Abstract: The invention relates to a process for obtaining a thin film from a substrate, the film being delimited in the substrate by ionic implantation and by heat treatment inducing a fracture line along which the film can be separated from the rest of the substrate. A particular area, for example composed of a gate oxide layer (15) and the channel area (19) of a MOS transistor (12) created in the substrate region (10) intended to form the tin film (20), this area may be protected by ionic implantation by masking using the transistor gate (16), which does not prevent the fracture from occurring provided that the width of the area does not exceed a limiting dimension determined for the material forming the substrate.

Abstract: The invention relates to a method of manufacturing a thin film of solid material comprising at least the following steps: a step of ionic implantation through one face of a substrate of said solid materials using ions capable of creating in the volume of the substrate and at a depth close to the mean depth of penetration of the ions, a layer of micro-cavities or micro-bubbles, this step being carried out at a particular temperature and for a particular length of time, an annealing step intended to bring the layer of micro-cavities or micro-bubbles to a particular temperature and for a particular length of time with the intention of obtaining cleavage of the substrate on both sides of the layer of micro-cavities or micro-bubbles. The annealing step is carried out to a thermal budget made in relation to the thermal budget of the ionic implantation step and possibly other thermal budgets inferred for other steps, in order to provide said cleavage of the substrate.

Abstract: A method for producing a micro- or nanostructure on a substrate. In a first step, one surface of a first wafer in crystalline material is placed in contact with one surface of a second wafer in crystalline material, such that crystalline lattices presented by the surfaces offer at least one mismatch parameter able to allow the formation of a lattice of crystalline defects and/or of a lattice of strains within a crystalline zone extending on either side of the interface of the two wafers, at least one of the lattices determining the micro- or nanostructure. Then, one of the two wafers is thinned to expose the lattice defects and/or the lattice strains on a substrate formed by the other wafer.

Abstract: The invention relates to a method of producing a thin layer of semiconductor material including:

Abstract: A process for separating at least two elements of a structure. The two elements are in contact with one another along an interface and are fixed to one another by interatomic bonds at their interface. An ion implantation is performed in order to introduce ions into the structure with an adequate energy for them to reach the interface and with an adequate dose to break the interatomic bonds. This brings about at the interface, the formation of a gaseous phase having an adequate pressure to permit the separation of the two elements.

Abstract: The invention relates to a method of producing a thin layer of semiconductor material including: a step of implanting ions through a flat face (2) of a semiconductor wafer in order to create a layer of microcavities, the ion dose being within a specific range in order to avoid the formation of blisters on the flat face, a thermal treatment step in order to achieve coalescence of the microcavities possibly, a step of creating at least one electronic component (5) in the thin layer (6), a separation step of separating the thin layer (6) from the rest (7) of the wafer.

Abstract: A method for making a thin film of solid material, including bombarding one face of a substrate of the solid material with at least one of rare gas ions and hydrogen gas ions so as to create a layer of microcavities seperating the substrate into two regions at a depth neighboring the average ion penetration depth, and heating the layer of microcavities to a temperature sufficient to bring about a separation between the two regions of the substrate. The solid material includes one of a dielectric material, a conducting material, a semi-insulating material, and an unorganized semiconducting material.

Abstract: Process for transfer of a microstructure (12) from an initial substrate (10) to a final substrate (32). The process includes the following steps in sequence:bonding between the initial substrate (10) and an intermediate substrate (24), the microstructure facing the intermediate substrate,formation of at least one layer (30) of bond material on at least one selected region (16) of the initial substrate including the microstructurebring the said selected region (16) into contact with the final substrate,treatment of the bond material in an area corresponding to the selected region (16), to increase the bond force,breaking the selected region (16) of the initial substrate, from the intermediate substrate (24).

Abstract: A method of obtaining a thin film from a substrate made of semiconductor material, the thin film including at least one element on one face of the substrate made of a material different from the semiconductor material, and conferring to the thin film a heterogeneous structure.

Abstract: A process for obtaining at least one wafer of semiconducting material, including the step of cutting an ingot of semiconducting material along a longitudinal plane of the ingot to obtain a wafer with large dimensions. The wafer obtained may be used to make a Semiconductor on Insulator type substrate, for example a Silicon On Insulator substrate.

Abstract: A thin layer of semiconductor material is produced by implanting ions through a flat face of a semiconductor wafer in order to create a layer of microcavities, the ion dose being within a specific range in order to avoid the formation of blisters on the flat face. The resulting wafer is then subjected to a thermal treatment step in order to achieve coalescence of the microcavities. During or following the thermal treatment, a thin layer is separated from the rest of the wafer by application of mechanical force.

Abstract: A thin film is transferred from an initial substrate onto a final substrate. The process includes the following successive stages: joining of the thin film (112) onto a handle substrate (120) comprising a cleavage zone, elimination of the initial substrate, joining of the thin film (112) with a final substrate (132), and cleavage of the handle substrate (120) following the cleavage zone. The cleavage zone includes a film of micro-bubbles formed by ion implantation. The invention has, in particular, applications in the fabrication of three-dimensional structures of integrated circuits.

Abstract: A method for inserting a gaseous phase in a sealed cavity including inserting ions in the sealed cavity by ion implantation carried out at an energy level sufficient for the inserted ions to reach the sealed cavity and to form a gas having a gas pressure which deforms a wall of the sealed cavity. The ion implantation is performed using hydrogen ions, or a rare gas ions, such as helium ions. The method may be implemented into a method for manufacturing a structure with a soft electrical contact, a capacitor, or a matrix of pressure sensors.

Abstract: A process for the production of a structure having a thin semiconductor film (2) adhering to a target substrate (24). The process which is applicable to the production of electronic components comprises the steps ofa) producing a first structure having a thin semiconductor film (2) on a first substrate, andb) transferring of the thin film (2) from the first substrate to the target substrate.

Abstract: This process for producing a structure incorporating a substrate (2), a thin surface film (16) made from a non-conducting material joined to one face (1) of the substrate (2), said substrate (2) having cavities (10) flush with said face (1), comprises the following successive stages:etching cavities (10) in one face (1) of a substrate, the cavities having in the plane of the substrate face at least one dimension which is a function of the thickness of the surface film, in order to correctly secure the latter,joining a non-conducting material wafer (12) to the face (1) of the substrate (2),thinning the wafer (12) to obtain the thin surface film.

Abstract: The process includes the following steps: implantation of ions (12) in a semi-conducting wafer (10), to create a cleavage layer of gaseous microblisters (16) in the wafer, heat treatment of the wafer, in order to cause separation of a surface layer (18) from the rest of the wafer, along the layer of microblisters. According to the invention, the implantation is carried out at a depth equal to or greater than a given minimum depth so that the thin film obtained is rigid, and so that the heat treatment can release it.

Abstract: A substrate for integrated components including a support structure and a thin non-conductive film. An intermediate film is placed between the support structure and the thin non-conductive film. The intermediate film is a sacrificial film which may be removed chemically. By doing so, the thin non-conductive film may be liberated from the support structure. The intermediate film is traversed by channels which carry the chemicals for removing the sacrificial film. The channels may form a grid on the surface of the intermediate film.

Abstract: Method for laying at least one semiconductive plate with a specific thickness and size on a support, wherein it includes the following stages: the bombardment by ions of one face of a semiconductive substrate so as to create there a film of gaseous microbubbles along a splitting plane of the substrate, the ion implantation energy being provided so as to obtain the film of gaseous microbubbles at a depth corresponding to the specific thickness of the semiconductive plate, the ions being selected from rare gas or hydrogen gas ions, the rendering integral on the face of the substrate of the support, illuminating by a laser beam of the zone of the face of the substrate corresponding to the plate to be placed through the support, the luminous energy transmitted by the beam through the support needing to be sufficient so as to induce in the corresponding region of the film of gaseous microbubbles a temperature sufficient to cause splitting of the plate of the support and provoke increasing of the adherence of the p

Abstract: The invention relates to a process for the production of a relief structure on a semiconductor material support, by subjecting a wafer of semiconductor material having a planar face to three steps. The first step includes implantation by bombardment of the planar face of the wafer by means of ions, creating gas microbubble areas in the volume of the wafer, each area being positioned with respect to the planar face at a depth dependent on the implantation energy of the ions received by said area, so that all the implanted areas define a profile in the volume of the wafer. The profile defines, on the side of the planar face, an upper region of the wafer constituting a thin film and, on the side opposite to the planar face, a lower region constituting the mass of the substrate. The second step includes joining the planar face of the wafer to a stiffener constituted by at least one rigid material layer.

Abstract: Process for the preparation of thin moncrystalline or polycrystalline semiconductor material films, characterized in that it comprises subjecting a semiconductor material wafer having a planar face to the three following stages: a first stage of implantation by bombardment (2) of the face (4) of the said wafer (1) by means of ions creating in the volume of said wafer a layer (3) of gaseous microbubbles defining in the volume of said wafer a lower region (6) constituting the mass of the substrate and an upper region (5) constituting the thin film, a second stage of intimately contacting the planar face (4) of said wafer with a stiffener (7) constituted by at least one rigid material layer, a third stage of heat treating the assembly of said wafer (1) and said stiffener (7) at a temperature above that at which the ion bombardment (2) was carried out and sufficient to create by a crystalline rearrangement effect in said wafer (1) and a pressure effect in the said microbubbles, a separation between the thin film