Patents by Inventor Tomomasa Ueda
Tomomasa Ueda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7277318Abstract: A write wiring for writing information in an MTJ device is covered with a magnetic layer. The magnetic layer has a structure in which the growing direction of columnar grains is 30° or less from the normal-line direction of sidewalls, a structure in which grains are deposited of sidewalls, a structure in which grains are deposited like a layer, or a structure in which grains are amorphously deposited.Type: GrantFiled: August 30, 2005Date of Patent: October 2, 2007Assignee: Kabushiki Kaisha ToshibaInventors: Hiroaki Yoda, Hisanori Aikawa, Tomomasa Ueda, Tatsuya Kishi, Takeshi Kajiyama, Yoshiaki Asao
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Patent number: 7247506Abstract: There is provided a magnetic memory device which has a small switching current for a writing line and which has a small variation therein. A method for producing such a magnetic memory device includes: forming a magnetoresistive effect element; forming a first insulating film so as to cover the magnetoresistive effect element; forming a coating film so as to cover the first insulating film; exposing a top face of the magnetoresistive effect element; forming an upper writing line on the magnetoresistive effect element; exposing the first insulating film on a side portion of the magnetoresistive effect element by removing a part or all of the coating film; and forming a yoke structural member so as to cover at least a side portion of the upper writing line and so as to contact the exposed first insulating film on the side portion of the magnetoresistive effect element.Type: GrantFiled: March 27, 2006Date of Patent: July 24, 2007Assignee: Kabushiki Kaisha ToshibaInventors: Minoru Amano, Tatsuya Kishi, Yoshiaki Saito, Tomomasa Ueda, Hiroaki Yoda
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Patent number: 7200034Abstract: A magnetic memory device includes a magnetoresistance effect element, and a first write interconnection which is arranged under the magnetoresistance effect element and has a first interconnection layer and a first yoke layer, the first interconnection layer having a portion projecting toward the magnetoresistance effect element, and the first yoke layer including a first, a second, and third regions. And the device includes a second write interconnection which is arranged above the magnetoresistance effect element and has a second interconnection layer and a second yoke layer, the second interconnection layer having a portion projecting toward the magnetoresistance effect element, and the second yoke layer including a fourth, a fifth, and sixth regions.Type: GrantFiled: February 18, 2005Date of Patent: April 3, 2007Assignee: Kabushiki Kaisha ToshibaInventors: Takeshi Kajiyama, Tomomasa Ueda, Tatsuya Kishi, Hiroaki Yoda, Hisanori Aikawa, Masatoshi Yoshikawa
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Patent number: 7190613Abstract: An MTJ element has two magnetic layers and a nonmagnetic layer. The resistance of the MTJ element, which varies depending on whether the two magnetic layers are magnetized parallel or antiparallel. In an MRAM adapted to write data into the MTJ element by causing a write wiring to generate induced magnetic flux and consequently changing the direction of magnetization of the recording layer, the MTJ element is a perpendicular MTJ element in which each of the two magnetic layers is magnetized in a direction perpendicular to its plane. The write wiring is placed in a direction perpendicular to the direction of the thickness of the MTJ element and applies a generated magnetic field to the magnetic layers of the MTJ element in the direction in which they are magnetized. Magnetic yokes hold the MTJ element in the direction of its thickness.Type: GrantFiled: June 8, 2004Date of Patent: March 13, 2007Assignee: Kabushiki Kaisha ToshibaInventors: Toshihiko Nagase, Hiroaki Yoda, Masatoshi Yoshikawa, Tadashi Kai, Tatsuya Kishi, Hisanori Aikawa, Tomomasa Ueda
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Publication number: 20060163196Abstract: There is provided a magnetic memory device which has a small switching current for a writing line and which has a small variation therein. A method for producing such a magnetic memory device includes: forming a magnetoresistive effect element; forming a first insulating film so as to cover the magnetoresistive effect element; forming a coating film so as to cover the first insulating film; exposing a top face of the magnetoresistive effect element; forming an upper writing line on the magnetoresistive effect element; exposing the first insulating film on a side portion of the magnetoresistive effect element by removing a part or all of the coating film; and forming a yoke structural member so as to cover at least a side portion of the upper writing line and so as to contact the exposed first insulating film on the side portion of the magnetoresistive effect element.Type: ApplicationFiled: March 27, 2006Publication date: July 27, 2006Applicant: Kabushiki Kaisha ToshibaInventors: Minoru Amano, Tatsuya Kishi, Yoshiaki Saito, Tomomasa Ueda, Hiroaki Yoda
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Publication number: 20060132984Abstract: A magnetic memory device includes a magnetoresistance effect element, and a first write interconnection which is arranged under the magnetoresistance effect element and has a first interconnection layer and a first yoke layer, the first interconnection layer having a portion projecting toward the magnetoresistance effect element, and the first yoke layer including a first, a second, and third regions. And the device includes a second write interconnection which is arranged above the magnetoresistance effect element and has a second interconnection layer and a second yoke layer, the second interconnection layer having a portion projecting toward the magnetoresistance effect element, and the second yoke layer including a fourth, a fifth, and sixth regions.Type: ApplicationFiled: February 18, 2005Publication date: June 22, 2006Inventors: Takeshi Kajiyama, Tomomasa Ueda, Tatsuya Kishi, Hiroaki Yoda, Hisanori Aikawa, Masatoshi Yoshikawa
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Patent number: 7064402Abstract: A magnetic random access memory concerning an example of the present invention comprises a magneto resistive element, a first insulating layer which covers side surfaces of the magneto resistive element, a second insulating layer which is arranged on the first insulating layer and has a first groove on the magneto resistive element, a write line which fills the first groove and is connected with the magneto resistive element, and a third insulating layer which is arranged between the first and second insulating layers except a bottom portion of the first groove and has an etching selection ratio with respect to at least the first and second insulating layers.Type: GrantFiled: July 27, 2005Date of Patent: June 20, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Takeshi Kajiyama, Tomomasa Ueda, Tatsuya Kishi, Hisanori Aikawa, Masatoshi Yoshikawa, Yoshiaki Asao, Hiroaki Yoda
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Patent number: 7054187Abstract: A magnetic memory includes: a magnetoresistance effect element having a magnetic recording layer; a first writing wiring extending in a first direction on or below the magnetoresistance effect element, a center of gravity of an axial cross section of the wiring being apart from a center of thickness at the center of gravity, and the center of gravity being eccentric toward the magnetoresistance effect element; and a writing circuit configured to pass a current through the first writing wiring in order to record an information in the magnetic recording layer by a magnetic field generated by the current.Type: GrantFiled: November 5, 2004Date of Patent: May 30, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Tatsuya Kishi, Minoru Amano, Yoshiaki Saito, Shigeki Takahashi, Katsuya Nishiyama, Yoshiaki Asao, Hiroaki Yoda, Tomomasa Ueda, Yoshihisa Iwata
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Patent number: 7041603Abstract: There is provided a magnetic memory device which has a small switching current for a writing line and which has a small variation therein. A method for producing such a magnetic memory device includes: forming a magnetoresistive effect element; forming a first insulating film so as to cover the magnetoresistive effect element; forming a coating film so as to cover the first insulating film; exposing a top face of the magnetoresistive effect element; forming an upper writing line on the magnetoresistive effect element; exposing the first insulating film on a side portion of the magnetoresistive effect element by removing a part or all of the coating film; and forming a yoke structural member so as to cover at least a side portion of the upper writing line and so as to contact the exposed first insulating film on the side portion of the magnetoresistive effect element.Type: GrantFiled: March 26, 2003Date of Patent: May 9, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Minoru Amano, Tatsuya Kishi, Yoshiaki Saito, Tomomasa Ueda, Hiroaki Yoda
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Patent number: 7023725Abstract: There are provided at least one wire, a magnetoresistive effect element having a storage layer whose magnetization direction varies according to a current magnetic field generated by causing a current to flow in the wire, and first yokes provided so as to be spaced from at least one pair of opposed side faces of the magnetoresistive effect element to form a magnetic circuit in cooperation with the magnetoresistive effect element when a current is caused to flow in the wire. Each of the first yokes has at least two soft magnetic layers which are stacked via a non-magnetic layer.Type: GrantFiled: June 10, 2004Date of Patent: April 4, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Yoshiaki Saito, Tomomasa Ueda, Tatsuya Kishi, Minoru Amano
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Patent number: 6984865Abstract: A magnetic random access memory concerning an example of the present invention comprises a magneto resistive element, a first insulating layer which covers side surfaces of the magneto resistive element, a second insulating layer which is arranged on the first insulating layer and has a first groove on the magneto resistive element, a write line which fills the first groove and is connected with the magneto resistive element, and a third insulating layer which is arranged between the first and second insulating layers except a bottom portion of the first groove and has an etching selection ratio with respect to at least the first and second insulating layers.Type: GrantFiled: May 18, 2004Date of Patent: January 10, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Takeshi Kajiyama, Tomomasa Ueda, Tatsuya Kishi, Hisanori Aikawa, Masatoshi Yoshikawa, Yoshiaki Asao, Hiroaki Yoda
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Publication number: 20050280043Abstract: There are provided a first reference layer, in which a direction of magnetization is fixed, and a storage layer including a main body, in which a length in an easy magnetization axis direction is longer than a length in a hard magnetization axis direction, and a projecting portion provided to a central portion of the main body in the hard magnetization axis direction, a direction of magnetization of the storage layer being changeable in accordance with an external magnetic field.Type: ApplicationFiled: August 30, 2005Publication date: December 22, 2005Applicant: Kabushiki Kaisha ToshibaInventors: Tadashi Kai, Shigeki Takahashi, Tomomasa Ueda, Tatsuya Kishi, Yoshiaki Saito
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Publication number: 20050281079Abstract: A write wiring for writing information in an MTJ device is covered with a magnetic layer. The magnetic layer has a structure in which the growing direction of columnar grains is 300 or less from the normal-line direction of sidewalls, a structure in which grains are deposited like a layer, or a structure in which grains are amorphously deposited.Type: ApplicationFiled: August 30, 2005Publication date: December 22, 2005Inventors: Hiroaki Yoda, Hisanori Aikawa, Tomomasa Ueda, Tatsuya Kishi, Takeshi Kajiyama, Yoshiaki Asao
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Publication number: 20050275000Abstract: A magnetic memory device includes a first write wiring line including a wiring layer formed in a trench in an insulation layer, a barrier metal layer buried in the trench over the wiring layer. And the device includes a magneto-resistance effect element provided on the first write wiring line.Type: ApplicationFiled: August 13, 2004Publication date: December 15, 2005Inventors: Takeshi Kajiyama, Hisanori Aikawa, Tomomasa Ueda, Tatsuya Kishi, Masatoshi Yoshikawa
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Publication number: 20050259464Abstract: A magnetic random access memory concerning an example of the present invention comprises a magneto resistive element, a first insulating layer which covers side surfaces of the magneto resistive element, a second insulating layer which is arranged on the first insulating layer and has a first groove on the magneto resistive element, a write line which fills the first groove and is connected with the magneto resistive element, and a third insulating layer which is arranged between the first and second insulating layers except a bottom portion of the first groove and has an etching selection ratio with respect to at least the first and second insulating layers.Type: ApplicationFiled: July 27, 2005Publication date: November 24, 2005Inventors: Takeshi Kajiyama, Tomomasa Ueda, Tatsuya Kishi, Hisanori Aikawa, Masatoshi Yoshikawa, Yoshiaki Asao, Hiroaki Yoda
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Publication number: 20050254289Abstract: A method of manufacturing a magnetic memory device includes forming an insulation layer on a substrate, forming a lower electrode on the insulation layer, forming a magneto-resistive film on an upper surface of the lower electrode, the magneto-resistive film including an insulation barrier layer and a plurality of magnetic films stacked on both sides of the insulation barrier layer, stacking a mask layer on the magneto-resistive film, performing ion etching on the magneto-resistive film, using the mask layer as a mask, thereby forming a magneto-resistive element, forming an insulation film on upper surfaces of the mask, the magneto-resistive element and the lower electrode, and etching the insulation film with an ion beam such that a side surface of the magneto-resistive element is exposed.Type: ApplicationFiled: July 1, 2005Publication date: November 17, 2005Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Kentaro Nakajima, Minoru Amano, Tomomasa Ueda, Shigeki Takahashi
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Patent number: 6965138Abstract: A method of manufacturing a magnetic memory device includes forming an insulation layer on a substrate, forming a lower electrode on the insulation layer, forming a magneto-resistive film on an upper surface of the lower electrode, the magneto-resistive film including an insulation barrier layer and a plurality of magnetic films stacked on both sides of the insulation barrier layer, stacking a mask layer on the magneto-resistive film, performing ion etching on the magneto-resistive film, using the mask layer as a mask, thereby forming a magneto-resistive element, forming an insulation film on upper surfaces of the mask, the magneto-resistive element and the lower electrode, and etching the insulation film with an ion beam such that a side surface of the magneto-resistive element is exposed.Type: GrantFiled: November 7, 2003Date of Patent: November 15, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Kentaro Nakajima, Minoru Amano, Tomomasa Ueda, Shigeki Takahashi
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Patent number: 6960815Abstract: A magnetic memory device includes first wiring which runs in the first direction, second wiring which runs in the second direction, a magneto-resistance element which is arranged at an intersection between the first and second wirings, a first yoke main body which covers at least either of the lower surface and two side surfaces of the first wring, a second yoke main body which covers at least either of the upper surface and two side surfaces of the second wiring, first and second yoke tips which are arranged on two sides of the magneto-resistance element in the first direction at an interval from the magneto-resistance element, and third and fourth yoke tips which are arranged on two sides of the magneto-resistance element in the second direction at an interval from the magneto-resistance element.Type: GrantFiled: March 6, 2003Date of Patent: November 1, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Hiroaki Yoda, Yoshiaki Asao, Tomomasa Ueda, Minoru Amano, Tatsuya Kishi, Keiji Hosotani, Junichi Miyamoto
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Patent number: 6949779Abstract: There are provided a first reference layer, in which a direction of magnetization is fixed, and a storage layer including a main body, in which a length in an easy magnetization axis direction is longer than a length in a hard magnetization axis direction, and a projecting portion provided to a central portion of the main body in the hard magnetization axis direction, a direction of magnetization of the storage layer being changeable in accordance with an external magnetic field.Type: GrantFiled: September 3, 2003Date of Patent: September 27, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Tadashi Kai, Shigeki Takahashi, Tomomasa Ueda, Tatsuya Kishi, Yoshiaki Saito
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Patent number: 6947314Abstract: A write wiring for writing information in an MTJ device is covered with a magnetic layer. The magnetic layer has a structure in which the growing direction of columnar grains is 30° or less from the normal-line direction of sidewalls, a structure in which grains are deposited like a layer, or a structure in which grains are amorphously deposited.Type: GrantFiled: September 29, 2003Date of Patent: September 20, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Hiroaki Yoda, Hisanori Aikawa, Tomomasa Ueda, Tatsuya Kishi, Takeshi Kajiyama, Yoshiaki Asao