Patents by Inventor Michael Goldstein

Michael Goldstein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substituted 7-azaquinazoline compounds useful as p38 kinase inhibitors
    Patent number: 7189731
    Abstract: Compounds having the formula (I) or (II), are useful as p38 kinase inhibitors, wherein R is an optionally substituted alkyl, cycloalkyl, or aryl; R6 is hydrogen or lower alkyl; R7 is hydrogen or a non-interfering substituent, and Q is a non-aromatic moiety as defined in the specification.
    Type: Grant
    Filed: April 15, 2004
    Date of Patent: March 13, 2007
    Assignee: Roche Palo Alto LLC
    Inventors: Nolan James Dewdney, David Michael Goldstein
  • Source multiplexing in lithography
    Patent number: 7183565
    Abstract: An illumination system for an extreme ultraviolet (EUV) lithography system may include multiple sources of EUV light. The system may combine the light from the multiple sources when illuminating a mask.
    Type: Grant
    Filed: August 2, 2005
    Date of Patent: February 27, 2007
    Assignee: Intel Corporation
    Inventors: Michael Goldstein, Peter J. Silverman
  • 6-substituted pyrido-pyrimidines
    Patent number: 7169794
    Abstract: The present invention provides compounds of the Formula I and II: wherein R1, R3, W, Z, X1, X2, Ar1, R8 and R9 are as defined herein, and methods and intermediates for their preparation and uses thereof.
    Type: Grant
    Filed: November 25, 2003
    Date of Patent: January 30, 2007
    Assignee: Roche Palo Alto LLC
    Inventors: Jian Jeffrey Chen, James Patrick Dunn, David Michael Goldstein, Christoph Martin Stahl
  • Method and apparatus for polarizing electromagnetic radiation
    Patent number: 7167295
    Abstract: According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.
    Type: Grant
    Filed: December 20, 2005
    Date of Patent: January 23, 2007
    Assignee: Intel Corporation
    Inventors: David L. Williams, James Kardach, Michael Goldstein
  • Optical device
    Patent number: 7154527
    Abstract: Stereoscopic device including at least two apertures, each including a light valve, a multi wavelength light sensor array and a controllable multi wavelength illumination unit, producing at least two alternating beams of light, each of the beams of light is characterized as being in a different range of wavelengths, wherein each light valve is operative to open at a different predetermined timing and wherein the multi wavelength light sensor array detects a plurality of images, each of the images corresponding to a predetermined combination of an open state of a selected one of the light valves and a selected one of the modes.
    Type: Grant
    Filed: October 30, 2000
    Date of Patent: December 26, 2006
    Assignee: Visionsense Ltd.
    Inventors: Michael Goldstein, Abraham Yaron, Shay Ghilai
  • Apparatus for adjustment of partial coherence of light energy in an imaging system
    Patent number: 7139135
    Abstract: The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
    Type: Grant
    Filed: June 11, 2003
    Date of Patent: November 21, 2006
    Assignee: Intel Corporation
    Inventors: Michael Goldstein, John M. Urata
  • Method of and apparatus for modifying polarity of light
    Publication number: 20060250694
    Abstract: A method of modifying polarity of light is provided. The light propagates through a first transverse plane and has known polarization states in respective cells of the first transverse plane. A first retardation compensator having respective waveplates matching the cells then changes the polarity of the light so that light propagating through a second transverse plane is circularly polarized across the entire second transverse plane. A second retardation compensator includes a plurality of quarter waveplates that change the polarization of the circularly polarized light, so that light passing through a third transverse plane is linearly polarized. The crystal alignment of the quarter waveplates and their shape and configuration are selected so that the direction of the polarization is normal to a radius from a single point.
    Type: Application
    Filed: May 5, 2005
    Publication date: November 9, 2006
    Inventors: David Williams, Michael Goldstein, James Kardach
  • Dual hemispherical collectors
    Publication number: 20060237668
    Abstract: A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a source to illuminate in a second hemisphere of the source; and a second surface shaped to reflect radiation in the second hemisphere of the source to an output plane.
    Type: Application
    Filed: April 25, 2006
    Publication date: October 26, 2006
    Inventors: Peter Silverman, Michael Goldstein
  • Wavefront engineering with off-focus mask features
    Publication number: 20060216615
    Abstract: An imaging part such as a mask or reticle includes a patterned layer in an on-axis plane of the imaging part. The imaging part further includes another layer including sub-resolution features, where the another layer is positioned in an off-axis plane of the imaging part.
    Type: Application
    Filed: March 28, 2005
    Publication date: September 28, 2006
    Inventors: Michael Goldstein, John Urata
  • 6-alkoxy-pyrido-pyrimidines
    Patent number: 7105525
    Abstract: The present invention provides compounds of the Formula I: wherein R1 is alkyl, cycloalkyl, cycloalkylalkyl, or —CH2-alkenyl, X1 is O, NH, N(alkyl), S or —C(?O), Z is N or CH; and R2 and R3are as defined herein, pharmaceutical compositions comprising same, and methods for their use.
    Type: Grant
    Filed: May 4, 2005
    Date of Patent: September 12, 2006
    Assignee: Roche Palo Alto LLC
    Inventors: David Michael Goldstein, Julie Anne Lim
  • Method and apparatus for polarizing electromagnetic radiation
    Publication number: 20060193055
    Abstract: According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.
    Type: Application
    Filed: March 21, 2006
    Publication date: August 31, 2006
    Inventors: David Williams, James Kardach, Michael Goldstein
  • High reflector tunable stress coating, such as for a MEMS mirror
    Publication number: 20060182404
    Abstract: An optical device having a high reflector tunable stress coating includes a micro-electromechanical system (MEMS) platform, a mirror disposed on the MEMS platform, and a multiple layer coating disposed on the mirror. The multiple layer coating includes a layer of silver (Ag), a layer of silicon dioxide (SiO2) deposited on the layer of Ag, a layer of intrinsic silicon (Si) deposited on the layer of SiO2, and a layer of silicon oxynitride (SiOxNy) deposited on the layer of Si. The concentration of nitrogen is increased and/or decreased to tune the stress (e.g., tensile, none, compressive).
    Type: Application
    Filed: April 7, 2006
    Publication date: August 17, 2006
    Inventor: Michael Goldstein
  • High reflector tunable stress coating, such as for a MEMS mirror
    Publication number: 20060182403
    Abstract: An optical device having a high reflector tunable stress coating includes a micro-electromechanical system (MEMS) platform, a mirror disposed on the MEMS platform, and a multiple layer coating disposed on the mirror. The multiple layer coating includes a layer of silver (Ag), a layer of silicon dioxide (SiO2) deposited on the layer of Ag, a layer of intrinsic silicon (Si) deposited on the layer of SiO2, and a layer of silicon oxynitride (SiOxNy) deposited on the layer of Si. The concentration of nitrogen is increased and/or decreased to tune the stress (e.g., tensile, none, compressive).
    Type: Application
    Filed: April 7, 2006
    Publication date: August 17, 2006
    Inventor: Michael Goldstein
  • Imidazo-substituted compounds as p38 kinase inhibitors
    Patent number: 7081462
    Abstract: The present invention discloses compounds corresponding to formula I: wherein A, Z, Z1, Y, R1 and R2 are as defined in the specification, as well as pharmaceutical formulations, methods of making and uses thereof.
    Type: Grant
    Filed: May 4, 2005
    Date of Patent: July 25, 2006
    Assignee: Roche Palo Alto LLC
    Inventors: David Michael Goldstein, Ronald Charles Hawley, Alfred Sui-Ting Lui, Eric Brian Sjogren
  • Sublimating process for cleaning and protecting lithography masks
    Patent number: 7070832
    Abstract: Spraying a surface of a reticle with carbon dioxide snow cleans the surface and removes particles. Further spraying the surface of the reticle with carbon dioxide snow at a temperature below a carbon dioxide sublimation temperature forms a solid carbon dioxide layer on the surface. The solid carbon dioxide layer prevents particles from contacting the surface of the reticle. The solid carbon dioxide layer may be removed, and the reticle may be used in a extreme ultraviolet lithography tool.
    Type: Grant
    Filed: September 11, 2003
    Date of Patent: July 4, 2006
    Assignee: Intel Corporation
    Inventor: Michael Goldstein
  • Method of manufacturing alloy sputtering targets
    Publication number: 20060137969
    Abstract: The present invention relates to a composite sputtering target comprising a plurality of bonded metal pieces. The composite sputtering target further comprises a bonded region between the metal pieces. The bonded region may comprise an inter-metallic region upon bonding. The composite sputter target of the present invention may be used in conjunction with an apparatus for sputtering alloy films on substrates.
    Type: Application
    Filed: December 29, 2004
    Publication date: June 29, 2006
    Inventors: Gerald Feldewerth, John Barnak, Michael Goldstein
  • High reflector tunable stress coating, such as for a MEMS mirror
    Patent number: 7057262
    Abstract: An optical device having a high reflector tunable stress coating includes a micro-electromechanical system (MEMS) platform, a mirror disposed on the MEMS platform, and a multiple layer coating disposed on the mirror. The multiple layer coating includes a layer of silver (Ag), a layer of silicon dioxide (SiO2) deposited on the layer of Ag, a layer of intrinsic silicon (Si) deposited on the layer of SiO2, and a layer of silicon oxynitride (SiOxNy) deposited on the layer of Si. The concentration of nitrogen is increased and/or decreased to tune the stress (e.g., tensile, none, compressive).
    Type: Grant
    Filed: February 18, 2004
    Date of Patent: June 6, 2006
    Assignee: Intel Corporation
    Inventor: Michael Goldstein
  • Method and apparatus for polarizing electromagnetic radiation
    Publication number: 20060103942
    Abstract: According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.
    Type: Application
    Filed: December 20, 2005
    Publication date: May 18, 2006
    Inventors: David Williams, James Kardach, Michael Goldstein
  • Active hardmask for lithographic patterning
    Publication number: 20060093972
    Abstract: In an implementation, energy reaching the lower surface of a photoresist may be redirected back into the photoresist material. This may be done by, for example, reflecting and/or fluorescing the energy from a hardmask provided on the wafer surface back into the photoresist.
    Type: Application
    Filed: December 2, 2005
    Publication date: May 4, 2006
    Inventors: Michael Goldstein, Manish Chandhok, Eric Panning, Robert Bristol, Bryan Rice
  • Dual hemispherical collectors
    Patent number: 7034320
    Abstract: A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a source to illuminate in a second hemisphere of the source; and a second surface shaped to reflect radiation in the second hemisphere of the source to an output plane.
    Type: Grant
    Filed: March 20, 2003
    Date of Patent: April 25, 2006
    Assignee: Intel Corporation
    Inventors: Peter J. Silverman, Michael Goldstein