Patents by Inventor Tetsuya Shimizu

Tetsuya Shimizu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11175585
    Abstract: An object of the present invention is to provide a treatment liquid which is capable of suppressing the generation of defects of a semiconductor device and has excellent corrosion resistance and wettability. The treatment liquid of the present invention is a treatment liquid for a semiconductor device, containing at least one organic solvent selected from the group consisting of ethers, ketones, and lactones, water, and a metal component including at least one metal element selected from the group consisting of Na, K, Ca, Fe, Cu, Mg, Mn, Li, Al, Cr, Ni, Ti, and Zn, in which the content of water in the treatment liquid is 100 ppb by mass to 100 ppm by mass and the content of the metal component in the treatment liquid is 10 ppq by mass to 10 ppb by mass.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: November 16, 2021
    Assignee: FUJIFILM Corporation
    Inventors: Satoru Murayama, Tetsuya Shimizu, Tetsuya Kamimura
  • Patent number: 11155717
    Abstract: The storage container according to the embodiment of the present invention includes a storage portion storing a liquid composition containing an organic solvent having a moisture concentration of 400 ppm by mass or less and a surface treatment agent. At least a portion, which is in contact with the liquid composition, of an inner wall of the storage portion has a contact angle ? with respect to water of 10 degrees or more and 150 degrees or less.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: October 26, 2021
    Assignee: FUJIFILM Corporation
    Inventors: Tetsuya Shimizu, Ryo Saito
  • Patent number: 11009139
    Abstract: A relief valve that includes a tube; a valve configured to slide along an inner wall of the tube in an axial direction, and a spring that urges the valve, wherein the valve has a hydraulic pressure receiving surface on a first axial side that is one side in the axial direction, and a spring abutment against which the spring abuts, on a second axial side opposite to the first axial side, and the tube has a discharge oil passage having an opening in the inner wall and extending through the inner wall in a radial direction.
    Type: Grant
    Filed: May 17, 2018
    Date of Patent: May 18, 2021
    Assignee: AISIN AW CO., LTD.
    Inventors: Tetsuya Shimizu, Toru Sugiyama, Masaya Iwata
  • Publication number: 20210139231
    Abstract: The present invention provides a chemical liquid having excellent defect suppressing properties. The present invention further provides a chemical liquid storage body containing the chemical liquid. The chemical liquid of the present invention is a chemical liquid containing a compound other than an alkane and an alkene, and one or more organic solvents selected from the group consisting of decane and undecane, in which the chemical liquid further contains one or more organic components selected from the group consisting of alkanes having 12 to 50 carbon atoms and alkenes having 12 to 50 carbon atoms, and a content of the organic component is 0.10 to 1,000,000 mass ppt with respect to a total mass of the chemical liquid.
    Type: Application
    Filed: December 31, 2020
    Publication date: May 13, 2021
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya KAMIMURA, Satomi TAKAHASHI, Tadashi OOMATSU, Tetsuya SHIMIZU
  • Publication number: 20210130084
    Abstract: The present invention provides a member which makes is possible to obtain excellent residue defect inhibition properties and excellent bridge defect inhibition properties of a chemical liquid in a case where the member is brought into contact with the chemical liquid. The present invention also provides a container, a chemical liquid storage body, a reactor, a distillation column, a filter unit, a storage tank, a pipe line, and a chemical liquid manufacturing method. The member according to an embodiment of the present invention is a member that will be brought into contact with a chemical liquid. A surface of the member is constituted with stainless steel containing chromium atoms and iron atoms. In a case where an atomic ratio of the chromium atoms to the iron atoms is measured from the surface of the member to a position 10 nm below the surface in a depth direction, a maximum value of the atomic ratio is found in a region extending 3 nm from the surface of the member in the depth direction.
    Type: Application
    Filed: January 5, 2021
    Publication date: May 6, 2021
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya SHIMIZU, Tetsuya KAMIMURA, Satomi TAKAHASHI, Tadashi OOMATSU
  • Publication number: 20210132503
    Abstract: An object of the present invention is to provide a chemical liquid which exhibits excellent defect inhibition performance even after long-term preservation, a kit, a pattern forming method, a chemical liquid manufacturing method, and a chemical liquid storage body. The chemical liquid according to an embodiment of the present invention is a chemical liquid containing an organic solvent, an acid component, and a metal component. The content of the acid component is equal to or greater than 1 mass ppt and equal to or smaller than 15 mass ppm with respect to the total mass of the chemical liquid. The content of the metal component is 0.001 to 100 mass ppt with respect to the total mass of the chemical liquid.
    Type: Application
    Filed: January 8, 2021
    Publication date: May 6, 2021
    Applicant: FUJIFILM Corporation
    Inventors: Tadashi OOMATSU, Tetsuya KAMIMURA, Tetsuya SHIMIZU, Satomi TAKAHASHI, Akihiko OHTSU
  • Publication number: 20200384416
    Abstract: A filtering device is for obtaining a chemical liquid by purifying a liquid to be purified, and the filtering device has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series and extends from the inlet portion to the outlet portion, in which the filter A is a porous membrane containing a polyimide-based resin.
    Type: Application
    Filed: July 13, 2020
    Publication date: December 10, 2020
    Applicant: FUJIFILM CORPORATION
    Inventors: Tadashi OMATSU, Tetsuya KAMIMURA, Tetsuya SHIMIZU, Satomi TAKAHASHI
  • Publication number: 20200368692
    Abstract: A filtering device is for obtaining a chemical liquid by purifying a liquid to be purified, and has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series between the inlet portion and the outlet portion and extends from the inlet portion to the outlet portion, in which the filter A includes at least one kind of porous membrane selected from the group consisting of a first porous membrane having a porous base material made of polytetrafluoroethylene and a non-crosslinked coating which is formed to cover the porous base material and contains a perfluorosulfonic acid polymer and a second porous membrane containing polytetrafluoroethylene blended with a perfluorosulfonic acid polymer.
    Type: Application
    Filed: August 12, 2020
    Publication date: November 26, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya SHIMIZU, Tetsuya KAMIMURA, Tadashi OMATSU, Satomi TAKAHASHI
  • Publication number: 20200368693
    Abstract: A filtering device for obtaining a chemical liquid by purifying a liquid to be purified has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series between the inlet portion and the outlet portion and extends from the inlet portion to the outlet portion, in which the filter A has a porous base material made of polyfluorocarbon and a coating layer which is disposed to cover the porous base material and contains a first resin having a hydrophilic group.
    Type: Application
    Filed: August 13, 2020
    Publication date: November 26, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Tadashi OMATSU, Tetsuya KAMIMURA, Tetsuya SHIMIZU, Satomi TAKAHASHI
  • Publication number: 20200368691
    Abstract: A filtering device is used for obtaining a chemical liquid by purifying a liquid to be purified and includes an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path that includes the filter A and the filter B arranged in series and extends from the inlet portion to the outlet portion. The filter A has a porous membrane made of ultra-high-molecular-weight polyethylene and a resin layer disposed to cover at least a portion of the surface of the porous membrane, and the resin layer includes a resin having a neutral group or an ion exchange group.
    Type: Application
    Filed: August 12, 2020
    Publication date: November 26, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya KAMIMURA, Satomi TAKAHASHI, Tadashi OMATSU, Tetsuya SHIMIZU
  • Publication number: 20200360862
    Abstract: A filtering device is for obtaining a chemical liquid by purifying a liquid to be purified and has an inlet portion, an outlet portion, a filter A, a filter B different from the filter A, and a flow path extending from the inlet portion to the outlet portion, in which the filter A and the filter B are arranged in series between the inlet portion and the outlet portion and have, and the filter A is selected from the group consisting of predetermined filters A1, A2, and A3.
    Type: Application
    Filed: August 3, 2020
    Publication date: November 19, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya KAMIMURA, Tadashi OMATSU, Tetsuya SHIMIZU, Satomi TAKAHASHI
  • Publication number: 20200360861
    Abstract: A filtering device is for obtaining a chemical liquid by purifying a liquid to be purified, and the filtering device has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series and extends from the inlet portion to the outlet portion, in which the filter A has a porous base material made of polyfluorocarbon and a coating layer which is disposed to cover the porous base material and contains a resin having an adsorptive group.
    Type: Application
    Filed: July 20, 2020
    Publication date: November 19, 2020
    Applicant: FUJIFILM CORPORATION
    Inventors: Tadashi OMATSU, Tetsuya Kamimura, Tetsuya Shimizu, Satomi Takahashi
  • Publication number: 20200350291
    Abstract: A memory device includes a first memory cell array, a second memory cell array disposed in a first direction with respect to the first memory cell array, a first contact plug extending in the first direction through the first memory cell array, and a second contact plug extending in the first direction through the second memory cell array. The first memory cell array includes first electrode layers stacked in a first direction, and a first semiconductor pillar extending through the first electrode layers in the first direction. The second memory cell array including second electrode layers stacked in the first direction, and a second semiconductor pillar extending in the first direction through the second electrode layers. The first contact plug is electrically connected to the first semiconductor pillar, and the second contact plug is electrically connected to the second semiconductor pillar and the first contact plug.
    Type: Application
    Filed: June 30, 2020
    Publication date: November 5, 2020
    Applicant: Toshiba Memory Corporation
    Inventors: Masayoshi TAGAMI, Ryota KATSUMATA, Jun IIJIMA, Tetsuya SHIMIZU, Takamasa USUI, Genki FUJITA
  • Patent number: 10741527
    Abstract: A memory device includes a first memory cell array, a second memory cell array disposed in a first direction with respect to the first memory cell array, a first contact plug extending in the first direction through the first memory cell array, and a second contact plug extending in the first direction through the second memory cell array. The first memory cell array includes first electrode layers stacked in a first direction, and a first semiconductor pillar extending through the first electrode layers in the first direction. The second memory cell array including second electrode layers stacked in the first direction, and a second semiconductor pillar extending in the first direction through the second electrode layers. The first contact plug is electrically connected to the first semiconductor pillar, and the second contact plug is electrically connected to the second semiconductor pillar and the first contact plug.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: August 11, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Masayoshi Tagami, Ryota Katsumata, Jun Iijima, Tetsuya Shimizu, Takamasa Usui, Genki Fujita
  • Publication number: 20200147528
    Abstract: An object of the present invention is to provide a filtering device which makes it possible to obtain a chemical liquid having excellent performance and enables filter media to have sufficiently long pot life. Another object of the present invention is to provide a purification device, a chemical liquid manufacturing device, a filtered substance to be purified, a chemical liquid, and an actinic ray-sensitive or radiation-sensitive resin composition. A filtering device according to an embodiment of the present invention has a first filter unit including a first filter, which satisfies at least one condition selected from the group consisting of following conditions 1 to 3, and a housing accommodating the first filter and a second filter unit including a second filter different from the first filter and a housing accommodating the second filter, in which the first filter unit and the second filter unit are independently disposed in a pipe line through which a substance to be purified is supplied.
    Type: Application
    Filed: January 17, 2020
    Publication date: May 14, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya SHIMIZU, Tetsuya KAMIMURA
  • Publication number: 20200115105
    Abstract: A container has a base material and a coating layer which is disposed on at least a portion of the base material, contains a composition containing at least one kind of metal component selected from the group consisting of Ti, Al, Mg, Zr, Hf, Fe, Ni, Sn, Zn, Cr, and Mo, and has a thickness equal to or greater than 50 ?m. In a case where the composition contains one kind of metal component, a ratio RCAs calculated by CA1s/CA2s is less than 1.0. Alternatively, in a case where the composition contains two or more kinds of metal components, in at least a portion of the coating layer, an average of RCAs determined for each of two or more kinds of the metal components is less than 1.0.
    Type: Application
    Filed: December 11, 2019
    Publication date: April 16, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Tadashi Omatsu, Tetsuya Kamimura, Tetsuya Shimizu
  • Publication number: 20200103044
    Abstract: A relief valve that includes a tube; a valve configured to slide along an inner wall of the tube in an axial direction, and a spring that urges the valve, wherein the valve has a hydraulic pressure receiving surface on a first axial side that is one side in the axial direction, and a spring abutment against which the spring abuts, on a second axial side opposite to the first axial side, and the tube has a discharge oil passage having an opening in the inner wall and extending through the inner wall in a radial direction.
    Type: Application
    Filed: May 17, 2018
    Publication date: April 2, 2020
    Applicant: AISIN AW CO., LTD.
    Inventors: Tetsuya SHIMIZU, Toru SUGIYAMA, Masaya IWATA
  • Publication number: 20200011410
    Abstract: An oil supply device that includes a first pump configured to discharge oil by being driven by power transferred along the power transfer path; a second pump configured to discharge the oil by being driven by a power source independent of the power transfer path; a first supply oil passage through which the oil discharged from the first pump is supplied to the transmission; and a second supply oil passage through which the oil discharged from the second pump is supplied to the friction engagement device.
    Type: Application
    Filed: March 30, 2018
    Publication date: January 9, 2020
    Applicant: AISIN AW CO., LTD.
    Inventors: Tetsuya SHIMIZU, Toru SUGIYAMA, Keiji Suzuki, Yuya ISHIHARA, Masaya IWATA, Shinya ICHIKAWA
  • Publication number: 20190312012
    Abstract: A memory device includes a first memory cell array, a second memory cell array disposed in a first direction with respect to the first memory cell array, a first contact plug extending in the first direction through the first memory cell array, and a second contact plug extending in the first direction through the second memory cell array. The first memory cell array includes first electrode layers stacked in a first direction, and a first semiconductor pillar extending through the first electrode layers in the first direction. The second memory cell array including second electrode layers stacked in the first direction, and a second semiconductor pillar extending in the first direction through the second electrode layers. The first contact plug is electrically connected to the first semiconductor pillar, and the second contact plug is electrically connected to the second semiconductor pillar and the first contact plug.
    Type: Application
    Filed: April 22, 2019
    Publication date: October 10, 2019
    Applicant: Toshiba Memory Corporation
    Inventors: Masayoshi TAGAMI, Ryota KATSUMATA, Jun IIJIMA, Tetsuya SHIMIZU, Takamasa USUI, Genki FUJITA
  • Patent number: 10393548
    Abstract: A linear motor system that includes a field system in which magnets are arrayed such that polarities are alternately different, armatures, a magnetic detector which includes first, second and third hall elements, and in which an electrical angle phase of the third hall element is shifted from that of the first hall element by 90° and an electrical angle phase of the second hall element is shifted from that of the first hall element by 180°, and a calculator which calculates a first electrical angle from outputs of the first and the third hall elements, calculates a second electrical angle from outputs of the second and the third hall elements, and calculates an estimated value of an electrical angle by weighting is provided. An electrical angle with a larger amplitude between the first and the second electrical angles is multiplied by a relatively larger coefficient value.
    Type: Grant
    Filed: October 16, 2017
    Date of Patent: August 27, 2019
    Assignee: Murata Machinery, Ltd.
    Inventors: Tetsuya Shimizu, Yasutake Yamada, Kenji Kadoguchi, Shogo Terada