Patents by Inventor Paul Farrar

Paul Farrar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7898062
    Abstract: A method for epitaxially forming a first semiconductor structure attached to a second semiconductor structure is provided. Devices and methods described include advantages such as reduced lattice mismatch at an epitaxial interface between two different semiconductor materials. One advantageous application of such an interface includes an electrical-optical communication structure. Methods such as deposition of layers at an elevated temperature provide easy formation of semiconductor structures with a modified lattice constant that permits an improved epitaxial interface.
    Type: Grant
    Filed: April 9, 2010
    Date of Patent: March 1, 2011
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7888744
    Abstract: In various method embodiments, a device region is defined in a semiconductor substrate and isolation regions are defined adjacent to the device region. The device region has a channel region, and the isolation regions have volumes. The volumes of the isolation regions are adjusted to provide the channel region with a desired strain. In various embodiments, adjusting the volumes of the isolation regions includes transforming the isolation regions from a crystalline region to an amorphous region to expand the volumes of the isolation regions and provide the channel region with a desired compressive strain. In various embodiments, adjusting the volumes of the isolation regions includes transforming the isolation regions from an amorphous region to a crystalline region to contract the volumes of the isolation regions to provide the channel region with a desired tensile strain. Other aspects and embodiments are provided herein.
    Type: Grant
    Filed: December 30, 2008
    Date of Patent: February 15, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Paul A. Farrar
  • Patent number: 7875529
    Abstract: Methods, devices, modules, and systems providing semiconductor devices in a stacked wafer system are described herein. One embodiment includes a first wafer for NMOS transistors in a CMOS architecture and a second wafer for PMOS transistors in the CMOS architecture, with the first wafer being bonded and electrically coupled to the second wafer to form at least one CMOS device. Another embodiment includes a number of DRAM capacitors formed on a first wafer and support circuitry associated with the DRAM capacitors formed on a second wafer, with the first wafer being bonded and electrically coupled to the second wafer to form a number of DRAM cells. Another embodiment includes a first wafer having a number of vertical transistors coupled to a data line and a second wafer having amplifier circuitry associated with the number of vertical transistors, with the first wafer being bonded and electrically coupled to the second wafer.
    Type: Grant
    Filed: October 5, 2007
    Date of Patent: January 25, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Paul A. Farrar, Arup Bhattacharyya, Hussein I. Hanafi, Warren M. Farnworth
  • Publication number: 20100271777
    Abstract: Methods and devices for multi-chip stacks are shown. A method is shown that assembles multiple chips into stacks by stacking wafers prior to dicing into individual chips. Methods shown provide removal of defective chips and their replacement during the assembly process to improve manufacturing yield.
    Type: Application
    Filed: July 9, 2010
    Publication date: October 28, 2010
    Inventor: Paul A. Farrar
  • Publication number: 20100237422
    Abstract: A method and device for reducing a dopant diffusion rate in a doped semiconductor region is provided. The methods and devices include selecting a plurality of dopant elements. Selection of a plurality of dopant elements includes selecting a first dopant element with a first atomic radius larger than a host matrix atomic radius and selecting a second dopant element with a second atomic radius smaller than a host matrix atomic radius. The methods and devices further include selecting amounts of each dopant element of the plurality of dopant elements wherein amounts and atomic radii of each of the plurality of dopant elements complement each other to reduce a host matrix lattice strain. The methods and devices further include introducing the plurality of dopant elements to a selected region of the host matrix and annealing the selected region of the host matrix.
    Type: Application
    Filed: May 28, 2010
    Publication date: September 23, 2010
    Inventors: Paul A. Farrar, Jerome M. Eldridge
  • Patent number: 7790603
    Abstract: A system and method for providing low dielectric constant insulators in integrated circuits is provided. One aspect of this disclosure relates to a method for forming an integrated circuit insulator. The method includes forming an insulating layer using a first structural material upon a substrate, the first structural material having sufficient mechanical characteristics to support metal during chemical-mechanical polishing (CMP). The method also includes depositing a metallic layer upon the insulating layer, the metallic layer adapted to be used as a wiring channel. The method further includes processing the metallic layer to form the wiring channel, where processing includes CMP. In addition, the method includes removing and replacing at least a portion of the first structural material with a second structural material, the second structural material having insufficient mechanical characteristics to support metal during CMP. Other aspects and embodiments are provided herein.
    Type: Grant
    Filed: March 18, 2009
    Date of Patent: September 7, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Publication number: 20100193838
    Abstract: A method for epitaxially forming a first semiconductor structure attached to a second semiconductor structure is provided. Devices and methods described include advantages such as reduced lattice mismatch at an epitaxial interface between two different semiconductor materials. One advantageous application of such an interface includes an electrical-optical communication structure. Methods such as deposition of layers at an elevated temperature provide easy formation of semiconductor structures with a modified lattice constant that permits an improved epitaxial interface.
    Type: Application
    Filed: April 9, 2010
    Publication date: August 5, 2010
    Inventor: Paul A. Farrar
  • Patent number: 7754532
    Abstract: Methods and devices for multi-chip stacks are shown. A method is shown that assembles multiple chips into stacks by stacking wafers prior to dicing into individual chips. Methods shown provide removal of defective chips and their replacement during the assembly process to improve manufacturing yield.
    Type: Grant
    Filed: October 19, 2006
    Date of Patent: July 13, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7750379
    Abstract: One aspect of this disclosure relates to an integrated circuit structure. An integrated circuit structure embodiment includes a substrate, a gate dielectric over the substrate, a carbon structure having a predetermined thickness in contact with and over the gate dielectric, and a layer of desired gate material for a transistor in contact with and over the carbon structure. The layer of desired gate material includes a predetermined thickness corresponding to the predetermined thickness of the carbon structure to support a metal substitution process to replace the carbon structure with the desired gate material. Other aspects and embodiments are provided herein.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: July 6, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Paul A. Farrar, Kie Y. Ahn
  • Patent number: 7745934
    Abstract: Structures are provided that include a conducting layer disposed on a layered arrangement of a diffusion barrier layer and a seed layer in an integrated circuit. Apparatus and systems having such structures and methods of forming these structures for apparatus and systems are disclosed.
    Type: Grant
    Filed: June 24, 2008
    Date of Patent: June 29, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7727868
    Abstract: A method and device for reducing a dopant diffusion rate in a doped semiconductor region is provided. The methods and devices include selecting a plurality of dopant elements. Selection of a plurality of dopant elements includes selecting a first dopant element with a first atomic radius larger than a host matrix atomic radius and selecting a second dopant element with a second atomic radius smaller than a host matrix atomic radius. The methods and devices further include selecting amounts of each dopant element of the plurality of dopant elements wherein amounts and atomic radii of each of the plurality of dopant elements complement each other to reduce a host matrix lattice strain. The methods and devices further include introducing the plurality of dopant elements to a selected region of the host matrix and annealing the selected region of the host matrix.
    Type: Grant
    Filed: August 30, 2005
    Date of Patent: June 1, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Paul A. Farrar, Jerome M. Eldridge
  • Patent number: 7705429
    Abstract: A method for epitaxially forming a first semiconductor structure attached to a second semiconductor structure is provided. Devices and methods described include advantages such as reduced lattice mismatch at an epitaxial interface between two different semiconductor materials. One advantageous application of such an interface includes an electrical-optical communication structure. Methods such as deposition of layers at an elevated temperature provide easy formation of semiconductor structures with a modified lattice constant that permits an improved epitaxial interface.
    Type: Grant
    Filed: February 2, 2009
    Date of Patent: April 27, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Publication number: 20100090265
    Abstract: A nanodot nonvolatile memory element comprises a substrate having a source and a drain region formed therein, and an insulating layer formed on the substrate. The insulating layer contains a nanocrystalline floating gate of approximately three to six nanometers in diameter formed at a distance of approximately two to five nanometers from the substrate, and a carbon nanotube control gate having a diameter of approximately six nanometers or less is formed at a distance of approximately 10-15 nanometers from the substrate.
    Type: Application
    Filed: October 19, 2006
    Publication date: April 15, 2010
    Inventors: Arup Bhattacharyya, Warren M. Farnworth, Paul A. Farrar
  • Patent number: 7674698
    Abstract: One aspect of this disclosure relates to a method for forming an integrated circuit. According to various embodiments of the method, a plurality of transistors is formed. For each transistor, a gate dielectric is formed on a substrate, a substitutable structure is formed on the gate dielectric, and source/drain regions for the transistor are formed. At least two substitution processes are performed. Each substitution process includes substituting a desired gate material for the substitutable structure. Other aspects and embodiments are provided herein.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: March 9, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Paul A. Farrar, Kie Y. Ahn
  • Patent number: 7655095
    Abstract: Devices and methods of cleaning are described. The methods, and devices formed by the methods have a number of advantages. Embodiments are shown that include cleaning using a supercritical fluid. Advantages include a combination of both chemical and mechanical removal abilities from the supercritical fluid. Mechanical energy for cleaning is transmitted in a homogenous manner throughout a carrier fluid. The mechanical energy provided in methods shown can also be used with delicate surface features.
    Type: Grant
    Filed: November 28, 2006
    Date of Patent: February 2, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7645344
    Abstract: Devices and methods of cleaning are described. The methods, and devices formed by the methods have a number of advantages. Embodiments are shown that include cleaning using a supercritical fluid. Advantages include a combination of both chemical and mechanical removal abilities from the supercritical fluid. Mechanical energy for cleaning is transmitted in a homogenous manner throughout a carrier fluid. The mechanical energy provided in methods shown also can also be used with delicate surface features.
    Type: Grant
    Filed: October 8, 2003
    Date of Patent: January 12, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7626252
    Abstract: A multi-chip electronic package comprised of a plurality of integrated circuit chips secured together in a stack formation. The chip stack is hermetically sealed in an enclosure. The enclosure comprises a pressurized, thermally conductive fluid, which is utilized for cooling the enclosed chip stack. A process and structure is proposed that allows for densely-packed, multi-chip electronic packages to be manufactured with improved heat dissipation efficiency, thus improving the performance and reliability of the multi-chip electronic package.
    Type: Grant
    Filed: December 13, 2005
    Date of Patent: December 1, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Paul A. Farrar, Jerome M. Eldridge
  • Patent number: 7614027
    Abstract: The present subject matter allows non-orthogonal lines to be formed at the same thickness as the orthogonal lines so as to promote compact designs, to be formed with even line edges, and to be formed efficiently. Various method embodiments relate to forming a magnetic random access memory (MRAM) array. Various embodiments include forming a first wiring layer of approximately parallel conductors, a second wiring layer of approximately parallel conductors and a third wiring layer of approximately parallel conductors such that the first, second and third wiring layers cross at a number of intersections. At least one of the first, second and third wiring layers are formed so as to be non-orthogonal with respect to a remaining at least one of the first, second and third wiring layers. The method further includes forming a layer of magnetic storage elements proximately located to the intersections. Other aspects are provided herein.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: November 3, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7613031
    Abstract: Circuits, systems, and methods are disclosed for SRAM memories. An SRAM includes memory cells wherein read stability and write stability can be modified by adjusting a well bias signal operably coupled to an N-well of the memory cell. The well bias signal is generated at VDD or at a bias offset from VDD for both the read and the write operations. The memory cells may be adjusted for operation by designing the memory device to be stable relative to local parameter variations with a well bias substantially equal to VDD. The memory cells are then tested for stable read operations and stable write operations. If the write operations are unstable or the read operations are unstable, the well bias is modified and the memory cells are tested again.
    Type: Grant
    Filed: September 17, 2007
    Date of Patent: November 3, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Hussein I. Hanafi, Paul Farrar, Leonard Forbes
  • Publication number: 20090256243
    Abstract: Systems, devices and methods are provided to improve performance of integrated circuits by providing a low-k insulator. One aspect is an integrated circuit insulator structure. One embodiment includes a solid structure of an insulator material, and a precisely determined arrangement of at least one void formed within the solid structure which lowers an effective dielectric constant of the insulator structure. One aspect is a method of forming a low-k insulator structure. In one embodiment, an insulator material is deposited, and a predetermined arrangement of at least one hole is formed in a surface of the insulator material. The insulator material is annealed such that the low-k dielectric material undergoes a surface transformation to transform the arrangement of at least one hole into predetermined arrangement of at least one empty space below the surface of the insulator material. Other aspects are provided herein.
    Type: Application
    Filed: June 1, 2009
    Publication date: October 15, 2009
    Inventors: Joseph E. Geusic, Paul A. Farrar, Arup Bhattacharyya