Patents by Inventor Satoshi Inaba

Satoshi Inaba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7456481
    Abstract: A semiconductor device includes a first device region including a plurality of source regions and a plurality of drain regions of first conductivity type transistors, a plurality of loop-shaped gate electrode regions of the first conductivity type transistors, a second device region including a plurality of source regions and a plurality of drain regions of a second conductivity type transistors, a plurality of loop-shaped gate electrode regions of the second conductivity type transistors, a first wiring configured to supply a first voltage to at least one of the source regions of the first device region, a second wiring configured to supply a second voltage to at least one of the source regions of the second device region, and a third wiring electrically coupled to the drain regions of the first and second device regions and to the gate electrode regions of the first and the second conductivity type transistors.
    Type: Grant
    Filed: August 1, 2006
    Date of Patent: November 25, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Satoshi Inaba, Makoto Fujiwara
  • Patent number: 7456472
    Abstract: A semiconductor device comprising a multi Fin-FET structure capable of suppressing short channel effects, controlling a threshold voltage, driving a high current, and operating in a high-speed comprises a source region and a drain region disposed on a semiconductor substrate, a plurality of fins interconnecting the source region and drain region, a first gate electrode disposed on the semiconductor substrate and to one side face of each fin, a second gate electrode disposed on the semiconductor substrate and to the other side face of the fin to face the first gate electrode, and separated from the first gate electrode, a plurality of first pad electrodes connected to respective first gate electrode, a first wiring interconnecting the plurality of first pad electrodes, a plurality of second pad electrodes connected to respective second gate electrode, and a second wiring interconnecting the plurality of second pad electrodes.
    Type: Grant
    Filed: December 7, 2004
    Date of Patent: November 25, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Patent number: 7449733
    Abstract: A semiconductor device includes a semiconductor substrate, a channel region formed above the semiconductor substrate, a first gate electrode formed above the channel region via a first gate insulating film, a second gate electrode formed below the channel region via a second gate insulating film to face the first gate electrode, a first insulating film covering side surfaces of the second gate electrode, a second insulating film covering a bottom surface of the second gate electrode, and a semiconductor layer which has an upper surface positioned above an upper surface of the first gate insulating film and side surfaces facing side surfaces of the first gate electrode, and in which a source region and drain region are formed. The side surfaces of the second gate electrode are aligned with or positioned inside the side surfaces of the semiconductor layer.
    Type: Grant
    Filed: January 30, 2006
    Date of Patent: November 11, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Satoshi Inaba, Tetsu Morooka
  • Publication number: 20080253170
    Abstract: In one aspect of the present invention, a semiconductor device A semiconductor device may include a SRAM cell having a first inverter, a second inverter, a first transfer transistor and a second transistor, the first inverter having a first load transistor and a first driver transistor connected to the first load transistor, the second inverter having a second load transistor and a second driver transistor connected to the second load transistor, a voltage supplying circuit configured to supply a voltage to one of the terminals of the first driver transistor and one of the terminals of the second driver transistor, the voltage which is one of more than a GND voltage and less than a GND voltage.
    Type: Application
    Filed: October 2, 2007
    Publication date: October 16, 2008
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Satoshi INABA
  • Publication number: 20080230805
    Abstract: In one aspect of the present invention, a semiconductor device may include a Si substrate, a gate electrode provided on the semiconductor via a gate dielectric layer, a first epitaxially grown layer provided on the Si substrate, a channel region provided in the Si substrate below the gate electrode, a source/drain region provided in the first epitaxially grown layer sandwiching the channel region, and having a first conductivity type impurity, a second epitaxially grown layer provided between the channel region and the first epitaxially grown layer, and provided below the gate electrode, and having a second conductivity type impurity opposite to the first conductivity type.
    Type: Application
    Filed: March 20, 2008
    Publication date: September 25, 2008
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Akira Hokazono, Satoshi Inaba
  • Patent number: 7400016
    Abstract: In a semiconductor device, source/drain layers have a low resistivity region and an extension region extending from the low resistivity region toward the channel region. The extension regions are lower in impurity concentration and shallower in depth than the low resistivity regions. The device also has a first impurity-doped layer formed in the channel region between the source/drain layers, a second impurity-doped layer formed under the first impurity-doped layer, and a third impurity-doped layer formed under the second impurity-doped layer. The first impurity-doped layer is equal or less in junction depth than the extension regions. The second impurity doped layer has impurity concentration and thickness to be fully depleted due to a built-in potential as created between the first and third impurity-doped layers.
    Type: Grant
    Filed: June 3, 2005
    Date of Patent: July 15, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Publication number: 20070221956
    Abstract: A semiconductor device according to one embodiment of the present invention includes: a fin including a buffer layer made of SiGe and formed on a Si layer, and a SiGe layer formed on the buffer layer, the SiGe layer having a Ge concentration corresponding to a Ge concentration of the buffer layer in an interface between the buffer layer and the SiGe layer; a gate electrode formed on a side face of the fin through a gate insulating film; a channel region formed in a region within the fin facing the gate electrode through the gate insulating film, the channel region being selectively provided within the SiGe layer of the buffer layer and the SiGe layer included in the fin; and a source region and a drain region formed within the fin, the channel region being formed between the source region and the drain region.
    Type: Application
    Filed: March 22, 2007
    Publication date: September 27, 2007
    Inventor: Satoshi Inaba
  • Patent number: 7259428
    Abstract: A semiconductor device includes a support substrate, a buried insulation film, provided on the support substrate, having a thickness of 5 to 10 nm, a silicon layer provided on the buried insulation film, a MOSFET provided in the silicon layer, and a triple-well region provided in the support substrate under the MOSFET.
    Type: Grant
    Filed: April 4, 2005
    Date of Patent: August 21, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Publication number: 20070189063
    Abstract: A semiconductor integrated circuit device comprises a first transistor formed on a bulk substrate region in a semiconductor substrate and having a source or drain layer connected to a first reference voltage; and a second transistor including an impurity layer region formed on the bulk substrate region and being of a conductivity type different from that of the bulk substrate region, a semiconductor region formed on the impurity layer region and being of a conductivity type the same as that of the bulk substrate region, a source layer and a drain layer formed in the semiconductor region and being of a conductivity type different from that of the bulk substrate region, a gate insulating film provided between the source layer and the drain layer and formed on the semiconductor region, a gate electrode formed on the gate insulating film, and a body region surrounded by the source layer, the drain layer, the impurity layer region, and the gate insulating film on a section along a source-drain direction and being
    Type: Application
    Filed: April 20, 2007
    Publication date: August 16, 2007
    Inventor: Satoshi Inaba
  • Publication number: 20070190708
    Abstract: The disclosure concerns a method of manufacturing a semiconductor device including forming a plurality of fins made of a semiconductor material on an insulating layer; forming a gate insulating film on side surfaces of the plurality of fins; and forming a gate electrode on the gate insulating film in such a manner that a compressive stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a direction perpendicular to the side surface and a tensile stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a direction perpendicular to the side surface.
    Type: Application
    Filed: January 31, 2007
    Publication date: August 16, 2007
    Inventors: Akio Kaneko, Atsushi Yagishita, Satoshi Inaba
  • Publication number: 20070189060
    Abstract: A semiconductor memory having a plurality of static random access memory cells, word lines, first and second bit lines orthogonal to the word lines, and threshold voltage control lines parallel to the word lines and each of the static random access memory cell includes the first and the second driver transistors, the first and the second load transistors, and the first and the second transfer transistors configured by Fin field effect transistors, and at least one of the Fin field effect transistors is configured by a separated-gate type double-gate field effect transistor comprising a first gate electrode and a second gate electrode and controlling a voltage for the first gate electrode to form a channel, and controlling a voltage for the second gate electrode to decrease a threshold voltage at the time of writing data.
    Type: Application
    Filed: January 24, 2007
    Publication date: August 16, 2007
    Inventor: Satoshi Inaba
  • Publication number: 20070102761
    Abstract: A semiconductor device includes a semiconductor substrate, a channel region formed above the semiconductor substrate, a first gate electrode formed above the channel region via a first gate insulating film, a second gate electrode formed below the channel region via a second gate insulating film to face the first gate electrode, a first insulating film covering side surfaces of the second gate electrode, a second insulating film covering a bottom surface of the second gate electrode, and a semiconductor layer which has an upper surface positioned above an upper surface of the first gate insulating film and side surfaces facing side surfaces of the first gate electrode, and in which a source region and drain region are formed. The side surfaces of the second gate electrode are aligned with or positioned inside the side surfaces of the semiconductor layer.
    Type: Application
    Filed: January 30, 2006
    Publication date: May 10, 2007
    Inventors: Satoshi Inaba, Tetsu Morooka
  • Patent number: 7215569
    Abstract: A semiconductor integrated circuit device comprises a first transistor formed on a bulk substrate region in a semiconductor substrate and having a source or drain layer connected to a first reference voltage; and a second transistor including an impurity layer region formed on the bulk substrate region and being of a conductivity type different from that of the bulk substrate region, a semiconductor region formed on the impurity layer region and being of a conductivity type the same as that of the bulk substrate region, a source layer and a drain layer formed in the semiconductor region and being of a conductivity type different from that of the bulk substrate region, a gate insulating film provided between the source layer and the drain layer and formed on the semiconductor region, a gate electrode formed on the gate insulating film, and a body region surrounded by the source layer, the drain layer, the impurity layer region, and the gate insulating film on a section along a source-drain direction and being
    Type: Grant
    Filed: April 29, 2005
    Date of Patent: May 8, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Publication number: 20070069342
    Abstract: A first electrode is formed on a semiconductor substrate. A second electrode is formed separately at a predetermined interval from the first electrode, and has at least one opening. An actuator layer is connected to the second electrode, and drives the second electrode.
    Type: Application
    Filed: December 15, 2005
    Publication date: March 29, 2007
    Inventor: Satoshi Inaba
  • Publication number: 20060267112
    Abstract: A semiconductor device includes a first device region including a plurality of source regions and a plurality of drain regions of first conductivity type transistors, a plurality of loop-shaped gate electrode regions of the first conductivity type transistors, a second device region including a plurality of source regions and a plurality of drain regions of a second conductivity type transistors, a plurality of loop-shaped gate electrode regions of the second conductivity type transistors, a first wiring configured to supply a first voltage to at least one of the source regions of the first device region, a second wiring configured to supply a second voltage to at least one of the source regions of the second device region, and a third wiring electrically coupled to the drain regions of the first and second device regions and to the gate electrode regions of the first and the second conductivity type transistors.
    Type: Application
    Filed: August 1, 2006
    Publication date: November 30, 2006
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Satoshi Inaba, Makoto Fujiwara
  • Patent number: 7125779
    Abstract: There is provided a MISFET which suppresses a short-channel effect in a deep submicron region and has a low parasitic resistance, a low parasitic capacitance, and a small drain junction leakage current. A shallow concave is formed in a channel forming portion and an extension region forming portion of a MISFET, shallow ion implantation for forming an extension region is performed to a bottom surface of the shallow concave. Deep ion implantation for forming a source/drain region is performed to a silicon substrate adjacent to the concave, and the position of a peak concentration of the shallow ion implantation is caused to coincide with the position of a peak concentration of the deep ion implantation, so that a MISFET which suppresses a short-channel effect and has a low source/drain parasitic resistance, a low source/drain parasitic capacitance, and a small drain junction leakage current generated by SALICIDE steps can be provided.
    Type: Grant
    Filed: August 5, 2004
    Date of Patent: October 24, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Satoshi Inaba
  • Patent number: 7112858
    Abstract: An aspect of the present invention provides a semiconductor device that includes a first transistor including a source region, a drain region provided in the same device region as the source region, and a loop-shaped gate electrode region, and a second transistor sharing, with the first transistor, the loop-shaped gate electrode region and the source region or the drain region.
    Type: Grant
    Filed: March 15, 2004
    Date of Patent: September 26, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Satoshi Inaba, Makoto Fujiwara
  • Publication number: 20060104108
    Abstract: A semiconductor integrated circuit device comprises a first transistor formed on a bulk substrate region in a semiconductor substrate and having a source or drain layer connected to a first reference voltage; and a second transistor including an impurity layer region formed on the bulk substrate region and being of a conductivity type different from that of the bulk substrate region, a semiconductor region formed on the impurity layer region and being of a conductivity type the same as that of the bulk substrate region, a source layer and a drain layer formed in the semiconductor region and being of a conductivity type different from that of the bulk substrate region, a gate insulating film provided between the source layer and the drain layer and formed on the semiconductor region, a gate electrode formed on the gate insulating film, and a body region surrounded by the source layer, the drain layer, the impurity layer region, and the gate insulating film on a section along a source-drain direction and being
    Type: Application
    Filed: April 29, 2005
    Publication date: May 18, 2006
    Inventor: Satoshi Inaba
  • Publication number: 20060073647
    Abstract: A semiconductor device comprising a multi Fin-FET structure capable of suppressing short channel effects, controlling a threshold voltage, driving a high current, and operating in a high-speed comprises a source region and a drain region disposed on a semiconductor substrate, a plurality of fins interconnecting the source region and drain region, a first gate electrode disposed on the semiconductor substrate and to one side face of each fin, a second gate electrode disposed on the semiconductor substrate and to the other side face of the fin to face the first gate electrode, and separated from the first gate electrode, a plurality of first pad electrodes connected to respective first gate electrode, a first wiring interconnecting the plurality of first pad electrodes, a plurality of second pad electrodes connected to respective second gate electrode, and a second wiring interconnecting the plurality of second pad electrodes.
    Type: Application
    Filed: December 7, 2004
    Publication date: April 6, 2006
    Inventor: Satoshi Inaba
  • Publication number: 20060027870
    Abstract: A Fin-FET includes a support substrate, a buried insulation film provided on the support substrate, a fin part provided on the buried insulation film, the fin part being formed of a silicon layer and having mutually opposed side surfaces, and a gate electrode provided via an insulation film so as to cover at least a part of the side surfaces, wherein the gate electrode is provided to cover the part of the side surfaces of the fin part from a position lower than an interface between the support substrate and the buried oxide film.
    Type: Application
    Filed: April 7, 2005
    Publication date: February 9, 2006
    Inventor: Satoshi Inaba