Abstract: Installed in a vacuum chamber is a mounting table for supporting semiconductor wafer, which is a substrate to be treated, with an electron beam irradiation mechanism mounted on the ceiling of the vacuum chamber for generating electron beams. The mounting table is adapted to be vertically moved by a lifting/lowering device, allowing the distance between the electron beam irradiating mechanism and the semiconductor wafer to be set at a desired value. This makes it possible to perform a uniform satisfactory treatment over the entire surface of the substrate to be treated.

Abstract: A surface processing apparatus which enables the electron beam energy to be reduced with a simplified construction. A wafer W as an object to be processed is placed in a processing chamber. The wafer is mounted on a mounting stage inside the processing chamber. An electron beam irradiating device is provided on the processing chamber such as to face the mounting stage and irradiates at least one electron beam toward the wafer. A self-generated electric field generator is provided between the electron beam irradiating device and the mounting stage and generates at least one self-generated electric field.

Abstract: A multi-layered medical container formed by a multi-layered film, in which an innermost layer is a layer comprising a cyclic polyolefin or a polymer blend containing the cyclic polyolefin, and a layer, which is adhered to the above-described layer, having a linear polyolefin or polyamide is provided. Also, a multi-layered medical plural chamber container which includes a body divided by a peelable seal portion into a medical liquid-containing chamber that stores the medical liquid and a medicament-containing chamber that stores the medicament is provided.

Abstract: An evaporative fuel adsorbent 32, which adsorbs evaporative fuel, is positioned substantially parallel to a sidewall surface 30 of a surge tank 22. A retention member 34 is positioned between the sidewall surface 22 and evaporative fuel adsorbent 32 to prevent oil, which runs down on the sidewall surface 22, from adhering to the evaporative fuel adsorbent 32. The evaporative fuel adsorbent 32 is mounted on the sidewall surface 30 of the surge tank 22 via the retention member 34.

Abstract: There is provided a method for reforming laminated films, which simultaneously reforms a plurality of laminated films by irradiating electron beams on the laminated films. The method for reforming laminated films includes the steps of forming a lower film by coating a first low dielectric material in liquid form on a surface of a substrate; forming an upper film by coating a second low dielectric material in liquid form on the lower film; and irradiating electron beams on the lower and upper film. A laminated film manufacturing system includes a mounting table for mounting thereon a substrate on which the laminated films are formed; and an electron beam unit having a plurality of electron beam tubes for irradiating electron beams on the laminated films to thereby simultaneously reform the films.

Abstract: In a film reforming method for reforming a film layer to be reformed by irradiating electron beams thereon, the electron beams are irradiated in a state where the film layer is cooled. Further, in a slimming amount controlling method for controlling a slimming amount of a resist film layer, the slimming amount thereof is controlled by the irradiation amount of electron beams irradiated thereon in a state where the resist film layer having a specified opening dimension is cooled. Furthermore, in a film reforming apparatus including a mounting unit for mounting thereon an object to be processed and an electron beam irradiating unit for irradiating electron beams on the object disposed on the mounting unit to thereby reform a film layer to be reformed, formed on an object, the electron beams are irradiated from the electron beam irradiating unit in a state where the film layer is cooled by a cooling unit provided in the mounting unit.

Abstract: A fuel vapor adsorbing device (10, 60, 70, 70?, 80) for adsorbing residual fuel vapors that remain in an intake conduit (1, 2, 3, 4) of an induction system of an internal combustion engine when the internal combustion engine is stopped may include an adsorbing member (40, 40?) that is constructed to adsorb the residual fuel vapors and is disposed along an inner wall surface of the intake conduit. The adsorbing member is arranged and constructed to form a supplemental intake path (T, T?, T??) between the adsorbing member and the inner wall surface of the intake conduit, so that intake air of the engine can flow through the supplemental intake path.

Abstract: A processing method according to the present invention coats a polar liquid film or forms an inorganic film on a surface of an organic film formed on a substrate as a protective film. The processing method comprises a modifying step of curing an organic film by irradiating the organic film with electron beams by means of an electron-beam irradiation device in a rare gas atmosphere, and an applying step of applying a polar liquid to the modified surface of the organic film or an film forming step of forming an inorganic film on the organic film. The organic film is cured and affinity for the polar liquid or the inorganic film is imparted to the organic film.

Abstract: The invention provides a method for manufacturing a semiconductor device with reduced dishing and erosion. In this method for manufacturing a semiconductor device, the convex/concave pattern is planarized by relatively moving a substrate having the convex/concave pattern on the surface and a polishing tool with pressing the convex/concave surface of the substrate on the polishing tool. The polishing tool is provided with a grindstone 10 having a plurality of polygonal segments 20, which comprises abrasive 23 that is bonded together with resin 24 and contains pores 22. The polygonal segments are arranged so that corners of three or more polygonal segments are not located near each other.

Abstract: Installed in a vacuum chamber is a mounting table for supporting semiconductor wafer, which is a substrate to be treated, with an electron beam irradiation mechanism mounted on the ceiling of the vacuum chamber for generating electron beams. The mounting table is adapted to be vertically moved by a lifting/lowering device, allowing the distance between the electron beam irradiating mechanism and the semiconductor wafer to be set at a desired value. This makes it possible to perform a uniform satisfactory treatment over the entire surface of the substrate to be treated.

Abstract: An organic material film formed on a surface of an object to be processed is cured by electron beams irradiated thereon through a hydrocarbon radical generating gas. By employing the electron beams and the hydrocarbon radical generating gas, a deterioration of a k value of the organic material film and a reduction of a chemical resistance thereof are suppressed.

Abstract: A surface processing apparatus which enables the electron beam energy to be reduced with a simplified construction. A wafer W as an object to be processed is placed in a processing chamber. The wafer is mounted on a mounting stage inside the processing chamber. An electron beam irradiating device is provided on the processing chamber such as to face the mounting stage and irradiates at least one electron beam toward the wafer. A self-generated electric field generator is provided between the electron beam irradiating device and the mounting stage and generates at least one self-generated electric field.

Abstract: A shut off valve is provided in an intake line farther upstream than a throttle valve of the intake passage and farther downstream than an air cleaner. This shut off valve is opened by a signal or the like from an ECU when an engine is operating. Further, the shut off valve closes when the engine is stopped so as to suppress evaporative fuel inside the intake passage from flowing outside through the air cleaner. The evaporative fuel trapped inside the intake passage passes through a bypass passage that provides communication between the intake passage and the canister, and is then adsorbed with an adsorbent in the canister. A blow-by passage is also connected to the intake passage that is closed off by the shut off valve. Because the blow-by passage is closed off by a blow-by valve, which is closed during normal operation when the engine is stopped, sticking of the shut off valve and the throttle valve and the like due to the inflow of blow-by gas into the intake passage is inhibited.

Abstract: A medicine bag, which includes a bag body having a medicine storage chamber that stores a medicine in such a way that the medicine is visually confirmed through a light-transmission portion provided in at least one part of the bag body, the bag body having a weak seal portion that divides the medicine storage chamber into a plurality of division spaces, and the sealing of the weak seal portion adjacent to a specific division space being removed by increasing the internal pressure of that division space, including: a cover sheet which is peelably attached to the bag body; and a requisitely-used portion which is used in the process shortly before the medicine is administered, in which the cover sheet includes: a light-shielding portion which shields from the light the medicine stored in at least one division space by covering a predetermined part of the light-transmission portion; and a continuously-formed portion which is continuously formed in the light-shielding portion and is placed so that the requisitely-

Abstract: In a thin film processing method and system, a film thickness is regulated by using electron beams irradiated from a plurality of electron beam tubes onto a film of varying thickness formed on an object to be processed, wherein the output powers or beam irradiation times of the electron beam tubes are individually controlled according to a distribution of the thickness. In the method and system, electric charges charged in a film of an object to be processed can be removed also.

Abstract: A filter portion of a filter includes a plurality of bag-like members. The bag-like members are formed in a container shape having an opening and disposed with intervals therebetween. The periphery of the opening of each bag-like member is supported by a supporting member, and the bag-like members are mutually connected by the supporting member. Consequently, the strength of the filter portion comprising the bag-like members is improved.

Abstract: An absorbent, such as, for example, an active carbon, is provided in an intake air passage, for example, in an air cleaner, to efficiently adsorb fuel vapor. To ensure that fuel vapor adsorbed into the intake air passage can be efficiently desorbed even when there is only a small amount of the intake air, an intake throttle valve is provided upstream of the adsorbent and an opening of the intake throttle valve is throttled so as to decompress an area near the adsorbent. Desorption of fuel vapor also can be efficiently promoted by using a heater to directly heat the adsorbent in the intake air passage or by heating the intake air to indirectly heat the adsorbent.

Abstract: A sheet-like adsorption filter formed by sandwiching particulate activated carbon with heat-resistant nets and non-woven fabric sheets that have a percentage of void of 90% or higher, is disposed at an internal combustion engine side of a filter element.

Abstract: A shut valve is provided in an intake line farther upstream than a throttle valve of the intake line and farther downstream than an air cleaner. This shut valve is opened by a signal or the like from an ECU when an engine is operating. Further, the shut valve closes when the engine is stopped so as to suppress evaporative fuel inside the intake line from flowing outside through the air cleaner. The evaporative fuel trapped inside the intake line passes through a bypass passage that provides communication between the intake line and the canister, and is then adsorbed with an adsorbent in the canister. A blow-by line is also connected to the intake line that is closed off by the shut valve. Because the blow-by line is closed off by a blow-by valve, which is closed during normal operation, when the engine is stopped, sticking of the shut valve and the throttle valve and the like due to the inflow of blow-by gas into the intake line is inhibited.

Abstract: A bag-shaped drug container comprises a bag-shaped container body 1 made of a flexible film, and a mouth 2 provided at one end of the container body 1. The mouth 2 is provided on a side of an open end thereof with a Luer locking means 21 to liquid-tightly connect it with a tip of a syringe, and closed by a closing means such as cap 3 or a male Luer portion.