Patents by Inventor SEAN T. MA
SEAN T. MA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10644137Abstract: An apparatus including a transistor device including a body including a channel region between a source region and a drain region; and a gate stack on the body in the channel region, wherein at least one of the source region and the drain region of the body include a contact surface between opposing sidewalls and the contact surface includes a profile such that a height dimension of the contact surface is greater at the sidewalls than at a point between the sidewalls. A method including forming a transistor device body on a circuit substrate, the transistor device body dimension defining a channel region between a source region and a drain region; forming a groove in the body in at least one of the source region and the drain region; and forming a gate stack on the body in the channel region.Type: GrantFiled: July 2, 2016Date of Patent: May 5, 2020Assignee: Intel CorporationInventors: Willy Rachmady, Matthew V. Metz, Gilbert Dewey, Sean T. Ma, Chandra S. Mohapatra, Sanaz K. Gardner, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
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Patent number: 10636912Abstract: An apparatus is described. The apparatus includes a FINFET transistor. The FINFET transistor comprises a tapered subfin structure having a sidewall surface area that is large enough to induce aspect ratio trapping of lattice defects along sidewalls of the subfin structure so that the defects are substantially prevented from reaching said FINFET transistor's channel.Type: GrantFiled: June 30, 2016Date of Patent: April 28, 2020Assignee: Intel CorporationInventors: Gilbert Dewey, Willy Rachmady, Matthew V. Metz, Jack T. Kavalieros, Chandra S. Mohapatra, Sean T. Ma, Tahir Ghani, Anand S. Murthy
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Publication number: 20200098925Abstract: Techniques are disclosed for an integrated circuit including a ferroelectric gate stack including a ferroelectric layer, an interfacial oxide layer, and a gate electrode. The ferroelectric layer can be voltage activated to switch between two ferroelectric states. Employing such a ferroelectric layer provides a reduction in leakage current in an off-state and provides an increase in charge in an on-state. The interfacial oxide layer can be formed between the ferroelectric layer and the gate electrode. Alternatively, the ferroelectric layer can be formed between the interfacial oxide layer and the gate electrode.Type: ApplicationFiled: September 25, 2018Publication date: March 26, 2020Applicant: INTEL CORPORATIONInventors: Gilbert Dewey, Willy Rachmady, Jack T. Kavalieros, Cheng-Ying Huang, Matthew V. Metz, Sean T. Ma, Harold Kennel, Tahir Ghani
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Publication number: 20200098753Abstract: Techniques are disclosed for integrating semiconductor oxide materials as alternate channel materials for n-channel devices in integrated circuits. The semiconductor oxide material may have a wider band gap than the band gap of silicon. Additionally or alternatively, the high mobility, wide band gap semiconductor oxide material may have a higher electron mobility than silicon. The use of such semiconductor oxide materials can provide improved NMOS channel performance in the form of less off-state leakage and, in some instances, improved electron mobility as compared to silicon NMOS channels.Type: ApplicationFiled: September 25, 2018Publication date: March 26, 2020Applicant: INTEL CORPORATIONInventors: Gilbert Dewey, Willy Rachmady, Jack T. Kavalieros, Cheng-Ying Huang, Matthew V. Metz, Sean T. Ma, Harold Kennel, Tahir Ghani, Abhishek A. Sharma
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Publication number: 20200083225Abstract: Disclosed herein are memory cells and memory arrays, as well as related methods and devices. For example, in some embodiments, a memory device may include: a support having a surface; and a three-dimensional array of memory cells on the surface of the support, wherein individual memory cells include a transistor and a capacitor, and a channel of the transistor in an individual memory cell is oriented parallel to the surface.Type: ApplicationFiled: September 7, 2018Publication date: March 12, 2020Applicant: Intel CorporationInventors: Sean T. Ma, Aaron D. Lilak, Abhishek A. Sharma, Van H. Le, Seung Hoon Sung, Gilbert W. Dewey, Benjamin Chu-Kung, Jack T. Kavalieros, Tahir Ghani
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Publication number: 20200066843Abstract: An electronic device comprises a channel layer on a buffer layer on a substrate. The channel layer has a first portion and a second portion adjacent to the first portion. The first portion comprises a first semiconductor. The second portion comprises a second semiconductor that has a bandgap greater than a bandgap of the first semiconductor.Type: ApplicationFiled: June 30, 2017Publication date: February 27, 2020Inventors: Sean T. MA, Gilbert DEWEY, Willy RACHMADY, Matthew V. METZ, Cheng-Ying HUANG, Harold W. KENNEL, Jack T. KAVALIEROS, Anand S. MURTHY, Tahir GHANI
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Publication number: 20200066855Abstract: An apparatus including a transistor device disposed on a surface of a circuit substrate, the device including a body including opposing sidewalls defining a width dimension and a channel material including indium, the channel material including a profile at a base thereof that promotes indium atom diffusivity changes in the channel material in a direction away from the sidewalls. A method including forming a transistor device body on a circuit substrate, the transistor device body including opposing sidewalls and including a buffer material and a channel material on the buffer material, the channel material including indium and the buffer material includes a facet that promotes indium atom diffusivity changes in the channel material in a direction away from the sidewalls; and forming a gate stack on the channel material.Type: ApplicationFiled: April 1, 2016Publication date: February 27, 2020Inventors: Chandra S. MOHAPATRA, Glenn A. GLASS, Harold W. KENNEL, Anand S. MURTHY, Willy RACHMADY, Gilbert DEWEY, Sean T. MA, Matthew V. METZ, Jack T. KAVALIEROS, Tahir GHANI
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Publication number: 20200044059Abstract: Disclosed herein are tri-gate transistor arrangements, and related methods and devices. For example, in some embodiments, a transistor arrangement may include a fin stack shaped as a fin extending away from a base, and a subfin dielectric stack. The fin includes a subfin portion and a channel portion, the subfin portion being closer to the base than the channel portion. The subfin dielectric stack includes a transistor dielectric material, and a fixed charge liner material disposed between the transistor dielectric material and the subfin portion of the fin.Type: ApplicationFiled: December 14, 2016Publication date: February 6, 2020Applicant: Intel CorporationInventors: Sean T. Ma, Aaron D. Lilak, Justin R. Weber, Harold W. Kennel, Willy Rachmady, Gilbert W. Dewey, Cheng-Ying Huang, Matthew V. Metz, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
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Patent number: 10529808Abstract: An apparatus including a transistor device on a substrate including an intrinsic layer including a channel; a source and a drain on opposite sides of the channel; and a diffusion barrier between the intrinsic layer and each of the source and the drain, the diffusion barrier including a conduction band energy that is less than a conduction band energy of the channel and greater than a material of the source and drain. A method including defining an area of an intrinsic layer on a substrate for a channel of a transistor device; forming a diffusion barrier layer in an area defined for a source and a drain; and forming a source on the diffusion barrier layer in the area defined for the source and forming a drain in the area defined for the drain.Type: GrantFiled: April 1, 2016Date of Patent: January 7, 2020Assignee: Intel CorporationInventors: Chandra S. Mohapatra, Harold W. Kennel, Glenn A. Glass, Will Rachmady, Gilbert Dewey, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani, Matthew V. Metz, Sean T. Ma
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Publication number: 20200006510Abstract: In various embodiments, the disclosure describes transistors having non-vertical gates. In one embodiment, the non-vertical gates can have a curved or wide angle gate in order to reduce the electric field crowing on the drain side of the gate edge and/or portions having corners and thereby reduce leakage current in the transistor. In one embodiment, the non-vertical gate can be generated by one or more etching steps (for example, isotropic etching steps) of an underlying channel during the fabrication of a transistor having the non-vertical gate. In one embodiment, the non-vertical gate can be generated by one or more directional etching steps that may expose various facets having predetermined orientations of a source and/or drain associated with the transistor.Type: ApplicationFiled: March 31, 2017Publication date: January 2, 2020Applicant: Intel CorporationInventors: Cheng-Ying Huang, Sean T. Ma, Willy Rachmady, Gilbert Dewey, Matthew V. Metz, Harold W. Kennel, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
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Publication number: 20200006501Abstract: Solid-state assemblies including dielectric lining layers having localized charges are provided. Processes to form the solid-state assemblies also are provided. The solid-state assemblies can included in CMOS transistors, where first dielectric lining layers having localized charges of positive polarity can be adjacent to the PMOS member and a second dielectric lining layers having localized charges of positive polarity can be adjacent to an NMOS member. The first dielectric lining layers can be adjacent to a first gate electrode of the CMOS transistor, and the second dielectric lining can be adjacent to a second gate electrode of the CMOS transistor. The first dielectric lining layers and the second dielectric lining layers can improve, at least in part, the performance of the CMOS transistor by attracting mobile carriers into respective transport channels of the PMOS member and the NMOS member.Type: ApplicationFiled: March 31, 2017Publication date: January 2, 2020Applicant: Intel CorporationInventors: Willy Rachmady, Sean T. Ma, Matthew V. Metz, Nicholas G. Minutillo, Cheng-Ying Huang, Dewey Gilbert, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
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Publication number: 20190341481Abstract: An apparatus is described. The apparatus includes a FINFET transistor. The FINFET transistor comprises a tapered subfin structure having a sidewall surface area that is large enough to induce aspect ratio trapping of lattice defects along sidewalls of the subfin structure so that the defects are substantially prevented from reaching said FINFET transistor's channel.Type: ApplicationFiled: June 30, 2016Publication date: November 7, 2019Inventors: Gilbert DEWEY, Willy RACHMADY, Matthew V. METZ, Jack T. KAVALIEROS, Chandra S. MOHAPATRA, Sean T. MA, Tahir GHANI, Anand S. MURTHY
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Publication number: 20190326175Abstract: An apparatus is provided which comprises: a fin; a layer formed on the fin, the layer dividing the fin in a first section and a second section; a first device formed on the first section of the fin; and a second device formed on the second section of the fin.Type: ApplicationFiled: March 30, 2017Publication date: October 24, 2019Applicant: Intel CorporationInventors: Aaron D. Lilak, Sean T. Ma, Justin R. Weber, Patrick Morrow, Rishabh Mehandru
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Publication number: 20190305101Abstract: Techniques and mechanisms for improved performance characteristics of a transistor device. In an embodiment, a transistor of an integrated circuit comprises a source, a drain, a gate, a gate dielectric and a semiconductor structure which adjoins the gate dielectric. The semiconductor structure is configured to provide a conductive channel between the source and drain. The semiconductor structure includes first, second and third portions, the second portion between the source and the gate, and the third portion between the drain and the gate, wherein the first portion connects the second portion and third portion to one another. A thickness of the first portion is less than another thickness of one of the second portion or the third portion. In another embodiment, the locations of thicker portions of semiconductor structure mitigate overall transistor capacitance, while a thinner intermediary portion of the semiconductor structure promotes good sub-threshold swing characteristics.Type: ApplicationFiled: March 28, 2018Publication date: October 3, 2019Applicant: Intel CorporationInventors: Abhishek A. Sharma, Van H. Le, Sean T. Ma, Jack Kavalieros, Benjamin Chu-Kung
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Publication number: 20190305138Abstract: Described is a thin film transistor which comprises: a dielectric comprising a dielectric material; a first structure adjacent to the dielectric, the first structure comprising a first material; a second structure adjacent to the first structure, the second structure comprising a second material wherein the second material is doped; a second dielectric adjacent to the second structure; a gate comprising a metal adjacent to the second dielectric; a spacer partially adjacent to the gate and the second dielectric; and a contact adjacent to the spacer.Type: ApplicationFiled: March 30, 2018Publication date: October 3, 2019Applicant: Intel CorporationInventors: Abhishek A. Sharma, Sean T. Ma, Van H. Le, Jack T. Kavalieros, Gilbert Dewey
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Publication number: 20190296145Abstract: A buffer layer is deposited on a substrate. A first III-V semiconductor layer is deposited on the buffer layer. A second III-V semiconductor layer is deposited on the first III-V semiconductor layer. The second III-V semiconductor layer comprises a channel portion and a source/drain portion. The first III-V semiconductor layer acts as an etch stop layer to etch a portion of the second III-V semiconductor layer to form the source/drain portion.Type: ApplicationFiled: September 26, 2016Publication date: September 26, 2019Inventors: Cheng-Ying HUANG, Willy RACHMADY, Matthew V. METZ, Gilbert DEWEY, Jack T. KAVALIEROS, Sean T. MA, Harold KENNEL
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Patent number: 10411007Abstract: Monolithic FETs including a channel region in a first semiconductor material disposed over a substrate. While a mask, such as a gate stack or sacrificial gate stack, is covering a channel region, a semiconductor spacer of a semiconductor material with a band offset relative to the channel material is grown, for example on at least a drain end of the channel region to introduce at least one charge carrier-blocking band offset between the channel semiconductor and a drain region of a third III-V semiconductor material. In some N-type transistor embodiments, the carrier-blocking band offset is a conduction band offset of at least 0.1 eV. A wider band gap and/or a blocking conduction band offset may contribute to reduced gate induced drain leakage (GIDL). Source/drain regions couple electrically to the channel region through the semiconductor spacer, which may be substantially undoped (i.e. intrinsic) or doped.Type: GrantFiled: September 25, 2015Date of Patent: September 10, 2019Assignee: Intel CorporationInventors: Gilbert Dewey, Willy Rachmady, Matthew V. Metz, Chandra S. Mohapatra, Sean T. Ma, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
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Publication number: 20190267289Abstract: A transistor device comprising a channel disposed on a substrate between a source and a drain, a gate electrode disposed on the channel, wherein the channel comprises a channel material that is separated from a body of the same material on a substrate. A method comprising forming a trench in a dielectric layer on an integrated circuit substrate, the trench comprising dimensions for a transistor body including a width; depositing a spacer layer in a portion of the trench, the spacer layer narrowing the width of the trench; forming a channel material in the trench through the spacer layer; recessing the dielectric layer to define a first portion of the channel material exposed and a second portion of the channel material in the trench; and separating the first portion of the channel material from the second portion of the channel material.Type: ApplicationFiled: September 30, 2016Publication date: August 29, 2019Applicant: Intel CorporationInventors: Gilbert DEWEY, Matthew V. METZ, Sean T. MA, Cheng-Ying HUANG, Tahir GHANI, Anand S. MURTHY, Harold W. KENNEL, Nicholas G. MINUTILLO, Jack T. KAVALIEROS, Willy RACHMADY
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Publication number: 20190214500Abstract: An embodiment includes a transistor comprising: first, second, and third layers each including a group III-V material; a channel included in the second layer, which is between the first and third layers; and a gate having first and second gate portions; wherein (a)(i) the first and third layers are doped, (a)(ii) the channel is between the first and second gate portions and the second gate portion is between the channel and a substrate, (a)(iii) a first axis intersects the first, second, and third layers but not the first gate portion, and (a)(iv) a second axis, parallel to the first axis, intersects the first and second gate portions and the channel. Other embodiments are described herein.Type: ApplicationFiled: September 30, 2016Publication date: July 11, 2019Inventors: Cheng-Ying Huang, Matthew V. Metz, Gilbert Dewey, Willy Rachmady, Jack T. Kavalieros, Sean T. Ma
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Patent number: 10340374Abstract: Monolithic FETs including a channel region of a first semiconductor material disposed over a substrate. While a mask, such as a gate stack or sacrificial gate stack, is covering the channel region, an impurity-doped compositionally graded semiconductor is grown, for example on at least a drain end of the channel region to introduce a carrier-blocking conduction band offset and/or a wider band gap within the drain region of the transistor. In some embodiments, the compositional grade induces a carrier-blocking band offset of at least 0.25 eV. The wider band gap and/or band offset contributes to a reduced gate induced drain leakage (GIDL). The impurity-doped semiconductor may be compositionally graded back down from the retrograded composition to a suitably narrow band gap material providing good ohmic contact. In some embodiments, the impurity-doped compositionally graded semiconductor growth is integrated into a gate-last, source/drain regrowth finFET fabrication process.Type: GrantFiled: September 25, 2015Date of Patent: July 2, 2019Assignee: Intel CorporationInventors: Gilbert Dewey, Willy Rachmady, Matthew V. Metz, Chandra S. Mohapatra, Sean T. Ma, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani