Abstract: A magnetron actuator for moving a magnetron in a nearly arbitrary radial and azimuthal path in the back of a target in a plasma sputter reactor. The magnetron includes two coaxial rotary shafts extending along the chamber central axis and coupled to two independently controllable rotary actuators. An epicyclic gear mechanism or a frog-leg structure mechanically couple the shafts to the magnetron to control its radial and azimuthal position. A vertical actuator moves the shafts vertically in tandem to vary the magnetron's separation from the target's back surface and compensate for erosion of the front surface. The rotary actuators may be separately coupled to the shafts or a rotatable ring gear may be coupled to the shafts through respectively fixed and orbiting idler gears. Two radially spaced sensors detect reflectors attached to the inner and outer arms of the epicyclic gear mechanism for homing of the controller.

Abstract: Apparatus and methods for performing plasma processing on a wafer supported on a pedestal are provided. The apparatus can include a pedestal on which the wafer can be supported, a variable capacitor having a variable capacitance, a motor attached to the variable capacitor which varies the capacitance of the variable capacitor, a motor controller connected to the motor that causes the motor to rotate, and an output from the variable capacitor connected to the pedestal. A desired state of the variable capacitor is associated with a process recipe in a process controller. When the process recipe is executed the variable capacitor is placed in the desired state.

Abstract: Couplers for attaching an accessory to an excavator arm of an excavator. Couplers having a first side for attaching the coupler to the excavator arm and a second side onto which the accessory will be coupled. The coupler includes a latch for selectively securing and releasing an attachment pin of the accessory in a jaw, groove, hook or slot in the second side of the coupler. The coupler is fully controllable from within the cab of the excavator and it allows improved security in the securement of the accessory to the coupler, i.e. preventing accidental decouplings, but while still allowing intentional decoupling operations to be carried out without undue burden.

Abstract: A spinal rod assembly may be formed by attaching an extension portion onto a spinal rod that extends along a longitudinal axis. The extension portion may include a rod coupler that attaches to the spinal rod with a first coupling that includes a first degree of rotational freedom and a first degree of translational freedom in positioning the rod coupler relative to the spinal rod along the longitudinal axis. The extension portion may further include an extender rod including an elongated rod body that may be secured to the rod coupler using a second coupling that includes at least a second degree of rotational freedom in positioning the extender rod relative to the rod coupler about an axis substantially perpendicular to the longitudinal axis. The extension portion may be assembled in situ to a spinal rod that has been previously secured to vertebral bodies in a patient.

Abstract: An improved method and apparatus for respiratory audio-visual biofeedback are disclosed. A guide patterned after a breathing cycle comfortable to the patient serves as a target. The target is displayed as a bar moving vertically upward during inhale and vertically downward during exhale, between fixed end ex-hale and end in-hale limits. The patient's current respiratory position is also displayed as a bar, oriented parallel to the target bar so that the difference between the current position and the target position is easy for the patient to see.

Abstract: A spinal rod assembly may be formed by attaching an extension portion onto a spinal rod that extends along a longitudinal axis. The extension portion may include a rod coupler that attaches to the spinal rod with a first coupling that includes a first degree of rotational freedom and a first degree of translational freedom in positioning the rod coupler relative to the spinal rod along the longitudinal axis. The extension portion may further include an extender rod including an elongated rod body that may be secured to the rod coupler using a second coupling that includes at least a second degree of rotational freedom in positioning the extender rod relative to the rod coupler about an axis substantially perpendicular to the longitudinal axis. The extension portion may be assembled in situ to a spinal rod that has been previously secured to vertebral bodies in a patient.

Abstract: The present invention provides a system and method for automatically adjusting a continuously variable transmission (CVT) in a motorized vehicle. A microprocessor processor in the vehicle receives data about the operating status of the vehicle from a plurality. Examples of vehicle data include vehicle speed, motor speed, throttle position, current draw from a battery, and battery level. A servo motor is in mechanical communication with the CVT and provides an axial force to adjust the CVT. The microprocessor uses lookup tables of optimal set points for vehicle data to instruct the servo motor to adjust the transmission ratio of the CVT according to the vehicle data provided by the sensors.

Abstract: A portable, non-cryogenic, oxygen generation system capable of delivering oxygen gas at purities greater than 98% and flow rates of 15 L/min or more is described. The system consists of two major components. The first component is a high efficiency membrane capable of separating argon and a portion of the nitrogen content from air, yielding an oxygen-enriched permeate flow. This is then fed to the second component, a pressure swing adsorption (PSA) unit utilizing a commercially available, but specifically formulated zeolite compound to remove the remainder of the nitrogen from the flow. The system is a unique gas separation system that can operate at ambient temperatures, for producing high purity oxygen for various applications (medical, refining, chemical production, enhanced combustion, fuel cells, etc . . . ) and represents a significant advance compared to current technologies.

Abstract: A electromagnet array structure including multiple electromagnetic coils captured in a rigid encapsulant, for example, of cured epoxy resin, to form a unitary free-standing structure which can be placed around the walls of a plasma processing chamber. A liquid cooling coil may also be captured in the encapsulant between the electromagnetic coils. The structure may additionally include water fittings, locating pins, through tubes for chamber bolts, and lifting brackets.

Abstract: A continuously variable multi-position magnetron that is rotated about a central axis in back of a sputtering target at a freely selected radius. The position is dynamically controlled from the outside, for example, through a hydraulic actuator connected between a pivoting arm supporting the magnetron and an arm fixed to the shaft, by two coaxial shafts independent controllable from the outside and supporting the magnetron through a frog-leg mechanism, or a cable connected between the pivoting arms and moved by an external slider. The magnetron can be rotated at two, three, or more discrete radii or be moved in a continuous spiral pattern.

Abstract: A continuously variable multi-position magnetron that is rotated about a central axis in back of a sputtering target at a freely selected radius. The position is dynamically controlled from the outside, for example, through a hydraulic actuator connected between a pivoting arm supporting the magnetron and an arm fixed to the shaft, by two coaxial shafts independent controllable from the outside and supporting the magnetron through a frog-leg mechanism, or a cable connected between the pivoting arms and moved by an external slider. The magnetron can be rotated at two, three, or more discrete radii or be moved in a continuous spiral pattern.

Abstract: The invention generally provides a ground shield for use in a physical vapor deposition (PVD) chamber. In one embodiment, a ground shield includes a generally cylindrical body comprising an outer wall, an inner upper wall, an inner lower wall having a diameter less than a diameter of the inner upper wall and a reentrant feature coupling the upper and inner lower walls. The reentrant feature advantageously prevents arching between the shield and target, which promotes greater process uniformity and repeatability along with longer chamber component service life.

Abstract: A portable, non-cryogenic, oxygen generation system capable of delivering oxygen gas at purities greater than 98% and flow rates of 15 L/min or more is described. The system consists of two major components. The first component is a high efficiency membrane capable of separating argon and a portion of the nitrogen content from air, yielding an oxygen-enriched permeate flow. This is then fed to the second component, a pressure swing adsorption (PSA) unit utilizing a commercially available, but specifically formulated zeolite compound to remove the remainder of the nitrogen from the flow. The system is a unique gas separation system that can operate at ambient temperatures, for producing high purity oxygen for various applications (medical, refining, chemical production, enhanced combustion, fuel cells, etc . . . ) and represents a significant advance compared to current technologies.

Abstract: Couplers for attaching an accessory to an excavator arm of an excavator. Couplers having a first side for attaching the coupler to the excavator arm and a second side onto which the accessory will be coupled. The coupler includes a latch for selectively securing and releasing an attachment pin of the accessory in a jaw, groove, hook or slot in the second side of the coupler. The coupler is fully controllable from within the cab of the excavator and it allows improved security in the securement of the accessory to the coupler, i.e. preventing accidental decouplings, but while still allowing intentional decoupling operations to be carried out without undue burden.

Abstract: A method in a communication system, a communication system and a communication device wherein in the method media streams are transmitted from a sending communication device to a receiving communication device at least partly via a wireless communication network. At least one media stream is selected to be transmitted to the receiving communication device. QoS requirements for transmitting the selected at least one media stream are defined, transmission resources are reserved from the wireless communication network for the transmission of at least one media stream, and a setup procedure is performed between the receiving communication device and the sending communication device for activating the one packet data transmission connection.

Abstract: The present invention relates to a method for transmitting video information, in which a bitstream is formed comprising a set of frames comprising macroblocks. At least one switching frame is formed into the bitstream, macroblocks of the switching frame are arranged into a first and a second group of macroblocks, each macroblock of the first group of macroblocks are encoded by a first encoding method to provide a switching point for continuing the transmission of video information with another bitstream formed from the video information; and macroblocks of the second group of macroblocks are encoded by another encoding method. Errors in transmission of video information are reduced by forming at least one SP-encoded frame by predictively encoding the macroblocks; replacing part of the SP-encoded macroblocks with intra encoded blocks; and transmitting the encoded frame containing both predictively and intra encoded macroblocks instead of the SP-encoded frame.

Abstract: An isolator ring is provided for a substrate support used in a substrate processing chamber. The substrate support comprises an annular ledge having a circumferential edge, and an inner perimeter sidewall. The isolator ring comprises an L-shaped dielectric ring comprising a laser textured surface; a horizontal leg capable of resting on the annular ledge of the support, and having a length that extends radially outward and stops short of the circumferential edge of the annular ledge; and a vertical leg abutting the inner perimeter sidewall of the support. A ring assembly includes the isolator ring and a deposition ring.

Abstract: Process kit shields for use in a process chamber and methods of use thereof are provided herein. In some embodiments, the process kit shield may include a body having a wall comprising a first layer and a second layer bonded to the first layer, wherein the first layer comprises a first material resistant to a cleaning chemistry utilized to remove material disposed on the first layer during processing, and wherein the second layer comprises a second material different than the first material and having a coefficient of thermal expansion substantially similar to that of the first material. In some embodiments, the process kit shield may be disposed in a process chamber having a processing volume and a non-processing volume.