Abstract: A method of forming a tungsten film having low resistance is provided. The method includes forming a discontinuous film containing a metal on a substrate; and forming the tungsten film on the substrate on which the discontinuous film is formed. In the forming of the discontinuous film, a first source gas and a nitriding gas are supplied onto the substrate alternately along with, for example, a carrier gas. In the forming of the tungsten film, a second source gas and a reducing gas are supplied onto the substrate alternately along with, for example, a carrier gas.

Abstract: A semiconductor light-emitting device includes a semiconductor light-emitting element that emits ultraviolet light, a package substrate mounting the semiconductor light-emitting element, a sealing resin that seals the semiconductor light-emitting element, and a coat film further provided between a light output surface of the semiconductor light-emitting element and the sealing resin. The refractive index of the coat film and the refractive index of the sealing resin are smaller than the refractive index of a member constituting the light output surface of the semiconductor light-emitting element, and the refractive index difference between the coat film and the sealing resin is not more than 0.15.

Abstract: A control apparatus for controlling a sound output apparatus is provided. The control apparatus includes a specifying unit configured to specify an aspect of sound that is being generated in a space, and a control unit configured to control the sound output apparatus so as to output sound information in an aspect that is different from the specified aspect while sound is being generated in the space.

Abstract: Embodiments provide point-of-use blending of photoresist rinse solutions for patterned photoresists. Disclosed methods and systems form different mitigation solutions for multiple different photoresists through point-of-use variable blending of a mitigation solution with deionized water and/or other chemistries to adjust the formulation of the solution just prior to dispense within a process chamber. For one example embodiment, different surfactant rinse solutions are used for different photoresists, such as different extreme ultraviolet photoresists. In addition, the level of reactive components, the level of nonreactive components, or both within a mitigation solution can be adjusted using this point-of-use blending to provide an adjusted mitigation solution. The ability to make point-of-use adjustments to the solution chemistry just before dispense on a microelectronic workpiece, such as a semiconductor wafer, improves interactions between the adjusted mitigation solution and the patterned photoresist.

Abstract: A vehicle includes an electric motor, a storage battery which supplies power to the electric motor, and a power line which configures a power transmission path between the electric motor and the storage battery. The power line is arranged to extend in a front-rear direction of the vehicle along a bottom surface of the vehicle. A part of the power line is covered by a protection member from below with a gap between the power line and the bottom surface. A fixing point of the protection member to the bottom surface is positioned on a front side of the protection member and on an outer side of the protection member in a vehicle width direction.

Abstract: There is provided a tungsten film forming method which includes: forming a first tungsten film on a substrate; and forming a second tungsten film on the first tungsten film. The forming a first tungsten film includes alternately supplying a first raw material gas containing tungsten and a diborane gas together with a first carrier gas to the substrate. The forming a second tungsten film includes alternately supplying a second raw material gas containing tungsten and a hydrogen gas together with a second carrier gas to the substrate on which the first tungsten film is formed. The first carrier gas is a nitrogen gas. The second carrier gas includes at least one kind of nobel gas and has the noble gas at a flow rate of 70% or more with respect to a total flow rate of the second carrier gas.

Abstract: A vehicle includes an electric motor, a storage battery which supplies power to the electric motor, and a power line which configures a power transmission path between the electric motor and the storage battery. The power line is arranged to extend in a front-rear direction of the vehicle along a bottom surface of the vehicle. A part of the power line is covered by a protection member from below with a gap between the power line and the bottom surface. A fixing point of the protection member to the bottom surface is positioned on a front side of the protection member and on an outer side of the protection member in a vehicle width direction.

Abstract: A control apparatus for controlling a sound output apparatus is provided. The control apparatus includes a specifying unit configured to specify an aspect of sound that is being generated in a space, and a control unit configured to control the sound output apparatus so as to output sound information in an aspect that is different from the specified aspect while sound is being generated in the space.

Abstract: An information presentation system comprises: a determining unit that determines a recognition level indicating a degree of a user's recognition of a spot; and a presentation unit that changes a type of information about the spot to be presented to the user, according to the recognition level, and presents the information.

Abstract: A control device for controlling a device provided in a vehicle is provided. The device includes a starting unit capable of starting the device, an identification unit configured to identify a place of stay where an occupant of the vehicle spends time after getting out of the vehicle, an estimation unit configured to estimate a stay period of the occupant at the place of stay, and a determination unit configured to determine, based on the stay period, a scheduled time at which the starting unit is to start the device before the occupant gets into the vehicle.

Abstract: Provided are an optical waveguide capable of propagating light, and a position sensor and an optical circuit board including the same. The optical waveguide includes cores each partially formed in an S-shape. The S-shaped portion includes a first curved portion upstream as seen in the direction of light propagation, and a second curved portion downstream as seen in the direction of light propagation and curved in a direction opposite to the first curved portion. The first curved portion and the second curved portion are connected to each other via a straight portion having a length in the range of from 0 mm to 30 mm. One of the width of the exit of the first curved portion and the width of the entrance of the second curved portion is smaller than the width of a core portion upstream of the S-shaped portion.

Abstract: An object of the invention is to provide a hot and cold water mixing device for reducing degradation in the measurement accuracy of a flowmeter. In the device according to the invention, the flowmeter is disposed in one of a hot water supply path and a cold water supply path, having a higher flow rate. At least first and second temperature sensors are individually disposed in at least two of the hot and cold water supply paths and a mixed water path. A hot and cold water adjustment unit adjusts a mixing volume of hot water and cold water based on measurement values of the flowmeter disposed in one of the flow paths having a higher flow rate, a mixed water path flowmeter and at least the first and second temperature sensors.

Abstract: A film forming method for forming a coating film by applying a coating solution onto a substrate having projections and recesses formed on a surface thereof by a predetermined pattern, includes: applying the coating solution onto the surface of the substrate to form a thick film having a depth of projections and recesses on a surface of the film of a predetermined value or less and having a film thickness larger than a target film thickness of the coating film; and removing the surface of the thick film to form the coating film having the target film thickness.

Abstract: There is provided an opto-electric hybrid module in which an optical element of an optical element unit and a core of an optical waveguide of an opto-electric hybrid unit are aligned with each other simply and precisely. This opto-electric hybrid module includes: a connector including an optical element; and an opto-electric hybrid unit including an electric circuit board and an optical waveguide which are stacked together. The connector includes aligning protrusions positioned and formed in a predetermined position with respect to the optical element. The opto-electric hybrid unit 2 includes recesses for fitting engagement with the aligning protrusion, the recesses being positioned and formed in a predetermined position with respect to an end surface of a core of the optical waveguide.

Abstract: There is provided a tungsten film forming method which includes: forming a first tungsten film on a substrate; and forming a second tungsten film on the first tungsten film. The forming a first tungsten film includes alternately supplying a first raw material gas containing tungsten and a diborane gas together with a first carrier gas to the substrate. The forming a second tungsten film includes alternately supplying a second raw material gas containing tungsten and a hydrogen gas together with a second carrier gas to the substrate on which the first tungsten film is formed. The first carrier gas is a nitrogen gas. The second carrier gas includes at least one kind of inert gas and has a noble gas at a flow rate of 70% or more with respect to a total flow rate of the second carrier gas.

Abstract: A method of forming a tungsten film having low resistance is provided. The method includes forming a discontinuous film containing a metal on a substrate; and forming the tungsten film on the substrate on which the discontinuous film is formed. In the forming of the discontinuous film, a first source gas and a nitriding gas are supplied onto the substrate alternately along with, for example, a carrier gas. In the forming of the tungsten film, a second source gas and a reducing gas are supplied onto the substrate alternately along with, for example, a carrier gas.

Abstract: There are provided an optical waveguide including cores arranged in a lattice form in which intersection loss is further reduced where, at each intersection of the cores including first and second cores extending in two intersecting directions, the first core is separated by the second core and a gap is formed between the second core and each of the end portions of the first core, and a position sensor using the same. The position sensor includes an optical waveguide including cores arranged in a lattice form. At each intersection of the cores including first and second cores extending in two intersecting directions, the first core is separated by the second core, and a gap is formed between the second core and each of the end portions of the first core. The width of the end portions of the first core is greater than the width of the second core.

Abstract: Provided are an optical waveguide capable of propagating light, and a position sensor and an optical circuit board including the same. The optical waveguide includes cores each partially formed in an S-shape. The S-shaped portion includes a first curved portion upstream as seen in the direction of light propagation, and a second curved portion downstream as seen in the direction of light propagation and curved in a direction opposite to the first curved portion. The first curved portion and the second curved portion are connected to each other via a straight portion having a length in the range of greater than 0 mm to 30 mm. One of the width of the exit of the first curved portion and the width of the entrance of the second curved portion is smaller than the width of a core portion upstream of the S-shaped portion.