Abstract: A component having a mounting support, a displaceable part, which is joined to the mounting support by at least one flexible joining component, and an actuator device. The actuator device is configured to set at least one subunit of the displaceable part and/or of the at least one flexible joining component into a first oscillatory motion along a first axis in such a manner, that the displaceable part may be set into an angular oscillatory motion about a first rotational axis. The actuator device is additionally configured to set the same and/or another subunit into a second oscillatory motion having a motion component along a second axis at an inclination to the first axis, in such a manner, that, in addition to the angular oscillatory motion, the displaceable part is displaceable about a second rotational axis.

Abstract: A manufacturing method for an encapsulated micromechanical component has the following steps: creating an intermediate substrate having a plurality of perforations; laminating an encapsulation substrate onto a front side of the intermediate substrate, which closes the perforations on the front side; laminating an MEMS functional wafer onto a rear side of the intermediate substrate; the MEMS functional wafer being aligned with the intermediate substrate in such a way that the perforations form cavities over the corresponding functional areas of the MEMS functional wafer.

Abstract: A magnetic actuator includes: a plate having a main plane of extent and mounted rotatably about at least one first axis of rotation which is parallel to the main plane of extent, the plate having at least one conductor loop parallel to the main plane of extent; a magnetic bracket situated beneath the plate and having a U-shaped magnetic flux conducting rail and a hard magnet whose magnetization is perpendicular to the U-shaped opening, the magnetic bracket and the plate being aligned with one another in such a way that the opening in the magnetic bracket points toward the main plane of extent of the plate, the U-shaped magnetic flux conducting rail having a main direction of extent parallel to the first axis of rotation, and the plate being deflectable about the at least one axis of rotation by energizing the at least one conductor loop.

Abstract: A cover device is described for a micro-optomechanical component having a substrate which has a maximum surface whose surface area is equal to or greater than a single surface area of any other surface of the substrate, and having at least one window, made of a light-transmitting material, which is inclined with respect to the maximum surface of the substrate, the at least one window being situated within at least one continuous opening provided in the substrate. A manufacturing method for a cover device for a micro-optomechanical component is also described. Furthermore, a micro-optomechanical component and a manufacturing method for a micro-optomechanical component are described.

Abstract: A method for producing oblique surfaces in a substrate, comprising a formation of recesses on both surfaces of the substrate, until the recesses are so deep that the substrate is perforated by the two recesses. One recess is produced going out from a first main surface in the region of a first surface, and the other recess is produced going out from the second main surface in the region of a second surface, so that the first surface and the second surface do not coincide along a surface normal of the main surfaces of the substrate. Subsequently, flexible diaphragms are attached over the recesses on each of the main surfaces. If a vacuum pressure is then produced inside the recesses, the flexible diaphragms each curve in the direction of the recesses until their surfaces facing the substrate come into contact with one another, generally in the center of the recesses.

Abstract: A micromechanical component having a base part, a swiveling part, which has an electrically conductive material, and a swiveling part insulation which electrically insulates a first and a second section of the swiveling part from each other. A first flexible, electrically conductive connecting element connects the base part to the first swiveling part section, and a second flexible, electrically conductive connecting element connects the base part to the second swiveling part section.

Abstract: A micromechanical component has a holding device and an adjustable component, which is adjustable with respect to the holding device at least from a first position into a second position, and which is connected via at least one spring to the holding device. The micromechanical component also includes at least one silicide-containing line segment situated on the at least one spring.

Abstract: A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis.

Abstract: A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.

Abstract: A method for operating an electrostatic drive having a stator electrode and an actuator electrode which are designed as multilayer electrodes having subunits includes: predeflecting the actuator electrode with respect to the stator electrode from its non-energized starting position into a first end position by applying a first potential to the first stator electrode subunit, and applying a second potential which is different from the first potential to the first actuator electrode subunit, and applying a third potential which is different from the first potential and the second potential, to the second stator electrode subunit and to the second actuator electrode subunit.

Abstract: An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described.

Abstract: A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

Abstract: A magnetic yoke (10) having a magnet (12) having a magnetization direction (14) on which a first yoke arm (18a) and a second yoke arm (18b) are mounted in such a way that the magnet (12) and the two yoke arms (18a, 18b) define a yoke intermediate space (20) extending from a front side to a rear side of the magnetic yoke; and first pole shoe (22a) configured on the first yoke arm (18a) and a second pole shoe (22b) configured on the second yoke arm (18b), between which a yoke gap (24) is located; the first pole shoe (22a) having a first width (b1) at a first end (40a) on the front side of the magnetic yoke (10), in parallel to the magnetization direction (14) of the magnet (12), and having a second width (b2) unequal to the first width (b1) at a second end (42a) facing opposite the first end (40a) on the rear side of the magnetic yoke (10), in parallel to the magnetization direction (14) of the magnet (12).

Abstract: A method for reducing microcrack formation and crack growth in the glass carrier of a component having a micromechanical sensor element that is bonded to the glass carrier. The upper side of the glass carrier acts as a bonding surface for the sensor element. The rear side of the glass carrier, situated opposite the upper side, acts as a mounting surface for the component, and the glass carrier has side surfaces that connect the upper side and the rear side. In particular, the glass carrier is formed by a segment of a glass wafer into which at least the contours of the glass carrier have been stamped, so that at least the areas produced in this way of the side surfaces of the glass carrier and the rear side of the glass carrier form a surface that is largely closed and free of microcracks.

Abstract: A process for manufacturing a component is described. In a first manufacturing step a base structure having a substrate, a diaphragm, and a cavern region is provided. The diaphragm is oriented substantially parallel to a main plane of extension of the substrate. The cavern region is situated between the substrate and the diaphragm, and has an access opening. In a second manufacturing step, a first conductive layer is provided at least partially in the cavern region, in particular on a second side of the diaphragm facing the substrate, perpendicularly to the main plane of extension.

Abstract: A method for manufacturing chips (1, 2), in which at least one diaphragm (11, 12) is produced in the surface layer of a semiconductor substrate (10) spanning a cavity (13). The functionality of the chip (1, 2) is then integrated into the diaphragm (11, 12). In order to separate the chip (1, 2), the diaphragm (11, 12) is detached from the substrate composite. The method according to the present invention is characterized by metal plating of the back of the chip (1, 2) in an electroplating process before the chip is separated.

Abstract: In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.

Abstract: An electrode comb for a micromechanical component includes at least one electrode finger for which a first electrode finger subunit with a first central longitudinal axis and a second electrode finger subunit with a second central longitudinal axis are defined. The second central longitudinal axis are defined is inclined in relation to the first central longitudinal axis about a bend angle not equal to 0° and not equal to 180°.

Abstract: A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.

Abstract: The present invention relates to a magnetic yoke (300) having a yoke core that has a magnet (202), on which a first yoke arm (210) and a second yoke arm (210) are developed in such a way that the magnet (202) and the two yoke arms (210) open up a yoke opening, and having a first pair of pole pieces (212), which extend into the yoke opening and are positioned at a distance to each other in a first direction in such a way that a first gap (214) is developed between the first pair of pole pieces (212) and having a second pair of pole pieces (254), which extend into the yoke opening and are positioned in a second direction, that is aligned perpendicular to the first direction, at a distance from each other in such a way that a second gap (256) is developed between the second pair of pole pieces (254). The present invention also relates to a micromechanical component having such a magnetic yoke (300).