Patents by Inventor Jordan D. Greenlee

Jordan D. Greenlee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220005823
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises laterally-spaced memory-block regions. Channel-material strings extend through the first tiers and the second tiers. Material of the first tiers is of different composition from material of the second tiers. Conducting material is formed in one of the first tiers. The conducting material comprises a seam in and longitudinally-along opposing sides of individual of the memory-block regions in the one first tier. The seam is penetrated with a fluid that forms intermediate material in the seam longitudinally-along the opposing sides of the individual memory-block regions in the one first tier and comprises a different composition from that of the conducting material. Other embodiments, including structure independent of method, are disclosed.
    Type: Application
    Filed: July 1, 2020
    Publication date: January 6, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, John D. Hopkins
  • Publication number: 20210384422
    Abstract: Some embodiments include an integrated assembly having an insulative mass over a conductive base structure. A conductive interconnect extends through the insulative mass to an upper surface of the conductive base structure. The conductive interconnect includes a conductive liner extending around an outer lateral periphery of the interconnect. The conductive liner includes nitrogen in combination with a first metal. A container-shaped conductive structure is laterally surrounded by the conductive liner. The container-shaped conductive structure includes a second metal. A conductive plug is within the container-shaped conductive structure. Some embodiments include methods of forming conductive interconnects within integrated assemblies.
    Type: Application
    Filed: August 24, 2021
    Publication date: December 9, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Tao D. Nguyen, John Mark Meldrim, Aaron K. Belsher
  • Publication number: 20210384216
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a conductor tier comprising conductor material on a substrate. Laterally-spaced memory-block regions are formed and individually comprise a vertical stack comprising alternating first tiers and second tiers directly above the conductor tier. Channel-material strings of memory cells extend through the first tiers and the second tiers. Horizontally-elongated lines are formed in the conductor material between the laterally-spaced memory-block regions. The horizontally-elongated lines are of different composition from an upper portion of the conductor material that is laterally-between the horizontally-elongated lines. After the horizontally-elongated lines are formed, conductive material of a lowest of the first tiers is formed that directly electrically couples together the channel material of individual of the channel-material strings and the conductor material of the conductor tier.
    Type: Application
    Filed: June 3, 2020
    Publication date: December 9, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, John D. Hopkins
  • Patent number: 11195848
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Upper masses comprise first material laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks and second material laterally-between and longitudinally-spaced-along the immediately-laterally-adjacent memory blocks longitudinally-between and under the upper masses. The second material is of different composition from that of the first material. The second material comprises insulative material. Other embodiments, including method, are disclosed.
    Type: Grant
    Filed: August 25, 2019
    Date of Patent: December 7, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Daniel Billingsley, Indra V. Chary, Rita J. Klein
  • Publication number: 20210375911
    Abstract: Some embodiments include an integrated assembly having a second deck over a first deck. The first deck has first memory cell levels, and the second deck has second memory cell levels. A pair of cell-material-pillars pass through the first and second decks. Memory cells are along the first and second memory cell levels. The cell-material-pillars are a first pillar and a second pillar. An intermediate level is between the first and second decks. The intermediate level includes a region between the first and second pillars. The region includes a first segment adjacent the first pillar, a second segment adjacent the second pillar, and a third segment between the first and second segments. The first and second segments include a first composition, and the third segment includes a second composition different from the first composition. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: June 2, 2020
    Publication date: December 2, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, John D. Hopkins
  • Publication number: 20210376083
    Abstract: Some embodiments include an integrated assembly having a source structure. The source structure includes, in ascending order, a first conductively-doped semiconductor material, one or more first insulative layers, a second conductively-doped semiconductor material, one or more second insulative layers, and a third conductively-doped semiconductor material. The source structure includes blocks extending through the second conductively-doped semiconductor material. Conductive levels are over the source structure. Channel material extends vertically along the conductive levels, and extends into the source structure to be in direct contact with the second conductively-doped semiconductor material. One or more memory cell materials are between the channel material and the conductive levels. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: June 2, 2020
    Publication date: December 2, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, John D. Hopkins
  • Patent number: 11177276
    Abstract: Some embodiments include a conductive structure of an integrated circuit. The conductive structure includes an upper primary portion, with the upper primary portion having a first conductive constituent configured as a container. The container has a bottom, and a pair of sidewalls extending upwardly from the bottom. An interior region of the container is over the bottom and between the sidewalls. The upper primary portion includes a second conductive constituent configured as a mass filling the interior region of the container. The second conductive constituent is a different composition than the first conductive constituent. One or more conductive projections join to the upper primary portion and extend downwardly from the upper primary portion. Some embodiments include assemblies comprising memory cells over conductive structures. Some embodiments include methods of forming conductive structures.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: November 16, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Nancy M. Lomeli, Tom George, Jordan D. Greenlee, Scott M. Pook, John Mark Meldrim
  • Patent number: 11158718
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. Channel material extends vertically along the stack. The wordline levels include conductive regions which have a first metal-containing material and a second metal-containing material. The first metal-containing material at least partially surrounds the second metal-containing material. The first metal-containing material has a different crystallinity than the second metal-containing material. In some embodiments the first metal-containing material is substantially amorphous, and the second metal-containing material has a mean grain size within a range of from greater than or equal to about 5 nm to less than or equal to about 200 nm. Charge-storage regions are adjacent the wordline levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: October 26, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Rita J. Klein, Everett A. McTeer, John Mark Meldrim
  • Publication number: 20210313346
    Abstract: Some embodiments include a method of forming an integrated assembly. A stack of alternating first and second materials is formed over a conductive structure. The conductive structure includes a semiconductor-containing material over a metal-containing material. An opening is formed to extend through the stack and through the semiconductor-containing material, to expose the metal-containing material. The semiconductor-containing material is doped with carbon and/or with one or more metals. After the doping of the semiconductor-containing material, the second material of the stack is removed to form voids. Conductive material is formed within the voids. Insulative material is formed within the opening. Some embodiments include integrated assemblies having carbon distributed within at least a portion of a semiconductor material.
    Type: Application
    Filed: June 15, 2021
    Publication date: October 7, 2021
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Purnima Narayanan, Jordan D. Greenlee
  • Patent number: 11127899
    Abstract: Some embodiments include an integrated assembly having an insulative mass over a conductive base structure. A conductive interconnect extends through the insulative mass to an upper surface of the conductive base structure. The conductive interconnect includes a conductive liner extending around an outer lateral periphery of the interconnect. The conductive liner includes nitrogen in combination with a first metal. A container-shaped conductive structure is laterally surrounded by the conductive liner. The container-shaped conductive structure includes a second metal. A conductive plug is within the container-shaped conductive structure. Some embodiments include methods of forming conductive interconnects within integrated assemblies.
    Type: Grant
    Filed: April 11, 2019
    Date of Patent: September 21, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Tao D. Nguyen, John Mark Meldrim, Aaron K. Belsher
  • Publication number: 20210287990
    Abstract: A microelectronic device comprises a first conductive structure, a barrier structure, a conductive liner structure, and a second conductive structure. The first conductive structure is within a first filled opening in a first dielectric structure. The barrier structure is within the first filled opening in the first dielectric structure and vertically overlies the first conductive structure. The conductive liner structure is on the barrier structure and is within a second filled opening in a second dielectric structure vertically overlying the first dielectric structure. The second conductive structure vertically overlies and is horizontally surrounded by the conductive liner structure within the second filled opening in the second dielectric structure. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Application
    Filed: March 16, 2020
    Publication date: September 16, 2021
    Inventors: Jordan D. Greenlee, Christian George Emor, Luca Fumagalli, John D. Hopkins, Rita J. Klein, Christopher W. Petz, Everett A. McTeer
  • Publication number: 20210287989
    Abstract: A microelectronic device comprises a stack structure, a staircase structure, conductive pad structures, and conductive contact structures. The stack structure comprises vertically alternating conductive structures and insulating structures arranged in tiers. Each of the tiers individually comprises one of the conductive structures and one of the insulating structures. The staircase structure has steps comprising edges of at least some of the tiers of the stack structure. The conductive pad structures are on the steps of the staircase structure and comprise beta phase tungsten. The conductive contact structures are on the conductive pad structures. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Application
    Filed: March 12, 2020
    Publication date: September 16, 2021
    Inventors: Jordan D. Greenlee, John D. Hopkins, Rita J. Klein, Everett A. McTeer, Lifang Xu, Daniel Billingsley, Collin Howder
  • Publication number: 20210233801
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. Bridge material is formed across the trenches laterally-between and longitudinally-along immediately-laterally-adjacent of the memory-block regions. The bridge material comprises longitudinally-alternating first and second regions. The first regions of the bridge material are ion implanted differently than the second regions of the bridge material to change relative etch rate of one of the first or second regions relative to the other in an etching process.
    Type: Application
    Filed: April 13, 2021
    Publication date: July 29, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Daniel Billingsley, Jordan D. Greenlee, Yongjun Jeff Hu
  • Publication number: 20210233933
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include terminal regions, and include nonterminal regions proximate the terminal regions. The terminal regions are vertically thicker than the nonterminal regions, and are configured as segments which are vertically stacked one atop another and which are vertically spaced from one another. Blocks are adjacent to the segments and have approximately a same vertical thickness as the segments. The blocks include high-k dielectric material, charge-blocking material and charge-storage material. Channel material extends vertically along the stack and is adjacent to the blocks. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: April 14, 2021
    Publication date: July 29, 2021
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi, Jordan D. Greenlee
  • Patent number: 11056505
    Abstract: Some embodiments include a method of forming an integrated assembly. A stack of alternating first and second materials is formed over a conductive structure. The conductive structure includes a semiconductor-containing material over a metal-containing material. An opening is formed to extend through the stack and through the semiconductor-containing material, to expose the metal-containing material. The semiconductor-containing material is doped with carbon and/or with one or more metals. After the doping of the semiconductor-containing material, the second material of the stack is removed to form voids. Conductive material is formed within the voids. Insulative material is formed within the opening. Some embodiments include integrated assemblies having carbon distributed within at least a portion of a semiconductor material.
    Type: Grant
    Filed: December 10, 2019
    Date of Patent: July 6, 2021
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Purnima Narayanan, Jordan D. Greenlee
  • Publication number: 20210202388
    Abstract: Described are methods for forming a tungsten conductive structure over a substrate, such as a semiconductor substrate. Described examples include forming a silicon-containing material, such as a doped silicon-containing material, over a supporting structure. The silicon-containing material is then subsequently converted to a tungsten seed material containing the dopant material. A tungsten fill material of lower resistance will then be formed over the tungsten seed material.
    Type: Application
    Filed: December 30, 2019
    Publication date: July 1, 2021
    Inventors: Jordan D. Greenlee, Christian George Emor, Travis Rampton, Everett Allen McTeer, Rita J. Klein
  • Publication number: 20210202710
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and control gate levels. Channel material extends vertically along the stack. The control gate levels comprising conductive regions. The conductive regions include at least three different materials. Charge-storage regions are adjacent the control gate levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.
    Type: Application
    Filed: February 19, 2021
    Publication date: July 1, 2021
    Applicant: Micron Technology, Inc.
    Inventors: David Ross Economy, Rita J. Klein, Jordan D. Greenlee, John Mark Meldrim, Brenda D. Kraus, Everett A. McTeer
  • Publication number: 20210183651
    Abstract: Described are methods for forming a multilayer conductive structure for semiconductor devices. A seed layer is formed comprising a metal and an additional constituent that in combination with the metal inhibits nucleation of a fill layer of the metal formed over the seed layer. Tungsten may be doped or alloyed with silicon to form the seed layer, with a tungsten fill being formed over the seed layer.
    Type: Application
    Filed: November 23, 2020
    Publication date: June 17, 2021
    Inventors: David Ross Economy, Brian Beatty, John Mark Meldrim, Yongjun Jeff Hu, Jordan D. Greenlee
  • Publication number: 20210175249
    Abstract: Some embodiments include a method of forming an integrated assembly. A stack of alternating first and second materials is formed over a conductive structure. The conductive structure includes a semiconductor-containing material over a metal-containing material. An opening is formed to extend through the stack and through the semiconductor-containing material, to expose the metal-containing material. The semiconductor-containing material is doped with carbon and/or with one or more metals. After the doping of the semiconductor-containing material, the second material of the stack is removed to form voids. Conductive material is formed within the voids. Insulative material is formed within the opening. Some embodiments include integrated assemblies having carbon distributed within at least a portion of a semiconductor material.
    Type: Application
    Filed: December 10, 2019
    Publication date: June 10, 2021
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Purnima Narayanan, Jordan D. Greenlee
  • Patent number: 11031417
    Abstract: A method used in forming an array of elevationally-extending transistors comprises forming vertically-alternating tiers of insulating material and void space. Such method includes forming (a) individual longitudinally-aligned channel openings extending elevationally through the insulating-material tiers, and (b) horizontally-elongated trenches extending elevationally through the insulating-material tiers. The void-space tiers are filled with conductive material by flowing the conductive material or one or more precursors thereof through at least one of (a) and (b) to into the void-space tiers. After the filling, transistor channel material is formed in the individual channel openings along the insulating-material tiers and along the conductive material in the filled void-space tiers.
    Type: Grant
    Filed: June 16, 2020
    Date of Patent: June 8, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, John Mark Meldrim, E. Allen McTeer