Patents by Inventor Katsuhiko Hotta

Katsuhiko Hotta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing semiconductor integrated circuit device having insulatro film formed from liquid containing polymer of silicon, oxygen, and hydrogen
    Patent number: 6509277
    Abstract: An SOG film 16 obtained by heat-treating a polysilazan type SOG film at high temperature of about 800° C. is used as a planarized insulating film to be formed on the gate electrode 9 of a MISFET (Qs, Qn, Qp). A polysilazan SOG film 57 not subjected to such a heat treatment is used as interlayer insulating film arranged among upper wiring layers (54, 55, 56, 62, 63).
    Type: Grant
    Filed: September 18, 2000
    Date of Patent: January 21, 2003
    Assignees: Hitachi, Ltd., Hitachi ULSI Systems Co., Ltd.
    Inventors: Masayoshi Saito, Katsuhiko Hotta, Masayoshi Hirasawa, Masayuki Kojima, Hiroyuki Uchiyama, Hiroyuki Maruyama, Takuya Fukuda