Patents by Inventor SEAN T. MA
SEAN T. MA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20200279931Abstract: An apparatus is provided which comprises: a source and a drain with a channel region therebetween, the channel region comprising a semiconductor material, and a gate dielectric layer over at least a portion of the channel region, wherein the gate dielectric layer comprises a first thickness proximate to the source and a second thickness proximate to the drain, wherein the second thickness is greater than the first thickness, and wherein at least a portion of the gate dielectric layer comprises a linearly varying thickness over the channel region. Other embodiments are also disclosed and claimed.Type: ApplicationFiled: December 27, 2017Publication date: September 3, 2020Applicant: Intel CorporationInventors: Dipanjan Basu, Sean T. Ma, Willy Rachmady, Jack T. Kavalieros
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Publication number: 20200227533Abstract: Group III-V semiconductor devices having dual workfunction gate electrodes and their methods of fabrication are described. In an example, an integrated circuit structure includes a gallium arsenide layer on a substrate. A channel structure is on the gallium arsenide layer. The channel structure includes indium, gallium and arsenic. A source structure is at a first end of the channel structure and a drain structure is at a second end of the channel structure. A gate structure is over the channel structure, the gate structure having a first workfunction material laterally adjacent a second workfunction material. The second workfunction material has a different workfunction than the first workfunction material.Type: ApplicationFiled: September 26, 2017Publication date: July 16, 2020Inventors: Sean T. MA, Willy RACHMADY, Gilbert DEWEY, Cheng-Ying HUANG, Dipanjan BASU
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Publication number: 20200227416Abstract: Embodiments disclosed herein include three-dimensional 3D arrays of memory cells and methods of forming such devices. In an embodiment a memory device comprises, a substrate surface, and a three-dimensional (3D) array of memory cells over the substrate surface. In an embodiment each memory cell comprises a transistor and a capacitor. In an embodiment the transistor of each memory cell comprises, a semiconductor channel, with a first end of the semiconductor channel electrically coupled to a bit line that runs substantially parallel to the substrate surface, and a second end of the semiconductor channel is electrically coupled to the capacitor. The transistor may also comprise a gate dielectric on a surface of the semiconductor channel between the first end and the second end of the semiconductor channel. In an embodiment, the gate dielectric is contacted by a word line that runs substantially perpendicular to the substrate surface.Type: ApplicationFiled: January 14, 2019Publication date: July 16, 2020Inventors: Aaron LILAK, Sean T. MA, Abhishek SHARMA
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Publication number: 20200220024Abstract: A back-gated thin-film transistor (TFT) includes a gate electrode, a gate dielectric on the gate electrode, an active layer on the gate dielectric and having source and drain regions and a semiconductor region physically connecting the source and drain regions, a capping layer on the semiconductor region, and a charge trap layer on the capping layer. In an embodiment, a memory cell includes this back-gated TFT and a capacitor, the gate electrode being electrically connected to a wordline and the source region being electrically connected to a bitline, the capacitor having a first terminal electrically connected to the drain region, a second terminal, and a dielectric medium electrically separating the first and second terminals. In another embodiment, an embedded memory includes wordlines extending in a first direction, bitlines extending in a second direction crossing the first direction, and several such memory cells at crossing regions of the wordlines and bitlines.Type: ApplicationFiled: September 29, 2017Publication date: July 9, 2020Applicant: Intel CorporationInventors: Abhishek A. Sharma, Van H. Le, Jack T. Kavalieros, Cory E. Weber, Sean T. Ma, Tahir Ghani, Shriram Shivaraman, Gilbert Dewey
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Publication number: 20200203169Abstract: Group III-V semiconductor devices having asymmetric source and drain structures and their methods of fabrication are described. In an example, an integrated circuit structure includes a gallium arsenide layer on a substrate. A channel structure is on the gallium arsenide layer. The channel structure includes indium, gallium and arsenic. A source structure is at a first end of the channel structure and a drain structure is at a second end of the channel structure. The drain structure has a wider band gap than the source structure. A gate structure is over the channel structure.Type: ApplicationFiled: September 28, 2017Publication date: June 25, 2020Inventors: Sean T. MA, Gilbert DEWEY, Willy RACHMADY, Harold W. KENNEL, Cheng-Ying HUANG, Matthew V. METZ, Nicholas G. MINUTILLO, Jack T. KAVALIEROS, Anand S. MURTHY
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Publication number: 20200194435Abstract: Embodiments herein describe techniques for a semiconductor device including a memory cell vertically above a substrate. The memory cell includes a metal-insulator-metal (MIM) capacitor at a lower device portion, and a transistor at an upper device portion above the lower device portion. The MIM capacitor includes a first plate, and a second plate separated from the first plate by a capacitor dielectric layer. The first plate includes a first group of metal contacts coupled to a metal electrode vertically above the substrate. The first group of metal contacts are within one or more metal layers above the substrate in a horizontal direction in parallel to a surface of the substrate. Furthermore, the metal electrode of the first plate of the MIM capacitor is also a source electrode of the transistor. Other embodiments may be described and/or claimed.Type: ApplicationFiled: December 17, 2018Publication date: June 18, 2020Inventors: Aaron LILAK, Willy RACHMADY, Gilbert DEWEY, Kimin JUN, Hui Jae YOO, Patrick MORROW, Sean T. MA, Ahn PHAN, Abhishek SHARMA, Cheng-Ying HUANG, Ehren MANNEBACH
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Publication number: 20200185501Abstract: Disclosed herein are tri-gate and all-around-gate transistor arrangements, and related methods and devices. For example, in some embodiments, a transistor arrangement may include a channel material disposed over a substrate; a gate electrode of a first tri-gate or all-around-gate transistor, disposed over a first part of the channel material; and a gate electrode of a second tri-gate or all-around-gate transistor, disposed over a second part of the channel material. The transistor arrangement may further include a device isolation structure made of a fixed charge dielectric material disposed over a third part of the channel material, the third part being between the first part and the second part of the channel material.Type: ApplicationFiled: December 1, 2016Publication date: June 11, 2020Applicant: Intel CorporationInventors: Sean T. Ma, Willy Rachmady, Gilbert W. Dewey, Aaron D. Lilak, Justin R. Weber, Harold W. Kennel, Cheng-Ying Huang, Matthew V. Metz, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
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Publication number: 20200185504Abstract: An embodiment includes an apparatus comprising: a substrate; a thin film transistor (TFT) comprising: source, drain, and gate contacts; a semiconductor material, comprising a channel, between the substrate and the gate contact; a gate dielectric layer between the gate contact and the channel; and an additional layer between the channel and the substrate; wherein (a)(i) the channel includes carriers selected from the group consisting of hole carriers or electron carriers, (a)(ii) the additional layer includes an insulator material that includes charged particles having a polarity equal to a polarity of the carriers. Other embodiments are described herein.Type: ApplicationFiled: September 27, 2017Publication date: June 11, 2020Inventors: Abhishek A. Sharma, Van H. Le, Jack T. Kavalieros, Tahir Ghani, Gilbert Dewey, Shriram Shivaraman, Sean T. Ma, Benjamin Chu-Kung
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Patent number: 10651313Abstract: An embodiment includes a transistor comprising: first, second, and third layers each including a group III-V material; a channel included in the second layer, which is between the first and third layers; and a gate having first and second gate portions; wherein (a)(i) the first and third layers are doped, (a)(ii) the channel is between the first and second gate portions and the second gate portion is between the channel and a substrate, (a)(iii) a first axis intersects the first, second, and third layers but not the first gate portion, and (a)(iv) a second axis, parallel to the first axis, intersects the first and second gate portions and the channel. Other embodiments are described herein.Type: GrantFiled: September 30, 2016Date of Patent: May 12, 2020Assignee: Intel CorporationInventors: Cheng-Ying Huang, Matthew V. Metz, Gilbert Dewey, Willy Rachmady, Jack T. Kavalieros, Sean T. Ma
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Publication number: 20200144374Abstract: An electronic device comprises a first layer on a buffer layer on a substrate. A source/drain region is deposited on the buffer layer. The first layer comprises a first semiconductor. The source/drain region comprises a second semiconductor. The second semiconductor has a bandgap that is smaller than a bandgap of the first semiconductor. A gate electrode is deposited on the first layer.Type: ApplicationFiled: June 30, 2017Publication date: May 7, 2020Inventors: Sean T. MA, Cory E. WEBER, Dipanjan BASU, Harold W. KENNEL, Willy RACHMADY, Gilbert DEWEY, Jack T. KAVALIEROS, Anand S. MURTHY, Tahir GHANI, Matthew V. METZ, Cheng-ying HUANG
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Patent number: 10644137Abstract: An apparatus including a transistor device including a body including a channel region between a source region and a drain region; and a gate stack on the body in the channel region, wherein at least one of the source region and the drain region of the body include a contact surface between opposing sidewalls and the contact surface includes a profile such that a height dimension of the contact surface is greater at the sidewalls than at a point between the sidewalls. A method including forming a transistor device body on a circuit substrate, the transistor device body dimension defining a channel region between a source region and a drain region; forming a groove in the body in at least one of the source region and the drain region; and forming a gate stack on the body in the channel region.Type: GrantFiled: July 2, 2016Date of Patent: May 5, 2020Assignee: Intel CorporationInventors: Willy Rachmady, Matthew V. Metz, Gilbert Dewey, Sean T. Ma, Chandra S. Mohapatra, Sanaz K. Gardner, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
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Patent number: 10636912Abstract: An apparatus is described. The apparatus includes a FINFET transistor. The FINFET transistor comprises a tapered subfin structure having a sidewall surface area that is large enough to induce aspect ratio trapping of lattice defects along sidewalls of the subfin structure so that the defects are substantially prevented from reaching said FINFET transistor's channel.Type: GrantFiled: June 30, 2016Date of Patent: April 28, 2020Assignee: Intel CorporationInventors: Gilbert Dewey, Willy Rachmady, Matthew V. Metz, Jack T. Kavalieros, Chandra S. Mohapatra, Sean T. Ma, Tahir Ghani, Anand S. Murthy
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Publication number: 20200098925Abstract: Techniques are disclosed for an integrated circuit including a ferroelectric gate stack including a ferroelectric layer, an interfacial oxide layer, and a gate electrode. The ferroelectric layer can be voltage activated to switch between two ferroelectric states. Employing such a ferroelectric layer provides a reduction in leakage current in an off-state and provides an increase in charge in an on-state. The interfacial oxide layer can be formed between the ferroelectric layer and the gate electrode. Alternatively, the ferroelectric layer can be formed between the interfacial oxide layer and the gate electrode.Type: ApplicationFiled: September 25, 2018Publication date: March 26, 2020Applicant: INTEL CORPORATIONInventors: Gilbert Dewey, Willy Rachmady, Jack T. Kavalieros, Cheng-Ying Huang, Matthew V. Metz, Sean T. Ma, Harold Kennel, Tahir Ghani
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Publication number: 20200098753Abstract: Techniques are disclosed for integrating semiconductor oxide materials as alternate channel materials for n-channel devices in integrated circuits. The semiconductor oxide material may have a wider band gap than the band gap of silicon. Additionally or alternatively, the high mobility, wide band gap semiconductor oxide material may have a higher electron mobility than silicon. The use of such semiconductor oxide materials can provide improved NMOS channel performance in the form of less off-state leakage and, in some instances, improved electron mobility as compared to silicon NMOS channels.Type: ApplicationFiled: September 25, 2018Publication date: March 26, 2020Applicant: INTEL CORPORATIONInventors: Gilbert Dewey, Willy Rachmady, Jack T. Kavalieros, Cheng-Ying Huang, Matthew V. Metz, Sean T. Ma, Harold Kennel, Tahir Ghani, Abhishek A. Sharma
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Publication number: 20200083225Abstract: Disclosed herein are memory cells and memory arrays, as well as related methods and devices. For example, in some embodiments, a memory device may include: a support having a surface; and a three-dimensional array of memory cells on the surface of the support, wherein individual memory cells include a transistor and a capacitor, and a channel of the transistor in an individual memory cell is oriented parallel to the surface.Type: ApplicationFiled: September 7, 2018Publication date: March 12, 2020Applicant: Intel CorporationInventors: Sean T. Ma, Aaron D. Lilak, Abhishek A. Sharma, Van H. Le, Seung Hoon Sung, Gilbert W. Dewey, Benjamin Chu-Kung, Jack T. Kavalieros, Tahir Ghani
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Publication number: 20200066843Abstract: An electronic device comprises a channel layer on a buffer layer on a substrate. The channel layer has a first portion and a second portion adjacent to the first portion. The first portion comprises a first semiconductor. The second portion comprises a second semiconductor that has a bandgap greater than a bandgap of the first semiconductor.Type: ApplicationFiled: June 30, 2017Publication date: February 27, 2020Inventors: Sean T. MA, Gilbert DEWEY, Willy RACHMADY, Matthew V. METZ, Cheng-Ying HUANG, Harold W. KENNEL, Jack T. KAVALIEROS, Anand S. MURTHY, Tahir GHANI
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Publication number: 20200066855Abstract: An apparatus including a transistor device disposed on a surface of a circuit substrate, the device including a body including opposing sidewalls defining a width dimension and a channel material including indium, the channel material including a profile at a base thereof that promotes indium atom diffusivity changes in the channel material in a direction away from the sidewalls. A method including forming a transistor device body on a circuit substrate, the transistor device body including opposing sidewalls and including a buffer material and a channel material on the buffer material, the channel material including indium and the buffer material includes a facet that promotes indium atom diffusivity changes in the channel material in a direction away from the sidewalls; and forming a gate stack on the channel material.Type: ApplicationFiled: April 1, 2016Publication date: February 27, 2020Inventors: Chandra S. MOHAPATRA, Glenn A. GLASS, Harold W. KENNEL, Anand S. MURTHY, Willy RACHMADY, Gilbert DEWEY, Sean T. MA, Matthew V. METZ, Jack T. KAVALIEROS, Tahir GHANI
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Publication number: 20200044059Abstract: Disclosed herein are tri-gate transistor arrangements, and related methods and devices. For example, in some embodiments, a transistor arrangement may include a fin stack shaped as a fin extending away from a base, and a subfin dielectric stack. The fin includes a subfin portion and a channel portion, the subfin portion being closer to the base than the channel portion. The subfin dielectric stack includes a transistor dielectric material, and a fixed charge liner material disposed between the transistor dielectric material and the subfin portion of the fin.Type: ApplicationFiled: December 14, 2016Publication date: February 6, 2020Applicant: Intel CorporationInventors: Sean T. Ma, Aaron D. Lilak, Justin R. Weber, Harold W. Kennel, Willy Rachmady, Gilbert W. Dewey, Cheng-Ying Huang, Matthew V. Metz, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
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Patent number: 10529808Abstract: An apparatus including a transistor device on a substrate including an intrinsic layer including a channel; a source and a drain on opposite sides of the channel; and a diffusion barrier between the intrinsic layer and each of the source and the drain, the diffusion barrier including a conduction band energy that is less than a conduction band energy of the channel and greater than a material of the source and drain. A method including defining an area of an intrinsic layer on a substrate for a channel of a transistor device; forming a diffusion barrier layer in an area defined for a source and a drain; and forming a source on the diffusion barrier layer in the area defined for the source and forming a drain in the area defined for the drain.Type: GrantFiled: April 1, 2016Date of Patent: January 7, 2020Assignee: Intel CorporationInventors: Chandra S. Mohapatra, Harold W. Kennel, Glenn A. Glass, Will Rachmady, Gilbert Dewey, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani, Matthew V. Metz, Sean T. Ma
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Publication number: 20200006501Abstract: Solid-state assemblies including dielectric lining layers having localized charges are provided. Processes to form the solid-state assemblies also are provided. The solid-state assemblies can included in CMOS transistors, where first dielectric lining layers having localized charges of positive polarity can be adjacent to the PMOS member and a second dielectric lining layers having localized charges of positive polarity can be adjacent to an NMOS member. The first dielectric lining layers can be adjacent to a first gate electrode of the CMOS transistor, and the second dielectric lining can be adjacent to a second gate electrode of the CMOS transistor. The first dielectric lining layers and the second dielectric lining layers can improve, at least in part, the performance of the CMOS transistor by attracting mobile carriers into respective transport channels of the PMOS member and the NMOS member.Type: ApplicationFiled: March 31, 2017Publication date: January 2, 2020Applicant: Intel CorporationInventors: Willy Rachmady, Sean T. Ma, Matthew V. Metz, Nicholas G. Minutillo, Cheng-Ying Huang, Dewey Gilbert, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani