Abstract: An image sensor package may include a semiconductor wafer having a pixel array, a color filter array (CFA) formed over the pixel array, and one or more lenses formed over the CFA. A light block layer may couple over the semiconductor wafer around a perimeter of the lenses and an encapsulation layer may be coupled around the perimeter of the lenses and over the light block layer. The light block layer may form an opening providing access to the lenses. A mold compound layer may be coupled over the encapsulation layer and the light block layer. A temporary protection layer may be used to protect the one or more lenses from contamination during application of the mold compound and/or during processes occurring outside of a cleanroom environment.

Abstract: A high dynamic range image sensor may include a plurality of pixel groups. One or more pixel groups may include attenuated pixels in addition to unattenuated pixels. The unattenuated pixels may include a photosensitive area, a color filter element and a microlens of a first size. Each attenuated pixel may include a photosensitive area, a color filter element, a neutral density filter, and a microlens of a second size that is smaller than the first size. The color filter elements for each pixel in a given pixel group may be the same color. The neutral density filter may attenuate light for the attenuated pixels, increasing dynamic range of the image sensor. The microlenses of varying sizes may redirect light from attenuated pixels towards unattenuated pixels, further increasing the dynamic range.

Abstract: A high dynamic range image sensor may include a plurality of pixel groups. One or more pixel groups may include attenuated pixels in addition to unattenuated pixels. The unattenuated pixels may include a photosensitive area, a color filter element and a microlens of a first size. Each attenuated pixel may include a photosensitive area, a color filter element, a neutral density filter, and a microlens of a second size that is smaller than the first size. The color filter elements for each pixel in a given pixel group may be the same color. The neutral density filter may attenuate light for the attenuated pixels, increasing dynamic range of the image sensor. The microlenses of varying sizes may redirect light from attenuated pixels towards unattenuated pixels, further increasing the dynamic range.

Abstract: Implementations of image sensors may include: a first die including a plurality of detectors adapted to convert photons to electrons; a second die including a plurality of transistors, passive electrical components, or both transistors and passive electrical components; a third die including analog circuitry, logic circuitry, or analog and logic circuitry. The first die may be hybrid bonded to the second die, and the second die may be fusion bonded to the third die. The plurality of transistors, passive electrical components, or transistors and passive electrical components of the second die may be adapted to enable operation of the plurality of detectors of the first die. The analog circuitry, logic circuitry, and analog circuitry and logical circuitry may be adapted to perform signal routing.

Abstract: An imaging device may include single-photon avalanche diodes (SPADs). To improve the sensitivity and signal-to-noise ratio of the SPADs, light scattering structures may be formed in the semiconductor substrate to increase the path length of incident light through the semiconductor substrate. To mitigate crosstalk, an isolation structure may be formed in a ring around the SPAD. The isolation structure may be a hybrid isolation structure with both a metal filler that absorbs light and a low-index filler that reflects light. The isolation structure may be formed as a single trench or may include a backside deep trench isolation portion and a front side deep trench isolation portion. The isolation structure may also include a color filtering material.

Abstract: An imaging device may include single-photon avalanche diodes (SPADs). To improve the sensitivity and signal-to-noise ratio of the SPADs, light scattering structures may be formed in the semiconductor substrate to increase the path length of incident light through the semiconductor substrate. The light scattering structures may include a low-index material formed in trenches in the semiconductor substrate. One or more microlenses may focus light onto the semiconductor substrate. Areas of the semiconductor substrate that receive more light from the microlenses may have a higher density of light scattering structures to optimize light scattering while mitigating dark current.

Abstract: An imaging device may include single-photon avalanche diodes (SPADs). To improve the sensitivity and signal-to-noise ratio of the SPADs, light scattering structures may be formed in the semiconductor substrate to increase the path length of incident light through the semiconductor substrate. The light scattering structures may include a low-index material formed in trenches in the semiconductor substrate. The light scattering structures may have different sizes and/or a layout with a non-uniform number of structures per unit area. SPAD devices may also include isolation structures in a ring around the SPADs to prevent crosstalk. The isolation structures may include metal-filled deep trench isolation structures. The metal filler may include tungsten.

Abstract: An imaging device may include a plurality of single-photon avalanche diode (SPAD) pixels. The SPAD pixels may be overlapped by microlenses to direct light incident on the pixels onto photosensitive regions of the pixels and a containment grid with openings that surround each of the microlenses. During formation of the microlenses, the containment grid may prevent microlens material for adjacent SPAD pixels from merging. To ensure separation between the microlenses, the containment grid may be formed from material phobic to microlens material, or phobic material may be added over the containment grid material. Additionally, the containment grid may be formed from material that can absorb stray or off-angle light so that it does not reach the associated SPAD pixel, thereby reducing crosstalk during operation of the SPAD pixels.

Abstract: A method includes etching a through-substrate via (TSV) in a substrate from a backside of the substrate. The substrate has a device layer on a frontside. The method further includes depositing a conformal spacer layer on the backside of the substrate, and sidewalls and a bottom of the TSV, and etching the spacer layer to form a self-aligned mask for etching a contact opening at the bottom of TSV to a metal pad in the device layer, and etching the contact opening at the bottom of TSV to the metal pad in the device layer. The method further includes disposing a conductive material layer in the TSV and the contact opening to make a vertical interconnection from the backside of the substrate to the metal pad in the device layer.

Abstract: An imaging device may have an array of image sensor pixels that includes infrared image pixels. Backside and frontside reflectors may be incorporated into the infrared pixels to increase effective thicknesses of photosensitive regions within the pixels. In other words, light incident on each pixel may be reflected and traverse the photosensitive region multiple times, thereby allowing silicon in the photosensitive region to absorb infrared light more efficiently. The backside reflector may be interposed between the silicon and a microlens, which may have a toroidal shape to direct light around the backside reflector. If desired, the toroidal lens may have a concave opening. Alternatively, the backside reflector may be ring-shaped, and a spherical microlens may focus light through a center portion of the reflector. A top surface of the silicon layer may be curved to focus light toward the center of the photosensitive region and improve pixel efficiency.

Abstract: An imaging device may have an array of image sensor pixels that includes infrared image pixels. Backside and frontside reflectors may be incorporated into the infrared pixels to increase effective thicknesses of photosensitive regions within the pixels. In other words, light incident on each pixel may be reflected and traverse the photosensitive region multiple times, thereby allowing silicon in the photosensitive region to absorb infrared light more efficiently. The backside reflector may be interposed between the silicon and a microlens, which may have a toroidal shape to direct light around the backside reflector. If desired, the toroidal lens may have a concave opening. Alternatively, the backside reflector may be ring-shaped, and a spherical microlens may focus light through a center portion of the reflector. A top surface of the silicon layer may be curved to focus light toward the center of the photosensitive region and improve pixel efficiency.

Abstract: An imaging system may include an image sensor with phase detection pixel groups for depth sensing or automatic focusing operations. Each phase detection pixel group may have two or more photosensitive regions covered by a single microlens so that each photosensitive region has an asymmetric angular response. The image sensor may be sensitive to both near-infrared (NIR) and visible light. Each phase detection pixel group may be designed to include light-scattering structures that increase NIR sensitivity while minimizing disruptions of phase detection and visible light performance. Deep trench isolation may be formed between adjacent photosensitive areas within the phase detection pixel group. The light-scattering structures may have a non-uniform distribution to minimize disruptions of phase detection performance.

Abstract: Various embodiments of the present technology may comprise a method and apparatus for a biosensor. The biosensor comprises a vertical flow channel that extends through a photodiode, and wherein the photodiode is lateral to the channel's vertical sidewall.

Abstract: An imaging system may include an image sensor with phase detection pixel groups for depth sensing or automatic focusing operations. Each phase detection pixel group may have two or more photosensitive regions covered by a single microlens so that each photosensitive region has an asymmetric angular response. The image sensor may be sensitive to both near-infrared (NIR) and visible light. Each phase detection pixel group may be designed to include light-scattering structures that increase NIR sensitivity while minimizing disruptions of phase detection and visible light performance. Deep trench isolation may be formed between adjacent photosensitive areas within the phase detection pixel group. The light-scattering structures may have a non-uniform distribution to minimize disruptions of phase detection performance.

Abstract: Various embodiments of the present technology may comprise methods and apparatus for increasing dynamic range of an image sensor. According to an exemplary embodiment, the image sensor comprises a backside-illuminated hybrid bonded stacked chip image senor having a pixel circuit array. A capacitor is formed on each pixel circuit along two adjacent sidewalls of an epitaxial substrate layer facing a deep trench isolation region. The capacitor may also extend along an upper surface of the epitaxial substrate layer.

Abstract: Several embodiments for semiconductor devices and methods for forming semiconductor devices are disclosed herein. One embodiment is directed to a method for manufacturing a microelectronic imager having a die including an image sensor, an integrated circuit electrically coupled to the image sensor, and electrical connectors electrically coupled to the integrated circuit. The method can comprise covering the electrical connectors with a radiation blocking layer and forming apertures aligned with the electrical connectors through a layer of photo-resist on the radiation blocking layer. The radiation blocking layer is not photoreactive such that it cannot be patterned using radiation. The method further includes etching openings in the radiation blocking layer through the apertures of the photo-resist layer.

Abstract: An imaging system may include an image sensor package with through-oxide via connections between the image sensor die and the digital signal processing die in the image sensor package. The image sensor die and the digital signal processing die may be attached to each other. The through-oxide via may connect a bond pad on the image sensor die with metal routing paths in the image sensor and digital signal processing dies. The through-oxide via may simultaneously couple the image sensor die to the digital signal processing die. The through-oxide via may be formed through a shallow trench isolation structure in the image sensor die. The through-oxide via may be formed through selective etching of the image sensor and digital signal processing dies.

Abstract: Color filters may affect imaging performance attributes such as low light sensitivity, color accuracy, and modulation transfer function (MTF). In an image pixel array, these factors are influenced by both the spectral absorption and pattern of the color filter elements. Different portions of an image sensor may prioritize different imaging performance attributes. Accordingly, in certain applications it may be beneficial for color filter characteristics to vary across an image sensor. Different color filters of the same color may have different structures to optimize imaging performance across the image sensor.

Abstract: An image sensor may include phase detecting and autofocusing (PDAF) pixels. Each pixel may include an inner photodiode region and outer photodiode regions to provide high dynamic range (HDR) capability. Each pixel may include an in infrared blocking filter that selectively covers the inner photodiode region or the outer photodiode regions. Two pixels of the same color but with different infrared blocking filter patterns may be compared to provide infrared sensing. Any color filter array configuration can be used. Instead of an infrared blocking filter, an infrared pass filter may also be used. A first pixel may include an infrared pass filter that selectively covers the inner photodiode region, whereas a second pixel may include an infrared pass filter that selectively covers the outer photodiode regions. The charge collected by the first and second pixels may be compared to provide infrared sensing.

Abstract: Methods of forming an image sensor chip scale package. Implementations may include providing a semiconductor wafer having a pixel array, forming a first cavity through the wafer and/or one or more layers coupled over the wafer, filling the first cavity with a fill material, planarizing the fill material and/or the one or more layers to form a first surface of the fill material coplanar with a first surface of the one or more layers, and bonding a transparent cover over the fill material and the one or more layers. The bond may be a fusion bond between the transparent cover and a passivation oxide; a fusion bond between the transparent cover and an anti-reflective coating; a bond between the transparent cover and an organic adhesive coupled over the fill material, and/or; a bond between a first metallized surface of the transparent cover and a metallized layer coupled over the wafer.