Abstract: An upper electrode structure includes a first plate, a second plate and an electrostatic attraction unit. The first plate has a first region, a second region and a third region which are concentrically arranged. Each of the regions is provided with a multiple number of gas discharge openings. The electrostatic attraction unit is provided between the first plate and the second plate and is configured to attract the first plate. The electrostatic attraction unit is equipped with a first to third heaters for the first to third regions. The electrostatic attraction unit and the second plate provide a first supply path, a second supply path and a third supply path through which gases are supplied into the first to third regions, respectively. A first gas diffusion space, a second gas diffusion space and a third gas diffusion space are formed in the electrostatic attraction unit.

Abstract: A fusion protein for protein detection in which are fused: a protein domain including at least one among a C1 domain of protein G, a C2 domain of protein G, and a C3 domain of protein G; and a double mutant D153G/D330N of Escherichia coli alkaline phosphatase (BAP) in which the 153 amino acid residue Asp has been substituted by Gly and the 330 amino acid residue Asp has been substituted by Asn, a double mutant D153H/D330N of Escherichia coli alkaline phosphatase (BAP) in which the 153 amino acid residue Asp has been substituted by His and the 330 amino acid residue Asp has been substituted by Asn, or a double mutant K328R/D330N of Escherichia coli alkaline phosphatase (BAP) in which the 328 amino acid residue Lys has been substituted by Arg and the 330 amino acid residue Asp has been substituted by Asn.

Abstract: Provided is a method for producing a nucleic acid probe that can detect a target substance with good sensitivity. A method for producing a nucleic acid probe, comprising: a 3?-terminal addition step of adding at least one nucleoside triphosphate derivative having a glutamine (Gln) residue or a lysine (Lys) residue to the 3?-terminal of a nucleic acid using a 3?-terminal addition enzyme which adds a nucleotide to the 3?-terminal of a nucleic acid, and a labeling compound binding step of either binding a labeling compound having a lysine (Lys) residue and containing a labeling moiety to the glutamine (Gln) residue using a transglutaminase (TGase), or binding a labeling compound having a glutamine (Gln) residue and containing a labeling moiety to the lysine (Lys) residue using a transglutaminase (TGase).

Abstract: A high-frequency semiconductor device, wherein on one surface of a semiconductor substrate, a first insulating layer, an undoped epitaxial polysilicon layer in a state of column crystal, a second insulating layer, and a semiconductor layer are formed in order from a side of the one surface, and a high-frequency transistor is formed in a location of the semiconductor layer facing the undoped epitaxial polysilicon layer with the second insulating layer in between.

Abstract: Provided is a method for producing a nucleic acid probe that can detect a target substance with good sensitivity. A method for producing a nucleic acid probe, comprising: a 3?-terminal addition step of adding at least one nucleoside triphosphate derivative having a glutamine (Gln) residue or a lysine (Lys) residue to the 3?-terminal of a nucleic acid using a 3?-terminal addition enzyme which adds a nucleotide to the 3?-terminal of a nucleic acid, and a labeling compound binding step of either binding a labeling compound having a lysine (Lys) residue and containing a labeling moiety to the glutamine (Gln) residue using a transglutaminase (TGase), or binding a labeling compound having a glutamine (Gln) residue and containing a labeling moiety to the lysine (Lys) residue using a transglutaminase (TGase).

Abstract: A catalyst for catalytic cracking of a hydrocarbon oil can produce a gasoline fraction having a high octane number in high yield while suppressing an increase in yield of a heavy distillate, and produce LPG having a high propylene content in high yield. The catalyst includes a specific amount of a granulated catalyst A that includes a zeolite having a sodalite cage structure, silicon derived from a silica sol, phosphorus and aluminum derived from mono aluminum phosphate, a clay mineral, and a rare-earth metal, and a specific amount of a granulated catalyst B that includes a pentasil-type zeolite, the ratio of the mass of phosphorus and aluminum derived from mono aluminum phosphate included in the granulated catalyst A to the mass of the pentasil-type zeolite included in the granulated catalyst B being 0.015 to 3000.

Abstract: There are provided a method for obtaining a distance between a base portion of an electrostatic chuck and a back surface of a target object and a method for neutralizing the electrostatic chuck based on the obtained distance. The electrostatic chuck has an upper surface including the base portion and a plurality of convex portions projecting from the base portion. The target object is mounted on apexes of the convex portions of the electrostatic chuck such that the back surface is in contact with the apexes. By processing a first wavelength spectrum output from a spectroscope based on reflected light of light emitted from a light source, a distance between the back surface of the target object and the base portion of the electrostatic chuck is calculated. Based on the calculated distance, a voltage is applied to the electrostatic chuck to neutralize the electrostatic chuck.

Abstract: The temperature measuring system using optical interference includes a light source which generates measuring light; a spectroscope which measures an interference intensity distribution that is an intensity distribution of reflected light; optical transfer mechanisms which emit light reflected from a surface and a rear surface of the object to be measured to the spectroscope; an optical path length calculation unit which calculates an optical path length by performing Fourier transformation; and a temperature calculation unit which calculates a temperature of the object to be measured on the basis of a relation between optical path lengths and temperatures. The light source has a half-width at half-maximum of a light source spectrum that satisfies conditions based on a wavelength span of the spectroscope. The spectroscope measures the intensity distribution by using the number of samplings that satisfies conditions based on the wavelength span and a maximum measurable thickness.

Abstract: A high-frequency semiconductor device, wherein on one surface of a semiconductor substrate, a first insulating layer, an undoped epitaxial polysilicon layer in a state of column crystal, a second insulating layer, and a semiconductor layer are formed in order from a side of the one surface, and a high-frequency transistor is formed in a location of the semiconductor layer facing the undoped epitaxial polysilicon layer with the second insulating layer in between.

Abstract: The temperature control system includes: a susceptor which allows an object to be processed to be held on a top surface thereof and includes a flow path, through which a temperature adjusting medium flows, formed therein; a temperature measuring unit which measures a temperature of the object to be processed held on the top surface of the susceptor; a first temperature adjusting unit which adjusts a temperature of the temperature adjusting medium flowing through the flow path; and a second temperature adjusting unit which is disposed between the susceptor and the first temperature adjusting unit, and adjusts a temperature of the temperature adjusting medium based on a result of the measurement of the temperature measuring unit.

Abstract: A light interference system and a substrate processing apparatus can suppress loss of reflection spectrum. The light interference system 1 includes a light source 10, a coupler 41, multiple collimators 12A and 12B, a collimator 42, a mirror 43, a spectrometer 14, and an operation unit 15. The collimator 42 and the mirror 43 are provided at a side of multiple input terminals except a first input terminal and configured to send reflected lights from multiple output terminals to the multiple output terminals again.

Abstract: The temperature measuring apparatus includes: a light source; a first wavelength-dividing unit which wavelength-divides a light from the light source into m lights whose wavelength bands are different from one another; m first dividing units which divides each of the m lights from the first wavelength-dividing unit into n lights; a transmitting unit which transmits lights from the m first dividing unit to measurement points of an object to be measured; a light receiving unit which receives a light reflected by each of the measurement points; and a temperature calculating unit which calculates a temperature of each of the measurement points based on a waveform of the light received by the light receiving unit.

Abstract: A light interference system and a substrate processing apparatus can suppress loss of reflection spectrum. The light interference system 1 includes a light source 10, a coupler 41, multiple collimators 12A and 12B, a collimator 42, a mirror 43, a spectrometer 14, and an operation unit 15. The collimator 42 and the mirror 43 are provided at a side of multiple input terminals except a first input terminal and configured to send reflected lights from multiple output terminals to the multiple output terminals again.

Abstract: The temperature measuring apparatus includes a data input portion, a peak interval calculation portion, an optical path length calculation portion, and a temperature calculation portion. The data input portion inputs a spectrum of interference light that is obtained when measuring light is irradiated onto a surface of the object and the measuring light reflected from the surface and the measuring light reflected from a rear surface interfere with each other. The peak interval calculation portion calculates a peak interval of the input spectrum. The optical path length calculation portion calculates an optical path length based on the peak interval. The temperature calculation portion calculates the temperature of the object based on the optical path length.

Abstract: The temperature measuring system using optical interference includes a light source which generates measuring light; a spectroscope which measures an interference intensity distribution that is an intensity distribution of reflected light; optical transfer mechanisms which emit light reflected from a surface and a rear surface of the object to be measured to the spectroscope; an optical path length calculation unit which calculates an optical path length by performing Fourier transformation; and a temperature calculation unit which calculates a temperature of the object to be measured on the basis of a relation between optical path lengths and temperatures. The light source has a half-value and half-width of a light source spectrum that satisfies conditions based on a wavelength span of the spectroscope. The spectroscope measures the intensity distribution by using the number of samplings that satisfies conditions based on the wavelength span and a maximum measurable thickness.

Abstract: An oil seal for sealing a hollow rotary shaft in a power transmission apparatus, wherein the rotary shaft is formed with an internal flow passage through which oil flows and constituted such that the oil flies out as the rotary shaft rotates, including: a fixed portion that is fixedly attached to a case of the power transmission apparatus; a seal portion that seals the rotary shaft at a position that is axially offset position from the fixed portion and allows the rotary shaft to rotate; and a radiator portion that is formed from a metallic material between the fixed portion and the seal portion, receives the oil that flies out as the rotary shaft rotates, and dissipates heat generated by the seal portion by exchanging heat with the oil.

Abstract: The temperature control system includes: a susceptor which allows an object to be processed to be held on a top surface thereof and includes a flow path, through which a temperature adjusting medium flows, formed therein; a temperature measuring unit which measures a temperature of the object to be processed held on the top surface of the susceptor; a first temperature adjusting unit which adjusts a temperature of the temperature adjusting medium flowing through the flow path; and a second temperature adjusting unit which is disposed between the susceptor and the first temperature adjusting unit, and adjusts a temperature of the temperature adjusting medium based on a result of the measurement of the temperature measuring unit.

Abstract: The temperature measuring apparatus includes: a light source; a first wavelength-dividing unit which wavelength-divides a light from the light source into m lights whose wavelength bands are different from one another; m first dividing units which divides each of the m lights from the first wavelength-dividing unit into n lights; a transmitting unit which transmits lights from the m first dividing unit to measurement points of an object to be measured; a light receiving unit which receives a light reflected by each of the measurement points; and a temperature calculating unit which calculates a temperature of each of the measurement points based on a waveform of the light received by the light receiving unit.

Abstract: The physical state measuring apparatus includes: a light source; a transmitting unit which transmits a light from the light source to a measurement point of an object to be measured; a nonlinear optical device which changes a wavelength of the light reflected by the measurement point to a wavelength that is different from the wavelength before the changing; a light receiving unit which receives the light whose wavelength has been changed; and a measuring unit which measures a physical state of the object to be measured at the measurement point based on a waveform of the light received by the light receiving unit.

Abstract: In the storage device of the invention, latch control is performed on a series of signals in response to latch control signals. Latch control terminals are provided to which the latch control signals are input respectively and a plurality of signal terminals to which a series of signals are input. Herein, a plurality of latch circuits is provided so as to correspond to the plurality of signal terminals, respectively. The plurality of latch circuits are located within a specified distance from their associated signal terminals respectively and within a specified distance from the latch control terminals. The delays of signal transmission from the signal terminals to their associated latch circuits can be equalized and the delays of signal transmission from the latch control terminals to which the latch control signals for executing latch control are input to the latch circuits can be equalized. This contributes to a reduction in the skew of the latch characteristics of the signals.