Patents by Inventor Steven M. Zuniga

Steven M. Zuniga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Carrier head with retaining ring and carrier ring
    Patent number: 8021215
    Abstract: A carrier head that has a housing, a base assembly, a retaining ring, a carrier ring, and a flexible membrane is described. The base assembly is vertically movable relative to the housing. The retaining ring is connected to and vertically movable relative to the base assembly and has a lower surface configured to contact a polishing pad and an inner surface configured to circumferentially surround the edge of a substrate to retain the substrate. The carrier ring is connected to and vertically fixed relative to the base assembly, circumferentially surrounds the retaining ring to prevent lateral motion of the retaining ring, and has a bottom surface configured to contact a polishing pad.
    Type: Grant
    Filed: February 1, 2010
    Date of Patent: September 20, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Steven M. Zuniga, Andrew J. Nagengast, Jeonghoon Oh
  • Flexible Membrane for Carrier Head
    Publication number: 20110212672
    Abstract: A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
    Type: Application
    Filed: May 10, 2011
    Publication date: September 1, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Steven M. Zuniga, Andrew J. Nagengast, Jeonghoon Oh
  • RETAINING RING WITH SHAPED SURFACE
    Publication number: 20110195639
    Abstract: A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
    Type: Application
    Filed: April 18, 2011
    Publication date: August 11, 2011
    Inventors: Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer, Sidney P. Huey, Jeonghoon Oh, Trung T. Doan, Jeffrey Schmidt, Martin S. Wohlert, Kerry F. Hughes, James C. Wang, Danny Cam Toan Lu, Romain Beau De Lamenie, Venkata R. Balagani, Aden Martin Allen, Michael Jon Fong
  • APPARATUS AND METHOD FOR SIMULTANEOUS TREATMENT OF MULTIPLE WORKPIECES
    Publication number: 20110140334
    Abstract: A system for simultaneously treating multiple workpieces is configured with sites, configured to hold respective workpieces, affixed on a rotatable base. Each site has a shelf accommodating an interior space and may be positioned by base rotation in alignment with a station of fixed location. Each station is equipped with an active component. The active components are movable simultaneously within respective stations into the respective interior spaces of respective aligned sites.
    Type: Application
    Filed: December 11, 2009
    Publication date: June 16, 2011
    Applicant: TWIN CREEKS TECHNOLOGIES, INC.
    Inventors: Steven M. Zuniga, Derek G. Aqui, Andrew J. Nagengast, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal
  • TWO-CHAMBER SYSTEM AND METHOD FOR SERIAL BONDING AND EXFOLIATION OF MULTIPLE WORKPIECES
    Publication number: 20110143520
    Abstract: A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.
    Type: Application
    Filed: December 11, 2009
    Publication date: June 16, 2011
    Applicant: TWIN CREEKS TECHNOLOGIES, INC.
    Inventors: Steven M. Zuniga, Derek G. Aqui, Andrew J. Nagengast, Kirk G. Liebscher, John M. Alexander, Keenan Leon Guerrero
  • APPARATUS AND METHOD FOR SIMULTANEOUS TREATMENT OF MULTIPLE WORKPIECES
    Publication number: 20110143521
    Abstract: A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.
    Type: Application
    Filed: December 11, 2009
    Publication date: June 16, 2011
    Applicant: TWIN CREEKS TECHNOLOGIES, INC.
    Inventors: Steven M. Zuniga, Derek G. Aqui, Andrew J. Nagengast, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal
  • Flexible membrane for carrier head
    Patent number: 7950985
    Abstract: A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
    Type: Grant
    Filed: June 1, 2010
    Date of Patent: May 31, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Steven M. Zuniga, Andrew J. Nagengast, Jeonghoon Oh
  • Substrate Retainer
    Publication number: 20110104990
    Abstract: A retainer is used with an apparatus for polishing a substrate. The substrate has upper and lower surfaces and a lateral, substantially circular, perimeter. The apparatus has a polishing pad with an upper polishing surface for contacting and polishing the lower face of the substrate. The retainer has an inward facing retaining face for engaging and retaining the substrate against lateral movement during polishing of the substrate. The retaining face engages a substrate perimeter at more than substantially a single discrete circumferential location along the perimeter.
    Type: Application
    Filed: January 10, 2011
    Publication date: May 5, 2011
    Inventors: Steven M. Zuniga, Hung Chih Chen
  • Retaining ring with shaped surface
    Patent number: 7927190
    Abstract: A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
    Type: Grant
    Filed: March 17, 2008
    Date of Patent: April 19, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer, Sidney P. Huey, Jeonghoon Oh, Trung T. Doan, Jeffrey Schmidt, Martin S. Wohlert, Kerry F. Hughes, James C. Wang, Danny Cam Toan Lu, Romain Beau De Lamenie, Venkata R. Balagani, Aden Martin Allen, Michael Jon Fong
  • LASER SYSTEM FOR PROCESSING SOLAR WAFERS IN A CARRIER
    Publication number: 20110076847
    Abstract: An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.
    Type: Application
    Filed: September 27, 2010
    Publication date: March 31, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Derek Aqui, Steven M. Zuniga, Venkateswaran Subbaraman, Kirk Liebscher, John Alexander, Zhenhua Zhang, Virendra V.S. Rana
  • MULTIPLE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE
    Publication number: 20110070810
    Abstract: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
    Type: Application
    Filed: November 29, 2010
    Publication date: March 24, 2011
    Inventors: Hung Chih Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky, Steven M. Zuniga
  • Carrier ring for carrier head
    Patent number: 7901273
    Abstract: A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A carrier ring has an annular upper portion and an annular lower portion having a lower surface with a smaller inner diameter than the upper surface of the annular upper portion, wherein the carrier ring circumferentially surrounds a retaining ring and has a lower surface to contact a polishing pad.
    Type: Grant
    Filed: February 2, 2010
    Date of Patent: March 8, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Steven M. Zuniga, Andrew J. Nagengast, Jeonghoon Oh
  • Substrate retainer
    Patent number: 7883397
    Abstract: A retainer is used with an apparatus for polishing a substrate. The substrate has upper and lower surfaces and a lateral, substantially circular, perimeter. The apparatus has a polishing pad with an upper polishing surface for contacting and polishing the lower face of the substrate. The retainer has an inward facing retaining face for engaging and retaining the substrate against lateral movement during polishing of the substrate. The retaining face engages a substrate perimeter at more than substantially a single discrete circumferential location along the perimeter.
    Type: Grant
    Filed: October 28, 2008
    Date of Patent: February 8, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Steven M. Zuniga, Hung Chih Chen
  • BONDING APPARATUS AND METHOD
    Publication number: 20100330776
    Abstract: A bonding apparatus and method holds first and second bodies peripherally, one above the other, on respective shelves. A lower heat-transfer body is configured to lift the first body from below and press the first and second bodies against an upper heat-transfer body to enable bonding between the first and second bodies.
    Type: Application
    Filed: June 30, 2009
    Publication date: December 30, 2010
    Inventors: Steven M. Zuniga, Robert D. Tolles, Derek G. Aqui, Andrew J. Nagengast, Anthony J. Senn, Keenan Leon Guerrero
  • Stepped Retaining Ring
    Publication number: 20100303584
    Abstract: A two part retaining ring is described. An rigid upper portion has an annular recess along its inner diameter. An annular wearable lower portion has an inner diameter, an annular extension defined by the inner diameter and a vertical wall that is perpendicular to a surface of the second portion and opposite to the inner diameter. The annular extension fits into the annular recess of the annular first portion. A bonding material is on the vertical wall of the annular second portion.
    Type: Application
    Filed: August 5, 2010
    Publication date: December 2, 2010
    Inventors: Shaun Van Der Veen, Steven M. Zuniga
  • Multiple zone carrier head with flexible membrane
    Patent number: 7842158
    Abstract: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
    Type: Grant
    Filed: August 10, 2007
    Date of Patent: November 30, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Hung Chih Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas B. Brezoczky, Steven M. Zuniga
  • Pad conditioner
    Patent number: 7815495
    Abstract: A pad conditioner is provided for conditioning a polishing pad in chemical mechanical planarization (CMP). The pad conditioner comprises a plastic abrasive portion having a first hardness and optionally a brush portion having a second hardness less than the first hardness. The plastic abrasive portion comprises a base plate and a plurality of plastic nodules formed on a surface of the base plate, each of the plastic nodules having a planar top surface, wherein the planar top surface is positioned to substantially contact a polishing pad. The brush portion may be positioned adjacent to the plastic abrasive portion, the brush portion having a plurality of brush elements positioned to substantially contact the pad.
    Type: Grant
    Filed: April 11, 2007
    Date of Patent: October 19, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Kun Xu, Jimin Zhang, James C. Wang, Thomas H. Osterheld, Yutao Ma, Steven M. Zuniga, Jin Yi
  • Flexible Membrane for Carrier Head
    Publication number: 20100240287
    Abstract: A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
    Type: Application
    Filed: June 1, 2010
    Publication date: September 23, 2010
    Inventors: Steven M. Zuniga, Andrew J. Nagengast, Jeonghoon Oh
  • BACK-CONTACT PHOTOVOLTAIC CELL COMPRISING A THIN LAMINA HAVING A SUPERSTRATE RECEIVER ELEMENT
    Publication number: 20100229928
    Abstract: A photovoltaic assembly comprises a thin semiconductor lamina and a receiver element, where the receiver element serves as a superstrate in the completed device. The photovoltaic assembly includes a photovoltaic cell. The photovoltaic cell is a back-contact cell; photocurrent passes into and out of the back surface of the cell, but does not pass through the light-facing surface. The lamina is typically substantially crystalline and has a thickness less than about 100 microns, in some embodiments 10 microns or less.
    Type: Application
    Filed: March 12, 2009
    Publication date: September 16, 2010
    Applicant: Twin Creeks Technologies, Inc.
    Inventors: Steven M. Zuniga, Christopher J. Petti, Mohamed M. Hilali
  • Stepped retaining ring
    Patent number: 7789736
    Abstract: A two part retaining ring is described. An rigid upper portion has an annular recess along its inner diameter. An annular wearable lower portion has an inner diameter, an annular extension defined by the inner diameter and a vertical wall that is perpendicular to a surface of the second portion and opposite to the inner diameter. The annular extension fits into the annular recess of the annular first portion. A bonding material is on the vertical wall of the annular second portion.
    Type: Grant
    Filed: October 13, 2006
    Date of Patent: September 7, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Shaun Van Der Veen, Steven M. Zuniga