Patents by Inventor Lun Wang

Lun Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240297279
    Abstract: A light source assembly is provided, including a substrate; a light-emitting element disposed on the substrate; and an optical film disposed on the light-emitting element. A diffuser layer is disposed between the optical film and the light-emitting element, wherein a haze of the diffuser layer is greater than 85%, a distance between the diffuser layer and the light-emitting element is in a range from 0 mm to 10 mm, and a thickness of the light-emitting element is less than the distance.
    Type: Application
    Filed: May 13, 2024
    Publication date: September 5, 2024
    Inventors: Chia-Lun CHEN, Shih-Chang HUANG, Ming-Hui CHU, Chih-Chang CHEN, Kai-Hsien HSIUNG, Hui-Chi WANG, Wun-Yuan SU
  • Patent number: 12080646
    Abstract: A method having a semiconductor substrate received and a first dielectric layer is formed over the semiconductor substrate. A trench is formed in the first dielectric layer. The trench is filled to form a conductive layer in the first dielectric layer. The conductive layer is segmented to form a first conductive feature and a second conductive feature separated from each other by a recess. The recess is filled with a second dielectric layer, such that one or both of the conductive features are end-capped by a portion of the first dielectric layer and a portion of the second dielectric layer.
    Type: Grant
    Filed: August 8, 2023
    Date of Patent: September 3, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20240290672
    Abstract: A semiconductor memory device and method of making the same are disclosed. The semiconductor memory device includes a substrate that includes a memory region and a peripheral region, a transistor including a metal gate located in the peripheral region, a composite dielectric film structure located over the metal gate of the transistor, the composite dielectric film structure including a first dielectric layer and a second dielectric layer over the first dielectric layer, where the second dielectric layer has a greater density than a density of the first dielectric layer, and at least one memory cell located in the memory region. The composite dielectric film structure provides enhanced protection of the metal gate against etching damage and thereby improves device performance.
    Type: Application
    Filed: May 6, 2024
    Publication date: August 29, 2024
    Inventors: Sheng-Chieh Chen, Wei-Ming Wang, Ming-Lun Lee, Chih-Ren Hsieh, Ming Chyi Liu
  • Patent number: 12074167
    Abstract: A method includes etching a hybrid substrate to form a recess extending into the hybrid substrate. The hybrid substrate includes a first semiconductor layer having a first surface orientation, a dielectric layer over the first semiconductor layer, and a second semiconductor layer having a second surface orientation different from the first surface orientation. After the etching, a top surface of the first semiconductor layer is exposed to the recess. A spacer is formed on a sidewall of the recess. The spacer contacts a sidewall of the dielectric layer and a sidewall of the second semiconductor layer. An epitaxy is performed to grow an epitaxy semiconductor region from the first semiconductor layer. The spacer is removed.
    Type: Grant
    Filed: November 7, 2022
    Date of Patent: August 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Chiang, Shi Ning Ju, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20240282840
    Abstract: The present disclosure relates to a hybrid integrated circuit. In one implementation, an integrated circuit may have a first region with a first gate structure having a ferroelectric gate dielectric, at least one source associated with the first gate of the first region, and at least one drain associated with the first gate structure of the first region. Moreover, the integrated circuit may have a second region with a second gate structure having a high-? gate dielectric, at least one source associated with the second gate structure of the second region, and at least one drain associated with the second gate structure of the second region. The integrated circuit may further have at least one trench isolation between the first region and the second region.
    Type: Application
    Filed: May 2, 2024
    Publication date: August 22, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Yi CHUANG, Ching-Wei TSAI, Kuan-Lun CHENG, Chih-Hao WANG
  • Patent number: 12068320
    Abstract: Gate isolation techniques disclosed herein form gate isolation fins to isolate metal gates of multigate devices from one another before forming the multigate devices, and in particular, before forming the metal gates of the multigate devices. An exemplary device includes a first multigate device having first source/drain features and a first metal gate that surrounds a first channel layer and a second multigate device having second source/drain features and a second metal gate that surrounds a second channel layer. A gate isolation fin, which separates the first metal gate and the second metal gate, includes a dielectric feature having a first dielectric layer having a first dielectric constant (e.g., a low-k dielectric core) and a second dielectric layer (e.g., a high-k dielectric shell) surrounding the first dielectric layer. The second dielectric layer has a second dielectric constant that is greater than the first dielectric constant.
    Type: Grant
    Filed: September 3, 2021
    Date of Patent: August 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Kuan-Ting Pan, Kuo-Cheng Chiang, Shi Ning Ju, Yi-Ruei Jhan, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 12068382
    Abstract: A semiconductor structure includes a substrate; a first structure over the substrate and having a first gate stack and two first gate spacers on two opposing sidewalls of the first gate stack; a second structure over the substrate and having a second gate stack and two second gate spacers on two opposing sidewalls of the second gate stack; a source/drain (S/D) feature over the substrate and adjacent to the first and the second gate stacks; an S/D contact over the S/D feature and between one of the first gate spacers and one of the second gate spacers; a conductive via disposed over and electrically connected to the S/D contact; and a dielectric liner layer. A first portion of the dielectric liner layer is disposed on a sidewall of the one of the first gate spacers and is directly above the S/D contact and spaced from the S/D contact.
    Type: Grant
    Filed: April 25, 2022
    Date of Patent: August 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 12068372
    Abstract: A semiconductor device structure, along with methods of forming such, are described. In one embodiment, a semiconductor device structure is provided. The semiconductor device structure includes a substrate having a front side and a back side opposing the front side, a gate stack disposed on the front side of the substrate, and a first source/drain feature and a second source/drain feature disposed in opposing sides of the gate stack. Each first source/drain feature and second source/drain feature comprises a first side and a second side, and a portion of the back side of the substrate is exposed to an air gap.
    Type: Grant
    Filed: March 6, 2023
    Date of Patent: August 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Ching Wang, Kuan-Lun Cheng, Wen-Hsing Hsieh
  • Publication number: 20240274694
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes device fins formed on a substrate; fill fins formed on the substrate and disposed among the device fins; and gate stacks formed on the device fins and the fill fins. The fill fins include a first dielectric material layer and a second dielectric material layer deposited on the first dielectric material layer. The first and second dielectric material layers are different from each other in composition.
    Type: Application
    Filed: April 15, 2024
    Publication date: August 15, 2024
    Inventors: Kuo-Cheng CHIANG, Teng-Chun TSAI, Kuan-Lun CHENG, Chih-Hao WANG
  • Publication number: 20240274604
    Abstract: A semiconductor device structure is provided. The structure includes a first gate electrode layer having at least three surfaces surrounded by a first intermixed layer, wherein the first intermixed layer comprises a first material and a second material. The structure also includes a second gate electrode layer disposed below and in contact with the first gate electrode layer, the second gate electrode layer having at least three surfaces surrounded by a second intermixed layer, wherein the second intermixed layer comprises the first material and a fifth material, wherein the first gate electrode layer and the second gate electrode layer are disposed between two adjacent dielectric spacers.
    Type: Application
    Filed: April 3, 2024
    Publication date: August 15, 2024
    Inventors: Mao-Lin HUANG, Jia-Ni YU, LUNG-KUN CHU, Chung-Wei HSU, Chih-Hao WANG, Kuo-Cheng CHIANG, Kuan-Lun CHENG
  • Publication number: 20240274717
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a plurality of nanowire structures over a channel region of a semiconductor fin structure, a source/drain feature on a source/drain region of the semiconductor fin structure, and a dielectric fin structure spaced apart from the source/drain feature and the semiconductor fin structure. A top surface of the dielectric fin structure is higher than a top surface of a bottommost one of the nanowire structures, and a bottom surface of the dielectric fin structure is lower than a bottom surface of the source/drain feature.
    Type: Application
    Filed: April 15, 2024
    Publication date: August 15, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng CHIANG, Shi-Ning JU, Ching-Wei TSAI, Kuan-Lun CHENG, Chih-Hao WANG
  • Patent number: 12063070
    Abstract: A wireless radio frequency conversion system is disclosed. The wireless radio frequency conversion system includes a primary distributing device, a one-to-many conversion device, a plurality of first optical fiber networks, a plurality of remote antenna devices, and a plurality of antennas. The primary distributing device is configured to receive a first photoelectric signal. The one-to-many conversion device is configured to perform an optical-electrical conversion and a one-to-many conversion to the first photoelectric signal so as to generate a plurality of second photoelectric signals. The plurality of first optical fiber networks are configured to transmit the plurality of second photoelectric signals. The plurality of remote antenna devices are configured to receive and perform an optical-electrical conversion to the plurality of second photoelectric signals so as to generate a plurality of third photoelectric signals.
    Type: Grant
    Filed: September 8, 2022
    Date of Patent: August 13, 2024
    Inventors: Po-Kuan Shen, Yu-Chun Wang, Kai-Lun Han, Jenq-Yang Chang, Mao-Jen Wu
  • Patent number: 12062693
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first gate electrode layer, a second gate electrode layer disposed over and aligned with the first gate electrode layer, and a gate isolation structure disposed between the first gate electrode layer and the second gate electrode layer. The gate isolation structure includes a first surface and a second surface opposite the first surface. At least a portion of the first surface is in contact with the first gate electrode layer. The second surface includes a first material and a second material different from the first material, and at least a portion of the second surface is in contact with the second gate electrode layer.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: August 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jia-Ni Yu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Chung-Wei Hsu, Chih-Hao Wang, Kuan-Lun Cheng
  • Publication number: 20240266417
    Abstract: A first fin structure is disposed over a substrate. The first fin structure contains a semiconductor material. A gate dielectric layer is disposed over upper and side surfaces of the first fin structure. A gate electrode layer is formed over the gate dielectric layer. A second fin structure is disposed over the substrate. The second fin structure is physically separated from the first fin structure and contains a ferroelectric material. The second fin structure is electrically coupled to the gate electrode layer.
    Type: Application
    Filed: April 15, 2024
    Publication date: August 8, 2024
    Inventors: Chi-Hsing Hsu, Sai-Hooi Yeong, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang, Min Cao
  • Publication number: 20240266396
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor device structure includes a substrate having a first region and a second region, and a plurality of first nanostructures stacked in a vertical direction in the first region. The semiconductor device structure includes a plurality of second nanostructures stacked in the vertical direction in the second region, and a silicon germanium (SiGe) layer formed below the first nanostructures in the first region. The semiconductor device structure also includes a first gate structure surrounding the first nanostructures in the first region, and a second gate structure surrounding the second nanostructures in the second region. The bottommost surface of the second gate structure is lower than the bottommost surface of the first gate structure.
    Type: Application
    Filed: February 3, 2023
    Publication date: August 8, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuan-Ting PAN, Che-Lun CHANG, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Patent number: 12057341
    Abstract: Semiconductor devices and methods of forming the same are provided. A method according to the present disclosure includes providing a workpiece including a frontside and a backside. The workpiece includes a substrate, a first plurality of channel members over a first portion of the substrate, a second plurality of channel members over a second portion of the substrate, an isolation feature sandwiched between the first and second portions of the substrate. The method also includes forming a joint gate structure to wrap around each of the first and second pluralities of channel members, forming a pilot opening in the isolation feature, extending the pilot opening through the join gate structure to form a gate cut opening that separates the joint gate structure into a first gate structure and a second gate structure, and depositing a dielectric material into the gate cut opening to form a gate cut feature.
    Type: Grant
    Filed: September 1, 2021
    Date of Patent: August 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Yuan Chen, Pei-Yu Wang, Huan-Chieh Su, Yi-Hsun Chiu, Cheng-Chi Chuang, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 12057477
    Abstract: Semiconductor structures and method for manufacturing the same are provided. The semiconductor structure includes a substrate and a first fin structure formed over the substrate. The semiconductor structure also includes an isolation structure formed around the first fin structure and a protection layer formed on the isolation structure. The semiconductor structure also includes first nanostructures formed over the first fin structure and a gate structure surrounding the first nanostructures. In addition, a bottom surface of the gate structure and the top surface of the isolation structure are separated by the protection layer.
    Type: Grant
    Filed: February 22, 2022
    Date of Patent: August 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wen-Ting Lan, Guan-Lin Chen, Shi-Ning Ju, Kuo-Cheng Chiang, Chih-Hao Wang, Ching-Wei Tsai, Kuan-Lun Cheng
  • Patent number: 12057884
    Abstract: A wireless radio frequency conversion system is disclosed. The baseband device generates or receives a baseband signal. The remote radio device transforms between the baseband signal and a radio frequency signal. The beamforming device adjusts amplitude and phase of the radio frequency signal or adjusts scale factor and phase factor of the baseband signal. The conversion device performs an optical-electrical conversion to the radio frequency signal. One of the beamforming device, the conversion device, and the wireless radio frequency conversion system having a one-to-many conversion device performs a one-to-many conversion to the radio frequency signal or the baseband signal to generate radio frequency signals or baseband signals, or performs a many-to-one conversion to the radio frequency signals or the baseband signals to generate the radio frequency signal or the baseband signal. The front-end module amplifies the radio frequency signal. The antenna transmits or receives the radio frequency signal.
    Type: Grant
    Filed: September 8, 2022
    Date of Patent: August 6, 2024
    Inventors: Po-Kuan Shen, Yu-Chun Wang, Kai-Lun Han, Jenq-Yang Chang, Mao-Jen Wu
  • Patent number: 12057507
    Abstract: A method includes forming a SiGe layer over a substrate. A silicon layer is formed over the SiGe layer. The silicon layer and the SiGe layer are patterned to form a fin structure over the substrate. The fin structure includes a remaining portion of the SiGe layer and a remaining portion of the silicon layer over the remaining portion of the SiGe layer. A semiconductive capping layer is formed to cover the fin structure. A top portion of the semiconductive capping layer and the remaining portion of the silicon layer are oxidized to form an oxide layer covering the fin structure.
    Type: Grant
    Filed: May 12, 2023
    Date of Patent: August 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Ching, Kuan-Ting Pan, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20240258407
    Abstract: The present disclosure provides a semiconductor device and a method of manufacturing the semiconductor device. The semiconductor device includes channel members vertically stacked above a substrate, a gate structure engaging the channel members, a gate sidewall spacer disposed on a sidewall of the gate structure, an epitaxial feature abutting end portions of the channel members, and inner spacers interposing the gate structure and the epitaxial feature. The end portion of at least one of the channel members includes a first dopant. A concentration of the first dopant in the end portion of the at least one of the channel members is higher than in a center portion of the at least one of the channel members. The concentration of the first dopant in the end portion of the at least one of the channel members is higher than in an outer portion of the epitaxial feature.
    Type: Application
    Filed: April 1, 2024
    Publication date: August 1, 2024
    Inventors: Chih-Ching Wang, Chung-I Yang, Jon-Hsu Ho, Wen-Hsing Hsieh, Kuan-Lun Cheng, Chung-Wei Wu, Zhiqiang Wu