Patents by Inventor Junya Maruyama

Junya Maruyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7147740
    Abstract: An object of the present invention is to provide a method of transferring an object to be peeled onto a transferring member in a short time without imparting damage to the object to be peeled within a laminate. Also, another object of the present invention is to provide a method of manufacturing a semiconductor device in which a semiconductor element manufactured on a substrate is transferred onto a transferring member, typically, a plastic substrate. The methods are characterized by including: forming a peeling layer and an object to be peeled on a substrate; bonding the object to be peeled and a support through a two-sided tape; peeling the object to be peeled from the peeling layer by using a physical method, and then bonding the object to be peeled onto a transferring member; and peeling the support and the two-sided tape from the object to be peeled.
    Type: Grant
    Filed: May 16, 2003
    Date of Patent: December 12, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Toru Takayama, Yuugo Goto, Junya Maruyama, Yumiko Ohno
  • Publication number: 20060266410
    Abstract: The present invention provides a manufacturing method of a thinned semiconductor device with high reliability at low cost and a semiconductor device manufactured by the method. A peeling layer, a transistor, and an insulating layer are formed in this order over a substrate, an opening is formed so as to expose at least a part of the peeling layer, and the transistor is peeled off from the substrate by a physical means. The peeling layer is formed by forming a metal film and a metal oxide film so as to be in contact with the metal film by a method using a solution.
    Type: Application
    Filed: May 4, 2006
    Publication date: November 30, 2006
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Kaori Ogita, Tomoko Tamura, Junya Maruyama, Koji Dairiki
  • Publication number: 20060270191
    Abstract: An object of the present invention is to provide a method for manufacturing a semiconductor device with high reliability, at low cost, in which an element forming layer having a thin film transistor and the like provided over a substrate is peeled from the substrate, so that a semiconductor device is manufactured. According to the invention, a metal film is formed over a substrate, a plasma treatment is performed to the metal film in a dinitrogen monoxide atmosphere to form a metal oxide film over the metal film, a first insulating film is formed continuously without being exposed to the air, an element forming layer is formed over the first insulating film, and the element forming layer is peeled from the substrate, so that a semiconductor device is manufactured.
    Type: Application
    Filed: May 22, 2006
    Publication date: November 30, 2006
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Tomoko Tamura, Kaori Ogita, Koji Dairiki, Junya Maruyama
  • Publication number: 20060255837
    Abstract: A sense amplifier according to the present invention for detecting a potential difference of signals input to a first input terminal and a second input terminal, includes a first means for applying voltages corresponding to threshold voltages of first and second transistors to gate-source voltages of the first and second transistors, and a second means for transferring signals input to the first and second input terminals to gates of the first and second transistors. In this case, a threshold variation of the first and second transistors is corrected.
    Type: Application
    Filed: July 20, 2006
    Publication date: November 16, 2006
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Yutaka Shionoiri, Kiyoshi Kato, Munehiro Azami, Junya Maruyama
  • Patent number: 7132693
    Abstract: Failure light emission of an EL element due to failure film formation of an organic EL material in an electrode hole 46 is improved. By forming the organic EL material after embedding an insulator in an electrode hole 46 on a pixel electrode and forming a protective portion 41b, failure film formation in the electrode hole 46 can be prevented. This can prevent concentration of electric current due to a short circuit between a cathode and an anode of the EL element, and can prevent failure light emission of an EL layer.
    Type: Grant
    Filed: August 30, 2004
    Date of Patent: November 7, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Toshimitsu Konuma, Junya Maruyama
  • Publication number: 20060246636
    Abstract: To provide a method for manufacturing a semiconductor device including a transfer step that is capable of controlling the adhesiveness of a substrate and an element-formed layer in the case of separating the element-formed layer including a semiconductor element or an integrated circuit formed over the substrate from the substrate and bonding it to another substrate. An adhesive agent made of a good adhesiveness material is formed between the semiconductor element or the integrated circuit comprising plural semiconductor elements formed over the substrate (a first substrate) and the substrate, and thus it is possible to prevent a semiconductor element from peeling off a substrate in manufacturing the semiconductor element, and further, to make it easier to separate the semiconductor element from the substrate by removing the adhesive agent after forming the semiconductor element.
    Type: Application
    Filed: June 30, 2006
    Publication date: November 2, 2006
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Keitaro Imai, Toru Takayama, Yuugo Goto, Junya Maruyama, Yumiko Ohno
  • Patent number: 7122445
    Abstract: A peeling method is provided which does not cause damage to a layer to be peeled, and the method enables not only peeling of the layer to be peeled having a small area but also peeling of the entire layer to be peeled having a large area at a high yield. Further, there are provided a semiconductor device, which is reduced in weight through adhesion of the layer to be peeled to various base materials, and a manufacturing method thereof. In particular, there are provided a semiconductor device, which is reduced in weight through adhesion of various elements, typically a TFT, to a flexible film, and a manufacturing method thereof. A metal layer or nitride layer is provided on a substrate; an oxide layer is provided contacting with the metal layer or nitride layer; then, a base insulating film and a layer to be peeled containing hydrogen are formed; and heat treatment for diffusing hydrogen is performed thereto at 410° C. or more.
    Type: Grant
    Filed: July 15, 2003
    Date of Patent: October 17, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Toru Takayama, Junya Maruyama, Yuugo Goto, Yumiko Ohno, Takuya Tsurume, Hideaki Kuwabara
  • Publication number: 20060220211
    Abstract: According to the package and the method for manufacturing the package of the present invention, a chip can be formed extremely to be thin, and manufactured at lower cost and higher throughput, and the variations of a chip thickness can be reduced without back grind that causes cracks or polishing marks. In the present invention, a semiconductor film with a thickness of at most 500 ?m deposited over a substrate serving as a support medium is crystallized with a CW laser light, and a chip having a semiconductor device is formed to have a total thickness of 5 ?m, preferably at most 2 ?m by using the crystallized semiconductor film. Consequently, the chip is mounted on an interposer after separating a substrate.
    Type: Application
    Filed: May 25, 2006
    Publication date: October 5, 2006
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Toru Takayama, Junya Maruyama, Yumiko Ohno, Koichiro Tanaka
  • Publication number: 20060214306
    Abstract: A semiconductor chip having a plurality of device formative layers that are formed into an integrated thin film is provided by a technique for transferring. According to the present invention, a semiconductor chip that is formed into a thin film and that is highly integrated can be manufactured by transferring a device formative layer with a thickness of at most 50 ?m which is separated from a substrate into another substrate by a technique for transferring, and transferring another device formative layer with a thickness of at most 50 ?m which is separated from another substrate to the above device formative layer, and, repeating such transferring process.
    Type: Application
    Filed: May 25, 2006
    Publication date: September 28, 2006
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Shunpei Yamazaki, Toru Takayama, Junya Maruyama, Yumiko Ohno
  • Publication number: 20060216909
    Abstract: The object of the invention is to provide a method for fabricating a semiconductor device having a peeled layer bonded to a base material with curvature. Particularly, the object is to provide a method for fabricating a display with curvature, more specifically, a light emitting device having an OLED bonded to a base material with curvature. An external force is applied to a support originally having curvature and elasticity, and the support is bonded to a peeled layer formed over a substrate. Then, when the substrate is peeled, the support returns into the original shape by the restoring force, and the peeled layer as well is curved along the shape of the support. Finally, a transfer object original having curvature is bonded to the peeled layer, and then a device with a desired curvature is completed.
    Type: Application
    Filed: June 8, 2006
    Publication date: September 28, 2006
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Masakazu Murakami, Toru Takayama, Junya Maruyama
  • Patent number: 7101242
    Abstract: To provide a bright and highly reliable light-emitting device. An anode (102), an EL layer (103), a cathode (104), and an auxiliary electrode (105) are formed sequentially in lamination on a reflecting electrode (101). Further, the anode (102), the cathode (104), and the auxiliary electrode (105) are either transparent or semi-transparent with respect to visible radiation. In such a structure, lights generated in the EL layer (103) are almost all irradiated to the side of the cathode (104), whereby an effect light emitting area of a pixel is drastically enhanced.
    Type: Grant
    Filed: July 22, 2004
    Date of Patent: September 5, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Takeshi Fukunaga, Junya Maruyama
  • Publication number: 20060186399
    Abstract: It is an object of the present invention to provide a semiconductor device capable of preventing deterioration due to penetration of moisture or oxygen, for example, a light-emitting apparatus having an organic light-emitting device that is formed over a plastic substrate, and a liquid crystal display apparatus using a plastic substrate. According to the present invention, devices formed on a glass substrate or a quartz substrate (a TFT, a light-emitting device having an organic compound, a liquid crystal device, a memory device, a thin-film diode, a pin-junction silicon photoelectric converter, a silicon resistance element, or the like) are separated from the substrate, and transferred to a plastic substrate having high thermal conductivity.
    Type: Application
    Filed: August 18, 2005
    Publication date: August 24, 2006
    Inventors: Shunpei Yamazaki, Toru Takayama, Junya Maruyama, Yumiko Ohno
  • Publication number: 20060189097
    Abstract: The present invention is a separation method for easy separation of an allover release layer with a large area. Further, the present invention is the separating method that is not subjected to restrictions in the use of substrates, such as a kind of substrate, during forming a release layer. A separation method comprising the steps of forming a metal film, a first oxide, and a semiconductor film containing hydrogen in this order; and bonding a support to a release layer containing the first oxide and the semiconductor film and separating the release layer bonded to the support from a substrate provided with the metal layer by a physical means.
    Type: Application
    Filed: April 25, 2006
    Publication date: August 24, 2006
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junya Maruyama, Yumiko Ohno, Toru Takayama, Yuugo Goto, Shunpei Yamazaki
  • Patent number: 7091070
    Abstract: To provide a method for manufacturing a semiconductor device including a transfer step that is capable of controlling the adhesiveness of a substrate and an element-formed layer in the case of separating the element-formed layer including a semiconductor element or an integrated circuit formed over the substrate from the substrate and bonding it to another substrate. An adhesive agent made of a good adhesiveness material is formed between the semiconductor element or the integrated circuit comprising plural semiconductor elements formed over the substrate (a first substrate) and the substrate, and thus it is possible to prevent a semiconductor element from peeling off a substrate in manufacturing the semiconductor element, and further, to make it easier to separate the semiconductor element from the substrate by removing the adhesive agent after forming the semiconductor element.
    Type: Grant
    Filed: February 27, 2004
    Date of Patent: August 15, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Keitaro Imai, Toru Takayama, Yuugo Goto, Junya Maruyama, Yumiko Ohno
  • Publication number: 20060163710
    Abstract: A technique for manufacturing a low-cost, small volume, and highly integrated semiconductor device is provided. A characteristic of the present invention is that a semiconductor element formed by using a semiconductor thin film is transferred over a semiconductor element formed by using a semiconductor substrate by a transfer technique in order to manufacture a semiconductor device. Compared with the conventional manufacturing method, mass production of semiconductor devices with lower cost and higher throughput can be realized, and production cost per semiconductor device can be reduced.
    Type: Application
    Filed: March 14, 2006
    Publication date: July 27, 2006
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hideaki Kuwabara, Toru Takayama, Yuugo Goto, Junya Maruyama, Yumiko Ohno, Shunpei Yamazaki
  • Publication number: 20060150855
    Abstract: A gas generator comprising a first cup case 3 packing therein gas generant 2 to generate gas by the burning of it, a squib 5 having a second cup case E arranged in an inside of the first cup case 3 and containing an ignition charge D, a squib case 7 having a hole 20 and covering the second cup case E, and a holder 6 to hold the squib case 7 and second cut case E by crimping, wherein the holder 6 has holes 13, 14 for allowing passage of electrode pins 11, 12 of the squib 5, one for each of the electrode pins 11, 12.
    Type: Application
    Filed: July 18, 2003
    Publication date: July 13, 2006
    Applicant: NIPPON KAYAKU KABUSHIKI KAISHA
    Inventors: Junya Maruyama, Kazumasa Kurita, Akihiko Tanaka, Yoshiyuki Kishino
  • Patent number: 7067926
    Abstract: A semiconductor chip having a plurality of device formative layers that are formed into an integrated thin film is provided by a technique for transferring. According to the present invention, a semiconductor chip that is formed into a thin film and that is highly integrated can be manufactured by transferring a device formative layer with a thickness of at most 50 ?m which is separated from a substrate into another substrate by a technique for transferring, and transferring another device formative layer with a thickness of at most 50 ?m which is separated from another substrate to the above device formative layer, and, repeating such transferring process.
    Type: Grant
    Filed: December 9, 2003
    Date of Patent: June 27, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Toru Takayama, Junya Maruyama, Yumiko Ohno
  • Patent number: 7067392
    Abstract: It is an object of the present invention to provide a semiconductor device capable of preventing deterioration due to penetration of moisture or oxygen, for example, a light-emitting apparatus having an organic light-emitting device that is formed over a plastic substrate, and a liquid crystal display apparatus using a plastic substrate. According to the present invention, devices formed on a glass substrate or a quartz substrate (a TFT, a light-emitting device having an organic compound, a liquid crystal device, a memory device, a thin-film diode, a pin-junction silicon photoelectric converter, a silicon resistance element, or the like) are separated from the substrate, and transferred to a plastic substrate having high thermal conductivity.
    Type: Grant
    Filed: October 16, 2003
    Date of Patent: June 27, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Toru Takayama, Junya Maruyama, Yumiko Ohno
  • Patent number: 7067395
    Abstract: A technique for obtaining light emitting devices manufactured with high yield is provided. The width of a seal pattern (605b) can be kept thin by manufacturing a light emitting device using a second substrate (600a) which has a concave portion (607a) and a concave portion (608a). It therefore becomes possible to make the light emitting device have a narrow frame. In addition, the light emitting device with the narrow frame can be realized by a manufacturing method thereof in which a portion of the second substrate from the concave portion to an edge surface is cut.
    Type: Grant
    Filed: March 2, 2004
    Date of Patent: June 27, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junya Maruyama, Masahiro Takahashi
  • Publication number: 20060134918
    Abstract: The manufacturing method of a substrate having a conductive layer has the steps of: forming an inorganic insulating layer over a substrate; forming an organic resin layer with a desired shape over the inorganic insulating layer, forming a low wettability layer with respect to a composition containing conductive particles on a first exposed portion of the inorganic insulating layer; removing the organic resin layer; and coating a second exposed portion of the inorganic insulating layer with a composition containing conductive particles and baking, thereby forming a conductive layer.
    Type: Application
    Filed: December 7, 2005
    Publication date: June 22, 2006
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Gen Fujii, Masafumi Morisue, Hironobu Shoji, Junya Maruyama, Kouji Dairiki, Tomoyuki Aoki