Patents by Inventor Mao-Lin Huang

Mao-Lin Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10553718
    Abstract: A device structure includes: a core structure formed on a support, and a shell material formed on the core structure and surrounding at least part of the core structure. The shell material is associated with a first bandgap; the core structure is associated with a second bandgap; and the first bandgap is smaller than the second bandgap. The shell material and the core structure are configured to form a quantum-well channel in the shell material.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: February 4, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Carlos H. Diaz, Chun-Hsiung Lin, Huicheng Chang, Syun-Ming Jang, Chien-Hsun Wang, Mao-Lin Huang
  • Publication number: 20180350984
    Abstract: In a method of manufacturing a semiconductor device, a support layer is formed over a substrate. A patterned semiconductor layer made of a first semiconductor material is formed over the support layer. A part of the support layer under a part of the semiconductor layer is removed, thereby forming a semiconductor wire. A semiconductor shell layer made of a second semiconductor material different from the first semiconductor material is formed around the semiconductor wire.
    Type: Application
    Filed: July 30, 2018
    Publication date: December 6, 2018
    Inventors: Carlos H. DIAZ, Chun-Hsiung LIN, Huicheng CHANG, Syun-Ming JANG, Chien-Hsun WANG, Mao-Lin HUANG
  • Patent number: 10069721
    Abstract: The present invention discloses a communication device applicable to a stacking communication system. The communication device comprises: a plurality of communication ports operable to constitute a part of an internal transmission path of the stacking communication system; a storage unit operable to store a reference path table; and a controller operable to receive a frame and then determine whether the frame should be forwarded, wherein if the frame should be forwarded, the controller is operable to choose one among the communication ports according to the reference path table and the content of the frame to forward the frame or a frame derived therefrom to the internal transmission path of the stacking communication system.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: September 4, 2018
    Assignee: REALTEK SEMICONDUCTOR CORPORATION
    Inventors: Mao-Lin Huang, Chun-Da Wu
  • Publication number: 20180175165
    Abstract: A method includes forming a dummy gate stack, forming a dielectric layer, with the dummy gate stack located in the dielectric layer, removing the dummy gate stack to form a opening in the dielectric layer, forming a metal layer extending into the opening, and etching back the metal layer. The remaining portions of the metal layer in the opening have edges lower than a top surface of the dielectric layer. A conductive layer is selectively deposited in the opening. The conductive layer is over the metal layer, and the metal layer and the conductive layer in combination form a replacement gate.
    Type: Application
    Filed: June 13, 2017
    Publication date: June 21, 2018
    Inventors: Peng-Soon Lim, Cheng-Lung Hung, Mao-Lin Huang, Weng Chang
  • Patent number: 9929248
    Abstract: An embodiment high electron mobility transistor (HEMT) includes a gate electrode over a semiconductor substrate and a multi-layer semiconductor cap over the semiconductor substrate and adjacent the gate electrode. The multi-layer semiconductor cap includes a first semiconductor layer and a second semiconductor layer comprising a different material than the first semiconductor layer. The first semiconductor layer is laterally spaced apart from the gate electrode by a first spacing, and the second semiconductor layer is spaced apart from the gate electrode by a second spacing greater than the first spacing.
    Type: Grant
    Filed: December 2, 2016
    Date of Patent: March 27, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Hsiang Fan, Chun-Hsiung Lin, Mao-Lin Huang
  • Patent number: 9911812
    Abstract: According to an exemplary embodiment, a method of forming a fin structure is provided. The method includes the following operations: etching a first dielectric layer to form at least one recess and a first core portion of a fin core; form an oxide layer as a shallow trench isolation layer in the recess; etching back the oxide layer to expose a portion of the fin core; and forming a fin shell to cover a sidewall of the exposed portion of the fin core.
    Type: Grant
    Filed: November 10, 2015
    Date of Patent: March 6, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chun-Hsiung Lin, Carlos H. Diaz, Hui-Cheng Chang, Syun-Ming Jang, Mao-Lin Huang, Chien-Hsun Wang
  • Patent number: 9865460
    Abstract: A method for forming a semiconductor device having a fin-type channel is provided. The method may include the following operations: forming a first buffer layer over a substrate; forming a first dielectric layer over the first buffer layer; patterning the first dielectric layer over the first buffer layer; forming a barrier layer over the first buffer layer; forming a second dielectric layer over the barrier layer; patterning the second dielectric layer over the barrier layer; forming a channel layer over the barrier layer; and patterning the second dielectric layer, such that at least a portion of the channel layer protrudes to form the fin-type channel.
    Type: Grant
    Filed: September 23, 2015
    Date of Patent: January 9, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hsun Wang, Chun-Hsiung Lin, Mao-Lin Huang
  • Patent number: 9773868
    Abstract: Transistor devices and methods for forming transistor devices are provided. A transistor device includes a semiconductor substrate and a device layer. The device layer includes a source region and a drain region connected by a suspended nanowire channel. First and second etch stop layers are respectively arranged beneath the source region and the drain region. Each of the etch stop layers forms a support structure interposed between the semiconductor substrate and the respective source and drain regions.
    Type: Grant
    Filed: January 22, 2016
    Date of Patent: September 26, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hsun Wang, Mao-Lin Huang, Chun-Hsiung Lin, Jean-Pierre Colinge
  • Patent number: 9735261
    Abstract: A semiconductor devices and method of formation are provided herein. A semiconductor device includes a gate structure over a channel and an active region adjacent the channel. The active region includes a repaired doped region and a growth region over the repaired doped region. The repaired doped region includes a first dopant and a second dopant, where the second dopant is from the growth region. A method of forming a semiconductor device includes increasing a temperature during exposure to at least one of dopant(s) or agent(s) to form an active region adjacent a channel, where the active region includes a repaired doped region and a growth region over the repaired doped region.
    Type: Grant
    Filed: November 2, 2015
    Date of Patent: August 15, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Mao-Lin Huang, Chien-Hsun Wang, Chun-Hsiung Lin, Meng-Ku Chen, Li-Ting Wang, Hung-Ta Lin
  • Patent number: 9620618
    Abstract: A method for forming a transistor is provided. The method includes: forming a channel layer over a substrate; forming a barrier layer between the channel layer and the substrate; forming a recess that extends into the barrier layer through the channel layer; and forming a source layer in the recess.
    Type: Grant
    Filed: February 4, 2016
    Date of Patent: April 11, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hsun Wang, Mao-Lin Huang, Chun-Hsiung Lin
  • Publication number: 20170084717
    Abstract: An embodiment high electron mobility transistor (HEMT) includes a gate electrode over a semiconductor substrate and a multi-layer semiconductor cap over the semiconductor substrate and adjacent the gate electrode. The multi-layer semiconductor cap includes a first semiconductor layer and a second semiconductor layer comprising a different material than the first semiconductor layer. The first semiconductor layer is laterally spaced apart from the gate electrode by a first spacing, and the second semiconductor layer is spaced apart from the gate electrode by a second spacing greater than the first spacing.
    Type: Application
    Filed: December 2, 2016
    Publication date: March 23, 2017
    Inventors: Chun-Hsiang Fan, Chun-Hsiung Lin, Mao-Lin Huang
  • Publication number: 20170063688
    Abstract: The present invention discloses a communication device applicable to a stacking communication system. The communication device comprises: a plurality of communication ports operable to constitute a part of an internal transmission path of the stacking communication system; a storage unit operable to store a reference path table; and a controller operable to receive a frame and then determine whether the frame should be forwarded, wherein if the frame should be forwarded, the controller is operable to choose one among the communication ports according to the reference path table and the content of the frame to forward the frame or a frame derived therefrom to the internal transmission path of the stacking communication system.
    Type: Application
    Filed: August 9, 2016
    Publication date: March 2, 2017
    Inventors: MAO-LIN HUANG, CHUN-DA WU
  • Publication number: 20170025507
    Abstract: An embodiment high electron mobility transistor (HEMT) includes a gate electrode over a semiconductor substrate and a multi-layer semiconductor cap over the semiconductor substrate and adjacent the gate electrode. The multi-layer semiconductor cap includes a first semiconductor layer and a second semiconductor layer comprising a different material than the first semiconductor layer. The first semiconductor layer is laterally spaced apart from the gate electrode by a first spacing, and the second semiconductor layer is spaced apart from the gate electrode by a second spacing greater than the first spacing.
    Type: Application
    Filed: July 20, 2015
    Publication date: January 26, 2017
    Inventors: Chun-Hsiang Fan, Chun-Hsiung Lin, Mao-Lin Huang
  • Patent number: 9543419
    Abstract: An embodiment is a method including forming an epitaxial portion over a substrate, the epitaxial portion including a III-V material. A damaged material layer being on at least one surface of the epitaxial portion. The method further including oxidizing at least outer surfaces of the damaged material layer to form an oxide layer, selectively removing the oxide layer, and repeating the oxidizing and the selectively removing steps while at least a portion of the damaged material layer remains on the epitaxial portion.
    Type: Grant
    Filed: September 18, 2015
    Date of Patent: January 10, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Hsiang Fan, Yung-Ta Li, Mao-Lin Huang, Chun-Hsiung Lin
  • Patent number: 9536962
    Abstract: An embodiment high electron mobility transistor (HEMT) includes a gate electrode over a semiconductor substrate and a multi-layer semiconductor cap over the semiconductor substrate and adjacent the gate electrode. The multi-layer semiconductor cap includes a first semiconductor layer and a second semiconductor layer comprising a different material than the first semiconductor layer. The first semiconductor layer is laterally spaced apart from the gate electrode by a first spacing, and the second semiconductor layer is spaced apart from the gate electrode by a second spacing greater than the first spacing.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: January 3, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Hsiang Fan, Chun-Hsiung Lin, Mao-Lin Huang
  • Publication number: 20160155817
    Abstract: A method for forming a transistor is provided. The method includes: forming a channel layer over a substrate; forming a barrier layer between the channel layer and the substrate; forming a recess that extends into the barrier layer through the channel layer; and forming a source layer in the recess.
    Type: Application
    Filed: February 4, 2016
    Publication date: June 2, 2016
    Inventors: Chien-Hsun WANG, Mao-Lin HUANG, Chun-Hsiung LIN
  • Publication number: 20160141361
    Abstract: Transistor devices and methods for forming transistor devices are provided. A transistor device includes a semiconductor substrate and a device layer. The device layer includes a source region and a drain region connected by a suspended nanowire channel. First and second etch stop layers are respectively arranged beneath the source region and the drain region. Each of the etch stop layers forms a support structure interposed between the semiconductor substrate and the respective source and drain regions.
    Type: Application
    Filed: January 22, 2016
    Publication date: May 19, 2016
    Inventors: CHIEN-HSUN WANG, MAO-LIN HUANG, CHUN-HSIUNG LIN, JEAN-PIERRE COLINGE
  • Publication number: 20160071966
    Abstract: A semiconductor devices and method of formation are provided herein. A semiconductor device includes a gate structure over a channel and an active region adjacent the channel. The active region includes a repaired doped region and a growth region over the repaired doped region. The repaired doped region includes a first dopant and a second dopant, where the second dopant is from the growth region. A method of forming a semiconductor device includes increasing a temperature during exposure to at least one of dopant(s) or agent(s) to form an active region adjacent a channel, where the active region includes a repaired doped region and a growth region over the repaired doped region.
    Type: Application
    Filed: November 2, 2015
    Publication date: March 10, 2016
    Inventors: Mao-Lin Huang, Chien-Hsun Wang, Chun-Hsiung Lin, Meng-Ku Chen, Li-Ting Wang, Hung-Ta Lin
  • Publication number: 20160064493
    Abstract: According to an exemplary embodiment, a method of forming a fin structure is provided. The method includes the following operations: etching a first dielectric layer to form at least one recess and a first core portion of a fin core; form an oxide layer as a shallow trench isolation layer in the recess; etching back the oxide layer to expose a portion of the fin core; and forming a fin shell to cover a sidewall of the exposed portion of the fin core.
    Type: Application
    Filed: November 10, 2015
    Publication date: March 3, 2016
    Inventors: CHUN-HSIUNG LIN, CARLOS H. DIAZ, HUI-CHENG CHANG, SYUN-MING JANG, MAO-LIN HUANG, CHIEN-HSUN WANG
  • Patent number: 9276084
    Abstract: A method for forming a transistor is provided. The method includes: forming a channel layer over a substrate; patterning the channel layer to form a recess; and forming a source layer in the recess, such that at least a portion of the channel layer protrudes to form the fin-type channel.
    Type: Grant
    Filed: October 17, 2013
    Date of Patent: March 1, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hsun Wang, Mao-Lin Huang, Chun-Hsiung Lin