Patents by Inventor Junli Wang

Junli Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230345690
    Abstract: Embodiments of present invention provide a SRAM device. The SRAM device includes a first, a second, and a third SRAM cell each having a first and a second pass-gate (PG) transistor, wherein the second PG transistor of the second SRAM cell and the first PG transistor of the first SRAM cell are stacked in a first PG transistor cell, and the first PG transistor of the third SRAM cell and the second PG transistor of the first SRAM cell are stacked in a second PG transistor cell. The first and second PG transistors of the first SRAM cell may be stacked on top of, or underneath, the second PG transistor of the second SRAM cell and/or the first PG transistor of the third SRAM cell.
    Type: Application
    Filed: April 26, 2022
    Publication date: October 26, 2023
    Inventors: Ruilong Xie, Carl Radens, Junli Wang, Ravikumar Ramachandran, Julien Frougier, Dechao Guo
  • Publication number: 20230335585
    Abstract: A semiconductor device including a first pair of stacked transistors having a first upper transistor and a first lower transistor, a second pair of stacked transistors comprising a second upper transistor and a second lower transistor, and a first cross-connection between the first upper transistor and the second lower transistor.
    Type: Application
    Filed: April 17, 2022
    Publication date: October 19, 2023
    Inventors: Ruilong Xie, Albert M. Chu, Albert M. Young, Anthony I. Chou, Junli Wang, Brent A. Anderson
  • Publication number: 20230326854
    Abstract: Embodiments of present invention provide a semiconductor chip. The semiconductor chip includes a device layer having a first and a second circuit region; a frontside distribution network (FSDN) above the device layer and powering the first circuit region; and a backside distribution network (BSDN) below the device layer and powering the second circuit region, wherein the BSDN is electrically connected to the FSDN through the device layer and the FSDN is electrically connected to the first circuit region through one or more frontside metal layers, and wherein the BSDN is electrically connected to transistors of the second circuit region through the device layer.
    Type: Application
    Filed: April 8, 2022
    Publication date: October 12, 2023
    Inventors: Albert M. Chu, Brent A. Anderson, Junli Wang, John W. Golz, Nicholas Anthony Lanzillo, Lawrence A. Clevenger
  • Publication number: 20230317802
    Abstract: A high aspect ratio contact structure formed within a dielectric material includes a top portion and a bottom portion. The top portion of the contact structure includes a tapering profile towards the bottom portion. A first metal stack surrounded by an inner spacer is located within the top portion of the contact structure and a second metal stack is located within the bottom portion of the contact structure. A width of the bottom portion of the contact structure is greater than a minimum width of the top portion of the contact structure.
    Type: Application
    Filed: March 29, 2022
    Publication date: October 5, 2023
    Inventors: Junli Wang, Brent A Anderson, Terence Hook, Indira Seshadri, Albert M. Young, Stuart Sieg, Su Chen Fan, Shogo Mochizuki
  • Publication number: 20230320055
    Abstract: Embodiments disclosed herein include a semiconductor structure. The semiconductor structure may include a static random access memory (SRAM) cell. The SRAM cell may include a first section of the SRAM cell with a first pull-up transistor, first pull-down transistor, and first pass-gate transistor. The SRAM cell may include a second section of the SRAM cell with a second pull-up transistor, second pull-down transistor, and second pass-gate transistor. The first section of the SRAM cell and the second section of the SRAM cell may be arranged in a non-rectangular cell layout with the first pass-gate located at a first end of the non-rectangular cell layout and the second pass-gate at a second end of the non-rectangular cell layout opposite the first end.
    Type: Application
    Filed: March 31, 2022
    Publication date: October 5, 2023
    Inventors: Brent A Anderson, Albert M Chu, Junli Wang, Hemanth Jagannathan
  • Publication number: 20230317611
    Abstract: Embodiments are disclosed for a system. The system includes multiple tracks. Further, one track includes a power rail for a first voltage. The system also includes a first via, disposed beneath, and in electrical contact with, the power rail. The system additionally includes a first contact, beneath, and in electrical contact with, the first via. The system further includes a first field effect transistor (FET), beneath, and in electrical isolation with, the first contact. Additionally, the system includes a second FET, beneath, and in electrical contact with, the first FET. Further, the system includes a second contact, beneath, and in electrical contact with, the second FET. Also, the system includes a second via, beneath, and in electrical contact with, the second contact. The system additionally includes a buried power rail (BPR), beneath, and in electrical contact with, the second via, wherein the BPR comprises a second voltage.
    Type: Application
    Filed: March 31, 2022
    Publication date: October 5, 2023
    Inventors: Albert M Chu, Junli Wang, Albert M. Young, Dechao Guo
  • Patent number: 11777034
    Abstract: A stacked transistor device is provided. The stacked transistor device includes a nanosheet transistor device on a substrate; and a fin field effect transistor device over the nanosheet transistor device to form the stacked transistor device, wherein the fin field effect transistor device is configured to have a current flow through the fin field effect transistor device perpendicular to a current flow through the nanosheet transistor device.
    Type: Grant
    Filed: September 7, 2021
    Date of Patent: October 3, 2023
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ruilong Xie, Chen Zhang, Jingyun Zhang, Junli Wang, Pietro Montanini
  • Publication number: 20230307453
    Abstract: A semiconductor structure including a first logic cell having a first plurality of nanosheet devices along an axis and a second logic cell having a second plurality of nanosheet devices along the axis. Nanosheets of the second plurality of nanosheet devices are wider than nanosheets of the first plurality of nanosheet devices. The first logic cell is a same type as the second logic cell. The first and second logic cells can include inverter circuits or NAND circuits or NOR circuits. When the first logic cell has a height X, a width Y, and an effective width (Weff) Z, then the second logic cell has a height 2X, a width Y, and Weff>2.5 Z.
    Type: Application
    Filed: March 22, 2022
    Publication date: September 28, 2023
    Inventors: Brent A Anderson, Junli Wang, Albert Chu
  • Publication number: 20230307447
    Abstract: An approach forming semiconductor structure composed of one or more stacked semiconductor devices that include at least a top semiconductor device, a bottom semiconductor device under the top semiconductor, and contacts to each of the semiconductor devices. The approach provides a stacked semiconductor structure where the bottom semiconductor device is wider than the top semiconductor device. The approach also provides the stacked semiconductor structure where the width of the top semiconductor device is the same as the width of the bottom semiconductor device. The approach includes forming a contact to a side of the bottom semiconductor device when the width of the top semiconductor device is the same as the bottom semiconductor device. The approach includes forming a contact to epitaxy grown on a portion of the top and a side of the bottom semiconductor device when the bottom semiconductor device is larger than the top semiconductor device.
    Type: Application
    Filed: March 22, 2022
    Publication date: September 28, 2023
    Inventors: GEN TSUTSUI, Albert M. Young, Su Chen Fan, Junli Wang, Brent A. Anderson
  • Publication number: 20230309324
    Abstract: A high density memory apparatus includes a plurality of transistors vertically stacked on top of each other. The plurality of transistors share a common source structure, but each of the plurality of transistors has its own horizontal nanosheet and gate stack that are separate from respective horizontal channel structures and gate stacks of the others of the plurality of transistors. Ends of the nanosheets distal from the gate stacks are doped to act as drains for the transistors. Each of a plurality of two-terminal memory units is electrically connected to the drain end of a corresponding one of the nanosheets. Some embodiments achieve in excess of 5000 memory bits/square micrometer (?m2); in some embodiments, in excess of 6000 bits/?m2.
    Type: Application
    Filed: March 26, 2022
    Publication date: September 28, 2023
    Inventors: Heng Wu, Tenko Yamashita, Sanjay C. Mehta, Junli Wang
  • Publication number: 20230307452
    Abstract: A semiconductor device includes a first semiconductor layer and a second semiconductor layer. The first semiconductor layer of the semiconductor device includes a standard-gate field-effect transistor. The second semiconductor layer of the semiconductor device includes an extended-gate field-effect transistor. The first semiconductor layer and the second semiconductor layer are formed on top of one another.
    Type: Application
    Filed: March 25, 2022
    Publication date: September 28, 2023
    Inventors: Ruilong Xie, Julien Frougier, Nicolas Jean Loubet, Junli Wang, Ruqiang Bao, Min Gyu Sung, Heng Wu, Oleg Gluschenkov
  • Publication number: 20230299053
    Abstract: A semiconductor device is provided and includes a first substrate including a first transistor; a laser reflection layer on the first transistor; and a second substrate on the laser reflection layer, the second substrate including a second transistor.
    Type: Application
    Filed: March 17, 2022
    Publication date: September 21, 2023
    Inventors: Teresa J. Wu, Tenko Yamashita, Heng Wu, Junli Wang
  • Patent number: 11764298
    Abstract: A semiconductor device is provided. The semiconductor device includes a buried power rail, a buried oxide (BOX) layer formed on the buried power rail, a plurality of channel fins formed on the BOX layer, a bottom epitaxial layer formed on the BOX layer and between the channel fins such that the BOX layer is between the buried power rail and the bottom epitaxial layer, a gate stack formed over the bottom epitaxial layer and contacting the channel fins, the gate stack including a work function metal (WFM) layer and a high-? layer, and a top epitaxial layer formed on the gate stack. In the semiconductor device, between two adjacent ones of the channel fins the BOX layer has an opening so that the bottom epitaxial layer is electrically connected to the buried power rail.
    Type: Grant
    Filed: September 17, 2021
    Date of Patent: September 19, 2023
    Assignee: International Business Machines Corporation
    Inventors: Chen Zhang, Ruilong Xie, Heng Wu, Junli Wang, Brent Anderson
  • Publication number: 20230290823
    Abstract: A semiconductor device including a nanodevice located on a substrate, where the nanodevice includes a plurality of nanosheets. Each of the plurality of nanosheets are spaced apart from each other by a first distance. A gate located on the substrate, where the gate surrounds each of the plurality of nanosheets. A first dielectric layer located on the substrate, where the first dielectric layer is located adjacent to a sidewall of the gate. The gate has a first thickness when measured from the sidewall of one of the plurality of nanosheets to a sidewall of the first dielectric layer, where the first thickness is larger than the first distance. An inner spacer located on the substrate, where the inner spacer is wraps around an end of each of the plurality of nanosheets. The inner spacer has a second thickness, where the second thickness is substantially equal to the first distance.
    Type: Application
    Filed: March 14, 2022
    Publication date: September 14, 2023
    Inventors: Ruilong Xie, Balasubramanian S. Pranatharthiharan, Julien Frougier, Junli Wang
  • Publication number: 20230282722
    Abstract: A semiconductor device including a first nanodevice is located on a substrate, where the first nanodevice includes at least one channel. A first source/drain connected to the first nanodevice. A second nanodevice located on the substrate, where the second nanodevice includes at least one channel and a second source/drain connected to the second nanodevice. A first contact located above the first source/drain. A second contact located above the second source/drain. A contact cap located on top of the first contact and the second contact, where the contact cap has a first leg that extends downwards between the first contact and the second contact. The first leg of the contact cap is in contact with a first sidewall of the first contact, and a first sidewall of the second contact.
    Type: Application
    Filed: March 4, 2022
    Publication date: September 7, 2023
    Inventors: Julien Frougier, Sagarika Mukesh, Albert M Chu, Ruilong Xie, Andrew M. Greene, Eric Miller, Junli Wang, Veeraraghavan S. Basker, Prateek Hundekar, Tushar Gupta, Su Chen Fan
  • Patent number: 11749744
    Abstract: A semiconductor device is provided. The semiconductor device includes a bottom source/drain; a top source/drain; a fin provided between the bottom source/drain and the top source/drain, the fin including a first fin structure and a second fin structure that are symmetric to each other in a plan view. Each of the first and second fin structures includes a main fin extending laterally in a first direction, and first and second extension fins extending laterally from the main fin in a second direction perpendicular to the first direction. The main fin extends laterally in the first direction beyond where the first and second extension fins connect to the main fin.
    Type: Grant
    Filed: June 8, 2021
    Date of Patent: September 5, 2023
    Assignee: International Business Machines Corporation
    Inventors: Heng Wu, Lan Yu, Dechao Guo, Junli Wang, Ruqiang Bao, Ruilong Xie
  • Patent number: 11715794
    Abstract: Semiconductor devices include a channel fin having a top surface. A top semiconductor structure, in contact with the entire top surface of the channel fin and having a top portion and a bottom portion, with the top portion of the top semiconductor structure being narrower than the bottom portion. A restraint structure being formed over the bottom portion of the semiconductor structure.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: August 1, 2023
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Heng Wu, Ruilong Xie, Lan Yu, Alexander Reznicek, Junli Wang
  • Publication number: 20230238285
    Abstract: Embodiments of present invention provide a semiconductor device. The semiconductor device includes a silicon (Si) substrate containing a set of short channel field-effect-transistors (FETs); a germanium (Ge) layer on top of the Si substrate containing a set of long channel p-type FETs (PFETs); and an oxide semiconductor layer on top of the Ge layer containing a set of long channel n-type FETs (NFETs), wherein the set of short channel FETs, long channel PFETs, and long channel NFETs are interconnected through a set of far-back-end-of-line (FBEOL) layers.
    Type: Application
    Filed: January 25, 2022
    Publication date: July 27, 2023
    Inventors: Heng Wu, Junli Wang, Teresa J. Wu, Tenko Yamashita
  • Patent number: 11710666
    Abstract: A technique relates to a semiconductor device. A source/drain layer is formed. Fins with gate stacks are formed in a fill material, a dummy fin template including at least one fin of the fins and at least one gate stack of the gate stacks, the fins being formed on the source/drain layer. A trench is formed through the fill material by removing the dummy fin template, such that a portion of the source/drain layer is exposed in the trench. A source/drain metal contact is formed on the portion of the source/drain layer in the trench.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: July 25, 2023
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Junli Wang, Brent Alan Anderson, Albert Young
  • Patent number: 11710521
    Abstract: 6T-SRAM cell designs for larger SRAM arrays and methods of manufacture generally include a single fin device for both nFET (pass-gate (PG) and pull-down (PD)) and pFET (pull-up (PU). The pFET can be configured with a smaller effective channel width (Weff) than the nFET or with a smaller active fin height. An SRAM big cell consumes the (111) 6t-SRAM design area while provide different Weff ratios other than 1:1 for PU/PD or PU/PG as can be desired for different SRAM designs.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: July 25, 2023
    Assignee: International Business Machines Corporation
    Inventors: Lan Yu, Junli Wang, Heng Wu, Ruqiang Bao, Dechao Guo