Abstract: A semiconductor test structure includes a first transistor active area comprising at least a first source/drain region, and a second transistor active area stacked on the first transistor active area and comprising at least a second source/drain region. At least one dielectric layer is disposed between the first transistor active area and the second transistor active area. The semiconductor test structure further includes a plurality of contact structures spaced apart from each other and disposed on the second source/drain region, and at least one gate structure extending across the first transistor active area and the second transistor active area. Contact resistance is measured between respective ones of the plurality of contact structures and the second source/drain region, and the second source/drain region is continuous between the plurality of contact structures.

Abstract: A semiconductor structure including a plurality of stacked devices having different gate dielectrics is provided. The different gate dielectrics for the stacked devices are designed to improve the performance and the reliability for each of the stacked devices.

Abstract: A semiconductor structure with two adjacent semiconductor devices of a plurality of semiconductor devices that have a backside contact that connects two adjacent source/drains of the two adjacent semiconductor devices to a backside power rail. The semiconductor provides the backside contact with a larger bottom contact area with the backside power rail than a combined contact area of the two top surfaces of the backside contact with the two adjacent source/drains.

Abstract: Embodiments are disclosed for a semiconductor structure. The semiconductor structure includes a protection diode. The protection diode includes a substrate, a gate, a first nanosheet layer, and a second nanosheet layer. The first nanosheet layer includes a heavily doped n-type epitaxial disposed over the substrate. Additionally, the first nanosheet layer is in contact with the gate. Further, the second nanosheet layer includes a heavily doped p-type epitaxial disposed over the substrate. Additionally, the second nanosheet layer is in contact with the gate. Further, the first nanosheet layer and the second nanosheet layer surround the gate.

Abstract: A semiconductor device is provided. The semiconductor device includes a semiconductor device comprising: a first stacked field effect transistor (FET) structure in a first device area, the first stacked FET structure comprising a first pull down (PD) transistor, and a first pull up (PU) transistor disposed over the first PD transistor, a first metal gate that is shared by the first PD transistor and the first PU transistor; and an oxygen blocking layer provided on the first metal gate.

Abstract: A semiconductor structure including vertically stacked nFETs and pFETs containing suspended semiconductor channel material nanosheets (NS) and a method of forming such a structure. The structure is a three dimensional (3D) integration by vertically stacking nFETs and pFETs for area scaling. In an embodiment, vertically-stacked NS FET structures include a first nanosheet transistor located above a second nanosheet transistor; the first nanosheet transistor including a first NS channel material, wherein the first NS channel material includes a first crystalline orientation; the second nanosheet transistor including a second NS channel material, wherein the second NS channel material comprises a second crystalline orientation, the first crystalline orientation is different from the second crystalline orientation. In an embodiment, each of the respective formed vertically-stacked NS FET structures include respective suspended stack of nanosheet channels that are self-aligned with each other.

Abstract: Aspects of the invention are directed to fabrication methods and resulting structures for providing transistors having hybrid crystal orientation channels and mixed crystal orientation bottom epitaxies. In a non-limiting embodiment, a first fin having a first crystal orientation is formed in a first region of a substrate having a second crystal orientation. A second fin having the second crystal orientation is formed in a second region of the substrate. The second fin is formed directly on a surface of the substrate. A mixed crystal bottom source or drain region is formed between the first fin and the first region of the substrate and a single crystal bottom source or drain region having the second crystal orientation is formed on sidewalls of the second fin and on the surface of the substrate in the second region.

Abstract: A semiconductor device fabrication method is provided. The semiconductor device fabrication method includes frontside semiconductor device processing on a frontside of a wafer, flipping the wafer, backside semiconductor device processing on a backside of the wafer and backside and frontside contact formation processing on the backside and frontside of the wafer, respectively.

Abstract: Embodiments of present invention provide a method of forming backside contact. The method includes forming a set of gate stacks on top of a substrate; forming a first recess in the substrate between the set of gate stacks, the first recess having a triangle shape with a pointy bottom; forming a dielectric anchor at the pointy bottom of the first recess; with the dielectric anchor at the pointy bottom, performing a sigma etch of the substrate through the first recess to form a second recess; epitaxially growing a semiconductor material in the second recess to form a placeholder for a backside contact; surrounding the placeholder with a dielectric material; and replacing the placeholder with a conductive material to form the backside contact. The semiconductor structure formed thereby is also provided.

Abstract: A semiconductor structure is provided including stacked first and second devices wherein at least one of the stacked devices includes a lateral diode. The lateral diode includes a p-doped region as an anode, an n-doped region as a cathode and a semiconductor channel material region sandwiched between the anode and the cathode.

Abstract: A semiconductor structure includes a first transistor device comprising a plurality of channel regions. The semiconductor structure further includes a second transistor device comprising a plurality of channel regions. The first transistor device and the second transistor device are disposed in a stacked configuration. The plurality of channel regions of the first transistor device are disposed in a staggered configuration relative to the plurality of channel regions of the second transistor device.

Abstract: A semiconductor device is provided and includes a first substrate including a first transistor; a laser reflection layer on the first transistor; and a second substrate on the laser reflection layer, the second substrate including a second transistor.

Abstract: A semiconductor structure comprises a first transistor and a second transistor. The first transistor comprises a first input source/drain region and a first output source/drain region, and the second transistor comprises a second input source/drain region and a second output source/drain region. The first input source/drain region and the second input source/drain region are connected to a first source/drain contact, and the first output source/drain region and the second output source/drain region are connected to a second source/drain contact. The first source/drain contact and the second source/drain contact on a same side of the semiconductor structure.

Abstract: Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a stack of transistors with a first transistor on top of a second transistor, where a gate of the first transistor has a first width; a gate of the second transistor has a second width; and the first width is narrower than the second width, and where the first and the second transistor respectively have a first gate extension at a first side of the stack and a second gate extension at a second side of the stack, the first gate extension at the first side of the stack being narrower than the second gate extension at the second side of the stack, with the first side being opposite the second side. A method of manufacturing the semiconductor structure is also provided.

Abstract: An air pocket is located between a top S/D region and a bottom S/D region of a stacked transistor. The air pocket reduces the parasitic capacitance between the top S/D region and the bottom S/D region, reduces the capacitance between the gate and the top S/D region, and/or reduces the capacitance between the gate and the bottom S/D region. Reduction of such capacitance(s) may improve performance of the semiconductor IC device and may allow for further semiconductor IC device scaling. A semiconductor IC device may include a bottom transistor and a top transistor. The top transistor may be vertically stacked, or aligned, with respect to the bottom transistor. The air pocket is located between, and may be vertically aligned with, the top S/D region and the bottom S/D region.

Abstract: A device includes: a first dielectric material; a first metal line in the first dielectric material; a second dielectric material disposed on the first dielectric material and the first metal line; a second metal line in the second dielectric material; and a plurality of metal vias disposed on a same level and connecting the first metal line and the second metal line, wherein the plurality of metal vias comprise a first top via and a bottom via having different sidewall profile angles.

Abstract: A stacked FET structure having independently tuned gate lengths is provided to maximize the benefit of each FET within the stacked FET structure. Notably, a vertically stacked FET structure is provided in which a bottom FET has a different gate length than a top FET. In some embodiments, a dielectric spacer can be present laterally adjacent to the bottom FET and the top FET. In such an embodiment, the dielectric spacer can have a first portion that is located laterally adjacent to the bottom FET that has a different thickness than a second portion of the dielectric spacer that is located laterally adjacent the top FET.

Abstract: A semiconductor device including a logic block, the logic block includes circuitry for one logic function of a semiconductor device, the logic block comprises a set of circuit rows, and a frontside to backside signal via vertically aligned and directly connecting a first backside metal signal to a first frontside metal signal, where the frontside to backside signal via is only in an edge cell of the logic block. A method including forming a logic block, the logic block includes circuitry for one logic function of a semiconductor device, the logic block comprises a set of circuit rows, and edge cells surrounding the logic block, forming a frontside to backside signal via vertically aligned and directly connecting a first backside metal signal to a first frontside metal signal, where the frontside to backside signal via is in an edge cell of the logic block.

Abstract: A semiconductor including a short channel device including a vertical FET (Field-Effect Transistor), and a long channel device comprising a second vertical FET integrated with the short channel device. The long channel device including a plurality of short channel devices.

Abstract: A semiconductor device including a fin structure formed on a first semiconductor region, and a first semiconductor structure controlling the first semiconductor region, the first semiconductor structure formed on a substrate and spaced apart from the first semiconductor region including the fin structure.