Patents by Inventor Minoru Honda

Minoru Honda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10968513
    Abstract: Provided is a plasma film-firming apparatus including: a chamber configured to accommodate a substrate therein; a substrate pedestal configured to disposed the substrate thereon within the chamber; a gas supply mechanism configured to supply a gas including a film-forming gas into the chamber; an exhaust mechanism configured to exhaust an inside of the chamber; and a plasma generating unit configured to generate plasma in the chamber. The substrate pedestal includes a pedestal body having a smaller diameter than that of the substrate and including a placement surface, and an annular adjustment member disposed outside the pedestal body. The adjustment member is replaceably installed. A plurality of adjustment members having various steps are provided at a position outside the substrate as the adjustment member, and among the plurality of adjustment members, an adjustment member is selected and used according to a processing condition of a plasma processing.
    Type: Grant
    Filed: June 20, 2017
    Date of Patent: April 6, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Masashi Imanaka, Toshio Nakanishi, Minoru Honda, Koji Kotani
  • Patent number: 10576215
    Abstract: A pre-filled syringe includes: a cylindrical container, a front end-side gasket; a rear end-side gasket; an intermediate gasket partitioning an inside of the cylindrical container into a front chamber and a rear chamber; a plunger; a medical drug contained in the front chamber, and a liquid drug contained in the rear chamber. In a state where the plunger is pushed in, a bypass portion included in the cylindrical container faces a groove portion provided in the intermediate gasket, thereby allowing communication between the front chamber and the rear chamber therethrough, so that the medical drug and the liquid drug are mixed, and a liquid mixture is discharged. The pre-filled syringe further includes a movement limiting mechanism for limiting movement of the plunger such that a tail end of the rear end-side gasket does not reach the bypass portion.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: March 3, 2020
    Assignee: NIPRO CORPORATION
    Inventors: Mitsuru Hasegawa, Minoru Honda
  • Patent number: 10190217
    Abstract: Disclosed is a plasma film-forming method including: accommodating a workpiece in a chamber; supplying a film-forming gas into the chamber; generating plasma within the chamber; and exciting the film-forming gas by the plasma to form a predetermined film on the workpiece. Helium gas is supplied as a plasma generating gas into the chamber together with the film-forming gas to generate plasma containing the helium gas in the chamber.
    Type: Grant
    Filed: June 20, 2017
    Date of Patent: January 29, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Minoru Honda, Toshio Nakanishi, Masashi Imanaka, Cheonsoo Han
  • Publication number: 20170369996
    Abstract: Provided is a plasma film-firming apparatus including: a chamber configured to accommodate a substrate therein; a substrate pedestal configured to disposed the substrate thereon within the chamber; a gas supply mechanism configured to supply a gas including a film-forming gas into the chamber; an exhaust mechanism configured to exhaust an inside of the chamber; and a plasma generating unit configured to generate plasma in the chamber. The substrate pedestal includes a pedestal body having a smaller diameter than that of the substrate and including a placement surface, and an annular adjustment member disposed outside the pedestal body. The adjustment member is replaceably installed. A plurality of adjustment members having various steps are provided at a position outside the substrate as the adjustment member, and among the plurality of adjustment members, an adjustment member is selected and used according to a processing condition of a plasma processing.
    Type: Application
    Filed: June 20, 2017
    Publication date: December 28, 2017
    Inventors: Masashi Imanaka, Toshio Nakanishi, Minoru Honda, Koji Kotani
  • Publication number: 20170370000
    Abstract: Disclosed is a plasma film-forming method including: accommodating a workpiece in a chamber; supplying a film-forming gas into the chamber; generating plasma within the chamber; and exciting the film-forming gas by the plasma to form a predetermined film on the workpiece. Helium gas is supplied as a plasma generating gas into the chamber together with the film-forming gas to generate plasma containing the helium gas in the chamber.
    Type: Application
    Filed: June 20, 2017
    Publication date: December 28, 2017
    Inventors: Minoru Honda, Toshio Nakanishi, Masashi Imanaka, Cheonsoo Han
  • Patent number: 9779936
    Abstract: Disclosed is a plasma processing method including: growing a polycrystalline silicon layer on a processing target base body; and exposing the polycrystalline silicon layer to hydrogen radicals by supplying a processing gas containing hydrogen into a processing container that accommodates the processing target base body including the polycrystalline silicon layer grown thereon and radiating microwaves within the processing container to generate the hydrogen radicals.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: October 3, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Daisuke Katayama, Minoru Honda, Toshio Nakanishi
  • Publication number: 20170000954
    Abstract: A pre-filled syringe includes: a cylindrical container, a front end-side gasket; a rear end-side gasket; an intermediate gasket partitioning an inside of the cylindrical container into a front chamber and a rear chamber; a plunger; a medical drug contained in the front chamber, and a liquid drug contained in the rear chamber. In the state where the plunger is pushed in, a bypass portion included in the cylindrical container faces a groove portion provided in the intermediate gasket, thereby allowing communication between the front chamber and the rear chamber therethrough, so that the medical drug and the liquid drug are mixed, and a liquid mixture is discharged. The pre-filled syringe further includes a movement limiting mechanism for limiting movement of the plunger such that a tail end of the rear end-side gasket does not reach the bypass portion.
    Type: Application
    Filed: November 5, 2014
    Publication date: January 5, 2017
    Applicant: NIPRO CORPORATION
    Inventors: Mitsuru HASEGAWA, Minoru HONDA
  • Patent number: 9278049
    Abstract: There is provided a method for manufacturing a double-chamber container including an agent storage chamber and a solution storage chamber separated from each other by a weak seal portion, the method including the steps of: preparing a first sheet-like member including a first agent storage chamber forming portion and a first solution storage chamber forming portion whose one sides are joined to each other, as well as a second sheet-like member including a second agent storage chamber forming portion and a second solution storage chamber forming portion whose one sides are joined to each other; and forming the agent storage chamber and the solution storage chamber by joining the first and the second sheet-like members. The weak seal portion is formed by joining the one side of the first medical solution storage chamber forming portion and the one side of the second medical solution storage chamber forming portion.
    Type: Grant
    Filed: February 28, 2012
    Date of Patent: March 8, 2016
    Assignee: NIPRO CORPORATION
    Inventor: Minoru Honda
  • Patent number: 9239091
    Abstract: A sealing device for sealing between a tube member and an axial member movably inserted into the tube member includes a dust seal held on an opening end part of the tube member and including an annular dust seal lip held in sliding contact with the outer peripheral surface of the axial member, and a scraper arranged at an inner side of the dust seal and including an annular lip portion slidably pressed into contact with the outer peripheral surface of the axial member. The hardness of the lip portion is set to be higher than that of the dust seal lip.
    Type: Grant
    Filed: October 17, 2012
    Date of Patent: January 19, 2016
    Assignee: KAYABA INDUSTRY CO., LTD.
    Inventors: Kiyoshi Kani, Minoru Honda, Makoto Suzuki, Naohide Takimoto
  • Publication number: 20150245938
    Abstract: A foot health orthosis to be fitted with a toe includes a flexible ring-like retainer which can be fitted with the toe, and a cushion portion formed on a part of the retainer, which is thicker than the retainer and allowed to be held on a reverse surface of the toe in the fitted state.
    Type: Application
    Filed: February 2, 2015
    Publication date: September 3, 2015
    Inventor: Minoru HONDA
  • Publication number: 20150162193
    Abstract: Disclosed is a plasma processing method including: growing a polycrystalline silicon layer on a processing target base body; and exposing the polycrystalline silicon layer to hydrogen radicals by supplying a processing gas containing hydrogen into a processing container that accommodates the processing target base body including the polycrystalline silicon layer grown thereon and radiating microwaves within the processing container to generate the hydrogen radicals.
    Type: Application
    Filed: April 17, 2013
    Publication date: June 11, 2015
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Daisuke Katayama, Minoru Honda, Toshio Nakanishi
  • Publication number: 20150093886
    Abstract: A plasma processing method of one embodiment of the present invention is disclosed for growing a polycrystalline silicon layer on a base material to be processed. The plasma processing method includes: (a) a step for preparing, in a processing container, the base material to be processed; and (b) a step for growing the polycrystalline silicon layer on the base material by introducing microwaves for plasma excitation into the processing container, and introducing a silicon-containing raw material gas into the processing container.
    Type: Application
    Filed: April 23, 2013
    Publication date: April 2, 2015
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Minoru Honda, Toshio Nakanishi, Daisuke Katayama
  • Publication number: 20140216872
    Abstract: A sealing device for sealing between a tube member and an axial member movably inserted into the tube member includes a dust seal held on an opening end part of the tube member and including an annular dust seal lip held in sliding contact with the outer peripheral surface of the axial member, and a scraper arranged at an inner side of the dust seal and including an annular lip portion slidably pressed into contact with the outer peripheral surface of the axial member. The hardness of the lip portion is set to be higher than that of the dust seal lip.
    Type: Application
    Filed: October 17, 2012
    Publication date: August 7, 2014
    Inventors: Kiyoshi Kani, Minoru Honda, Makoto Suzuki, Naohide Takimoto
  • Publication number: 20130334079
    Abstract: There is provided a method for manufacturing a double-chamber container including an agent storage chamber and a solution storage chamber separated from each other by a weak seal portion, the method including the steps of: preparing a first sheet-like member including a first agent storage chamber forming portion and a first solution storage chamber forming portion whose one sides are joined to each other, as well as a second sheet-like member including a second agent storage chamber forming portion and a second solution storage chamber forming portion whose one sides are joined to each other; and forming the agent storage chamber and the solution storage chamber by joining the first and the second sheet-like members. The weak seal portion is formed by joining the one side of the first medical solution storage chamber forming portion and the one side of the second medical solution storage chamber forming portion.
    Type: Application
    Filed: February 28, 2012
    Publication date: December 19, 2013
    Applicant: NIPRO CORPORATION
    Inventor: Minoru Honda
  • Publication number: 20120315745
    Abstract: A high-quality crystalline silicon film can be formed at a high film forming rate by performing a plasma CVD process. In a crystalline silicon film forming method for forming a crystalline silicon film on a surface of a processing target object by using a plasma CVD apparatus for introducing microwave into a processing chamber through a planar antenna having a multiple number of holes and generating plasma, the crystalline silicon film forming method includes generating plasma by exciting a film forming gas containing a silicon compound represented as SinH2n+2 (n is equal to or larger than 2) by the microwave; and depositing a crystalline silicon film on the surface of the processing target substrate by performing the plasma CVD process with the plasma.
    Type: Application
    Filed: September 28, 2010
    Publication date: December 13, 2012
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Daisuke Katayama, Minoru Honda, Masayuki Kohno, Toshio Nakanishi
  • Patent number: 8308847
    Abstract: Provided is a filter for removing a sulfur-containing-gas (1), which removes the sulfur-containing-gas by being brought into contact with the sulfur-containing-gas in a gas flow path, the filter including a former filter (11) disposed on an upstream side of the gas flow path, and a latter filter (12) disposed on a downstream side of the gas flow path, wherein the former filter (11) includes a first material for removing a sulfur-containing-gas, the first material including a porous support, and iodine which is supported on the porous support, and is produced by catalytic pyrolysis of ammonium iodide at a thermal decomposition ratio of 80% or more by use of the porous support as a catalyst, and the latter filter (12) includes a second material for removing a sulfur-containing-gas, the second material including an activated carbon fiber, and an alkali component which is supported on the activated carbon fiber.
    Type: Grant
    Filed: January 24, 2008
    Date of Patent: November 13, 2012
    Assignee: Toyota Boshoku Kabushiki Kaisha
    Inventors: Kazuhiro Fukumoto, Minoru Takahara, Kenichirou Suzuki, Nobuhiko Nakagaki, Yasunari Arai, Minoru Honda
  • Patent number: D760893
    Type: Grant
    Filed: June 2, 2015
    Date of Patent: July 5, 2016
    Assignee: NIPRO CORPORATION
    Inventors: Minoru Honda, Mitsuru Hasegawa
  • Patent number: D777323
    Type: Grant
    Filed: January 23, 2015
    Date of Patent: January 24, 2017
    Assignee: NIPRO CORPORATION
    Inventors: Minoru Honda, Hiroaki Sano
  • Patent number: D914876
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: March 30, 2021
    Inventors: Yukihiro Yabe, Minoru Honda, Masanobu Iwasa
  • Patent number: D919803
    Type: Grant
    Filed: January 27, 2021
    Date of Patent: May 18, 2021
    Assignee: NIPRO CORPORATION
    Inventors: Yukihiro Yabe, Minoru Honda, Masanobu Iwasa