Patents by Inventor Suman Datta

Suman Datta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160308014
    Abstract: A method for fabricating a field-effect transistor with a gate completely wrapping around a channel region is described. Ion implantation is used to make the oxide beneath the channel region of the transistor more etchable, thereby allowing the oxide to be removed below the channel region. Atomic layer deposition is used to form a gate dielectric and a metal gate entirely around the channel region once the oxide is removed below the channel region.
    Type: Application
    Filed: June 29, 2016
    Publication date: October 20, 2016
    Inventors: Marko Radosavljevic, Amlan Majumdar, Suman Datta, Jack T. Kavalieros, Brian S. Doyle, Justin K. Brask, Robert S. Chau
  • Publication number: 20160293765
    Abstract: A method of patterning a semiconductor film is described. According to an embodiment of the present invention, a hard mask material is formed on a silicon film having a global crystal orientation wherein the semiconductor film has a first crystal plane and second crystal plane, wherein the first crystal plane is denser than the second crystal plane and wherein the hard mask is formed on the second crystal plane. Next, the hard mask and semiconductor film are patterned into a hard mask covered semiconductor structure. The hard mask covered semiconductor structured is then exposed to a wet etch process which has sufficient chemical strength to etch the second crystal plane but insufficient chemical strength to etch the first crystal plane.
    Type: Application
    Filed: June 14, 2016
    Publication date: October 6, 2016
    Inventors: Justin K. Brask, Jack Kavalieros, Brian S. Doyle, Uday Shah, Suman Datta, Amlan Majumdar, Robert S. Chau
  • Publication number: 20160284847
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: June 10, 2016
    Publication date: September 29, 2016
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 9425256
    Abstract: A method to form a strain-inducing semiconductor region is described. In one embodiment, formation of a strain-inducing semiconductor region laterally adjacent to a crystalline substrate results in a uniaxial strain imparted to the crystalline substrate, providing a strained crystalline substrate. In another embodiment, a semiconductor region with a crystalline lattice of one or more species of charge-neutral lattice-forming atoms imparts a strain to a crystalline substrate, wherein the lattice constant of the semiconductor region is different from that of the crystalline substrate, and wherein all species of charge-neutral lattice-forming atoms of the semiconductor region are contained in the crystalline substrate.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: August 23, 2016
    Assignee: Intel Corporation
    Inventors: Suman Datta, Jack T. Kavalieros, Been-Yih Jin
  • Patent number: 9391068
    Abstract: A power rectifier includes a stage having a first Tunneling Field-Effect Transistor (“TFET”) having a source, a gate, and a drain, a second TFET having a source, a gate, and a drain, a third TFET having a source, a gate, and a drain, and a fourth TFET having a source, a gate, and a drain such that the source of the first TFET, the source of the second TFET, the gate of the third TFET, and the gate of the fourth TFET are connected, the gate of the first TFET, the gate of the second TFET, the source of the third TFET and the source of the fourth TFET are connected, the drain of the first TFET and the drain of the third TFET are connected, and the drain of the second TFET and the drain of the fourth TFET are connected. Alternative embodiments are also disclosed.
    Type: Grant
    Filed: August 11, 2014
    Date of Patent: July 12, 2016
    Assignee: The Penn State Research Foundation
    Inventors: Huichu Liu, Ramesh Vaddi, Vijaykrishnan Narayanan, Suman Datta
  • Publication number: 20160197159
    Abstract: A method of manufacturing a semiconductor device and a novel semiconductor device are disclosed herein. An exemplary method includes sputtering a capping layer in-situ on a gate dielectric layer, before any high temperature processing steps are performed.
    Type: Application
    Filed: March 10, 2016
    Publication date: July 7, 2016
    Inventors: Gilbert Dewey, Mark L. Doczy, Suman Datta, Justin K. Brask, Matthew V. Metz
  • Publication number: 20160197185
    Abstract: A method of fabricating a MOS transistor having a thinned channel region is described. The channel region is etched following removal of a dummy gate. The source and drain regions have relatively low resistance with the process.
    Type: Application
    Filed: March 14, 2016
    Publication date: July 7, 2016
    Inventors: Justin K. Brask, Robert S. Chau, Suman Datta, Mark L. Doczy, Brian S. Doyle, Jack T. Kavalieros, Amlan Majumdar, Matthew V. Metz, Marko Radosavljevic
  • Patent number: 9385180
    Abstract: A method of patterning a semiconductor film is described. According to an embodiment of the present invention, a hard mask material is formed on a silicon film having a global crystal orientation wherein the semiconductor film has a first crystal plane and second crystal plane, wherein the first crystal plane is denser than the second crystal plane and wherein the hard mask is formed on the second crystal plane. Next, the hard mask and semiconductor film are patterned into a hard mask covered semiconductor structure. The hard mask covered semiconductor structured is then exposed to a wet etch process which has sufficient chemical strength to etch the second crystal plane but insufficient chemical strength to etch the first crystal plane.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: July 5, 2016
    Assignee: Intel Corporation
    Inventors: Justin K. Brask, Jack Kavalieros, Brian S. Doyle, Uday Shah, Suman Datta, Amlan Majumdar, Robert S. Chau
  • Patent number: 9368583
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: May 1, 2015
    Date of Patent: June 14, 2016
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 9337307
    Abstract: A method of fabricating a MOS transistor having a thinned channel region is described. The channel region is etched following removal of a dummy gate. The source and drain regions have relatively low resistance with the process.
    Type: Grant
    Filed: November 18, 2010
    Date of Patent: May 10, 2016
    Assignee: Intel Corporation
    Inventors: Justin K. Brask, Robert S. Chau, Suman Datta, Mark L. Doczy, Brian S. Doyle, Jack T. Kavalieros, Amlan Majumdar, Matthew V. Metz, Marko Radosavljevic
  • Publication number: 20160111423
    Abstract: A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.
    Type: Application
    Filed: December 21, 2015
    Publication date: April 21, 2016
    Inventors: Suman Datta, Mantu K. Hudait, Mark L. Doczy, Jack T. Kavalieros, Majumdar AmIan, Justin K. Brask, Been-Yih Jin, Matthew V. Metz, Robert S. Chau
  • Patent number: 9287380
    Abstract: A method of manufacturing a semiconductor device and a novel semiconductor device are disclosed herein. An exemplary method includes sputtering a capping layer in-situ on a gate dielectric layer, before any high temperature processing steps are performed.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: March 15, 2016
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Mark L. Doczy, Suman Datta, Justin K. Brask, Matthew V. Metz
  • Publication number: 20150333534
    Abstract: Disclosed are low power electronic devices configured to exploit the sub-threshold swing, unidirectional tunneling, and low-voltage operation of steep slope-tunnel tunnel field-effect transistors (TFET) to improve power-conversion efficiency and power-efficiency of electrical systems incorporating the TFET as an electrical component to perform energy harvesting, signal processing, and related operations. The devices include a HTFET-based rectifier having various topologies, a HTFET-based DC-DC charge pump converter, a HTFET-based amplifier having an amplifier circuit including a telescopic operational transconductance amplifier, and a HTFET-based SAR A/D converter having a HTFET-based transmission gate DFF. Any one of the devices may be used to generate a RF-powered system with improved power conversion efficiencies of power harvesters and power efficiencies of processing components within the system.
    Type: Application
    Filed: May 14, 2015
    Publication date: November 19, 2015
    Inventors: Huichu Liu, Ramesh Vaddi, Vijaykrishnan Narayanan, Suman Datta, Moon Seok Kim, Xueqing Li, Alexandre Schmid, Mahsa Shoaran, Unsuk Heo
  • Publication number: 20150236100
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: May 1, 2015
    Publication date: August 20, 2015
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Publication number: 20150214118
    Abstract: In one embodiment, the present invention includes a method for forming a logic device, including forming an n-type semiconductor device over a silicon (Si) substrate that includes an indium gallium arsenide (InGaAs)-based stack including a first buffer layer, a second buffer layer formed over the first buffer layer, a first device layer formed over the second buffer layer. Further, the method may include forming a p-type semiconductor device over the Si substrate from the InGaAs-based stack and forming an isolation between the n-type semiconductor device and the p-type semiconductor device. Other embodiments are described and claimed.
    Type: Application
    Filed: April 13, 2015
    Publication date: July 30, 2015
    Inventors: Mantu K. Hudait, Jack T. Kavalieros, Suman Datta, Marko Radosavljevic
  • Patent number: 9048314
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: August 21, 2014
    Date of Patent: June 2, 2015
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Publication number: 20150102429
    Abstract: A method of patterning a semiconductor film is described. According to an embodiment of the present invention, a hard mask material is formed on a silicon film having a global crystal orientation wherein the semiconductor film has a first crystal plane and second crystal plane, wherein the first crystal plane is denser than the second crystal plane and wherein the hard mask is formed on the second crystal plane. Next, the hard mask and semiconductor film are patterned into a hard mask covered semiconductor structure. The hard mask covered semiconductor structured is then exposed to a wet etch process which has sufficient chemical strength to etch the second crystal plane but insufficient chemical strength to etch the first crystal plane.
    Type: Application
    Filed: December 18, 2014
    Publication date: April 16, 2015
    Inventors: Justin K. Brask, Jack Kavalieros, Brian S. Doyle, Uday Shah, Suman Datta, Amlan Majumdar, Robert S. Chau
  • Patent number: 9006707
    Abstract: In one embodiment, the present invention includes a method for forming a logic device, including forming an n-type semiconductor device over a silicon (Si) substrate that includes an indium gallium arsenide (InGaAs)-based stack including a first buffer layer, a second buffer layer formed over the first buffer layer, a first device layer formed over the second buffer layer. Further, the method may include forming a p-type semiconductor device over the Si substrate from the InGaAs-based stack and forming an isolation between the n-type semiconductor device and the p-type semiconductor device. Other embodiments are described and claimed.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: April 14, 2015
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Jack T. Kavalieros, Suman Datta, Marko Radosavljevic
  • Publication number: 20150043260
    Abstract: A power rectifier includes a stage having a first Tunneling Field-Effect Transistor (“TFET”) having a source, a gate, and a drain, a second TFET having a source, a gate, and a drain, a third TFET having a source, a gate, and a drain, and a fourth TFET having a source, a gate, and a drain such that the source of the first TFET, the source of the second TFET, the gate of the third TFET, and the gate of the fourth TFET are connected, the gate of the first TFET, the gate of the second TFET, the source of the third TFET and the source of the fourth TFET are connected, the drain of the first TFET and the drain of the third TFET are connected, and the drain of the second TFET and the drain of the fourth TFET are connected. Alternative embodiments are also disclosed.
    Type: Application
    Filed: August 11, 2014
    Publication date: February 12, 2015
    Inventors: Huichu Liu, Ramesh Vaddi, Vijaykrishnan Narayanan, Suman Datta
  • Patent number: 8933458
    Abstract: A method of patterning a semiconductor film is described. According to an embodiment of the present invention, a hard mask material is formed on a silicon film having a global crystal orientation wherein the semiconductor film has a first crystal plane and second crystal plane, wherein the first crystal plane is denser than the second crystal plane and wherein the hard mask is formed on the second crystal plane. Next, the hard mask and semiconductor film are patterned into a hard mask covered semiconductor structure. The hard mask covered semiconductor structured is then exposed to a wet etch process which has sufficient chemical strength to etch the second crystal plane but insufficient chemical strength to etch the first crystal plane.
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: January 13, 2015
    Assignee: Intel Corporation
    Inventors: Justin K. Brask, Jack Kavalieros, Brian S. Doyle, Uday Shah, Suman Datta, Amlan Majumdar, Robert S. Chau