Patents by Inventor Jun Xia

Jun Xia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220344156
    Abstract: Embodiment relates to a method for fabricating a semiconductor structure. The method includes: forming a first pattern on the first region and forming a second pattern on the second region, wherein the first pattern includes a plurality of first sub-patterns, a first gap is provided between adjacent two of the plurality of first sub-patterns, a width of the first gap is a first pitch, and wherein the second pattern includes a plurality of second sub-patterns, a second gap is provided between adjacent two of the plurality of second sub-patterns, a width of the second gap is a second pitch, and the second pitch is greater than the first pitch; forming a first mask layer on a sidewall of the first pattern, and forming a second mask layer on a sidewall of the second pattern; and removing the first pattern and the second pattern.
    Type: Application
    Filed: September 14, 2021
    Publication date: October 27, 2022
    Inventors: Kangshu ZHAN, Qiang WAN, Penghui XU, Tao LIU, Sen LI, Jun XIA
  • Publication number: 20220345292
    Abstract: The present application provides a method and a device for encryption of a video stream, a communication equipment, and a storage media. The method for encryption of a video stream includes: acquiring a video stream, encrypting a data part of an I frame by using a first encryption algorithm to obtain a first encrypted data, and encrypting an encryption key of the first encrypted data by using a second encryption algorithm to obtain a second encrypted data, and storing the second encrypted data in a frame header of the I frame to obtain an encrypted I frame.
    Type: Application
    Filed: December 7, 2021
    Publication date: October 27, 2022
    Inventors: Jun XIA, Bin WANG, Guoqiang ZHENG
  • Publication number: 20220319857
    Abstract: Embodiments of the present disclosure provide a patterning method and a semiconductor structure. The method includes: providing a substrate, wherein the substrate includes adjacent storage regions and peripheral circuit regions; forming, on the substrate, a pattern transfer layer, the pattern transfer layer having a plurality of first hard masks, wherein the first hard masks extend along a first direction and are spaced apart from each other; forming a barrier layer on the pattern transfer layer; forming, on the barrier layer, a plurality of second hard masks, the plurality of second hard masks extending along a second direction, wherein the second hard masks are spaced apart from each other, and the second hard masks are located in the storage regions and second hard masks close to the peripheral circuit regions have structural defects.
    Type: Application
    Filed: January 14, 2022
    Publication date: October 6, 2022
    Inventors: Qiang Wan, Jun Xia, Kangshu Zhan, Sen Li, Tao Liu, Penghui Xu
  • Publication number: 20220319849
    Abstract: A method for manufacturing a mask pattern includes the following operations. A pattern transfer layer, an etching stopping layer, a sacrificial layer and a hard mask layer that are stacked from bottom up are formed. The hard mask layer and the sacrificial layer are patterned to obtain sacrificial patterns which expose the etching stopping layer. Side wall structures are formed on the side walls of the sacrificial patterns. The sacrificial patterns are removed. Filling layers are formed between the side wall structures, and the etching selection ratio of the side wall structures to the filling layers is greater than 100. The side wall structures are removed to form an initial mask pattern. The etching stopping layer and the pattern transfer layer are etched based on the initial mask pattern to transfer a pattern of the initial mask pattern to the pattern transfer layer to obtain a target mask pattern.
    Type: Application
    Filed: October 12, 2021
    Publication date: October 6, 2022
    Inventors: Qiang WAN, Kangshu Zhan, Jun Xia, Sen Li, Penghui Xu, Tao Liu
  • Publication number: 20220310402
    Abstract: The present disclosure provides a manufacturing method of a semiconductor structure, including: an insulating layer includes a first dielectric layer and a second dielectric layer, a protective layer covers an upper surface of the second dielectric layer and a bottom and sidewalls of the first trench; removing part of the protective layer to expose at least part of a surface of the second dielectric layer; removing the second dielectric layer by a first wet etching process, the first wet etching process has a first etch selectivity of a material of the second dielectric layer to that of the first dielectric layer; and removing the protective layer by a second wet etching process, the second wet etching process has a second etch selectivity of a material of the protective layer to that of the first dielectric layer, and the second etch selectivity is greater than the first etch selectivity.
    Type: Application
    Filed: January 21, 2022
    Publication date: September 29, 2022
    Inventors: Qiang WAN, Jun XIA, Kangshu ZHAN, Sen LI, Penghui XU, Tao LIU
  • Publication number: 20220310607
    Abstract: A method for manufacturing a mask structure includes: patterning a sacrificial layer and a second dielectric layer, so as to form pattern structures each including a first pattern and a second pattern, and a width of a lower portion of the pattern structures is less than a width of a upper portion of the pattern structures; forming an initial mask pattern on sidewalls of each of the plurality of pattern structures; filling a first filling layer between adjacent initial mask patterns located on the sidewalls of different pattern structures; removing the second patterns and the initial mask pattern located on sidewalls of each of the plurality of second patterns; removing the first filling layer and the first patterns, so as to form first mask patterns; and forming second mask patterns on the first mask patterns.
    Type: Application
    Filed: September 23, 2021
    Publication date: September 29, 2022
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Qiang WAN, JUN XIA, Penghui XU, Tao LIU, Sen LI, Kangshu ZHAN
  • Publication number: 20220310393
    Abstract: A mask structure, a semiconductor structure and methods for manufacturing the same are disclosed. The method for manufacturing the mask structure includes: forming a pattern transfer layer, a first etching stop layer, a first sacrificial layer and a first hard mask layer sequentially stacked from bottom to top; patterning the first sacrificial layer and the first hard mask layer, to obtain a first sacrificial pattern, the first sacrificial pattern exposing the first etching stop layer; forming a first initial mask pattern on side walls of the first sacrificial pattern; removing the first sacrificial pattern; removing, based on the first initial mask pattern, a part of the first etching stop layer of which a top surface being exposed; removing the first initial mask pattern, and using the remaining part of the first etching stop layer on the upper surface of the pattern transfer layer as a first mask pattern.
    Type: Application
    Filed: January 14, 2022
    Publication date: September 29, 2022
    Inventors: Penghui XU, Qiang WAN, Tao LIU, Sen LI, Jun XIA, Kangshu ZHAN, Jinghao WANG
  • Publication number: 20220310614
    Abstract: The embodiments of the present disclosure belong to the technical field of semiconductor manufacturing, and relate to a semiconductor structure and a method for manufacturing a semiconductor structure. Each of a plurality of storage structures in the semiconductor structure includes a plurality of capacitor structures stacked in a direction perpendicular to a substrate, each of the plurality of capacitor structures includes a bottom plate and an top plate which are arranged opposite to each other, and a first dielectric layer located between the bottom plate and the top plate, and the bottom plate and the top plate are both parallel to the substrate, all bottom plates in each of the plurality of storage structures are electrically connected, and all top plates in each of the plurality of storage structures are electrically connected; the bottom plate and the top plate extend in a plane parallel to the substrate.
    Type: Application
    Filed: January 13, 2022
    Publication date: September 29, 2022
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Kangshu ZHAN, JUN XIA, Qiang WAN, Tao LIU, Sen LI
  • Publication number: 20220310606
    Abstract: The present application provides a method for preparing a semiconductor structure and a semiconductor structure, relating to the technical field of semiconductors. The method for preparing a semiconductor structure includes: providing a base; forming a support layer having capacitor holes and electric contact structures; forming a first dielectric layer in the capacitor holes, the first dielectric layer surrounding first intermediate holes; forming a first electrode layer in the first intermediate holes, the first electrode layer filling the first intermediate holes; removing part of the support layer to form second intermediate holes; forming a second dielectric layer in the second intermediate holes, the first dielectric layer and the second dielectric layer forming a dielectric layer; and, forming a second electrode layer on the dielectric layer.
    Type: Application
    Filed: October 15, 2021
    Publication date: September 29, 2022
    Inventors: Kangshu ZHAN, Qiang WAN, Penghui XU, Tao LIU, Sen LI, Jun XIA
  • Publication number: 20220302127
    Abstract: The present disclosure relates to the technical field of semiconductors, and provides a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a substrate; a bit line located on the substrate; and a support layer located on the substrate, wherein the support layer includes a first support segment and a second support segment, the first support segment and the second support segment are both connected to the bit line, and the bit line is located between the first support segment and the second support segment.
    Type: Application
    Filed: February 8, 2022
    Publication date: September 22, 2022
    Inventors: Sen LI, Jun Xia, Kangshu Zhan, Tao Liu, Qiang Wan, Penghui Xu
  • Publication number: 20220285481
    Abstract: A method for forming a semiconductor structure includes: forming a base including a substrate, capacitor contacts in the substrate, a laminated structure disposed on a surface of the substrate capacitor holes penetrating through the laminated structure and exposing the respective capacitor contacts, the laminated structure including a plurality of support layers and at least one sacrificial layer which are alternately stacked along a direction perpendicular to the substrate, and a lower electrode layer covering inner walls of the capacitor holes; forming a protective layer covering a surface of the lower electrode layer; etching part of the support layer to expose the sacrificial layer; and removing all the sacrificial layers and all the protective layer to expose the lower electrode layer.
    Type: Application
    Filed: August 22, 2021
    Publication date: September 8, 2022
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Kangshu ZHAN, Qiang WAN, Penghui XU, Tao LIU, Sen LI, Jun XIA
  • Publication number: 20220254782
    Abstract: A method for manufacturing a memory and a memory is provided. The method for manufacturing a memory includes: providing a substrate; stacking an electrode support structure, a protective layer and a first mask layer in sequence on the substrate; patterning the first mask layer on an array region, and etching the protective layer, the electrode support structure and the substrate by using the patterned first mask layer as a mask, to form capacitor holes penetrating the protective layer and the electrode support structure and extending into the substrate; removing the first mask layer; and forming a first electrode layer on side walls and bottom walls of the capacitor holes, a top surface of the first electrode layer being flush with a top surface of the electrode support structure.
    Type: Application
    Filed: December 6, 2021
    Publication date: August 11, 2022
    Inventors: Qiang WAN, Jun XIA, Kangshu ZHAN, Sen LI, Tao LIU, Penghui XU
  • Publication number: 20220246616
    Abstract: An embodiment of the disclosure provides a method for manufacturing a semiconductor structure, including: providing a substrate, where the substrate has a peripheral region and an array region; stacking and forming an insulating layer and a mask layer with a mask pattern on the substrate; etching the insulating layer with the mask layer as a mask to form a contact hole penetrating the insulating layer at the array region; reserving the mask layer; in a direction perpendicular to a surface of the substrate, providing a thickness difference between the mask layer of the peripheral region and the mask layer of the array region; forming a first material layer; forming a second material layer; etching a part of the mask layer with the second material layer as the mask; and removing the remaining second material layer, the remaining mask layer and the first material layer on the remaining mask layer.
    Type: Application
    Filed: December 2, 2021
    Publication date: August 4, 2022
    Inventors: Jun XIA, Qiang WAN, Penghui XU, Tao LIU, Sen LI, Kangshu ZHAN
  • Publication number: 20220246617
    Abstract: A method for manufacturing a semiconductor structure includes: a substrate is provided, in which the substrate is provided with a peripheral area and an array area; an insulation layer is formed on the substrate; a first mask layer with a first mask pattern is formed on the insulation layer; the insulation layer is etched by taking the first mask layer as a mask, to form a contact hole in the array area; a first electrode layer is formed; a second mask layer with a second mask pattern is formed, in which the second mask layer is arranged on the first electrode layer; and the first electrode layer and the first mask layer are etched by taking the second mask layer as a mask until the insulation layer in the array area is exposed, in which a remaining portion of the first electrode layer forms a lower electrode layer.
    Type: Application
    Filed: October 18, 2021
    Publication date: August 4, 2022
    Inventors: Jun Xia, Qiang Wan, Penghui Xu, Sen Li, Kangshu Zhan, Tao Liu
  • Publication number: 20220246437
    Abstract: An embodiment of the application provides a method for forming a semiconductor structure. The semiconductor structure includes a first region and a second region. The method includes the following steps: providing a base, an insulating layer, and a mask layer that are stacked in sequence, where the first region has at least one trench penetrating the mask layer and the insulating layer, and the mask layer has an upper surface in the second region higher than that in the first region; forming a first protection layer, where an upper surface and a sidewall of the mask layer in the first region are covered with the first protection layer; after the first protection layer is formed, removing the mask layer in the second region; subsequent to removal of the mask layer in the second region, removing the first protection layer; and removing the mask layer in the first region.
    Type: Application
    Filed: October 19, 2021
    Publication date: August 4, 2022
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: JUN XIA, Kangshu ZHAN, Sen LI, Penghui XU, Qiang WAN, Tao LIU
  • Publication number: 20220216067
    Abstract: A method for manufacturing a semiconductor structure and a semiconductor structure are provided. The method for manufacturing a semiconductor structure includes: forming a conductive layer, a protective layer, and a mask layer in sequence on the substrate, the mask layer including a first pattern facing the first region and a second pattern facing the second region; forming a restriction pattern located in the second region by etching the protective layer using the mask layer as a mask; and forming contact pads located in the first region and connecting wires located in the second region on the conductive layer by etching the conductive layer using the mask layer as a mask.
    Type: Application
    Filed: October 25, 2021
    Publication date: July 7, 2022
    Inventors: Xinman Cao, Jun Xia, Zhongming Liu, Shijie Bai
  • Publication number: 20220216214
    Abstract: A semiconductor structure manufacturing method includes: forming a first pattern transfer layer on a conductive layer; forming a first mask layer having a plurality of first hole-shaped patterns disposed at intervals on the first pattern transfer layer, and etching the first pattern transfer layer by using the first mask layer as a mask to form first holes; and forming a second pattern transfer layer. The first holes are formed on the first pattern transfer layer. While forming the second pattern transfer layer by spin-on hardmask, there is a smaller amount of the second pattern transfer layer filling the first holes and a larger amount of the second pattern transfer layer located on the first pattern transfer layer.
    Type: Application
    Filed: September 12, 2021
    Publication date: July 7, 2022
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Xinman CAO, Zhongming LIU, JUN XIA, SHIJIE BAI
  • Publication number: 20220208764
    Abstract: Embodiments provide a memory and a fabrication method thereof, and relates to the field of storage device technology to solve the technical problem of lower storage density of the memory. The fabrication method of the memory includes: providing a substrate including a central region and an edge region connected to each other, a first contact structure electrically connected to a wordline structure in the substrate being formed in the edge region; forming a second contact structure electrically connected to the first contact structure on the edge region; forming a capacitor structure electrically connected to the wordline structure on the central region; forming a third contact structure electrically connected to the second contact structure on the second contact structure; and forming a transistor structure electrically connected to the wordline structure on the capacitor structure and the third contact structure.
    Type: Application
    Filed: August 16, 2021
    Publication date: June 30, 2022
    Inventors: Kangshu ZHAN, Jun XIA, Qiang WAN, Tao LIU, Sen LI
  • Publication number: 20220183564
    Abstract: Systems and methods are provided for imaging a sample. The system may include a pulsed light source configured to irradiate a region of interest in a sample from a first side and a second side opposite the first side; a first ultrasound transducer configured to receive acoustic waves induced at the region of interest and received from the first side of the sample; a second ultrasound transducer configured to receive acoustic waves induced at the region of interest and received from the second side of the sample; and a controller.
    Type: Application
    Filed: March 30, 2020
    Publication date: June 16, 2022
    Inventors: Jun XIA, Nikhila NYAYAPATHI, Huijuan ZHANG
  • Publication number: 20220183565
    Abstract: Devices and methods for photoacoustic tomography are disclosed herein. One exemplary photoacoustic tomography device uses a laser to produce acoustic waves in a sample. A transducer receives the acoustic waves through a slit formed by one or more blades positioned substantially parallel to the receiving aperture of the transducer. An acoustic absorber is affixed to each of the one or more blades along a surface proximal to the transducer. A processor acquires acoustic data and reconstructs photoacoustic tomographic images based on the acquired data. Reconstructing the image involves setting reconstruction parameters, defining a reconstruction area, reconstruction position, and pixel size, and calculating an acoustic travelling path for the sample to each transducer element. The acoustic travelling paths are saved into a three-dimensional array.
    Type: Application
    Filed: March 8, 2022
    Publication date: June 16, 2022
    Inventors: Jun XIA, Yuehang WANG