Abstract: A hinge and a mobile terminal to resolve poor use effect of a foldable electronic device. The hinge includes a main body, and a first folding assembly and a second folding assembly that are symmetrically disposed along the main body. When the first folding assembly and the second folding assembly are rotated toward each other, a length of the hinge can be extended, and an accommodation space for accommodating the flexible display can be formed. When the first folding assembly and the second folding assembly are rotated away from each other, the length of the hinge can be reduced, and a support surface for supporting the flexible display can be formed, so that the flexible display cannot be stretched, compressed, or the like during folding and unfolding, thereby improving the use effect and safety of the mobile terminal.

Abstract: A ranging apparatus for use in a plasma processing chamber having an internal space and a window is disclosed. The ranging apparatus includes at least one external light emitting device disposed external to the plasma processing chamber. The external light emitting device emits at least one source light beam to the internal space through the window. The ranging apparatus includes a base wafer disposed on a stage in the internal space. The ranging apparatus includes at least one optical circuit fixed to the base wafer. The optical circuit deflects the source light beam to a target in the internal space, and deflects a reflection light beam to the window. The ranging apparatus includes at least one external light receiving device disposed external to the plasma processing chamber. The external light receiving device receives the deflected reflection light beam through the window.

Abstract: A system includes a first optical unit that emits light to a measurement target object and receives first interference light incident from the measurement target object, a second optical unit that emits the light to a reference object configured to have a constant optical path length with respect to a temperature fluctuation and receives second interference light incident from the reference object, a spectroscope connected to the first optical unit and the second optical unit and receives the first interference light and the second interference light to be incident, and a control unit connected to the spectroscope, and the control unit calculates a fluctuation rate of a measurement optical path length with respect to a reference optical path length under a predetermined temperature environment on the basis of the optical path length of the reference object calculated on the basis of the second interference light incident on the spectroscope under the predetermined temperature environment, and the reference op

Abstract: A semiconductor device according to one embodiment of the present disclosure includes: a first low-permittivity region provided in a region that is between first metals in an in-plane direction of a semiconductor layer and below a lower surface of the first metal in a stacking direction of the semiconductor layer; and a second low-permittivity region provided in a region that is between a contact plug and the gate electrode in the in-plane direction and below the first low-permittivity region in the stacking direction. A planar region of the second low-permittivity region is at least partially different from that of the first low-permittivity region.

Abstract: A hinge and a mobile terminal to resolve poor use effect of a foldable electronic device. The hinge includes a main body, and a first folding assembly and a second folding assembly that are symmetrically disposed along the main body. When the first folding assembly and the second folding assembly are rotated toward each other, a length of the hinge can be extended, and an accommodation space for accommodating the flexible display can be formed. When the first folding assembly and the second folding assembly are rotated away from each other, the length of the hinge can be reduced, and a support surface for supporting the flexible display can be formed, so that the flexible display cannot be stretched, compressed, or the like during folding and unfolding, thereby improving the use effect and safety of the mobile terminal.

Abstract: This application provides a rotation shaft structure and an electronic device. The rotation shaft structure includes a main shaft assembly, and two folding assemblies. The folding assembly includes a rotation assembly, a support plate, and a housing mounting bracket. The rotation assembly is rotationally connected to the main shaft assembly. The support plate is rotationally connected to the housing mounting bracket and slidably connected to the rotation assembly. When two housing mounting brackets rotate toward each other, two support plates rotate in a same direction relative to the housing mounting brackets on corresponding sides, so that the two support plates and the main shaft assembly can form a triangle-like display accommodation space. When the electronic device is in a closed state, the display accommodation space can be used for accommodating a bent portion of the flexible display, so that the flexible display is not damaged by extrusion.

Abstract: The present invention discloses a rotating mechanism and a foldable terminal. The rotating mechanism includes a guide shaft, at least two rotating parts, and at least two constant-length units. The rotating parts are disposed on two sides of the guide shaft. An arc-shaped slot is disposed on the guide shaft. An arc-shaped part is disposed on the rotating part, and the arc-shaped part is disposed in the arc-shaped slot in a sliding manner. The constant-length unit is a long strip that has a fixed length and can be bent. A positioning end of the constant-length unit is fixedly connected to or rotationally connected to a rotating part on one side of the guide shaft, and a sliding end is connected to a rotating part on the other side of the guide shaft in a sliding manner. The foldable terminal has the foregoing rotating mechanism.

Abstract: In a rotating shaft mechanism and a foldable mobile terminal, connecting rods and swing arms are rotatably connected to a main shaft assembly, and the swing arms and the connecting rods rotate around different axes, so that the swing arms and the connecting rods rotate and slide relative to each other. During folding, the connecting rods or the swing arms drive the two support plates to rotate towards each other, the support plates and the main shaft assembly enclose folding space for accommodating a flexible display of the mobile terminal in a folded state, so that the bending effect of the flexible display is improved, and two housings of the mobile terminal fit almost seamlessly in the folded state.

Abstract: Embodiments provide a hinge mechanism and a foldable mobile terminal. A swing arm component and a synchronization component are disposed on both sides of a main shaft component of the hinge mechanism, so that when a swing arm rotates around the main shaft component, a synchronization arm on a same side as the swing arm rotates accordingly to drive a synchronization arm and a swing arm on the other side to rotate, and further, housings on both sides of the foldable mobile terminal including the main shaft component can move synchronously, and force of a flexible screen is relatively even. In addition, because swing arms on both sides of the main shaft component rotate around different axes, through such a design, accommodation space that can accommodate the flexible screen can be formed during rotation of the swing arms, so that damage to the flexible screen is reduced.

Abstract: A substrate processing apparatus includes a stage, a light source, an optical assembly, a light receiver, and controller circuitry. The stage includes a first placing surface on which a substrate is to be placed, and a second placing surface that surrounds the first placing surface and on which a focus ring is to be placed. The optical assembly focuses light from the light source on a lower surface position, which is a position of a lower surface of the focus ring placed on the second placing surface. The light receiver receives light from the lower surface position. The controller circuitry detects at least one of a presence and an absence of the focus ring on the second placing surface, based on light received by the light receiver.

Abstract: In a rotating shaft mechanism and a foldable mobile terminal, connecting rods and swing arms are rotatably connected to a main shaft assembly, and the swing arms and the connecting rods rotate around different axes, so that the swing arms and the connecting rods rotate and slide relative to each other. During folding, the connecting rods or the swing arms drive the two support plates to rotate towards each other, the support plates and the main shaft assembly enclose folding space for accommodating a flexible display of the mobile terminal in a folded state, so that the bending effect of the flexible display is improved, and two housings of the mobile terminal fit almost seamlessly in the folded state.

Abstract: A light interference system is provided. The light interference system includes a light source configured to generate a measurement light; a fiber configured to propagate therethrough the measurement light; and a measurement device. The fiber includes a single-mode fiber, a multimode fiber and a connector connecting the single-mode fiber and the multimode fiber. A tip end of the fiber is formed of the multimode fiber, and an end surface of the tip end of the fiber is configured to emit the measurement light to a measurement target object and receive a reflection light from the measurement target object. The measurement device is configured to measure physical property of the measurement target object based on the reflection light.

Abstract: A connection rod and a swing arm are separately rotatably connected to a primary shaft component, and an axis around which the swing arm rotates and an axis around which the connection rod rotates are different, so that the swing arm and the connection rod rotate and slide relative to each other. The swing arm or the connection rod drives a support plate to rotate, so that the primary shaft component and the support plates can encircle to form, when the mobile terminal is completely folded, space that accommodates a folded part of a flexible display.

Abstract: A hinge and a mobile terminal to resolve poor use effect of a foldable electronic device. The hinge includes a main body, and a first folding assembly and a second folding assembly that are symmetrically disposed along the main body. When the first folding assembly and the second folding assembly are rotated toward each other, a length of the hinge can be extended, and an accommodation space for accommodating the flexible display can be formed. When the first folding assembly and the second folding assembly are rotated away from each other, the length of the hinge can be reduced, and a support surface for supporting the flexible display can be formed, so that the flexible display cannot be stretched, compressed, or the like during folding and unfolding, thereby improving the use effect and safety of the mobile terminal.

Abstract: A transfer system configured to transfer a focus ring includes a processing system and a position detection system. The processing system includes a processing apparatus including a chamber main body and a placing table having a substrate placing region and a focus ring placing region; and a transfer device configured to transfer the focus ring. The position detection system includes a light source; multiple optical elements configured to output light and receive reflected light; a driving unit configured to move each optical element to allow each optical element to scan a scanning range; and a controller configured to calculate, based on the reflected light in the scanning range, a positional relationship between the placing table and the focus ring for each optical element. The transfer device is configured to adjust a transfer position of the focus ring onto the focus ring placing region based on the calculated positional relationship.

Abstract: A temperature measurement system configured to measure a temperature of a target object having a first main surface and a second main surface includes a light source unit configured to emit output light penetrating the target object and including a first wavelength range and a second wavelength range; a measurement unit configured to measure a spectrum of reflected light; an optical path length ratio calculator configured to calculate an optical path length ratio between the output light of the first wavelength range and the output light of the second wavelength range; and a temperature calculator configured to calculate the temperature of the target object based on the optical path length ratio and a previously investigated relationship between the temperature of the target object and a refractive index ratio between the output light of the first wavelength range and the output light of the second wavelength range.

Abstract: A transfer robot system includes a transfer robot configured to transfer a wafer under an operational instruction; a controller configured to output the operational instruction to the transfer robot; a wafer receptacle; and an interferometer. The wafer receptacle comprises a receptacle body having an open front through which an end effector and the wafer pass; a first reflector disposed under a support space; and a first optical element disposed above the support space to face the first reflector, configured to output the light toward the first reflector and receive received light therefrom. The interferometer calculates an optical interference peak, which is generated between the wafer and the first reflector, based on the received light. The controller determines a taught position of the transfer robot based on a variation of the optical interference peak during an operation of the transfer robot.

Abstract: A system configured to inspect a processing apparatus includes a temperature adjusting device configured to adjust a temperature of a component within a processing chamber of the processing apparatus; a light source configured to emit measurement light; multiple optical elements configured to output the measurement light emitted from the light source to the component within the processing chamber of the processing apparatus as output light and configured to receive reflected light from the component during a temperature adjustment of the component by the temperature adjusting device; and a controller configured to measure temperatures of the component at measurement points respectively corresponding to the multiple optical elements based on the reflected light, and make a determination upon abnormality of the processing apparatus based on comparisons of the temperatures of the component at the respective measurement points.

Abstract: The present invention discloses a rotating mechanism and a foldable terminal. The rotating mechanism includes a guide shaft, at least two rotating parts, and at least two constant-length units. The rotating parts are disposed on two sides of the guide shaft. An arc-shaped slot is disposed on the guide shaft. An arc-shaped part is disposed on the rotating part, and the arc-shaped part is disposed in the arc-shaped slot in a sliding manner. The constant-length unit is a long strip that has a fixed length and can be bent. A positioning end of the constant-length unit is fixedly connected to or rotationally connected to a rotating part on one side of the guide shaft, and a sliding end is connected to a rotating part on the other side of the guide shaft in a sliding manner. The foldable terminal has the foregoing rotating mechanism.

Abstract: A substrate processing apparatus includes a stage, a light source, an optical assembly, a light receiver, and controller circuitry. The stage includes a first placing surface on which a substrate is to be placed, and a second placing surface that surrounds the first placing surface and on which a focus ring is to be placed. The optical assembly focuses light from the light source on a lower surface position, which is a position of a lower surface of the focus ring placed on the second placing surface. The light receiver receives light from the lower surface position. The controller circuitry detects at least one of a presence and an absence of the focus ring on the second placing surface, based on light received by the light receiver.