Patents by Inventor Mao-Lin Huang

Mao-Lin Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9263295
    Abstract: A nanowire field effect transistor (FET) device and method for forming the same is disclosed. The device comprises: a semiconductor substrate; a device layer including a source region and a drain region connected by a suspended nanowire channel; and etch stop layers respectively arranged beneath the source region and the drain region, the etch stop layers forming support structures interposed between the semiconductor substrate and the source and drain regions. The suspended nanowire channel is formed by etching a sacrificial material disposed beneath the suspended nanowire channel and between the etch stop layers. The etching is selective to the sacrificial material to prevent the removal of the etch stop layers beneath the source region and the drain region.
    Type: Grant
    Filed: May 26, 2015
    Date of Patent: February 16, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hsun Wang, Mao-Lin Huang, Chun-Hsiung Lin, Jean-Pierre Colinge
  • Publication number: 20160013054
    Abstract: A method for forming a semiconductor device having a fin-type channel is provided. The method may include the following operations: forming a first buffer layer over a substrate; forming a first dielectric layer over the first buffer layer; patterning the first dielectric layer over the first buffer layer; forming a barrier layer over the first buffer layer; forming a second dielectric layer over the barrier layer; patterning the second dielectric layer over the barrier layer; forming a channel layer over the barrier layer; and patterning the second dielectric layer, such that at least a portion of the channel layer protrudes to form the fin-type channel.
    Type: Application
    Filed: September 23, 2015
    Publication date: January 14, 2016
    Inventors: CHIEN-HSUN WANG, CHUN-HSIUNG LIN, MAO-LIN HUANG
  • Patent number: 9214513
    Abstract: According to an exemplary embodiment, a method of forming a fin structure is provided. The method includes the following operations: etching a first dielectric layer to form at least one recess and a first core portion of a fin core; form an oxide layer as a shallow trench isolation layer in the recess; etching back the oxide layer to expose a portion of the fin core; and forming a fin shell to cover a sidewall of the exposed portion of the fin core.
    Type: Grant
    Filed: February 13, 2014
    Date of Patent: December 15, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chun-Hsiung Lin, Carlos H. Diaz, Hui-Cheng Chang, Syun-Ming Jang, Mao-Lin Huang, Chien-Hsun Wang
  • Patent number: 9184289
    Abstract: A semiconductor devices and method of formation are provided herein. A semiconductor device includes a gate structure over a channel and an active region adjacent the channel. The active region includes a repaired doped region and a growth region over the repaired doped region. The repaired doped region includes a first dopant and a second dopant, where the second dopant is from the growth region. A method of forming a semiconductor device includes increasing a temperature during exposure to at least one of dopant(s) or agent(s) to form an active region adjacent a channel, where the active region includes a repaired doped region and a growth region over the repaired doped region.
    Type: Grant
    Filed: November 8, 2013
    Date of Patent: November 10, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Mao-Lin Huang, Chien-Hsun Wang, Chun-Hsiung Lin, Meng-Ku Chen, Li-Ting Wang, Hung-Ta Lin
  • Patent number: 9166035
    Abstract: A transistor includes a gate terminal, a source terminal and a drain terminal. At least one of the source and drain terminals has a layered configuration that includes a terminal layer and an intervening layer. The terminal layer has a top surface and a bottom surface. The intervening layer is located within the terminal layer, between and spaced from the top and bottom surfaces, is oriented to be perpendicular to current flow, and is less than one tenth the thickness of the terminal layer. The terminal layer and the intervening layer include a common semiconductive compound and a common dopant, with a concentration of the dopant in the intervening layer being over ten times an average concentration of the dopant in the terminal layer.
    Type: Grant
    Filed: September 12, 2013
    Date of Patent: October 20, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Hung-Ta Lin, Mao-Lin Huang, Li-Ting Wang, Chien-Hsun Wang, Meng-Ku Chen, Chun-Hsiung Lin, Pang-Yen Tsai, Hui-Cheng Chang
  • Patent number: 9147766
    Abstract: A method for forming a semiconductor device having a fin-type channel is provided. The method may include the following operations: forming a first buffer layer over a substrate; forming a first dielectric layer over the first buffer layer; patterning the first dielectric layer over the first buffer layer; forming a barrier layer over the first buffer layer; forming a second dielectric layer over the barrier layer; patterning the second dielectric layer over the barrier layer; forming a channel layer over the barrier layer; and patterning the second dielectric layer, such that at least a portion of the channel layer protrudes to form the fin-type channel.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: September 29, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hsun Wang, Chun-Hsiung Lin, Mao-Lin Huang
  • Publication number: 20150263094
    Abstract: A device structure includes: a core structure formed on a support, and a shell material formed on the core structure and surrounding at least part of the core structure. The shell material and the core structure are configured to form a quantum-well channel in the shell material.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: CARLOS H. DIAZ, CHUN-HSIUNG LIN, HUI-CHENG CHANG, SYUN-MING JANG, CHIEN-HSUN WANG, MAO-LIN HUANG
  • Publication number: 20150255306
    Abstract: A nanowire field effect transistor (FET) device and method for forming the same is disclosed. The device comprises: a semiconductor substrate; a device layer including a source region and a drain region connected by a suspended nanowire channel; and etch stop layers respectively arranged beneath the source region and the drain region, the etch stop layers forming support structures interposed between the semiconductor substrate and the source and drain regions. The suspended nanowire channel is formed by etching a sacrificial material disposed beneath the suspended nanowire channel and between the etch stop layers. The etching is selective to the sacrificial material to prevent the removal of the etch stop layers beneath the source region and the drain region.
    Type: Application
    Filed: May 26, 2015
    Publication date: September 10, 2015
    Inventors: CHIEN-HSUN WANG, MAO-LIN HUANG, CHUN-HSIUNG LIN, JEAN-PIERRE COLINGE
  • Publication number: 20150228721
    Abstract: According to an exemplary embodiment, a method of forming a fin structure is provided. The method includes the following operations: etching a first dielectric layer to form at least one recess and a first core portion of a fin core; form an oxide layer as a shallow trench isolation layer in the recess; etching back the oxide layer to expose a portion of the fin core; and forming a fin shell to cover a sidewall of the exposed portion of the fin core.
    Type: Application
    Filed: February 13, 2014
    Publication date: August 13, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: CHUN-HSIUNG LIN, CARLOS H. DIAZ, HUI-CHENG CHANG, SYUN-MING JANG, MAO-LIN HUANG, CHIEN-HSUN WANG
  • Patent number: 9048301
    Abstract: A transistor device and method for forming a nanowire field effect transistor (FET) device are provided. A device layer including a source region and a drain region is formed, where the source region and the drain region are connected by a suspended nanowire channel. Etch stop layers are formed beneath the source region and the drain region. The etch stop layers comprise support structures interposed between a semiconductor substrate and the source and drain regions. The suspended nanowire channel is formed by etching a sacrificial material beneath the suspended nanowire channel. The etching is selective to the sacrificial material to prevent the removal of the etch stop layers beneath the source region and the drain region.
    Type: Grant
    Filed: October 16, 2013
    Date of Patent: June 2, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hsun Wang, Mao-Lin Huang, Chun-Hsiung Lin, Jean-Pierre Colinge
  • Publication number: 20150129938
    Abstract: A semiconductor devices and method of formation are provided herein. A semiconductor device includes a gate structure over a channel and an active region adjacent the channel. The active region includes a repaired doped region and a growth region over the repaired doped region. The repaired doped region includes a first dopant and a second dopant, where the second dopant is from the growth region. A method of forming a semiconductor device includes increasing a temperature during exposure to at least one of dopant(s) or agent(s) to form an active region adjacent a channel, where the active region includes a repaired doped region and a growth region over the repaired doped region.
    Type: Application
    Filed: November 8, 2013
    Publication date: May 14, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Mao-Lin Huang, Chien-Hsun Wang, Chun-Hsiung Lin, Meng-Ku Chen, Li-Ting Wang, Hung-Ta Lin
  • Publication number: 20150129981
    Abstract: A method for forming a semiconductor device having a fin-type channel is provided. The method may include the following operations: forming a first buffer layer over a substrate; forming a first dielectric layer over the first buffer layer; patterning the first dielectric layer over the first buffer layer; forming a barrier layer over the first buffer layer; forming a second dielectric layer over the barrier layer; patterning the second dielectric layer over the barrier layer; forming a channel layer over the barrier layer; and patterning the second dielectric layer, such that at least a portion of the channel layer protrudes to form the fin-type channel.
    Type: Application
    Filed: November 14, 2013
    Publication date: May 14, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: CHIEN-HSUN WANG, CHUN-HSIUNG LIN, MAO-LIN HUANG
  • Publication number: 20150108550
    Abstract: A method for forming a transistor is provided. The method includes: forming a channel layer over a substrate; patterning the channel layer to form a recess; and forming a source layer in the recess, such that at least a portion of the channel layer protrudes to form the fin-type channel.
    Type: Application
    Filed: October 17, 2013
    Publication date: April 23, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: CHIEN-HSUN WANG, MAO-LIN HUANG, CHUN-HSIUNG LIN
  • Publication number: 20150102287
    Abstract: A transistor device and method for forming a nanowire field effect transistor (FET) device are provided. A device layer including a source region and a drain region is formed, where the source region and the drain region are connected by a suspended nanowire channel. Etch stop layers are formed beneath the source region and the drain region. The etch stop layers comprise support structures interposed between a semiconductor substrate and the source and drain regions. The suspended nanowire channel is formed by etching a sacrificial material beneath the suspended nanowire channel. The etching is selective to the sacrificial material to prevent the removal of the etch stop layers beneath the source region and the drain region.
    Type: Application
    Filed: October 16, 2013
    Publication date: April 16, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: CHIEN-HSUN WANG, MAO-LIN HUANG, CHUN-HSIUNG LIN, JEAN-PIERRE COLINGE
  • Publication number: 20150069467
    Abstract: A transistor includes a gate terminal, a source terminal and a drain terminal. At least one of the source and drain terminals has a layered configuration that includes a terminal layer and an intervening layer. The terminal layer has a top surface and a bottom surface. The intervening layer is located within the terminal layer, between and spaced from the top and bottom surfaces, is oriented to be perpendicular to current flow, and is less than one tenth the thickness of the terminal layer. The terminal layer and the intervening layer include a common semiconductive compound and a common dopant, with a concentration of the dopant in the intervening layer being over ten times an average concentration of the dopant in the terminal layer.
    Type: Application
    Filed: September 12, 2013
    Publication date: March 12, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: HUNG-TA LIN, MAO-LIN HUANG, LI-TING WANG, CHIEN-HSUN WANG, MENG-KU CHEN, CHUN-HSIUNG LIN, PANG-YEN TSAI, HUI-CHENG CHANG
  • Patent number: 8859441
    Abstract: The present invention provides a system and method for manufacturing a semiconductor device including a substrate and a high-? dielectric layer on the substrate. The system comprises a modular track; a substrate-forming chamber connected with the modular track for forming the substrate; and an atomic layer deposition (ALD) chamber connected with the modular track for providing the high-? dielectric layer.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: October 14, 2014
    Inventors: Ming-Hwei Hong, Ray-Nien Kwo, Tun-Wen Pi, Mao-Lin Huang, Yu-Hsing Chang, Pen Chang, Chun-An Lin, Tsung-Da Lin
  • Publication number: 20130267077
    Abstract: The present invention provides a system and method for manufacturing a semiconductor device including a substrate and a high-? dielectric layer on the substrate. The system comprises a modular track; a substrate-forming chamber connected with the modular track for forming the substrate; and an atomic layer deposition (ALD) chamber connected with the modular track for providing the high-? dielectric layer.
    Type: Application
    Filed: April 5, 2012
    Publication date: October 10, 2013
    Inventors: Ming-Hwei Hong, Ray-Nien Kwo, Tun-Wen Pi, Mao-Lin Huang, Yu-Hsing Chang, Pen Chang, Chun-An Lin, Tsung-Da Lin
  • Patent number: 7773512
    Abstract: A bandwidth control method is adapted for use in a network device having a system clock. The network device has a register for storing a transmittable data amount to control bandwidth. The method includes: calculating a number of elapsed periods of the system clock so as to change a counting value every predetermined time interval, the counting value being cyclic within a specific range; adjusting the transmittable data amount in the register by a first unit amount when the counting value reaches a first count value; and adjusting the transmittable data amount in the register by a second unit amount after adjusting the transmittable data amount by the first unit amount and elapse of the predetermined time interval and when the counting value corresponds to a second count value. The first count value is different from the second count value, and the first unit amount is different from the second unit amount.
    Type: Grant
    Filed: February 15, 2008
    Date of Patent: August 10, 2010
    Assignee: Realtek Semiconductor Corporation
    Inventors: Mao-Lin Huang, Yi-Lun Chen, Jin-Ru Chen
  • Publication number: 20080198750
    Abstract: A bandwidth control method is adapted for use in a network device having a system clock. The network device has a register for storing a transmittable data amount to control bandwidth. The method includes: calculating a number of elapsed periods of the system clock so as to change a counting value every predetermined time interval, the counting value being cyclic within a specific range; adjusting the transmittable data amount in the register by a first unit amount when the counting value reaches a first count value; and adjusting the transmittable data amount in the register by a second unit amount after adjusting the transmittable data amount by the first unit amount and elapse of the predetermined time interval and when the counting value corresponds to a second count value. The first count value is different from the second count value, and the first unit amount is different from the second unit amount.
    Type: Application
    Filed: February 15, 2008
    Publication date: August 21, 2008
    Inventors: Mao-Lin Huang, Yi-Lun Chen, Jin-Ru Chen
  • Publication number: 20070009364
    Abstract: A blade of a ceiling fan includes a first flat end fixed to a blade bracket and a second end which includes an activation portion which includes a convex protruding from a top of the second end of the blade and a concavity is defined in an underside of the activation portion. Two sides of the activation portion are on a common horizontal surface with the first end of the blade. An angle between the horizontal surface and the convex is in a range of 15° to 20°. The blade generates stronger airflow with less resistance.
    Type: Application
    Filed: July 8, 2005
    Publication date: January 11, 2007
    Inventor: Mao-Lin Huang