Patents by Inventor Kuo-Tai Huang
Kuo-Tai Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7833853Abstract: Provided is a method of semiconductor fabrication including process steps allowing for defining and/or modifying a gate structure height during the fabrication process. The gate structure height may be modified (e.g., decreased) at one or more stages during the fabrication by etching a portion of a polysilicon layer included in the gate structure. The method includes forming a coating layer on the substrate and overlying the gate structure. The coating layer is etched back to expose a portion of the gate structure. The gate structure (e.g., polysilicon) is etched back to decrease the height of the gate structure.Type: GrantFiled: December 19, 2008Date of Patent: November 16, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ryan Chia-Jen Chen, Yih-Ann Lin, Joseph Lin, Jr Jung Lin, Yu Chao Lin, Chao-Cheng Chen, Kuo-Tai Huang
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Patent number: 7829949Abstract: A metal gate/high-k dielectric semiconductor device provides an NMOS gate structure and a PMOS gate structure formed on a semiconductor substrate. The NMOS gate structure includes a high-k gate dielectric treated with a dopant impurity such as La and the high-k gate dielectric material of the PMOS gate structure is deficient of this dopant impurity and further includes a work function tuning layer over the high-k gate dielectric.Type: GrantFiled: October 23, 2009Date of Patent: November 9, 2010Assignee: Taiwan Semconductor Manufacturing Co., LtdInventors: Joshua Tseng, Kang-Cheng Lin, Ji-Yi Yang, Kuo-Tai Huang, Ryan Chia-Jen Chen
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Patent number: 7812414Abstract: A semiconductor structure and methods for forming the same are provided. The semiconductor structure includes a first MOS device of a first conductivity type and a second MOS device of a second conductivity type opposite the first conductivity type. The first MOS device includes a first gate dielectric on a semiconductor substrate; a first metal-containing gate electrode layer over the first gate dielectric; and a silicide layer over the first metal-containing gate electrode layer. The second MOS device includes a second gate dielectric on the semiconductor substrate; a second metal-containing gate electrode layer over the second gate dielectric; and a contact etch stop layer having a portion over the second metal-containing gate electrode layer, wherein a region between the portion of the contact etch stop layer and the second metal-containing gate electrode layer is substantially free from silicon.Type: GrantFiled: January 23, 2007Date of Patent: October 12, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yong-Tian Hou, Peng-Fu Hsu, Jin Ying, Kang-Cheng Lin, Kuo-Tai Huang, Tze-Liang Lee
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Patent number: 7811892Abstract: A method of fabricating a dielectric layer is described. A substrate is provided, and a dielectric layer is formed over the substrate. The dielectric layer is performed with a nitridation process. The dielectric layer is performed with a first annealing process. A first gas used in the first annealing process includes inert gas and oxygen. The first gas has a first partial pressure ratio of inert gas to oxygen. The dielectric layer is performed with the second annealing process. A second gas used in the second annealing includes inert gas and oxygen. The second gas has a second partial pressure ratio of inert gas to oxygen, and the second partial pressure ratio is smaller than the first partial pressure ratio. At least one annealing temperature of the two annealing processes is equal to or greater than 950° C. The invention improves uniformity of nitrogen dopants distributed in dielectric layer.Type: GrantFiled: March 31, 2006Date of Patent: October 12, 2010Assignee: United Microelectronics Corp.Inventors: Yun-Ren Wang, Ying-Wei Yen, Chien-Hua Lung, Shu-Yen Chan, Kuo-Tai Huang
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Patent number: 7709316Abstract: A method of fabricating a gate structure is provided. First, a sacrificial oxide layer is formed on a substrate. A nitridation treatment process is performed to redistribute the nitrogen atoms in the sacrificial layer and the substrate. Next, the sacrificial oxide layer is removed. A re-oxidation process is performed to produce an interface layer on the surface of the substrate. A high K (dielectric constant) gate dielectric layer, a barrier layer and a metal layer are sequentially formed on the substrate. The metal layer, the barrier layer, the high K gate dielectric layer and the interface layer are defined to form a stacked gate structure.Type: GrantFiled: August 15, 2008Date of Patent: May 4, 2010Assignee: United Microelectronics Corp.Inventors: Yun-Ren Wang, Ying-Wei Yen, Shu-Yen Chan, Kuo-Tai Huang
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Publication number: 20100068861Abstract: Provided is a method of semiconductor fabrication including process steps allowing for defining and/or modifying a gate structure height during the fabrication process. The gate structure height may be modified (e.g., decreased) at one or more stages during the fabrication by etching a portion of a polysilicon layer included in the gate structure. The method includes forming a coating layer on the substrate and overlying the gate structure. The coating layer is etched back to expose a portion of the gate structure. The gate structure (e.g., polysilicon) is etched back to decrease the height of the gate structure.Type: ApplicationFiled: December 19, 2008Publication date: March 18, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ryan Chia-Jen Chen, Yih-Ann Lin, Joseph Lin, Jr Jung Lin, Yu Chao Lin, Chao-Cheng Chen, Kuo-Tai Huang
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Publication number: 20100068876Abstract: Methods of fabricating semiconductor devices with high-k/metal gate features are disclosed. In some instances, methods of fabricating semiconductor devices with high-k/metal gate features are disclosed that prevent or reduce high-k/metal gate contamination of non-high-k/metal gate wafers and production tools. In some embodiments, the method comprises forming an interfacial layer over a semiconductor substrate on a front side of the substrate; forming a high-k dielectric layer and a capping layer over the interfacial layer; forming a metal layer over the high-k and capping layers; forming a polysilicon layer over the metal layer; and forming a dielectric layer over the semiconductor substrate on a back side of the substrate.Type: ApplicationFiled: March 17, 2009Publication date: March 18, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yih-Ann Lin, Ryan Chia-Jen Chen, Chien-Hao Chen, Kuo-Tai Huang, Yi-Hsing Chen, Jr Jung Lin, Yu Chao Lin
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Publication number: 20100052077Abstract: A high-k metal gate structure including a buffer layer and method of fabrication of such, is provided. The buffer layer may interpose an interface oxide layer and a high-k gate dielectric layer. In one embodiment, the buffer layer includes aluminum oxide. The buffer layer and the high-k gate dielectric layer may be formed in-situ using an atomic layer deposition (ALD) process.Type: ApplicationFiled: April 13, 2009Publication date: March 4, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Peng-Fu Hsu, Hsin-Chun Ko, Kang-Cheng Lin, Kuo-Tai Huang
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Publication number: 20100052063Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes providing a semiconductor substrate having a first active region and a second active region, providing a semiconductor substrate having a first region and a second region, forming a high-k dielectric layer over the semiconductor substrate, forming a first capping layer and a second capping layer over the high-k dielectric layer, the first capping layer overlying the first region and the second capping layer overlying the second region, forming a layer containing silicon (Si) over the first and second capping layers, forming a metal layer over the layer containing Si, and forming a first gate stack over the first region and a second gate stack over the second active region.Type: ApplicationFiled: December 18, 2008Publication date: March 4, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yuri Masuoka, Peng-Fu Hsu, Huan-Tsung Huang, Kuo-Tai Huang, Carlos H. Diaz, Yong-Tian Hou
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Publication number: 20100052067Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes providing a semiconductor substrate having a first region and a second region, forming a high-k dielectric layer over the semiconductor substrate, forming a capping layer over the high-k dielectric layer in the first region, forming a first metal layer over capping layer in the first region and over the high-k dielectric in the second region, thereafter, forming a first gate stack in the first region and a second gate stack in the second region, protecting the first metal layer in the first gate stack while performing a treatment process on the first metal layer in the second gate stack, and forming a second metal layer over the first metal layer in the first gate stack and over the treated first metal layer in the second gate stack.Type: ApplicationFiled: April 16, 2009Publication date: March 4, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Peng-Fu Hsu, Kang-Cheng Lin, Kuo-Tai Huang
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Publication number: 20100048010Abstract: A method is provided that allows for maintaining a desired equivalent oxide thickness (EOT) by reducing the thickness of an interfacial layer in a gate structure. An interfacial layer is formed on a substrate, a gate dielectric layer such as, a high-k gate dielectric, is formed on the interfacial layer. A gettering layer is formed on the substrate overlying the interfacial layer. The gettering layer may function to getter oxygen from the interfacial layer such that the interfacial layer thickness is decreased and/or restricted from growth.Type: ApplicationFiled: October 23, 2008Publication date: February 25, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien-Hao Chen, Yong-Tian Hou, Peng-Fu Hsu, Kuo-Tai Huang, Donald Y. Chao, Cheng-Lung Hung
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Publication number: 20100044804Abstract: The present disclosure provides a semiconductor device that includes a semiconductor substrate, a transistor formed in the substrate, the transistor including a high-k gate dielectric formed over the substrate, the high-k gate dielectric having a first length measured from one sidewall to the other sidewall of the high-k gate dielectric, and a metal gate formed over the high-k gate dielectric, the metal gate having a second length measured from one sidewall to the other sidewall of the metal gate, the second length being smaller than the first length.Type: ApplicationFiled: April 21, 2009Publication date: February 25, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien-Hao Chen, Yong-Tian Hou, Kang-Cheng Lin, Kuo-Tai Huang
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Publication number: 20100044803Abstract: The present disclosure provides a semiconductor device that includes a semiconductor substrate and a transistor formed in the substrate. The transistor includes a gate stack having a high-k dielectric and metal gate, a sealing layer formed on sidewalls of the gate stack, the sealing layer having an inner edge and an outer edge, the inner edge interfacing with the sidewall of the gate stack, a spacer formed on the outer edge of the sealing layer, and a source/drain region formed on each side of the gate stack, the source/drain region including a lightly doped source/drain (LDD) region that is aligned with the outer edge of the sealing layer.Type: ApplicationFiled: February 20, 2009Publication date: February 25, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien-Hao Chen, Hao-Ming Lien, Ssu-Yi Li, Jun-Lin Yeh, Kang-Cheng Lin, Kuo-Tai Huang, Chii-Horng Li, Chien-Liang Chen, Chung-Hau Fei, Wen-Chih Yang, Jin-Aun Ng, Chi Hsin Chang, Chun Ming Lin, Harry Chuang
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Publication number: 20100044800Abstract: A metal gate/high-k dielectric semiconductor device provides an NMOS gate structure and a PMOS gate structure formed on a semiconductor substrate. The NMOS gate structure includes a high-k gate dielectric treated with a dopant impurity such as La and the high-k gate dielectric material of the PMOS gate structure is deficient of this dopant impurity and further includes a work function tuning layer over the high-k gate dielectric.Type: ApplicationFiled: October 23, 2009Publication date: February 25, 2010Inventors: Joshua Tseng, Kang-Cheng Lin, Ji-Yi Yang, Kuo-Tai Huang, Ryan Chia-Jen Chen
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Publication number: 20100038721Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a gate dielectric over a semiconductor substrate, forming a capping layer over or under the gate dielectric, forming a metal layer over the capping layer, the metal layer having a first work function, treating a portion of the metal layer such that a work function of the portion of the metal layer changes from the first work function to a second work function, and forming a first metal gate from the untreated portion of the metal layer having the first work function and forming a second metal gate from the treated portion of the metal layer having the second work function.Type: ApplicationFiled: June 26, 2009Publication date: February 18, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yih-Ann Lin, Ryan Chia-Jen Chen, Donald Y. Chao, Yi-Shien Mor, Kuo-Tai Huang
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Publication number: 20100041223Abstract: The present disclosure provides a method of fabricating a semiconductor device.Type: ApplicationFiled: June 4, 2009Publication date: February 18, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ryan Chia-Jen Chen, Yih-Ann Lin, Jr Jung Lin, Yi-Shien Mor, Chien-Hao Chen, Kuo-Tai Huang, Yi-Hsing Chen
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Patent number: 7625791Abstract: A metal gate/high-k dielectric semiconductor device provides an NMOS gate structure and a PMOS gate structure formed on a semiconductor substrate. The NMOS gate structure includes a high-k gate dielectric treated with a dopant impurity such as La and the high-k gate dielectric material of the PMOS gate structure is deficient of this dopant impurity and further includes a work function tuning layer over the high-k gate dielectric. A process for simultaneously forming the NMOS and PMOS gate structures includes forming the high-k gate dielectric material, and the work function tuning layer thereover, then selectively removing the work function tuning layer from the NMOS region and carrying out a plasma treatment to selectively dope the high-k gate dielectric material in the NMOS region with a dopant impurity while the high-k gate dielectric in the PMOS region is substantially free of the dopant impurity.Type: GrantFiled: October 29, 2007Date of Patent: December 1, 2009Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Joshua Tseng, Kang-Cheng Lin, Ji-Yi Yang, Kuo-Tai Huang, Ryan Chia-Jen Chen
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Publication number: 20090230479Abstract: A semiconductor structure includes a first MOS device including a first gate, and a second MOS device including a second gate. The first gate includes a first high-k dielectric over a semiconductor substrate; a second high-k dielectric over the first high-k dielectric; a first metal layer over the second high-k dielectric, wherein the first metal layer dominates a work-function of the first MOS device; and a second metal layer over the first metal layer. The second gate includes a third high-k dielectric over the semiconductor substrate, wherein the first and the third high-k dielectrics are formed of same materials, and have substantially a same thickness; a third metal layer over the third high-k dielectric, wherein the third metal layer and the second metal layer are formed of same materials, and have substantially a same thickness; and a fourth metal layer over the third metal layer.Type: ApplicationFiled: March 12, 2008Publication date: September 17, 2009Inventors: Peng-Fu Hsu, Yong-Tian Hou, Ssu-Yi Li, Kuo-Tai Huang, Mong Song Liang
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Patent number: 7553763Abstract: A salicide process contains providing a silicon substrate that comprises at least a predetermined salicide region, performing a cluster ion implantation process to form an amorphized layer in the predetermined salicide region of the silicon substrate near, forming a metal layer on the surface of the amorphized layer, and reacting the metal layer with the amorphized layer to form a silicide layer on the surface of the silicon substrate.Type: GrantFiled: August 8, 2006Date of Patent: June 30, 2009Assignee: United Microelectronics Corp.Inventors: Tsai-Fu Hsiao, Chin-Cheng Chien, Kuo-Tai Huang
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Publication number: 20090108365Abstract: A metal gate/high-k dielectric semiconductor device provides an NMOS gate structure and a PMOS gate structure formed on a semiconductor substrate. The NMOS gate structure includes a high-k gate dielectric treated with a dopant impurity such as La and the high-k gate dielectric material of the PMOS gate structure is deficient of this dopant impurity and further includes a work function tuning layer over the high-k gate dielectric. A process for simultaneously forming the NMOS and PMOS gate structures includes forming the high-k gate dielectric material, and the work function tuning layer thereover, then selectively removing the work function tuning layer from the NMOS region and carrying out a plasma treatment to selectively dope the high-k gate dielectric material in the NMOS region with a dopant impurity while the high-k gate dielectric in the PMOS region is substantially free of the dopant impurity.Type: ApplicationFiled: October 29, 2007Publication date: April 30, 2009Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Joshua Tseng, Kang-Cheng Lin, Ji-Yi Yang, Kuo-Tai Huang, Ryan Chia-Jen Chen