Patents by Inventor Uwe Wahl

Uwe Wahl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10971620
    Abstract: A method includes partly removing a supporting layer arranged between a first semiconductor layer and a second semiconductor layer using an etching process to form at least one undercut between the first semiconductor layer and the second semiconductor layer, at least partly filling the at least one undercut with a first material having a higher thermal conductivity than the supporting layer, and forming a sensor device in or on the second semiconductor layer. Semiconductor arrangements and devices produced by the method are also described.
    Type: Grant
    Filed: June 20, 2019
    Date of Patent: April 6, 2021
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Joachim Weyers, Andreas Boehm, Anton Mauder, Patrick Schindler, Stefan Tegen, Armin Tilke, Uwe Wahl
  • Publication number: 20190393334
    Abstract: A method includes partly removing a supporting layer arranged between a first semiconductor layer and a second semiconductor layer using an etching process to form at least one undercut between the first semiconductor layer and the second semiconductor layer, at least partly filling the at least one undercut with a first material having a higher thermal conductivity than the supporting layer, and forming a sensor device in or on the second semiconductor layer. Semiconductor arrangements and devices produced by the method are also described.
    Type: Application
    Filed: June 20, 2019
    Publication date: December 26, 2019
    Inventors: Joachim Weyers, Andreas Boehm, Anton Mauder, Patrick Schindler, Stefan Tegen, Armin Tilke, Uwe Wahl
  • Patent number: 10490656
    Abstract: A charge-compensation semiconductor device includes a source metallization spaced apart from a gate metallization, and a semiconductor body including opposing first and second sides, a drift region, a plurality of body regions adjacent the first side and each forming a respective first pn-junction with the drift region, and a plurality of compensation regions arranged between the second side and the body regions. Each compensation region forms a respective further pn-junction with the drift region. A plurality of gate electrodes in Ohmic connection with the gate metallization is arranged adjacent the first side and separated from the body regions and the drift region by a dielectric region. A resistive current path is formed between one of the gate electrodes and a first one of the compensation regions, or between the first one of the compensation regions and a further metallization spaced apart from the source metallization and the gate metallization.
    Type: Grant
    Filed: July 10, 2018
    Date of Patent: November 26, 2019
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Anton Mauder, Frank Dieter Pfirsch, Hans-Joachim Schulze, Uwe Wahl
  • Publication number: 20190019887
    Abstract: A charge-compensation semiconductor device includes a source metallization spaced apart from a gate metallization, and a semiconductor body including opposing first and second sides, a drift region, a plurality of body regions adjacent the first side and each forming a respective first pn-junction with the drift region, and a plurality of compensation regions arranged between the second side and the body regions. Each compensation region forms a respective further pn-junction with the drift region. A plurality of gate electrodes in Ohmic connection with the gate metallization is arranged adjacent the first side and separated from the body regions and the drift region by a dielectric region. A resistive current path is formed between one of the gate electrodes and a first one of the compensation regions, or between the first one of the compensation regions and a further metallization spaced apart from the source metallization and the gate metallization.
    Type: Application
    Filed: July 10, 2018
    Publication date: January 17, 2019
    Inventors: Armin Willmeroth, Franz Hirler, Anton Mauder, Frank Dieter Pfirsch, Hans-Joachim Schulze, Uwe Wahl
  • Patent number: 9825127
    Abstract: A super junction semiconductor device includes an impurity layer of a first (conductivity) type formed in a semiconductor portion having first and second parallel surfaces, a super junction structure between the first surface and impurity layer and including first columns of the first type and second columns of a second (conductivity) type, a body zone of the second type formed between the first surface and one of the second columns at least partially in the vertical projection of the second columns, and a field extension zone of the second type electrically connected to the body zone and arranged in the vertical projection of one of the columns. An area impurity density in the field extension zone is between 1×1012 and 5×1012 cm?2. A mean net impurity concentration in the field extension zone is higher than in the second columns and lower than in the body zone.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: November 21, 2017
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Uwe Wahl
  • Patent number: 9748116
    Abstract: Various embodiments provide an electronic device, wherein the electronic device comprises a mounting surface configured to mount the electronic device to an external structure and having a first size; a backside electrode having a second size and having arranged thereon a die electrically connected to the backside electrode; wherein the first size is at least three times the second size.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: August 29, 2017
    Assignee: Infineon Technologies Austria AG
    Inventors: Ralf Otremba, Ulrich Froehler, Felix Grawert, Ernst Katzmaier, Uwe Kirchner, Rene Mente, Andreas Schloegl, Uwe Wahl
  • Patent number: 9741601
    Abstract: Semiconductor component comprising at least two semiconductor regions are disclosed. In one embodiment the semiconductor regions of the semiconductor component are electrically isolated from one another by an insulator, and a deposited, patterned, metallic layer extends over the semiconductor regions and over the insulator.
    Type: Grant
    Filed: March 6, 2009
    Date of Patent: August 22, 2017
    Assignee: Infineon Technologies Austria AG
    Inventors: Martin Feldtkeller, Uwe Wahl
  • Patent number: 9722020
    Abstract: A super junction semiconductor device includes a semiconductor portion with first and second surfaces parallel to one another and including a doped layer of a first conductivity type formed at least in a cell area. Columnar first super junction regions of a second conductivity type extend in a direction perpendicular to the first surface and are separated by columnar second super junction regions of the first conductivity type. The first and second super junction regions form a super junction structure between the first surface and the doped layer. A first electrode structure directly adjoins the first surface and a second electrode structure directly adjoins the second surface. The first electrode structure has a first thickness and the second electrode structure has a second thickness. A sum of the first and second thicknesses is at least 20% of the thickness of the semiconductor portion between the first and second surfaces.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: August 1, 2017
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Hans-Joachim Schulze, Uwe Wahl, Winfried Kaindl
  • Patent number: 9711621
    Abstract: A trench transistor having a semiconductor body includes a source region, a body region, a drain region electrically connected to a drain contact, and a gate trench including a gate electrode which is isolated from the semiconductor body. The gate electrode is configured to control current flow between the source region and the drain region along at least a first side wall of the gate trench. The trench transistor further includes a doped semiconductor region having dopants introduced into the semiconductor body through an unmasked part of the walls of a trench.
    Type: Grant
    Filed: July 30, 2014
    Date of Patent: July 18, 2017
    Assignee: Infineon Technologies AG
    Inventors: Franz Hirler, Uwe Wahl, Thorsten Meyer, Michael Rüb, Armin Willmeroth, Markus Schmitt, Carolin Tolksdorf, Carsten Schaeffer
  • Publication number: 20170005025
    Abstract: Various embodiments provide an electronic device, wherein the electronic device comprises a mounting surface configured to mount the electronic device to an external structure and having a first size; a backside electrode having a second size and having arranged thereon a die electrically connected to the backside electrode; wherein the first size is at least three times the second size.
    Type: Application
    Filed: July 1, 2016
    Publication date: January 5, 2017
    Inventors: Ralf OTREMBA, Ulrich FROEHLER, Felix GRAWERT, Ernst KATZMAIER, Uwe KIRCHNER, Rene MENTE, Andreas SCHLOEGL, Uwe WAHL
  • Patent number: 9490250
    Abstract: A half-bridge circuit includes a low-side transistor and a high-side transistor each having a load path and a control terminal. The half-bridge circuit further includes a high-side drive circuit having a level shifter with a level shifter transistor. The low-side transistor and the level shifter transistor are integrated in a common semiconductor body.
    Type: Grant
    Filed: January 27, 2015
    Date of Patent: November 8, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Franz Hirler, Joachim Weyers, Uwe Wahl
  • Publication number: 20160300905
    Abstract: A vertical semiconductor device includes a semiconductor body having a first surface and a second surface opposite to the first surface, a first trench including a dielectric, a gate electrode and a field electrode, the first trench extending into the semiconductor body from the first surface, and a superjunction structure in the semiconductor body. The superjunction structure includes drift regions of a first conductivity type and compensation structures alternately disposed in a first direction parallel to the first surface.
    Type: Application
    Filed: June 17, 2016
    Publication date: October 13, 2016
    Inventors: Uwe Wahl, Franz Hirler, Hans Weber
  • Publication number: 20160268370
    Abstract: A super junction semiconductor device includes a semiconductor portion with first and second surfaces parallel to one another and including a doped layer of a first conductivity type formed at least in a cell area. Columnar first super junction regions of a second conductivity type extend in a direction perpendicular to the first surface and are separated by columnar second super junction regions of the first conductivity type. The first and second super junction regions form a super junction structure between the first surface and the doped layer. A first electrode structure directly adjoins the first surface and a second electrode structure directly adjoins the second surface. The first electrode structure has a first thickness and the second electrode structure has a second thickness. A sum of the first and second thicknesses is at least 20% of the thickness of the semiconductor portion between the first and second surfaces.
    Type: Application
    Filed: May 20, 2016
    Publication date: September 15, 2016
    Inventors: Armin Willmeroth, Franz Hirler, Hans-Joachim Schulze, Uwe Wahl, Winfried Kaindl
  • Patent number: 9431379
    Abstract: A signal transmission arrangement is disclosed. A voltage converter includes a signal transmission arrangement.
    Type: Grant
    Filed: January 22, 2015
    Date of Patent: August 30, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Martin Kerber, Jens-Peer Stengl, Uwe Wahl
  • Publication number: 20160218174
    Abstract: A super junction semiconductor device includes an impurity layer of a first (conductivity) type formed in a semiconductor portion having first and second parallel surfaces, a super junction structure between the first surface and impurity layer and including first columns of the first type and second columns of a second (conductivity) type, a body zone of the second type formed between the first surface and one of the second columns at least partially in the vertical projection of the second columns, and a field extension zone of the second type electrically connected to the body zone and arranged in the vertical projection of one of the columns. An area impurity density in the field extension zone is between 1×1012 and 5×1012 cm?2. A mean net impurity concentration in the field extension zone is higher than in the second columns and lower than in the body zone.
    Type: Application
    Filed: April 1, 2016
    Publication date: July 28, 2016
    Inventors: Armin Willmeroth, Franz Hirler, Uwe Wahl
  • Patent number: 9349792
    Abstract: A super junction semiconductor device includes a semiconductor portion with a first surface and a second surface parallel to the first surface. The semiconductor portion includes a doped layer of a first conductivity type formed at least in a cell area. The super junction semiconductor device further includes columnar first super junction regions of a second, opposite conductivity type extending in a direction perpendicular to the first surface and separated by columnar second super junction regions of the first conductivity type. The first and second super junction regions form a super junction structure between the first surface and the doped layer. A distance between the first super junction regions and the second surface does not exceed 30 ?m.
    Type: Grant
    Filed: January 29, 2015
    Date of Patent: May 24, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Hans-Joachim Schulze, Uwe Wahl, Winfried Kaindl
  • Publication number: 20160112041
    Abstract: A power transistor model is described which comprises a source drain path, a first current source and a voltage controlled second current source in the source drain path which model the static voltage-current-relationship of a modeled power transistor, wherein the voltage-controlled second current source models a nonlinear behavior of a drift zone of the power transistor.
    Type: Application
    Filed: October 15, 2014
    Publication date: April 21, 2016
    Inventors: Kevni Bueyuektas, Uwe Wahl, Andreas Schloegl, Gerhard Noebauer
  • Patent number: 9318549
    Abstract: A super junction semiconductor device includes a semiconductor portion with parallel first and second surfaces. An impurity layer of a first conductivity type is formed in the semiconductor portion. Between the first surface and the impurity layer a super junction structure includes first columns of the first conductivity type and second columns of a second conductivity type. A sign of a compensation rate between the first and second columns may change along a vertical extension of the columns perpendicular to the first surface. A body zone of the second conductivity type is formed between the first surface and one of the second columns. A field extension zone of the second conductivity type may be electrically connected to the body zone or a field extension zone of the first conductivity type may be connected to the impurity layer. The field extension zone improves the avalanche characteristics of the semiconductor device.
    Type: Grant
    Filed: February 18, 2013
    Date of Patent: April 19, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Uwe Wahl
  • Patent number: 9306064
    Abstract: The present disclosure provides a semiconductor device and an integrated apparatus having the same. The semiconductor device includes a substrate, a buffer layer on the substrate, a compensation area which includes a p-region and a n-region on the buffer layer, and a transistor cell on the compensation area. The transistor cell includes a source region, a body region, a gate electrode and a gate dielectric formed at least between the gate electrode and the body region. The gate dielectric has a thickness in a range of 12 nm to 50 nm.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: April 5, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Uwe Wahl, Armin Willmeroth
  • Patent number: 9269654
    Abstract: A semiconductor device, a method of manufacturing a semiconductor device and a method for transmitting a signal are disclosed. In accordance with an embodiment of the present invention, the semiconductor device comprises a first semiconductor chip comprising a first coil, a second semiconductor chip comprising a second coil inductively coupled to the first coil, and an isolating intermediate layer between the first semiconductor chip and the second semiconductor chip.
    Type: Grant
    Filed: February 13, 2014
    Date of Patent: February 23, 2016
    Assignee: Infineon Technologies AG
    Inventors: Stefan Willkofer, Uwe Wahl, Bernhard Knott, Markus Hammer, Andreas Strasser