Patents by Inventor Satoshi Inaba

Satoshi Inaba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8368148
    Abstract: A semiconductor device according to an aspect of the invention comprises an n-type FinFET which is provided on a semiconductor substrate and which includes a first fin, a first gate electrode crossing a channel region of the first fin via a gate insulating film in three dimensions, and contact regions provided at both end of the first fin, a p-type FinFET which is provided on the semiconductor substrate and which includes a second fin, a second gate electrode crossing a channel region of the second fin via a gate insulating film in three dimensions, and contact regions provided at both end of the second fin, wherein the n- and the p-type FinFET constitute an inverter circuit, and the fin width of the contact region of the p-type FinFET is greater than the fin width of the channel region of the n-type FinFET.
    Type: Grant
    Filed: July 5, 2011
    Date of Patent: February 5, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Patent number: 8338889
    Abstract: The disclosure concerns a method of manufacturing a semiconductor device including forming a plurality of fins made of a semiconductor material on an insulating layer; forming a gate insulating film on side surfaces of the plurality of fins; and forming a gate electrode on the gate insulating film in such a manner that a compressive stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a direction perpendicular to the side surface and a tensile stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a direction perpendicular to the side surface.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: December 25, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Akio Kaneko, Atsushi Yagishita, Satoshi Inaba
  • Publication number: 20120319164
    Abstract: According to one embodiment, a semiconductor device that has a rectification element includes a semiconductor substrate, a first well region of a first conductivity type formed on the semiconductor substrate, a second well region of a second conductivity type formed on the semiconductor substrate, and a plurality of fins arranged over the first well region and the second well region at a first pitch in the same direction. In the semiconductor device, the rectification element includes a cathode region, an anode region, a well contact region, and a trigger region that are configured using fins. These regions are connected to each wiring portion to form a PNP-type bipolar transistor and an NPN-type bipolar transistor.
    Type: Application
    Filed: February 2, 2012
    Publication date: December 20, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Satoshi INABA
  • Patent number: 8329592
    Abstract: A method of fabricating a semiconductor device according to one embodiment includes: forming a mask material on a semiconductor substrate comprising first and second regions; forming a pattern of a core on the mask material in the first region; forming a sidewall spacer mask on a side surfaces of the core pattern and subsequently removing the core pattern; transferring a pattern of the sidewall spacer mask to the mask material in the first region after removing the core; and thereafter, carrying out trimming of the pattern of the sidewall spacer mask which is transferred to the mask material in the first region, and formation of a predetermined pattern on the mask material in the second region, simultaneously.
    Type: Grant
    Filed: September 9, 2009
    Date of Patent: December 11, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Publication number: 20120224438
    Abstract: According to one embodiment, a fin formed on a semiconductor substrate, a gate electrode provided on both sides of the fin via a gate dielectric film, a depletion layer that forms a potential barrier, which confines a hole in a body region between channel regions of the fin, in the fin, and a source/drain layer formed in the fin to sandwich the gate electrode are included.
    Type: Application
    Filed: February 21, 2012
    Publication date: September 6, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Satoshi INABA
  • Publication number: 20120224419
    Abstract: A semiconductor storage device according to an embodiment includes wells in a semiconductor substrate, fins formed on the wells, gate electrodes provided on one side and another opposite side of each fin via a gate insulating film to form a channel region in the fin, impurity-diffused layers that each form a potential barrier that confines holes in a body region within the channel region, and source/drain layers each formed at the fin such that the channel region is sandwiched between the source layer and the drain layer. At the time of writing of data ‘1’, a gate voltage is set to a negative potential, a well bias voltage is set to a positive potential, and a drain voltage is set to a positive potential.
    Type: Application
    Filed: February 27, 2012
    Publication date: September 6, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Satoshi INABA
  • Publication number: 20120193722
    Abstract: According to one embodiment, a semiconductor device includes N fins made of a semiconductor material aligned in parallel with each other; a first gate electrode formed on both side surfaces of each of the N fins to cross the fins; and a second gate electrode formed in parallel with the first gate electrode on both side surfaces of the N fins to cross the fins, and having a larger gate length than a gate length of the first gate electrode, wherein number of fins formed with contacts of source/drain layers of first field-effect transistors having the first gate electrode is larger than number of fins formed with contacts of source/drain layers of second field-effect transistors having the second gate electrode.
    Type: Application
    Filed: April 5, 2012
    Publication date: August 2, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Satoshi INABA
  • Patent number: 8169009
    Abstract: A semiconductor device includes N fins made of semiconductor regions aligned in parallel with each other in the top view plain, a gate electrode formed on both side surfaces of each of the N fins to cross the fins, source/drain layers formed in each of the N fins by sandwiching the gate electrode, a first wiring connected to one of the source/drain layers via a first contact formed in each of M fins, and a second wiring connected to the other one of the source/drain layers via a second contact formed in each of K fins.
    Type: Grant
    Filed: June 30, 2009
    Date of Patent: May 1, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Publication number: 20120099363
    Abstract: According to one embodiment, a resistance change type memory includes a first bit line extending in a first direction, a first word line extending in a second direction, a first bipolar transistor which is a first drive type and has a first emitter, a first base, and a first collector, a second bipolar transistor which is a second drive type different from the first drive type and has a second emitter, a second base, and a second collector, and a first memory element which has first and second terminals and in which a change in resistance state thereof is associated with data. The first terminal is connected to the first and second emitters, the second terminal is connected to the first bit line, and the first and second bases are connected to the first word line.
    Type: Application
    Filed: September 19, 2011
    Publication date: April 26, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Satoshi Inaba
  • Publication number: 20120091537
    Abstract: In accordance with an embodiment, a semiconductor device includes an SRAM cell on a substrate. The SRAM cell includes: first and second load transistors each having an n-type source region and a p-type drain region, first and second driver transistors each having a p-type source region and an n-type drain region, and first and second transfer transistors each having an n-type source region and a n-type drain region. The n-type source regions of the first and second load transistors, the n-type drain regions of the first and second driver transistors, and the n-type source regions and the n-type drain regions of the first and second transfer transistors are located in a region other than a region present between any two of the p-type drain regions of the first and second load transistors and the p-type source regions of the first and second driver transistors.
    Type: Application
    Filed: September 16, 2011
    Publication date: April 19, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Kanna Adachi, Shigeru Kawanaka, Satoshi Inaba
  • Patent number: 8129798
    Abstract: A semiconductor device includes a circuit comprising a first transistor in a first Fin; a power supply circuit in a second Fin, the power supply circuit comprising a second transistor connected between the circuit and a power supply line; and a substrate contact electrically connected to the semiconductor substrate and configured to apply a substrate voltage to a substrate, wherein a width of the first Fin in a cross-section of the first Fin perpendicular to a channel length direction of the first transistor is equal to or smaller than a twofold of a largest depletion layer width of a depletion layer formed in a channel part of the first transistor, and a width of the second Fin in a cross-section of the second Fin perpendicular to a channel length direction of the second transistor is larger than a twofold of a largest depletion layer width of a depletion layer in a channel of the second transistor.
    Type: Grant
    Filed: December 3, 2009
    Date of Patent: March 6, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Publication number: 20120012935
    Abstract: The disclosure concerns a method of manufacturing a semiconductor device including forming a plurality of fins made of a semiconductor material on an insulating layer; forming a gate insulating film on side surfaces of the plurality of fins; and forming a gate electrode on the gate insulating film in such a manner that a compressive stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a direction perpendicular to the side surface and a tensile stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a direction perpendicular to the side surface.
    Type: Application
    Filed: September 21, 2011
    Publication date: January 19, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Akio Kaneko, Atsushi Yagishita, Satoshi Inaba
  • Publication number: 20120009744
    Abstract: A semiconductor substrate according to an embodiment includes: a first semiconductor wafer having a first crystal; and a second semiconductor wafer formed of a second crystal substantially same as the first crystal on the first semiconductor wafer, a crystal-axis direction of unit cell thereof being twisted at a predetermined angle around a direction vertical to a principal surface of the second semiconductor wafer from that of the first semiconductor wafer.
    Type: Application
    Filed: September 22, 2011
    Publication date: January 12, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Satoshi INABA
  • Patent number: 8053292
    Abstract: The disclosure concerns a method of manufacturing a semiconductor device including forming a plurality of fins made of a semiconductor material on an insulating layer; forming a gate insulating film on side surfaces of the plurality of fins; and forming a gate electrode on the gate insulating film in such a manner that a compressive stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a direction perpendicular to the side surface and a tensile stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a direction perpendicular to the side surface.
    Type: Grant
    Filed: August 4, 2010
    Date of Patent: November 8, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Akio Kaneko, Atsushi Yagishita, Satoshi Inaba
  • Publication number: 20110260253
    Abstract: A semiconductor device according to an aspect of the invention comprises an n-type FinFET which is provided on a semiconductor substrate and which includes a first fin, a first gate electrode crossing a channel region of the first fin via a gate insulating film in three dimensions, and contact regions provided at both end of the first fin, a p-type FinFET which is provided on the semiconductor substrate and which includes a second fin, a second gate electrode crossing a channel region of the second fin via a gate insulating film in three dimensions, and contact regions provided at both end of the second fin, wherein the n- and the p-type FinFET constitute an inverter circuit, and the fin width of the contact region of the p-type FinFET is greater than the fin width of the channel region of the n-type FinFET.
    Type: Application
    Filed: July 5, 2011
    Publication date: October 27, 2011
    Inventor: Satoshi INABA
  • Patent number: 8039843
    Abstract: A semiconductor substrate according to an embodiment includes: a first semiconductor wafer having a first crystal; and a second semiconductor wafer formed of a second crystal substantially same as the first crystal on the first semiconductor wafer, a crystal-axis direction of unit cell thereof being twisted at a predetermined angle around a direction vertical to a principal surface of the second semiconductor wafer from that of the first semiconductor wafer.
    Type: Grant
    Filed: August 15, 2008
    Date of Patent: October 18, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Patent number: 8035170
    Abstract: A semiconductor device according to an embodiment of the invention includes: a semiconductor substrate; device regions formed on the semiconductor substrate, the device regions having a length direction in a predetermined direction; a plurality of transistors having gate electrodes, respectively, the gate electrodes extending in a direction approximately perpendicular to the predetermined direction, the plurality of transistors having a source/drain region and a channel region having a channel direction approximately parallel to the predetermined direction in the device region; a plurality of SRAM cells disposed in an array, each of the plurality of SRAM cells including the plurality of transistors; and a dummy region made of the substantially same material as that of the device regions, the dummy region being formed between the outermost device regions of the SRAM cells adjacent to each other in the direction approximately perpendicular to the predetermined direction, the dummy region having a length directi
    Type: Grant
    Filed: November 25, 2008
    Date of Patent: October 11, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Publication number: 20110220778
    Abstract: According to one embodiments, a transparent reference electrode is provided to be sandwiched between a red-detecting photoelectric conversion film and a green-detecting photoelectric conversion film, a first transparent driving electrode is provided to face the transparent reference electrode with the green-detecting photoelectric conversion film therebetween, a second transparent driving electrode is provided to face the transparent reference electrode with the red-detecting photoelectric conversion film therebetween, and a blue-detecting photoelectric conversion film is provided below the red-detecting photoelectric conversion film and performs blue detection.
    Type: Application
    Filed: March 2, 2011
    Publication date: September 15, 2011
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Satoshi Inaba
  • Patent number: 7994583
    Abstract: A semiconductor device according to an aspect of the invention comprises an n-type FinFET which is provided on a semiconductor substrate and which includes a first fin, a first gate electrode crossing a channel region of the first fin via a gate insulating film in three dimensions, and contact regions provided at both end of the first fin, a p-type FinFET which is provided on the semiconductor substrate and which includes a second fin, a second gate electrode crossing a channel region of the second fin via a gate insulating film in three dimensions, and contact regions provided at both end of the second fin, wherein the n- and the p-type FinFET constitute an inverter circuit, and the fin width of the contact region of the p-type FinFET is greater than the fin width of the channel region of the n-type FinFET.
    Type: Grant
    Filed: May 12, 2008
    Date of Patent: August 9, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Patent number: 7989856
    Abstract: A fin transistor includes: a substrate; a plurality of semiconductor fins formed on the substrate; a gate electrode covering a channel region of the semiconductor fins; and a member as a stress source for the semiconductor fins included in a region of the gate electrode and the region provided between the semiconductor fins, and the member being made of a different material from the gate electrode.
    Type: Grant
    Filed: December 16, 2008
    Date of Patent: August 2, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masakazu Goto, Nobutoshi Aoki, Takashi Izumida, Kimitoshi Okano, Satoshi Inaba, Ichiro Mizushima