Patents by Inventor Paul Farrar

Paul Farrar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090243106
    Abstract: Disclosed structures and methods inhibit atomic migration and related capacitive-resistive effects between a metallization layer and an insulator layer in a semiconductor structure. One exemplary structure includes an inhibiting layer between an insulator and a metallization layer. The insulator includes a polymer or an insulating oxide compound. And, the inhibiting layer has a compound formed from a reaction between the polymer or insulating oxide compound and a transition metal, a representative metal, or a metalloid.
    Type: Application
    Filed: May 18, 2009
    Publication date: October 1, 2009
    Inventor: Paul A. Farrar
  • Patent number: 7592242
    Abstract: A method and device for reducing a dopant diffusion rate in a doped semiconductor region is provided. The methods and devices include selecting a plurality of dopant elements. Selection of a plurality of dopant elements includes selecting a first dopant element with a first atomic radius larger than a host matrix atomic radius and selecting a second dopant element with a second atomic radius smaller than a host matrix atomic radius. The methods and devices further include selecting amounts of each dopant element of the plurality of dopant elements wherein amounts and atomic radii of each of the plurality of dopant elements complement each other to reduce a host matrix lattice strain. The methods and devices further include introducing the plurality of dopant elements to a selected region of the host matrix and annealing the selected region of the host matrix.
    Type: Grant
    Filed: August 30, 2005
    Date of Patent: September 22, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Paul A. Farrar, Jerome M. Eldridge
  • Patent number: 7585753
    Abstract: A method and device for reducing a dopant diffusion rate in a doped semiconductor region is provided. The methods and devices include selecting a plurality of impurity elements, including at least one dopant element. Selection of a plurality of impurity elements includes selecting a first impurity element with a first atomic radius larger than an average host matrix atomic radius and selecting a second impurity element with a second atomic radius smaller than an average host matrix atomic radius. The methods and devices further include selecting amounts of each impurity element of the plurality of impurity elements wherein amounts and atomic radii of each of the plurality of impurity elements complement each other to reduce a host matrix lattice strain.
    Type: Grant
    Filed: November 1, 2007
    Date of Patent: September 8, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Paul A. Farrar, Jerome M. Eldridge
  • Publication number: 20090179331
    Abstract: A system and method for providing low dielectric constant insulators in integrated circuits is provided. One aspect of this disclosure relates to a method for forming an integrated circuit insulator. The method includes forming an insulating layer using a first structural material upon a substrate, the first structural material having sufficient mechanical characteristics to support metal during chemical-mechanical polishing (CMP). The method also includes depositing a metallic layer upon the insulating layer, the metallic layer adapted to be used as a wiring channel. The method further includes processing the metallic layer to form the wiring channel, where processing includes CMP. In addition, the method includes removing and replacing at least a portion of the first structural material with a second structural material, the second structural material having insufficient mechanical characteristics to support metal during CMP. Other aspects and embodiments are provided herein.
    Type: Application
    Filed: March 18, 2009
    Publication date: July 16, 2009
    Inventor: Paul A. Farrar
  • Patent number: 7560305
    Abstract: Devices and methods are described including a multi-chip assembly. Embodiments of multi-chip assemblies are provided that uses both lateral connection structures and through chip connection structures. One advantage of this design includes an increased number of possible connections. Another advantage of this design includes shorter distances for interconnection pathways, which improves device performance and speed.
    Type: Grant
    Filed: August 31, 2005
    Date of Patent: July 14, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Publication number: 20090166806
    Abstract: A method for epitaxially forming a first semiconductor structure attached to a second semiconductor structure is provided. Devices and methods described include advantages such as reduced lattice mismatch at an epitaxial interface between two different semiconductor materials. One advantageous application of such an interface includes an electrical-optical communication structure. Methods such as deposition of layers at an elevated temperature provide easy formation of semiconductor structures with a modified lattice constant that permits an improved epitaxial interface.
    Type: Application
    Filed: February 2, 2009
    Publication date: July 2, 2009
    Inventor: Paul A. Farrar
  • Patent number: 7550824
    Abstract: Systems, devices and methods are provided to improve performance of integrated circuits by providing a low-k insulator. One aspect is an integrated circuit insulator structure. One embodiment includes a solid structure of an insulator material, and a precisely determined arrangement of at least one void formed within the solid structure which lowers an effective dielectric constant of the insulator structure. One aspect is a method of forming a low-k insulator structure. In one embodiment, an insulator material is deposited, and a predetermined arrangement of at least one hole is formed in a surface of the insulator material. The insulator material is annealed such that the low-k dielectric material undergoes a surface transformation to transform the arrangement of at least one hole into predetermined arrangement of at least one empty space below the surface of the insulator material. Other aspects are provided herein.
    Type: Grant
    Filed: August 31, 2004
    Date of Patent: June 23, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Joseph E. Geusic, Paul A. Farrar, Arup Bhattacharyya
  • Patent number: 7541081
    Abstract: A structure for storing digital data is provided, with a high reflectance layer comprising a noble metal formed over an underlying material layer, and a plurality of low reflectance portions comprising a mixture of a noble metal and an underlying material. The plurality of low reflectance portions have top surfaces comprising a compound of the underlying and the noble metal. A method of changing reflectance on a data storage disk is also disclosed. The method comprises the acts of irradiating a laser light beam onto a noble metal formed over an underlying layer, and raising the temperature of the noble metal above the melting temperature forming a compound of the noble metal and the underlying material.
    Type: Grant
    Filed: July 27, 2005
    Date of Patent: June 2, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Paul A. Farrar, Leonard Forbes, Alan R. Reinberg
  • Patent number: 7535103
    Abstract: Disclosed structures and methods inhibit atomic migration and related capacitive-resistive effects between a metallization layer and an insulator layer in a semiconductor structure. One exemplary structure includes an inhibiting layer between an insulator and a metallization layer. The insulator includes a polymer or an insulating oxide compound. And, the inhibiting layer has a compound formed from a reaction between the polymer or insulating oxide compound and a transition metal, a representative metal, or a metalloid.
    Type: Grant
    Filed: July 18, 2006
    Date of Patent: May 19, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Publication number: 20090108363
    Abstract: In various method embodiments, a device region is defined in a semiconductor substrate and isolation regions are defined adjacent to the device region. The device region has a channel region, and the isolation regions have volumes. The volumes of the isolation regions are adjusted to provide the channel region with a desired strain. In various embodiments, adjusting the volumes of the isolation regions includes transforming the isolation regions from a crystalline region to an amorphous region to expand the volumes of the isolation regions and provide the channel region with a desired compressive strain. In various embodiments, adjusting the volumes of the isolation regions includes transforming the isolation regions from an amorphous region to a crystalline region to contract the volumes of the isolation regions to provide the channel region with a desired tensile strain. Other aspects and embodiments are provided herein.
    Type: Application
    Filed: December 30, 2008
    Publication date: April 30, 2009
    Inventors: Leonard Forbes, Paul A. Farrar
  • Patent number: 7521355
    Abstract: A system and method for providing low dielectric constant insulators in integrated circuits is provided. One aspect of this disclosure relates to a method for forming an integrated circuit insulator. The method includes forming an insulating layer using a first structural material upon a substrate, the first structural material having sufficient mechanical characteristics to support metal during chemical-mechanical polishing (CMP). The method also includes depositing a metallic layer upon the insulating layer, the metallic layer adapted to be used as a wiring channel. The method further includes processing the metallic layer to form the wiring channel, where processing includes CMP. In addition, the method includes removing and replacing at least a portion of the first structural material with a second structural material, the second structural material having insufficient mechanical characteristics to support metal during CMP. Other aspects and embodiments are provided herein.
    Type: Grant
    Filed: December 8, 2005
    Date of Patent: April 21, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Publication number: 20090090950
    Abstract: Methods, devices, modules, and systems providing semiconductor devices in a stacked wafer system are described herein. One embodiment includes a first wafer for NMOS transistors in a CMOS architecture and a second wafer for PMOS transistors in the CMOS architecture, with the first wafer being bonded and electrically coupled to the second wafer to form at least one CMOS device. Another embodiment includes a number of DRAM capacitors formed on a first wafer and support circuitry associated with the DRAM capacitors formed on a second wafer, with the first wafer being bonded and electrically coupled to the second wafer to form a number of DRAM cells. Another embodiment includes a first wafer having a number of vertical transistors coupled to a data line and a second wafer having amplifier circuitry associated with the number of vertical transistors, with the first wafer being bonded and electrically coupled to the second wafer.
    Type: Application
    Filed: October 5, 2007
    Publication date: April 9, 2009
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Leonard Forbes, Paul A. Farrar, Arup Bhattacharyya, Hussein I. Hanafi, Warren M. Farnworth
  • Publication number: 20090073782
    Abstract: Circuits, systems, and methods are disclosed for SRAM memories. An SRAM includes memory cells wherein read stability and write stability can be modified by adjusting a well bias signal operably coupled to an N-well of the memory cell. The well bias signal is generated at VDD or at a bias offset from VDD for both the read and the write operations. The memory cells may be adjusted for operation by designing the memory device to be stable relative to local parameter variations with a well bias substantially equal to VDD. The memory cells are then tested for stable read operations and stable write operations. If the write operations are unstable or the read operations are unstable, the well bias is modified and the memory cells are tested again.
    Type: Application
    Filed: September 17, 2007
    Publication date: March 19, 2009
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Hussein I. Hanafi, Paul Farrar, Leonard Forbes
  • Patent number: 7504674
    Abstract: Electronic devices are constructed by a method that includes forming a first conductive layer in an opening in a multilayer dielectric structure supported by a substrate, forming a core conductive layer on the first conductive layer, subjecting the core conductive layer to a H2 plasma treatment, and depositing a capping adhesion/barrier layer on the core conductive layer after the H2 plasma treatment. The multilayer dielectric structure provides an insulating layer for around the core conducting layer. The H2 plasma treatment removes unwanted oxide from the surface region of the core conducting layer such that the interface between the core conducting layer and the capping adhesion/barrier is substantially free of oxides.
    Type: Grant
    Filed: August 29, 2005
    Date of Patent: March 17, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7492042
    Abstract: A method and device for cooling an integrated circuit is provided. A method and device using a gas to cool circuit structures such as a number of air bridge structures is provided. A method and device using a boiling liquid to cool circuit structures is provided. Further provided is a method of controlling chip temperature. This allows circuit and device designers an opportunity to design more efficient structures. Some properties that exhibit less variation when temperature ranges are controlled include electromigration, conductivity, operating speed, and reliability.
    Type: Grant
    Filed: October 25, 2007
    Date of Patent: February 17, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Paul A. Farrar, Leonard Forbes, Kie Y. Ahn, Joseph E. Geusic, Arup Bhattacharyya, Alan R. Reinberg
  • Patent number: 7492030
    Abstract: One aspect of the present subject matter relates to a method for forming an interlayer dielectric (ILD). In various embodiments of the method, an insulator layer is formed, at least one trench is formed in the insulator layer, and a metal layer is formed in the at least one trench. After the metal layer is formed, voids are formed in the insulator layer. One aspect of the present subject matter relates to an integrated circuit. In various embodiments, the integrated circuit includes an insulator structure having a plurality of voids that have a maximum size, and a metal layer formed in the insulator structure. The maximum size of the voids is larger than the minimum photo dimension of the metal layer such that a maximum-sized void is capable of extending between a first and second metal line in the metal layer. Other aspects are provided herein.
    Type: Grant
    Filed: July 26, 2006
    Date of Patent: February 17, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Arup Bhattacharyya, Paul A. Farrar
  • Patent number: 7489019
    Abstract: A method for epitaxially forming a first semiconductor structure attached to a second semiconductor structure is provided. Devices and methods described include advantages such as reduced lattice mismatch at an epitaxial interface between two different semiconductor materials. One advantageous application of such an interface includes an electrical-optical communication structure. Methods such as deposition of layers at an elevated temperature provide easy formation of semiconductor structures with a modified lattice constant that permits an improved epitaxial interface.
    Type: Grant
    Filed: July 6, 2006
    Date of Patent: February 10, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7489034
    Abstract: A system and method for cooling an integrated circuit is provided. One aspect of this disclosure relates to a cooling system that utilizes sound waves to cool a semiconductor structure. The system includes a container to hold at least one semiconductor chip having surfaces to be in contact with a fluid. The system also includes a transducer and a heat exchanger disposed within the container and operably positioned with respect to each other to perform a thermoacoustic cooling process. In this system, the transducer is adapted to generate sound waves within the fluid such that compression and decompression of the fluid provides a temperature gradient across the semiconductor chip to transfer heat from the semiconductor chip to the heat exchanger, and the heat exchanger is adapted to remove heat from the fluid in the container. Other aspects and embodiments are provided herein.
    Type: Grant
    Filed: September 28, 2006
    Date of Patent: February 10, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Publication number: 20090032958
    Abstract: Intermetallic conductive materials are used to form interconnects in an integrated circuit. In some cases, the intermetallic conductive material may be an intermetallic alloy of aluminum.
    Type: Application
    Filed: August 3, 2007
    Publication date: February 5, 2009
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Paul A. Farrar
  • Patent number: 7485497
    Abstract: A method and device for cooling an integrated circuit is provided. A method and device using a gas to cool circuit structures such as a number of air bridge structures is provided. A method and device using a boiling liquid to cool circuit structures is provided. Further provided is a method of controlling chip temperature. This allows circuit and device designers an opportunity to design more efficient structures. Some properties that exhibit less variation when temperature ranges are controlled include electromigration, conductivity, operating speed, and reliability.
    Type: Grant
    Filed: October 25, 2007
    Date of Patent: February 3, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Paul A. Farrar, Leonard Forbes, Kie Y. Ahn, Joseph E. Geusic, Arup Bhattacharyya, Alan R. Reinberg