Abstract: A film-forming apparatus and method comprising a film-forming chamber for supplying a reaction gas, a cylindrical shaped liner provided in the film-forming chamber, a straightening vane provided above the liner for the reaction gas to pass through, wherein the outside of the film-forming chamber connects the inside of the liner via a substrate transfer portion provided at the wall of the film-forming chamber by moving the straightening vane from the position that the straightening vane closes the upper opening of the liner. A substrate supporting portion provided in the liner, for supporting the substrate before the film-forming to move the substrate in a vertical direction, a substrate transfer unit capable of moving inside the film-forming chamber through the substrate transfer portion, wherein the substrate is transferred between the substrate supporting portion and the substrate transfer unit.

Abstract: An engine includes: a first part that is provided in a first passage that interconnects an inside of a crankcase and a part of an intake passage at a downstream side of an adjustment part adjusting an intake air amount and changes gas flow in the first passage; and a second part that is provided in a second passage that interconnects the inside of the crankcase and a part of the intake passage located at an upstream side of the adjustment part and changes gas flow in the second passage. If an engine temperature is higher than a given value, and the degree of fuel decreasing correction exceeds a given value, the first part decreases the gas flow rate through the first passage and the second part restricts a flow direction in the second passage to a direction in which gas flows to the crankcase from the intake passage.

Abstract: In a control device for an internal combustion engine according to the present embodiment, the control device includes: cooling units arranged on a path where a coolant is circulated, and cooling an exhaust gas of an engine with the coolant flowing through the cooling units; an atmospheric pressure sensor detecting an atmosphere pressure; and ECUs deciding whether or not to perform an exhaust gas temperature control for suppressing a temperature of the exhaust gas based on whether or not a heat quantity is more than a decision value, and correcting the decision value to be lower as the atmosphere pressure is lower.

Abstract: According to this embodiment, a semiconductor substrate manufacturing apparatus for epitaxial growth in which gases are supplied to a wafer placed on a susceptor and in which a heater is provided on the back surface of the susceptor. As a result of this epitaxial growth, SiC film is deposited onto the susceptor in the film-forming chamber. The susceptor is then moved into a separate chamber and the SiC film deposited on the susceptor during the epitaxial process is removed. After removal of SiC film, regeneration of the SiC film of the susceptor occurs. This semiconductor substrate manufacturing apparatus makes it possible to remove film deposited on a susceptor during epitaxial growth that would otherwise limit manufacturing yield.

Abstract: An amount of aggregation of particulate matter is estimated with a high degree of accuracy.

Abstract: Aggregation of the particulate matter is facilitated. A particulate matter processing apparatus (1) comprises an electrode (5) which is provided in an exhaust gas passage (3) of an internal combustion engine, which extends from a wall surface of the exhaust gas passage (3) toward an inner side of the exhaust gas passage (3), which is bent at a bent portion (51) toward an upstream side or a downstream side in a flow direction (B) of an exhaust gas, and which extends toward the upstream side or the downstream side in the flow direction (B) of the exhaust gas, wherein the electrode (5) is formed so that a field intensity, which is provided between the electrode (5) and the wall surface of the exhaust gas passage (3) on the upstream side, is larger than that provided on the downstream side.

Abstract: An engine includes: a first part that is provided in a first passage that interconnects an inside of a crankcase and a part of an intake passage at a downstream side of an adjustment part adjusting an intake air amount and changes gas flow in the first passage; and a second part that is provided in a second passage that interconnects the inside of the crankcase and a part of the intake passage located at an upstream side of the adjustment part and changes gas flow in the second passage. If an engine temperature is higher than a given value, and the degree of fuel decreasing correction exceeds a given value, the first part decreases the gas flow rate through the first passage and the second part restricts a flow direction in the second passage to a direction in which gas flows to the crankcase from the intake passage.

Abstract: An engine includes a normal fuel tank, fuel gas tank, an in-tank injection valve and a fuel gas supply valve. During operation of the engine, in a state where the fuel gas supply valve is closed, a fuel is injected into the fuel gas tank through the in-tank injection valve to generate a fuel gas by vaporizing the fuel. The fuel gas is stored in the fuel gas tank and is maintained in the gas phase due to the natural decompression even after the engine is stopped. To start the engine, the fuel gas supply valve is opened to supply the fuel gas in the fuel gas tank to a surge tank. Thus, compared with the case where the fuel gas is generated at the start of the engine, the fuel gas can be quickly supplied into the cylinder, so that the ability to start the engine is improved.

Abstract: A semiconductor device manufacturing apparatus includes a chamber in which a wafer is loaded; a first gas supply unit for supplying a process gas into the chamber; a gas exhaust unit for exhausting a gas from the chamber; a wafer support member on which the wafer is placed; a ring on which the wafer support member is placed; a rotation drive control unit connected to the ring to rotate the wafer; a heater disposed in the ring and comprising a heater element for heating the wafer to a predetermined temperature and including an SiC layer on at least a surface, and a heater electrode portion molded integrally with a heater element and including an SiC layer on at least a surface; and a second gas supply unit for supplying an SiC source gas into the ring.

Abstract: Aggregation of particulate matter is facilitated. Provision is made for an electrode that is arranged in an exhaust passage of an internal combustion engine with a voltage to be applied thereto being able to be changed, a detection device that detects an electric current passing through the electrode, a determination device that determines whether a pulse current has been generated in the electric current detected by the detection device, and a control device that reduces the voltage to be applied more than that at this time in cases where a determination has been made by the determination device that a pulse current has been generated.

Abstract: An objective of the present invention is to stabilize the fuel injection amount for each cylinder and to execute fuel injection control accurately in a single-pressure-feed dual-injection type alcohol fuel injection system. An engine includes two injection valves and and a single-pressure-feed dual-injection type fuel supply system. The fuel supply system is configured such that fuel is injected sequentially in two cylinders during the pressure-feed-interval period from the execution of one fuel pressure-feed operation to the execution of the next fuel pressure-feed operation. If the alcohol concentration in the fuel is higher than a predetermined determination value ? at a startup operation time, an ECU executes only a cylinder injection for the first of the two cylinders described above, and executes both an intake passage injection and a cylinder injection for the second cylinder.

Abstract: A particulate matter control system includes: an electrode that is provided in an exhaust pipe of an internal combustion engine; a power supply that is connected to the electrode and that applies voltage; a particle number detecting unit that detects the particle number of particulate matter on a downstream side of the electrode; a calculation unit that calculates a reduction rate of the particle number at the time when voltage is applied on the basis of the particle number detected by the particle number detecting unit at the time when voltage is applied and the particle number detected by the particle number detecting unit at the time when no voltage is applied; and a determination unit that determines that there is a failure when the reduction rate of the particle number, calculated by the calculation unit, is smaller than a threshold.

Abstract: An amount of aggregation of particulate matter is estimated with a high degree of accuracy.

Abstract: Aggregation of particulate matter is facilitated. Provision is made for an electrode arranged in an exhaust passage of an internal combustion engine, a power supply connected to the electrode for applying a voltage thereto, an air fuel ratio detection device to detect or estimate an air fuel ratio of an exhaust gas which flows through the exhaust passage, and an electric power control device to make electric power supplied to the electrode from the power supply larger in cases where the air fuel ratio detected or estimated by the air fuel ratio detection device is a rich air fuel ratio than in cases where it is a stoichiometric air fuel ratio or a lean air fuel ratio.

Abstract: A concentration of HC in an exhaust gas is estimated with a high degree of accuracy by making use of a particulate matter processing apparatus (1).

Abstract: An excessively large electric current is suppressed from flowing to an electrode. Provision is made for an electrode arranged in an exhaust passage of an internal combustion engine, a power supply connected to the electrode for applying a voltage thereto, an air fuel ratio detection device for detecting or estimating an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a power upper limit setting device for setting an upper limit for electric power supplied to the electrode from the power supply in cases where the air fuel ratio detected or estimate.

Abstract: Aggregation of particulate matter is facilitated. Provision is made for an electrode that is arranged in an exhaust passage of an internal combustion engine with a voltage to be applied thereto being able to be changed, a detection device that detects an electric current passing through the electrode, a determination device that determines whether a pulse current has been generated in the electric current detected by the detection device, and a control device that reduces the voltage to be applied more than that at this time in cases where a determination has been made by the determination device that a pulse current has been generated.

Abstract: An excessively large electric current is suppressed from flowing to an electrode. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a voltage control device that makes the voltage applied to the electrode from the power supply smaller in cases where the air fuel ratio detected by the air fuel ratio detection device is a rich air fuel ratio, than in cases where it is a stoichiometric air fuel ratio or a lean air fuel ratio.

Abstract: A heater for heating a wafer includes elements that are arranged at a distance from one another in a rotationally symmetrical fashion with respect to a shaft extending through a center of the wafer, an electrode being provided to each of the elements to heat the wafer uniformly.

Abstract: A gas circulation engine includes a combustion chamber to which high-pressure fuel in a first high-pressure fuel supply passage, an oxidant and working gas are supplied; a circulation path that connects an intake-side portion and an exhaust-side portion of the combustion chamber to each other; a fuel bleed-off tank into which the high-pressure fuel in the first high-pressure fuel supply passage is bled off; a fuel bleed-off valve that permits or shuts off communication between the first high-pressure fuel supply passage and the fuel bleed-off tank; and a fuel bleed-off control unit that permits communication between the first high-pressure fuel supply passage and the fuel bleed-off tank by opening the fuel bleed-off valve when the engine is stopped, the communication between the first high-pressure fuel supply passage and the fuel bleed-off tank being shut off during operation of the engine.