Patents by Inventor Volume Chien

Volume Chien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9247116
    Abstract: An image sensor device and a manufacturing method for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate having an array region and a periphery region. The image sensor device also includes a light sensing region in the array region of the semiconductor substrate. The image sensor device further includes a dielectric structure over the array region and the periphery region, and the dielectric structure has a substantially planar top surface. In addition, the image sensor device includes a recess in the dielectric structure and substantially aligned with the light sensing region. The image sensor device also includes a filter in the recess and a light blocking grid in the dielectric structure and surrounding a portion of the filter.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: January 26, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Volume Chien, Su-Hua Chang, Zen-Fong Huang, Chia-Yu Wei, Chi-Cherng Jeng, Hsin-Chi Chen
  • Patent number: 9240503
    Abstract: A photodiode structure includes a photodiode and a concave reflector disposed below the photodiode. The concave reflector is arranged to reflect incident light from above back toward the photodiode.
    Type: Grant
    Filed: August 26, 2014
    Date of Patent: January 19, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Che-Min Lin, Volume Chien, Chih-Kang Chao, Chi-Cherng Jeng, Pin Chia Su, Chih-Mu Huang
  • Publication number: 20160013118
    Abstract: The present disclosure provides a semiconductor structure. The structure includes a first substrate; a first dielectric layer having a first surface in proximity to the first substrate and a second surface away from the first substrate; a first interconnect penetrating the first surface of the first dielectric layer; and a protection layer extending along a portion of a sidewall of the first interconnect. A thickness of the protection layer is in a range of from about 0.02 ?m to about 0.2 ?m.
    Type: Application
    Filed: July 14, 2014
    Publication date: January 14, 2016
    Inventors: TSUNG-HAN TSAI, VOLUME CHIEN, YUNG-LUNG HSU, CHUNG-BIN TSENG, KENG-YING LIAO, PO-ZEN CHEN
  • Publication number: 20160005781
    Abstract: A backside illuminated (BSI) image sensor device includes: a first substrate including a front side and a back side; a second substrate bonded with the first substrate on the front side; and a blocking layer between the first substrate and the second substrate. The first substrate includes an image sensor, and the image sensor is configured to collect incident light entering from the back side. The second substrate includes a circuit coupled with the image sensor. The blocking layer is configured to block radiation induced by the circuit.
    Type: Application
    Filed: July 2, 2014
    Publication date: January 7, 2016
    Inventors: HUAN-EN LIN, SHIU-KO JANGJIAN, VOLUME CHIEN, FU-TSUN TSAI, YUNG-LUNG HSU, CHI-CHERNG JENG
  • Publication number: 20150372030
    Abstract: A semiconductor image sensor includes a substrate having a first side and a second side that is opposite the first side. An interconnect structure is disposed over the first side of the substrate. A plurality of radiation-sensing regions is located in the substrate. The radiation-sensing regions are configured to sense radiation that enters the substrate from the second side. A plurality of light-blocking structures is disposed over the second side of the substrate. A passivation layer is coated on top surfaces and sidewalls of each of the light-blocking structures. A plurality of spacers is disposed on portions of the passivation layer coated on the sidewalls of the light-blocking structures.
    Type: Application
    Filed: June 19, 2014
    Publication date: December 24, 2015
    Inventors: Yun-Wei Cheng, Chen Chiu-Jung, Volume Chien, Kuo-Cheng Lee, Yung-Lung Hsu, Chen Hsin-Chi
  • Publication number: 20150372033
    Abstract: A semiconductor image sensor includes a substrate having a first side and a second side that is opposite the first side. An interconnect structure is disposed over the first side of the substrate. A plurality of radiation-sensing regions is located in the substrate. The radiation-sensing regions are configured to sense radiation that enters the substrate from the second side. A buffer layer is disposed over the second side of the substrate. A plurality of elements is disposed over the buffer layer. The elements and the buffer layer have different material compositions. A plurality of light-blocking structures is disposed over the plurality of elements, respectively. The radiation-sensing regions are respectively aligned with a plurality of openings defined by the light-blocking structures, the elements, and the buffer layer.
    Type: Application
    Filed: June 18, 2014
    Publication date: December 24, 2015
    Inventors: Yun-Wei Cheng, Chen Chiu-Jung, Volume Chien, Kuo-Cheng Lee, Yung-Lung Hsu, Chen Hsin-Chi
  • Publication number: 20150372045
    Abstract: A die includes a first plurality of edges, and a semiconductor substrate in the die. The semiconductor substrate includes a first portion including a second plurality of edges misaligned with respective ones of the first plurality of edges. The semiconductor substrate further includes a second portion extending from one of the second plurality of edges to one of the first plurality of edges of the die. The second portion includes a first end connected to the one of the second plurality of edges, and a second end having an edge aligned to the one of the first plurality of edges of the die.
    Type: Application
    Filed: August 31, 2015
    Publication date: December 24, 2015
    Inventors: I-I Cheng, Chih-Mu Huang, Pin Chia Su, Chi-Cherng Jeng, Volume Chien, Chih-Kang Chao
  • Patent number: 9201195
    Abstract: The present disclosure provides an integrated circuit device comprising a substrate having a back surface and a sensing region disposed in the substrate and being operable to sense radiation projected towards the back surface of the substrate. The device further includes a waveguide disposed over the back surface of the substrate. The waveguide is aligned with the sensing region such that the waveguide is operable to transmit the radiation towards the aligned sensing region. The waveguide includes a waveguide wall, and an inner region disposed adjacent to the waveguide wall. A diffractive index of the waveguide wall is less than a diffractive index of the inner region.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: December 1, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Allen Tseng, Che-Min Lin, Zen-Fong Huang, Volume Chien, Chi-Cherng Jeng
  • Patent number: 9196547
    Abstract: Embodiments of the invention relate to dual shallow trench isolations (STI). In various embodiments related to CMOS Image Sensor (CIS) technologies, the dual STI refers to one STI structure in the pixel region and another STI structure in the periphery or logic region. The depth of each STI structure depends on the need and/or isolation tolerance of devices in each region. In an embodiment, the pixel region uses NMOS devices and the STI in this region is shallower than that of in the periphery region that includes both NMOS and PMOS device having different P- and N-wells and that desire more protective isolation (i.e., deeper STI). Depending on implementations, different numbers of masks (e.g., two, three) are used to generate the dual STI, and are disclosed in various method embodiments.
    Type: Grant
    Filed: March 31, 2010
    Date of Patent: November 24, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jeng-Shyan Lin, Dun-Nian Yaung, Jen-Cheng Liu, Chun-Chieh Chuang, Volume Chien
  • Patent number: 9196642
    Abstract: An embodiment semiconductor device includes a substrate such as a silicon or silicon-containing film, a pixel array supported by the substrate, and a metal stress release feature arranged around a periphery of the pixel array. The metal stress release feature may be formed from metal strips or discrete metal elements. The metal stress release feature may be arranged in a stress release pattern that uses a single line or a plurality of lines. The metal stress release pattern may also use metal corner elements at ends of the lines.
    Type: Grant
    Filed: December 7, 2012
    Date of Patent: November 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Han Tsai, Allen Tseng, Yen-Hsung Ho, Chun-Hao Chou, Kuo-Cheng Lee, Volume Chien, Chi-Cherng Jeng
  • Publication number: 20150333007
    Abstract: A semiconductor device includes a first layer including a number of first layer metal pads, a second layer formed on top of the first layer, the second layer including a number of second layer metal pads, and vias connecting the first layer metal pads to the second layer metal pads. A surface area overlap between the first layer metal pads and the second layer metal pads is below a defined threshold.
    Type: Application
    Filed: July 27, 2015
    Publication date: November 19, 2015
    Inventors: I-Chih Chen, Ying-Hao Chen, Chi-Cherng Jeng, Volume Chien, Fu-Tsun Tsai, Kun-Huei Lin
  • Publication number: 20150311247
    Abstract: A semiconductor image sensor includes a substrate having a first side and a second side that is opposite the first side. An interconnect structure is disposed over the first side of the substrate. A plurality of radiation-sensing regions is located in the substrate. The radiation-sensing regions are configured to sense radiation that enters the substrate from the second side. The radiation-sensing regions are separated by a plurality of gaps. A plurality of radiation-blocking structures is disposed over the second side of the substrate. Each of the radiation-blocking structures is aligned with a respective one of the gaps. A plurality of color filters are disposed in between the radiation-blocking structures.
    Type: Application
    Filed: April 25, 2014
    Publication date: October 29, 2015
    Inventors: Chiu-Jung Chen, Yun-Wei Cheng, Volume Chien, Kuo-Cheng Lee, Chun-Hao Chou, Yung-Lung Hsu, Hsin-Chi Chen
  • Patent number: 9142588
    Abstract: A die includes a first plurality of edges, and a semiconductor substrate in the die. The semiconductor substrate includes a first portion including a second plurality of edges misaligned with respective ones of the first plurality of edges. The semiconductor substrate further includes a second portion extending from one of the second plurality of edges to one of the first plurality of edges of the die. The second portion includes a first end connected to the one of the second plurality of edges, and a second end having an edge aligned to the one of the first plurality of edges of the die.
    Type: Grant
    Filed: October 28, 2014
    Date of Patent: September 22, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: I-I Cheng, Chih-Mu Huang, Pin Chia Su, Chi-Cherng Jeng, Volume Chien, Chih-Kang Chao
  • Publication number: 20150263054
    Abstract: An integrated circuit structure includes a semiconductor substrate, an image sensor extending from a front surface of the semiconductor substrate into the semiconductor substrate, and an isolation structure extending from a back surface of the semiconductor substrate into the semiconductor substrate, wherein the isolation structure includes an air-gap therein. An air-gap sealing layer is on a backside of the semiconductor substrate. The air-gap sealing layer seals the air-gap, wherein the air-gap sealing layer includes a portion exposed to the air-gap.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 17, 2015
    Inventors: Volume Chien, Yu-Heng Cheng, Huan-En Lin, Chi-Cherng Jeng, Fu-Tsun Tsai
  • Publication number: 20150264233
    Abstract: An image sensor device and a manufacturing method for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate having an array region and a periphery region. The image sensor device also includes a light sensing region in the array region of the semiconductor substrate. The image sensor device further includes a dielectric structure over the array region and the periphery region, and the dielectric structure has a substantially planar top surface. In addition, the image sensor device includes a recess in the dielectric structure and substantially aligned with the light sensing region. The image sensor device also includes a filter in the recess and a light blocking grid in the dielectric structure and surrounding a portion of the filter.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Volume CHIEN, Su-Hua CHANG, Zen-Fong HUANG, Chia-Yu WEI, Chi-Cherng JENG, Hsin-Chi CHEN
  • Patent number: 9123608
    Abstract: A backside illuminated CMOS image sensor comprises a photo active region formed over a substrate using a front side ion implantation process and an extended photo active region formed adjacent to the photo active region, wherein the extended photo active region is formed by using a backside ion implantation process. The backside illuminated CMOS image sensor may further comprise a laser annealed layer on the backside of the substrate. The extended photo active region helps to increase the number of photons converted into electrons so as to improve quantum efficiency.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: September 1, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shiu-Ko JangJian, Volume Chien, Szu-An Wu
  • Patent number: 9123839
    Abstract: Among other things, one or more image sensors and techniques for guiding light towards a photodiode are provided. An image sensor comprises a metal grid configured to direct light towards a corresponding photodiode and away from other photodiodes. The image sensor also comprises a dielectric grid and a filler grid over the metal grid to direct light towards the corresponding photodiode and away from other photodiodes, where the filler grid has a different refractive index than the dielectric grid. In this way, crosstalk, otherwise resulting from detection of light by incorrect photodiodes, is mitigated.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: September 1, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yun-Wei Cheng, Volume Chien, Chao Chih-Kang, Chi-Cherng Jeng, Chen Hsin-Chi
  • Publication number: 20150243696
    Abstract: The disclosure provides an image sensor device and a manufacturing method. The image sensor device includes a semiconductor substrate and a light sensing region in the semiconductor substrate. The image sensor device also includes a light blocking structure in the semiconductor substrate and adjacent to the light sensing region. A sidewall of the light blocking structure is a curved surface.
    Type: Application
    Filed: February 27, 2014
    Publication date: August 27, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Volume CHIEN, Kun-Huei LIN, Chia-Yu WEI, Allen TSENG, Chi-Cherng JENG, Chuan-Pu LIU
  • Publication number: 20150243697
    Abstract: Embodiments of the disclosure provide an image sensor device. The image sensor device includes a semiconductor substrate. The semiconductor substrate has a front surface, a back surface opposite to the front surface, a light-sensing region close to the front surface, and a trench adjacent to the light-sensing region. The image sensor device includes a reflective layer positioned on an inner wall of the trench, wherein the reflective layer has a light reflectivity ranging from about 70% to about 100%.
    Type: Application
    Filed: February 27, 2014
    Publication date: August 27, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Volume CHIEN, Yu-Heng CHENG, Fu-Tsun TSAI, Hsi-Jung WU, Chi-Cherng JENG
  • Publication number: 20150243805
    Abstract: Embodiments of the disclosure provide an image sensor device. The image sensor device includes a semiconductor substrate including a front surface, a back surface opposite to the front surface, a light-sensing region close to the front surface, and a trench adjacent to the light-sensing region. The image sensor device includes a light-blocking structure positioned in the trench to absorb or reflect incident light.
    Type: Application
    Filed: February 27, 2014
    Publication date: August 27, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Volume CHIEN, Yun-Wei CHENG, Zhe-Ju LIU, Kuo-Cheng LEE, Chi-Cherng JENG, Chuan-Pu LIU