Patents by Inventor Tetsuya Shimizu

Tetsuya Shimizu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190025702
    Abstract: An object of the present invention is to provide a treatment liquid for manufacturing a semiconductor and a pattern forming method, in which the formation of particles including metal atoms can be reduced and an excellent pattern can be formed. A treatment liquid for manufacturing a semiconductor according to an embodiment of the present invention includes: a quaternary ammonium compound represented by Formula (N); at least one additive selected from the group consisting of an anionic surfactant, a nonionic surfactant, a cationic surfactant, and a chelating agent; and water. The treatment liquid for manufacturing a semiconductor includes one kind or two or more kinds of metal atoms selected from the group consisting of Na, K, Ca, Fe, Cu, Mg, Mn, Li, Al, Cr, Ni, and Zn, and a total mass of the metal atoms is 1 mass ppt to 1 mass ppm with respect to the sum of a total mass of the additive and the total mass of the metal atoms.
    Type: Application
    Filed: September 27, 2018
    Publication date: January 24, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya KAMIMURA, Tetsuya SHIMIZU, Satoru MURAYAMA
  • Publication number: 20190011827
    Abstract: In a method of manufacturing a chemical fluid for manufacturing an electronic material, a method of reducing particulate metal in the chemical fluid is selected according to a concentration of particulate metal including an iron atom, a concentration of particulate metal including a copper atom, and a concentration of particulate metal including a zinc atom which are measured by SP ICP-MS in the chemical fluid, and at least one of the concentration of particulate metal including an iron atom, the concentration of particulate metal including a copper atom, or the concentration of particulate metal including a zinc atom is reduced by using the selected reducing method.
    Type: Application
    Filed: September 13, 2018
    Publication date: January 10, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya SHIMIZU, Tsukasa YAMANAKA, Yukihisa KAWADA
  • Publication number: 20180261575
    Abstract: A memory device includes a first memory cell array, a second memory cell array disposed in a first direction with respect to the first memory cell array, a first contact plug extending in the first direction through the first memory cell array, and a second contact plug extending in the first direction through the second memory cell array. The first memory cell array includes first electrode layers stacked in a first direction, and a first semiconductor pillar extending through the first electrode layers in the first direction. The second memory cell array including second electrode layers stacked in the first direction, and a second semiconductor pillar extending in the first direction through the second electrode layers. The first contact plug is electrically connected to the first semiconductor pillar, and the second contact plug is electrically connected to the second semiconductor pillar and the first contact plug.
    Type: Application
    Filed: September 15, 2017
    Publication date: September 13, 2018
    Applicant: Toshiba Memory Corporation
    Inventors: Masayoshi TAGAMI, Ryota Katsumata, Jun Iijima, Tetsuya Shimizu, Takamasa Usui, Genki Fujita
  • Patent number: 9995597
    Abstract: The present invention enables to obtain an approximate position of a zero crossing point in a shorter time period. A magnetic position sensor detects, with an array in which multiple magnetic detection elements are arranged in a straight line, the zero crossing point at which the magnetic flux density from a pair of magnetic poles is zero in a plane perpendicular to the longitudinal direction of the array. The magnetic detection elements are elements whose output changes in polarity when the direction of the magnetic flux density is inverted, and detect an approximate position of the zero crossing point by reading an output of every k-th magnetic detection element of the array (where k is an integer of 2 or greater). Then, the position of the zero crossing point is detected according to outputs of at least two magnetic detection elements on both sides of the zero crossing point.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: June 12, 2018
    Assignee: Murata Machinery, Ltd.
    Inventors: Tetsuya Shimizu, Satoshi Hanaka, Tatsuo Ota, Shogo Terada
  • Publication number: 20180113002
    Abstract: A linear motor system that includes a field system in which magnets are arrayed such that polarities are alternately different, armatures, a magnetic detector which includes first, second and third hall elements, and in which an electrical angle phase of the third hall element is shifted from that of the first hall element by 90° and an electrical angle phase of the second hall element is shifted from that of the first hall element by 180°, and a calculator which calculates a first electrical angle from outputs of the first and the third hall elements, calculates a second electrical angle from outputs of the second and the third hall elements, and calculates an estimated value of an electrical angle by weighting is provided. An electrical angle with a larger amplitude between the first and the second electrical angles is multiplied by a relatively larger coefficient value.
    Type: Application
    Filed: October 16, 2017
    Publication date: April 26, 2018
    Applicant: MURATA MACHINERY, LTD.
    Inventors: Tetsuya Shimizu, Yasutake Yamada, Kenji Kadoguchi, Shogo Terada
  • Patent number: 9887262
    Abstract: A semiconductor device includes a semiconductor layer and a first insulating film provided on the semiconductor layer. The first insulating film has a surface opposite to the semiconductor layer, the surface including a first portion, a second portion and a third portion between the first portion and the second portion. The device includes a first interconnection provided on a first portion and a second interconnection provided on the second portion. The first interconnection and the second interconnection extend in a first direction. The device further includes a conductor and a nitride layer. The conductor extends through the first insulating film in a second direction from each of the first interconnection and the second interconnection toward the semiconductor layer, and the conductor electrically connects the first interconnection to the semiconductor layer. The nitrided layer is provided at least on the third surface.
    Type: Grant
    Filed: August 27, 2015
    Date of Patent: February 6, 2018
    Assignee: Toshiba Memory Corporation
    Inventors: Yoshihiro Minami, Jun Iijima, Tetsuya Shimizu, Takamasa Usui, Masayoshi Tagami
  • Patent number: 9772198
    Abstract: In a linear displacement sensor, two magnets with different polarities define one pitch of a magnetic scale. kn (k is a natural number greater than or equal to 2, n is a natural number greater than or equal to 1) sensor units configured to output a plurality of signals whose period is one pitch and whose phases with respect to the pitch are different are arranged along the magnetic scale in a one-pitch segment. Periodic errors with n periods per pitch of the sensor units are canceled out by averaging the phases from the kn sensor units.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: September 26, 2017
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Tetsuya Shimizu, Hideki Kubo, Satoshi Hanaka, Tatsuo Ota, Shogo Terada
  • Patent number: 9651146
    Abstract: A hydraulic control device that controls a hydraulic pressure for a plurality of friction engagement elements included in an automatic transmission mounted on a vehicle to establish a plurality of shift speeds, including: a plurality of pressure regulation valves, a plurality of hydraulic switches, speed change control means, and abnormality determination means.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: May 16, 2017
    Assignee: AISIN AW CO., LTD.
    Inventors: Tomoya Jinno, Munehiro Tashiro, Masamichi Yamaguchi, Tetsuya Shimizu, Kazunori Ishikawa
  • Patent number: 9568090
    Abstract: A spool valve that has a hollow portion formed with an input port, a first output port, and a second output port, and a spool capable of sliding within the hollow portion and having a plurality of lands, the spool valve being configured to distribute output for input to the input port to the first output port and the second output port in accordance with a proportion of distribution that matches a position of the spool. An opening of the second output port is formed in such a shape that a width of the opening becomes gradually smaller in a direction of movement of the spool in which distribution of the output to the first output port is increased.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: February 14, 2017
    Assignee: AISIN AW CO., LTD.
    Inventors: Hiroyuki Kutsubo, Kazuki Kojima, Tetsuya Shimizu, Kenichi Tsuchida, Kazunori Ishikawa, Tomomi Ishikawa
  • Publication number: 20160247783
    Abstract: A semiconductor device includes a semiconductor layer and a first insulating film provided on the semiconductor layer. The first insulating film has a surface opposite to the semiconductor layer, the surface including a first portion, a second portion and a third portion between the first portion and the second portion. The device includes a first interconnection provided on a first portion and a second interconnection provided on the second portion. The first interconnection and the second interconnection extend in a first direction. The device further includes a conductor and a nitride layer. The conductor extends through the first insulating film in a second direction from each of the first interconnection and the second interconnection toward the semiconductor layer, and the conductor electrically connects the first interconnection to the semiconductor layer. The nitrided layer is provided at least on the third surface.
    Type: Application
    Filed: August 27, 2015
    Publication date: August 25, 2016
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Yoshihiro MINAMI, Jun IIJIMA, Tetsuya SHIMIZU, Takamasa USUI, Masayoshi TAGAMI
  • Patent number: 9292018
    Abstract: A detector detects positions of a moving body in a travel direction at a position shifted from a center of control of travel of the moving body in a direction different than the travel direction of the moving body. Positions of the center of control in the travel direction relative to the output of the detector is stored in a storage unit for at least a curved section of a travel route of the moving body, and the travel of the moving body is controlled by a controller, based on the positions of the center of control read out from the storage unit.
    Type: Grant
    Filed: May 8, 2012
    Date of Patent: March 22, 2016
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Satoshi Hanaka, Tetsuya Shimizu
  • Publication number: 20160041005
    Abstract: The present invention enables to obtain an approximate position of a zero crossing point in a shorter time period. A magnetic position sensor detects, with an array in which multiple magnetic detection elements are arranged in a straight line, the zero crossing point at which the magnetic flux density from a pair of magnetic poles is zero in a plane perpendicular to the longitudinal direction of the array. The magnetic detection elements are elements whose output changes in polarity when the direction of the magnetic flux density is inverted, and detect an approximate position of the zero crossing point by reading an output of every k-th magnetic detection element of the array (where k is an integer of 2 or greater). Then, the position of the zero crossing point is detected according to outputs of at least two magnetic detection elements on both sides of the zero crossing point.
    Type: Application
    Filed: January 31, 2014
    Publication date: February 11, 2016
    Applicant: Murata Machinery, Ltd.
    Inventors: Tetsuya SHIMIZU, Satoshi HANAKA, Tatsuo OTA, Shogo TERADA
  • Patent number: 9243703
    Abstract: A lubricating oil supply device that supplies hydraulic oil used to actuate a vehicle's transmission. The supply device configured with a pump that generates a hydraulic pressure, and a line pressure generation valve that discharges a part of the hydraulic pressure from the pump as a discharge pressure to generate a line pressure for actuating the transmission. A signal pressure output valve that outputs a signal pressure for actuating the line pressure generation valve in accordance with at least a throttle operation amount or torque input to the transmission. Furthermore, a switching valve that is actuated by the signal pressure from the signal pressure output valve and that supplies lubricating oil input to an input port to the object to be lubricated from an output port with a flow rate of the lubricating oil changed.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: January 26, 2016
    Assignee: AISIN AW CO., LTD.
    Inventors: Hiroyuki Kutsubo, Kazuki Kojima, Tetsuya Shimizu, Kenichi Tsuchida, Kazunori Ishikawa
  • Publication number: 20150345992
    Abstract: In a linear displacement sensor, two magnets with different polarities define one pitch of a magnetic scale. kn (k is a natural number greater than or equal to 2, n is a natural number greater than or equal to 1) sensor units configured to output a plurality of signals whose period is one pitch and whose phases with respect to the pitch are different are arranged along the magnetic scale in a one-pitch segment. Periodic errors with n periods per pitch of the sensor units are canceled out by averaging the phases from the kn sensor units.
    Type: Application
    Filed: December 18, 2013
    Publication date: December 3, 2015
    Applicant: MURATA MACHINERY, LTD.
    Inventors: Tetsuya SHIMIZU, Hideki KUBO, Satoshi HANAKA, Tatsuo OTA, Shogo TERADA
  • Patent number: 9175679
    Abstract: A piston is slidably provided in a cylinder and partitions a first pump chamber, and a second pump chamber connected to an object to be operated. A first on-off valve is provided between the first pump chamber and the outside. A second on-off valve is provided in a connecting flow passage that connects the first pump chamber and the second pump chamber to each other. When the piston is moved forward by an electromagnetic force of a solenoid portion, a capacity of the first pump chamber decreases, and a capacity of the second pump chamber increases. When the piston is moved backward by a biasing force of a spring, the capacity of the first pump chamber increases, and the capacity of the second pump chamber decreases. A pressure receiving area of the front face of the piston is larger than that of the back face thereof.
    Type: Grant
    Filed: May 10, 2010
    Date of Patent: November 3, 2015
    Assignee: AISIN AW CO., LTD.
    Inventors: Tetsuya Shimizu, Kazuhiko Kato, Noriomi Fujii, Kazunori Ishikawa
  • Patent number: 9157544
    Abstract: A valve section that functions as a solenoid valve device that includes a pressure adjusting section that adjusts fluid pressure supplied from a fluid pressure source; a pump section that sucks and discharges working fluid in a reservoir; and a single solenoid section that drives the pressure adjusting section and the pump section.
    Type: Grant
    Filed: May 26, 2009
    Date of Patent: October 13, 2015
    Assignee: AISIN AW CO., LTD.
    Inventors: Tetsuya Shimizu, Kazuhiko Kato, Naoyuki Fukaya, Kazunori Ishikawa, Kenichi Tsuchida, Akitomo Suzuki, Noriomi Fujii
  • Patent number: 9109686
    Abstract: A hydraulic control device includes a lock-up control valve that regulates a line pressure to generate a control pressure, and a lock-up relay valve that switches between paths through which a hydraulic pressure is supplied to and discharged from a torque converter. The lock-up relay valve is formed to be capable of switching between a path that connects between a control pressure oil passage to which the control pressure is output and a lock-up oil passage communicated with a lock-up oil chamber and that connects between a control pressure oil passage to which the control pressure is output and a circulation input oil passage communicated with a converter oil chamber, and a path that blocks connection between the control pressure oil passage and the lock-up oil passage and that blocks connection between the control pressure oil passage and the circulation input oil passage.
    Type: Grant
    Filed: December 6, 2012
    Date of Patent: August 18, 2015
    Assignee: AISIN AW CO., LTD.
    Inventors: Tomoya Jinno, Tomomi Ishikawa, Masamichi Yamaguchi, Tetsuya Shimizu, Kazunori Ishikawa
  • Patent number: 9086140
    Abstract: A power transmission device that transmits power from a motor to a wheel via a hydraulically driven friction engagement element and that includes a mechanical pump driven by the motor to produce a hydraulic pressure that is regulated by a pressure regulating valve; an electric pump that produces a hydraulic pressure; a switching mechanism that either switches an output pressure of the regulating valve or an output pressure of the electric pump to a servo of the engagement element based upon a signal pressure; a passage to supply pressure from the mechanical pump to the hydraulic servo; a check valve in the passage that allows supply of the pressure from the mechanical pump to the hydraulic servo and prohibits supply of the pressure from the electric pump to the mechanical pump, and the switching mechanism either shuts off or allows communication through the passage based upon the signal pressure.
    Type: Grant
    Filed: October 26, 2011
    Date of Patent: July 21, 2015
    Assignee: AISIN AW CO., LTD.
    Inventors: Tetsuya Shimizu, Tomomi Ishikawa, Tomoya Jinno, Kenichi Tsuchida, Kazunori Ishikawa
  • Publication number: 20150179471
    Abstract: A method of producing a semiconductor substrate product, having the steps of: providing an etching liquid containing water, a hydrofluoric acid compound, and a water-soluble polymer; and applying the etching liquid to a semiconductor substrate, the semiconductor substrate having a silicon layer and a silicon oxide layer, the silicon layer containing an impurity, and thereby selectively etching the silicon oxide layer.
    Type: Application
    Filed: February 18, 2015
    Publication date: June 25, 2015
    Applicant: FUJIFILM Corporation
    Inventors: Atsushi MIZUTANI, Akiko YOSHII, Tetsuya KAMIMURA, Tetsuya SHIMIZU
  • Patent number: 9022191
    Abstract: A hydraulic pressure control device including a pump driven to generate hydraulic pressure; a first pressure regulation valve that regulates hydraulic pressure in a first passage coupled to a pump along with discharge of oil; a second pressure regulation valve that receives the hydraulic pressure in the first passage and regulates the hydraulic pressure to an engagement pressure to engage a lock-up clutch according to a first signal pressure to output the engagement pressure to a second passage that supplies the oil to an engagement chamber; and a third pressure regulation valve that receives the hydraulic pressure in the first passage or the engagement pressure output to the second passage and regulates the received pressure according to the first signal pressure or a second signal pressure that synchronizes with the first signal pressure to output the resulting pressure to a third passage that supplies the oil to the disengagement chamber.
    Type: Grant
    Filed: March 29, 2012
    Date of Patent: May 5, 2015
    Assignee: Aisin AW Co., Ltd.
    Inventors: Tomoya Jinno, Tetsuya Shimizu, Kazunori Ishikawa