Patents by Inventor Junya Maruyama

Junya Maruyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7332381
    Abstract: A semiconductor device having a semiconductor element (a thin film transistor, a thin film diode, a photoelectric conversion element of silicon PIN junction, or a silicon resistor element) which is light-weight, flexible (bendable), and thin as a whole is provided as well as a method of manufacturing the semiconductor device. In the present invention, the element is not formed on a plastic film. Instead, a flat board such as a substrate is used as a form, the space between the substrate (third substrate (17)) and a layer including the element (peeled layer (13)) is filled with coagulant (typically an adhesive) that serves as a second bonding member (16), and the substrate used as a form (third substrate (17)) is peeled off after the adhesive is coagulated to hold the layer including the element (peeled layer (13)) by the coagulated adhesive (second bonding member (16)) alone. In this way, the present invention achieves thinning of the film and reduction in weight.
    Type: Grant
    Filed: October 30, 2002
    Date of Patent: February 19, 2008
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junya Maruyama, Toru Takayama, Yuugo Goto
  • Publication number: 20080036680
    Abstract: The present invention provides an antenna in that the adhesive intensity of a conductive body formed on a base film is increased, and a semiconductor device including the antenna. The invention further provides a semiconductor device with high reliability that is formed by attaching an element formation layer and an antenna, wherein the element formation layer is not damaged due to a structure of the antenna. The semiconductor device includes the element formation layer provided over a substrate and the antenna provided over the element formation layer. The element formation layer and the antenna are electrically connected. The antenna has a base film and a conductive body, wherein at least a part of the conductive body is embedded in the base film. As a method for embedding the conductive body in the base film, a depression is formed in the base film and the conductive body is formed therein.
    Type: Application
    Filed: October 18, 2005
    Publication date: February 14, 2008
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Kyosuke Ito, Junya Maruyama, Takuya Tsurume, Shunpei Yamazaki
  • Publication number: 20080020555
    Abstract: It is an object to provide a method of manufacturing a crystalline silicon device and a semiconductor device in which formation of cracks in a substrate, a base protective film, and a crystalline silicon film can be suppressed. First, a layer including a semiconductor film is formed over a substrate, and is heated. A thermal expansion coefficient of the substrate is 6×10?7/° C. to 38×10?7/° C., preferably 6×10?7/° C. to 31.8×10?7/° C. Next, the layer including the semiconductor film is irradiated with a laser beam to crystallize the semiconductor film so as to form a crystalline semiconductor film. Total stress of the layer including the semiconductor film is ?500 N/m to +50 N/m, preferably ?150 N/m to 0 N/m after the heating step.
    Type: Application
    Filed: July 13, 2007
    Publication date: January 24, 2008
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Akihisa Shimomura, Hidekazu Miyairi, Fumito Isaka, Yasuhiro Jinbo, Junya Maruyama
  • Publication number: 20080009106
    Abstract: It is an object of the invention to provide a peeling method which does not damage a peeling layer, and to perform peeling not only a peeling layer having a small-size area but also an entire peeling layer having a large-size area with a preferable yield. In the invention, after pasting a fixing substrate, a part of a glass substrate is removed by scribing or performing laser irradiation on the glass substrate which leads to providing a trigger. Then, peeling is performed with a preferable yield by performing peeling from the removed part. In addition, a crack is prevented by covering the entire face except for a connection portion of a terminal electrode (including a periphery region of the terminal electrode) with a resin.
    Type: Application
    Filed: July 9, 2007
    Publication date: January 10, 2008
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yuugo Goto, Yumiko Fukumoto, Toru Takayama, Junya Maruyama, Takuya Tsurume
  • Publication number: 20080001148
    Abstract: An object of the present invention to provide a semiconductor device manufactured in short time by performing the step of forming the thin film transistor and the step of forming the photoelectric conversion layer in parallel, and to provide a manufacturing process thereof. According to the present invention, a semiconductor device is manufactured in such a way that a thin film transistor is formed over a first substrate, a photoelectric conversion element is formed over a second substrate, and the thin film transistor and the photoelectric conversion element are connected electrically by sandwiching a conductive layer between the first and second substrates opposed to each other so that the thin film transistor and the photoelectric conversion element are located between the first and second substrates. Thus, a method for manufacturing a semiconductor device which suppresses the increase in the number of steps and which increases the throughput can be provided.
    Type: Application
    Filed: May 16, 2005
    Publication date: January 3, 2008
    Inventors: Kazuo Nishi, Junya Maruyama, Naoto Kusumoto, Yuusuke Sugawara
  • Publication number: 20070292997
    Abstract: It is an object of the present invention to provide a method for manufacturing a semiconductor device, capable of keeping a peeling layer from being peeled from a substrate in the phase before the completion of a semiconductor element and peeling a semiconductor element rapidly. It is considered that a peeling layer tends to be peeled from a substrate because the stress is applied to a peeling layer due to the difference in thermal expansion coefficient between a substrate and a peeling layer, or because the volume of a peeling layer is reduced and thus the stress is applied thereto by crystallization of the peeling layer due to heat treatment. Therefore, according to one feature of the invention, the adhesion of a substrate and a peeling layer is enhanced by forming an insulating film (buffer film) for relieving the stress on the peeling layer between the substrate and the peeling layer before forming the peeling layer over the substrate.
    Type: Application
    Filed: August 9, 2007
    Publication date: December 20, 2007
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junya Maruyama, Atsuo Isobe, Susumu Okazaki, Koichiro Tanaka, Yoshiaki Yamamoto, Koji Dairiki, Tomoko Tamura
  • Patent number: 7303942
    Abstract: It is an object of the present invention to provide a technique for making a semiconductor device thinner without using a back-grinding method for a silicon wafer. According to the present invention, an integrated circuit film is mounted, thereby making a semiconductor device mounting the integrated circuit film thinner. The term “an integrated circuit film” means a film-like integrated circuit which is manufactured based on an integrated circuit manufactured by a semiconductor film formed over a substrate such as a glass substrate or a quartz substrate. In the present invention, the integrated circuit film is manufactured by a technique for transferring.
    Type: Grant
    Filed: December 16, 2003
    Date of Patent: December 4, 2007
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hideaki Kuwabara, Junya Maruyama, Yumiko Ohno, Toru Takayama, Yuugo Goto, Etsuko Arakawa, Shunpei Yamazaki
  • Publication number: 20070275506
    Abstract: It is an object to provide a semiconductor device integrating various elements without using a semiconductor substrate, and a method of manufacturing the same. According to the present invention, a layer to be separated including an inductor, a capacitor, a resistor element, a TFT element, an embedded wiring and the like, is formed over a substrate, separated from the substrate, and transferred onto a circuit board 100. An electrical conduction with a wiring pattern 114 provided in the circuit board 100 is made by a wire 112 or a solder 107, thereby forming a high frequency module or the like.
    Type: Application
    Filed: May 10, 2007
    Publication date: November 29, 2007
    Applicant: Semiconductor Energy Laboratory., Ltd.
    Inventors: Shunpei Yamazaki, Toru Takayama, Junya Maruyama, Yumiko Ohno, Yuugo Goto, Hideaki Kuwabara
  • Publication number: 20070267665
    Abstract: In an optical sensor device employing an amorphous silicon photodiode, an external amplifier IC and the like are required due to low current capacity of the sensor element in order to improve the load driving capacity. It leads to increase in cost and mounting space of the optical sensor device. In addition, noise may easily superimpose since the photodiode and the amplifier IC are connected to each other over a printed circuit board. According to the invention, an amorphous silicon photodiode and an amplifier configured by a thin film transistor are formed integrally over a substrate so that the load driving capacity is improved while reducing cost and mounting space. Superimposing noise can be also reduced.
    Type: Application
    Filed: July 27, 2007
    Publication date: November 22, 2007
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Jun Koyama, Takeshi Osada, Takanori Matsuzaki, Kazuo Nishi, Junya Maruyama
  • Publication number: 20070254456
    Abstract: A technique for peeling an element manufactured through a process at relatively low temperature (lower than 500° C.) from a substrate and transferring the element to a flexible substrate (typically, a plastic film). With the use of an existing manufacturing device for a large glass substrate, a molybdenum film (Mo film) is formed over a glass substrate, an oxide film is formed over the molybdenum film, and an element is formed over the oxide film through a process at relatively low temperature (lower than 500° C.). Then, the element is peeled from the glass substrate and transferred to a flexible substrate.
    Type: Application
    Filed: April 13, 2007
    Publication date: November 1, 2007
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Junya MARUYAMA, Yasuhiro JINBO, Hironobu SHOJI
  • Patent number: 7284488
    Abstract: A gas generator comprising a first cup case 3 packing therein gas generant 2 to generate gas by the burning of it, a squib 5 having a second cup case E arranged in an inside of the first cup case 3 and containing an ignition charge D, a squib case 7 having a hole 20 and covering the second cup case E, and a holder 6 to hold the squib case 7 and second cut case E by crimping, wherein the holder 6 has holes 13, 14 for allowing passage of electrode pins 11, 12 of the squib 5, one for each of the electrode pins 11, 12.
    Type: Grant
    Filed: July 18, 2003
    Date of Patent: October 23, 2007
    Assignee: Nippon Kayaku Kabushiki Kaisha
    Inventors: Junya Maruyama, Kazumasa Kurita, Akihiko Tanaka, Yoshiyuki Kishino
  • Publication number: 20070243352
    Abstract: An object of the present invention is to provide a method of transferring an object to be peeled onto a transferring member in a short time without imparting damage to the object to be peeled within a laminate. Also, another object of the present invention is to provide a method of manufacturing a semiconductor device in which a semiconductor element manufactured on a substrate is transferred onto a transferring member, typically, a plastic substrate. The methods are characterized by including: forming a peeling layer and an object to be peeled on a substrate; bonding the object to be peeled and a support through a two-sided tape; peeling the object to be peeled from the peeling layer by using a physical method, and then bonding the object to be peeled onto a transferring member; and peeling the support and the two-sided tape from the object to be peeled.
    Type: Application
    Filed: October 16, 2006
    Publication date: October 18, 2007
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Toru Takayama, Yuugo Goto, Junya Maruyama, Yumiko Ohno
  • Patent number: 7282380
    Abstract: It is an object of the present invention to provide a method for manufacturing a semiconductor device, capable of keeping a peeling layer from being peeled from a substrate in the phase before the completion of a semiconductor element and peeling a semiconductor element rapidly. It is considered that a peeling layer tends to be peeled from a substrate because the stress is applied to a peeling layer due to the difference in thermal expansion coefficient between a substrate and a peeling layer, or because the volume of a peeling layer is reduced and thus the stress is applied thereto by crystallization of the peeling layer due to heat treatment. Therefore, according to one feature of the invention, the adhesion of a substrate and a peeling layer is enhanced by forming an insulating film (buffer film) for relieving the stress on the peeling layer between the substrate and the peeling layer before forming the peeling layer over the substrate.
    Type: Grant
    Filed: March 15, 2005
    Date of Patent: October 16, 2007
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junya Maruyama, Atsuo Isobe, Susumu Okazaki, Koichiro Tanaka, Yoshiaki Yamamoto, Koji Dairiki, Tomoko Tamura
  • Publication number: 20070218650
    Abstract: It is an object of the invention to provide a lightweight semiconductor device having a highly reliable sealing structure which can prevent ingress of impurities such as moisture that deteriorate element characteristics, and a method of manufacturing thereof. A protective film having superior gas barrier properties (which is a protective film that is likely to damage an element if the protective film is formed on the element directly) is previously formed on a heat-resistant substrate other than a substrate with the element formed thereon. The protective film is peeled off from the heat-resistant substrate, and transferred over the substrate with the element formed thereon so as to seal the element.
    Type: Application
    Filed: May 10, 2007
    Publication date: September 20, 2007
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Toru Takayama, Yuugo Goto, Yumiko Fukumoto, Junya Maruyama, Takuya Tsurume
  • Publication number: 20070212853
    Abstract: A semiconductor device having a semiconductor element (a thin film transistor, a thin film diode, a photoelectric conversion element of silicon PIN junction, or a silicon resistor element) which is light-weight, flexible (bendable), and thin as a whole is provided as well as a method of manufacturing the semiconductor device. In the present invention, the element is not formed on a plastic film. Instead, a flat board such as a substrate is used as a form, the space between the substrate (third substrate (17)) and a layer including the element (peeled layer (13)) is filled with coagulant (typically an adhesive) that serves as a second bonding member (16), and the substrate used as a form (third substrate (17)) is peeled off after the adhesive is coagulated to hold the layer including the element (peeled layer (13)) by the coagulated adhesive (second bonding member (16)) alone. In this way, the present invention achieves thinning of the film and reduction in weight.
    Type: Application
    Filed: May 3, 2007
    Publication date: September 13, 2007
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Junya Maruyama, Toru Takayama, Yuugo Goto
  • Publication number: 20070211189
    Abstract: The present invention provides a simplifying method for a peeling process as well as peeling and transcribing to a large-size substrate uniformly. A feature of the present invention is to peel a first adhesive and to cure a second adhesive at the same time in a peeling process, thereby to simplify a manufacturing process. In addition, the present invention is to devise the timing of transcribing a peel-off layer in which up to an electrode of a semiconductor are formed to a predetermined substrate. In particular, a feature is that peeling is performed by using a pressure difference in the case that peeling is performed with a state in which plural semiconductor elements are formed on a large-size substrate.
    Type: Application
    Filed: May 4, 2007
    Publication date: September 13, 2007
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Toru Takayama, Junya Maruyama, Yuugo Goto, Yumiko Ohno
  • Publication number: 20070197118
    Abstract: To provide a bright and highly reliable light-emitting device. An anode (102), an EL layer (103), a cathode (104), and an auxiliary electrode (105) are formed sequentially in lamination on a reflecting electrode (101). Further, the anode (102), the cathode (104), and the auxiliary electrode (105) are either transparent or semi-transparent with respect to visible radiation. In such a structure, lights generated in the EL layer (103) are almost all irradiated to the side of the cathode )104), whereby an effect light emitting area of a pixel is drastically enhanced.
    Type: Application
    Filed: September 1, 2006
    Publication date: August 23, 2007
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Takeshi Fukunaga, Junya Maruyama
  • Publication number: 20070187790
    Abstract: [Abstract]Considering further promotion of high output and miniaturization of a sensor element, it is an object of the present invention to form a plurality of elements in a limited area so that an area occupied by the element is reduced for integration. It is another object to provide a process which improves the yield of a sensor element. According to the present invention, a sensor element using an amorphous silicon film and an output amplifier circuit constituted by a thin film transistor are formed over a substrate having an insulating surface. In addition, a metal layer for protecting an exposed wire when a photoelectric conversion layer of the sensor element is patterned is provided between the photoelectric conversion layer and the wire connected to the thin film transistor.
    Type: Application
    Filed: September 15, 2005
    Publication date: August 16, 2007
    Inventors: Hidekazu Takahashi, Junya Maruyama, Daiki Yamada, Naoto Kusumoto, Kazuo Nishi, Hiroki Adachi, Yuusuke Sugawara
  • Patent number: 7253391
    Abstract: In an optical sensor device employing an amorphous silicon photodiode, an external amplifier IC and the like are required due to low current capacity of the sensor element in order to improve the load driving capacity. It leads to increase in cost and mounting space of the optical sensor device. In addition, noise may easily superimpose since the photodiode and the amplifier IC are connected to each other over a printed circuit board. According to the invention, an amorphous silicon photodiode and an amplifier configured by a thin film transistor are formed integrally over a substrate so that the load driving capacity is improved while reducing cost and mounting space. Superimposing noise can be also reduced.
    Type: Grant
    Filed: September 14, 2004
    Date of Patent: August 7, 2007
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Jun Koyama, Takeshi Osada, Takanori Matsuzaki, Kazuo Nishi, Junya Maruyama
  • Publication number: 20070173034
    Abstract: A method for separating an integrated circuit formed by a thin film having a novel structure or a method for transfer-ring the integrated circuit to another substrate, that is, so-called transposing method, has not been proposed. According to the present invention, in the case that an integrated circuit having a thin film having a novel structure formed over a substrate via a release layer is separated, the release layer is removed in the state that the thin film integrated circuit is fixated, the thin film integrated circuit is transposed to a supporting substrate having an adhesion surface, and the thin film integrated circuit is transposed to another substrate having an adhesion surface with higher strength of adhesion than that of the supporting substrate.
    Type: Application
    Filed: March 15, 2005
    Publication date: July 26, 2007
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Takuya Tsurume, Junya Maruyama, Yoshitaka Dozen