: ULVAC, INC., INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Masanobu Hatanaka, Yohei Ogawa, Keon-chang Lee, Nobuyuki Kato, Takakazu Yamada, John Rozen
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Patent number: 11152214Abstract: A method of forming a semiconductor device that includes forming a metal oxide material on a III-V semiconductor channel region or a germanium containing channel region; and treating the metal oxide material with an oxidation process. The method may further include depositing of a hafnium containing oxide on the metal oxide material after the oxidation process, and forming a gate conductor atop the hafnium containing oxide. The source and drain regions are on present on opposing sides of the gate structure including the metal oxide material, the hafnium containing oxide and the gate conductor.Type: GrantFiled: April 20, 2016Date of Patent: October 19, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Takashi Ando, John Bruley, Eduard A. Cartier, Martin M. Frank, Vijay Narayanan, John Rozen
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Patent number: 11121259Abstract: A neuromorphic device includes a metal-oxide channel layer that has a variable-resistance between a first terminal and a second terminal. The neuromorphic device further includes a metal-oxide charge transfer layer over the metal-oxide channel layer that causes the metal-oxide channel layer to vary in resistance based on charge exchange between the metal-oxide charge transfer layer and the metal-oxide channel layer in accordance with an applied input signal. The neuromorphic device further includes a third terminal that applies the signal to the metal-oxide charge transfer layer and the metal-oxide channel layer.Type: GrantFiled: July 17, 2019Date of Patent: September 14, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: John Rozen, Takashi Ando, Teodor Krassimirov Todorov, Jianshi Tang
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Publication number: 20210272796Abstract: Embodiments of the present invention are directed to forming a sub-stoichiometric metal-oxide film using a modified atomic layer deposition (ALD) process. In a non-limiting embodiment of the invention, a first precursor and a second precursor are selected. The first precursor can include a metal and a first ligand. The second precursor can include the same metal and a second ligand. A substrate can be exposed to the first precursor during a first pulse of an ALD cycle. The substrate can be exposed to the second precursor during a second pulse of the ALD cycle. The second pulse can occur directly after the first pulse without an intervening thermal oxidant. The substrate can be exposed to the thermal oxidant during a third pulse of the ALD cycle.Type: ApplicationFiled: May 18, 2021Publication date: September 2, 2021Inventors: John Rozen, Martin Michael Frank, Yohei Ogawa