Abstract: A substrate processing apparatus has a processing space provided with a holding stand for holding a substrate to be processed. A hydrogen catalyzing member is arranged in the processing space to face the substrate and for decomposing hydrogen molecules into hydrogen radicals H*. A gas feeding port is arranged in the processing space on an opposite side of the hydrogen catalyzing member to the substrate for feeding a processing gas including at least hydrogen gas. An interval between the hydrogen catalyzing member and the substrate on the holding stand is set less than the distance that the hydrogen radicals H* can reach.

Abstract: A plasma processing apparatus comprises a processing vessel defined by an outer wall and having a stage for holding a substrate to be processed, an evacuation system coupled to the processing vessel, a plasma gas supply part for supplying plasma gas to an interior of the processing vessel, a microwave antenna provided on the processing vessel in correspondence to the substrate to be processed, and a process gas supply part provided between the substrate to be processed on the stage and the plasma gas supply part so as to face the substrate to be processed on the stage, wherein the process gas supply part comprises a plurality of first apertures for passing through plasma formed in the interior of the processing vessel, a process gas passage capable of connecting to a process gas source, a plurality of second apertures in communication with the process gas passage and a diffusion part provided opposite to the second aperture for diffusing process gas released from the second aperture.

Abstract: Disclosed is a method for fabricating a color filter for a transflective liquid crystal display device inexpensively in which desired color purities, brightnesses, and color tones are obtained for reflective display and transmissive display. A color filter for a liquid crystal display device includes pixels of a plurality of colors, each pixel of at least one color including a transmissive area and a reflective area. The pixel of at least one color includes a plurality of laminated color layers. The uppermost color layer in the pixel including the plurality of laminated color layers is composed of a photosensitive color resist. In the reflective area of the pixel including the plurality of laminated color layers, a transparent resin layer is disposed between a substrate and the color layer portion.

Abstract: A placement stage (24) on which a semiconductor wafer (W) is place is provided within a processing container (22). A microwave is generated by a microwave generator (76), and the microwave is introduced into a process container (22) through a flat antenna member (66). The flat antenna member (66) has a plurality of slots (84) arranged along a plurality of circumferences, and the plurality of circumferences are non-concentric to each other. A distribution of plasma density in the flat antenna member (66) in a radial direction is uniform.

Abstract: In a microwave plasma processing apparatus, the reflection of microwave by the joint unit between the microwave supplying waveguide and the microwave antenna is reduced by providing a taper surface or a member having a medium permittivity between the microwave supplying waveguide and the microwave antenna so as to moderate an impedance change. Accordingly, the efficiency of power supplying is improved, and reduced discharge ensures stable formation of plasma.

Abstract: In a microwave plasma processing apparatus that uses a radial line slot antenna, abnormal discharges are suppressed and the excitation efficiency of microwave plasma is improved simultaneously. In the joint between the radial line slot antenna and the coaxial waveguide, the point part of the power supplying line of the coaxial waveguide is separated from the slot plate constructing a radiation face.

Abstract: A liquid crystal display apparatus comprises:

Abstract: A liquid crystal diaplay apparatus having a color filter base plate with a transparent substrate, a resin black matrix formed by dispersing a light-shielding agent therein and a colored film of three primary colors provided on the transparent substrate, an electrode-carrying base plate provided with electrodes for applying an electric field parallel to the color filter, a liquid crystal disposed between said color filter base plate and said electrode-carrying base plate, a first alignment layer on the protective layer, an overcoat film on the colored film, a second alignment layer on the overcoat film, and a spacer formed on the resin black matrix by patterning a resin is disclosed.

Abstract: A tilt speed control apparatus for fork lift comprises a mast pivotally supported on a body frame. A fork is supported by the mast. The fork is lifted and lowered and is constructed to carry a load. A pump sends hydraulic oil to a tilt cylinder. A motor drives the pump. A lever is actuated to tilt the mast. A controller detects that the lever has been actuated. The controller produces a signal relating to the height of the load carrier. When the controller detects that the lever has been actuated, the controller controls the motor according to the signal such that the speed of the motor is relatively low when the position of the fork is relatively high. This permits a tilting speed controlling apparatus that optimizes the tilting speed of the mast.

Abstract: A main passage communicated to a pump passage or a tank passage by switching operation of a spool valve is provided with an operation check valve permitting communication only to a cylinder. A puppet in the operation check valve is provided with an orifice communicating the main passage with a pilot chamber of the operation check valve. The pilot chamber is communicated with the main passage through an electromagnetic on/off valve. Further, the pilot chamber in the operation check valve is communicated through a bypass passage with the main passage, and the bypass passage is provided with a manually operable opening/closing valve.

Abstract: The present invention provides a liquid crystal display element substrate having spacers fixed in non-display regions on the liquid crystal display element substrate, where the load compression displacement of these spacers in terms of a compression stress of 0.5 to 0.6 GPa is from 0.001 to 1 &mgr;m/mN. Further, it provides a liquid crystal display device which is characterized in that, in a liquid crystal display device where a liquid crystal layer is held between two liquid crystal display element substrates, at least one of these liquid crystal display element substrates is an aforesaid liquid crystal display element substrate. As well as realizing a sufficient cell gap the present invention has the effect that, by maintaining a uniform cell gap within the screen, the problems of a lowering in the display quality due to change in the cell gap and the generation of bubbles at the time of low temperature are resolved.

Abstract: A coating apparatus which comprises a feeding means to feed a coating liquid, a coating liquid applicator having a slot extending in one direction to discharge the coating liquid fed by the feeding means, and a conveying means to move at least either the coating liquid applicator or a substrate to be coated with the coating liquid relatively one to the other, comprising: (a) a first control means which comprises (a-1) a position detecting means to detect positions of the coating liquid applicator or the substrate which is moved by the conveying means, and (a-2) a controller capable of stopping the coating liquid applicator or the substrate which is moved by the conveying means at a position detected by the position detecting means such that a start-of-coating line of the substrate is in register with the slot of the coating liquid applicator and capable of starting the movement of the coating liquid applicator or the substrate which is stopped at the position; and (b) a second control means which comprises a

Abstract: A cold accumulator filled with a cold accumulating material including 20 to 95 at % of at least one element selected from the group consisting of cerium (Ce), neodymium (Nd), praseodymium (Pr), magnetic body dysprosium (Dy), holmium (Ho), erbium (Er) and thulium (Tm), and 5 to 80 at % of an additive containing at least silver (Ag), thereby improving the specific heat at 10 to 30 K. The cold accumulating material can increase the efficiency of heat accumulating at 10 to 30 K, and the cold accumulator can be applied to refrigerators which generate refrigeration at cold low temperatures of 10 to 30 K.

Abstract: A facsimile apparatus generating a monitor report. The facsimile apparatus stores kinds of causes of communication troubles and codes corresponding to the kinds of causes of the communication troubles. A control circuit recognizes an occurrence of the communication troubles during facsimile communication, self-diagnoses the cause of the occurrence of the communication troubles, and searches for a corresponding code. A monitor list then includes the cause of the occurrence of the communication troubles in accordance with communication trouble information if the communication trouble information has been stored.

Abstract: The invention relates to a resin black matrix for liquid crystal display device wherein the black matrix for liquid crystal display device contains dispersed light shading agents, wherein the chromaticity coordinates (x, y) in the XYZ color system of the transmitted and/or reflected light from source C or source F10 relative to the chromaticity coordinates (x.sub.o, y.sub.o) of said light source is in the relation of (x-x.sub.o).sup.2 +(y-y.sub.o).sup.2 .ltoreq.0.01, and also relates to a resin black matrix for liquid crystal display device wherein the black matrix for liquid crystal display device contains dispersed light shading agents and is provided with a backlighting source, wherein the chromaticity coordinates (x, y) in the XYZ color system of the light that is transmitted through the resin black matrix from said backlighting source relative to the chromaticity coordinates (x.sub.o, y.sub.o) of said light source is in the relation of (x-x.sub.o).sup.2 +(y-y.sub.o).sup.2 .ltoreq.0.01.

Abstract: This invention provides a resin black matrix with a light-shading agent dispersed in a resin, comprising the use of carbon black satisfying at least one of the following features of (A) to (D), as said light-shading agent.(A) 6.5 or less in pH(B) 0.001<?COOH! in the carboxyl group concentration ?COOH! on the surface, as a molar ratio per all carbon atoms(C) 0.001<?OH! in the hydroxyl group concentration on the surface, as a molar ratio per all carbon atoms(D) 0.001<?SO.sub.3 H! in the sulfonic acid group concentration on the surface, as a molar ratio per all carbon atomsThe present invention also provides a black paste with a light-shading agent dispersed in a resin or its precursor solution, comprising the use of carbon black satisfying at least one of the above features of (A) to (D) as said light-shading agent.The third aspect of the present invention is a color filter, comprising said resin black matrix.

Abstract: A particulate dry mix foaming creamer comprises a conventional particulate creamer for coffee beverages and the like together with a foam generating component comprising a food grade acidulant and an alkali metal carbonate or bicarbonate. A dry mix instant hot cappuccino product in accordance with the invention comprises a water soluble coffee component, the foam generating component, an optional creamer component, and an optional sweetener component. Cappuccino beverages are prepared by mixing a liquid component and the dry mix composition and heating. The liquid component may comprise milk or water. Heating, preferably microwave heating, may be carried out by pre-heating the liquid component or by heating after addition of the liquid component, or by a combination of these heating techniques.