Publication number: 20100155647
Abstract: Provided are an oxynitride piezoelectric material which exhibits ferroelectricity and has good piezoelectric properties and a method of producing the oxynitride piezoelectric material. The oxynitride piezoelectric material includes a tetragonal perovskite-type oxynitride represented by the following general formula (1): A1-xBix+?1B1-yB?y+?2O3-zNz??(1) where A represents a divalent element, B and B? each represent a tetravalent element, x represents a numerical value of 0.35 or more to 0.6 or less, y represents a numerical value of 0.35 or more to 0.6 or less, z represents a numerical value of 0.35 or more to 0.6 or less, and ?1 and ?2 each represent a numerical value of ?0.2 or more to 0.2 or less, in which the A includes at least one kind selected from Ba, Sr, and Ca and the B and the B? each include at least one kind selected from Ti, Zr, Hf, Si, Ge, and Sn.
Type:
Application
Filed:
December 16, 2009
Publication date:
June 24, 2010
Applicants:
CANON KABUSHIKI KAISHA, KYOTO UNIVERSITY, TOKYO INSTITUTE OF TECHNOLOGY, UNIVERSITY OF YAMANASHI, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, TOKYO UNIVERSITY OF SCIENCE EDUCATIONAL FOUNDATION ADMINISTRATIVE ORGANIZATION
Inventors:
Hiroshi Saito, Takanori Matsuda, Kaoru Miura, Kenji Takashima, Masaki Azuma, Takashi Iijima, Hiroshi Funakubo, Soichiro Okamura, Nobuhiro Kumada, Satoshi Wada