Patents by Inventor Volume Chien

Volume Chien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150214272
    Abstract: A backside illumination image sensor structure comprises an image sensor formed adjacent to a first side of a semiconductor substrate, wherein an interconnect layer is formed over the first side of the semiconductor substrate, a backside illumination film formed over a second side of the semiconductor substrate, a metal shielding layer formed over the backside illumination film and a via embedded in the backside illumination film and coupled between the metal shielding layer and the semiconductor substrate.
    Type: Application
    Filed: April 13, 2015
    Publication date: July 30, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shiu-Ko JangJian, Chi-Cherng Jeng, Volume Chien, Ying-Lang Wang
  • Publication number: 20150214165
    Abstract: A bonding pad structure comprises a first dielectric layer, a first conductive island in a second dielectric layer over the first dielectric layer and a via array having a plurality of vias in a third dielectric layer over the first conductive island. The structure also comprises a plurality of second conductive islands in a fourth dielectric layer over the via array. The second conductive islands are each separated from one another by a dielectric material of the fourth dielectric layer and in contact with at least one via of the via array. The structure further comprises a substrate over the second conductive islands. The substrate has an opening defined therein that exposes at least one second conductive island. The structure additionally comprises a bonding pad over the substrate. The bonding pad is in contact with the at least one second conductive island through the opening in the substrate.
    Type: Application
    Filed: April 10, 2015
    Publication date: July 30, 2015
    Inventors: Tsung-Han TSAI, Jung-Chi JENG, Yueh-Ching CHANG, Volume CHIEN, Huang-Ta HUANG, Chi-Cherng JENG
  • Patent number: 9093430
    Abstract: A semiconductor device includes a first layer including a number of first layer metal pads, a second layer formed on top of the first layer, the second layer including a number of second layer metal pads, and vias connecting the first layer metal pads to the second layer metal pads. A surface area overlap between the first layer metal pads and the second layer metal pads is below a defined threshold.
    Type: Grant
    Filed: October 21, 2013
    Date of Patent: July 28, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: I-Chih Chen, Ying-Hao Chen, Chi-Cherng Jeng, Volume Chien, Fu-Tsun Tsai, Kun-Huei Lin
  • Publication number: 20150189207
    Abstract: A semiconductor image sensor device having a conformal protective layer includes a semiconductor substrate a pixel-array region and a peripheral region. The conformal protective layer is disposed over a plurality of pixels having a photodiode and a plurality of transistors in the pixel-array region. Contacts to the plurality of transistors are surrounded by the conformal protective layer. In some embodiments, the conformal protective layer is the same material as transistor gate spacers in the peripheral region.
    Type: Application
    Filed: December 30, 2013
    Publication date: July 2, 2015
    Inventors: Volume Chien, Yi-Sheng Liu, Chia-Yu Wei, Yun-Wei Cheng, Chi-Cherng Jeng
  • Publication number: 20150179690
    Abstract: Embodiments of mechanisms for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate and an isolation structure in the semiconductor substrate. The image sensor device also includes an active region in the semiconductor substrate and surrounded by the isolation structure. The active region includes a light sensing region and a doped region, and the doped region has a horizontal length and a vertical length. A ratio of the horizontal length to the vertical length is in a range from about 1 to about 4.
    Type: Application
    Filed: December 19, 2013
    Publication date: June 25, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Volume CHIEN, Fu-Cheng CHANG, Yi-Hsing CHU, Shiu-Ko JANGJIAN, Chi-Cherng JENG
  • Publication number: 20150171136
    Abstract: A backside illuminated CMOS image sensor and a manufacturing method thereof are provided. Embedded micro-lenses disposed respectively on concave surfaces of a buffer oxide layer, wherein the concave surfaces are positioned to respectively align with photodiodes of pixel array of the CMOS image sensor. The embedded micro-lenses can confine incident light to the photodiodes to reduce optical crosstalk between adjacent pixels.
    Type: Application
    Filed: December 12, 2013
    Publication date: June 18, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Volume CHIEN, Zen-Fong HUANG, Chia-Yu WEI, Chi-Cherng JENG, Hsin-Chi CHEN
  • Publication number: 20150170985
    Abstract: A semiconductor wafer includes a substrate, an integrated circuit and a die seal ring structure. The substrate is with a die region, a die seal ring region surrounding the die region and a scribe line region surrounding the die seal ring region. The substrate includes a first surface and a second surface opposite to the first surface, and periodic recesses within the first surface of the die seal ring region, the scribe line region or both the die seal ring region and the scribe line region. The integrated circuit is located on the first surface and the second surface of the die region. The die seal ring structure is located on the second surface of the die seal ring region. A semiconductor die is also provided.
    Type: Application
    Filed: December 17, 2013
    Publication date: June 18, 2015
    Applicant: Taiwan Semiconductor Manufacturing CO., LTD.
    Inventors: Hsi-Jung Wu, Volume Chien, Ying-Lang Wang, Hsin-Chi Chen, Ying-Hao Chen, Hung-Ta Huang
  • Patent number: 9060144
    Abstract: An image sensor comprises an image sensing substrate that in turns includes an image sensing device, a first sensor pixel, a second sensor pixel, and a divider. The divider is between the first sensor pixel and the second sensor pixel.
    Type: Grant
    Filed: August 16, 2013
    Date of Patent: June 16, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yi-Sheng Liu, Yun-Wei Cheng, Volume Chien, Chi-Cherng Jeng, Hsin-Chi Chen
  • Publication number: 20150155320
    Abstract: Embodiments of mechanisms for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate and a photodetector in the semiconductor substrate. The image sensor device also includes a dielectric layer over the semiconductor substrate, and the dielectric layer has a recess aligned with the photodetector. The image sensor device further includes a filter in the recess of the dielectric layer. In addition, the image sensor device includes a shielding layer between the dielectric layer and the semiconductor substrate and surrounding the filter.
    Type: Application
    Filed: November 29, 2013
    Publication date: June 4, 2015
    Inventors: Volume CHIEN, Yun-Wei CHENG, Shiu-Ko JANGJIAN, Zhe-Ju LIU, Kuo-Cheng LEE, Chi-Cherng JENG
  • Patent number: 9041204
    Abstract: A bonding pad structure includes a substrate and a first conductive island formed in a first dielectric layer and disposed over the substrate. A first via array having a plurality of vias is formed in a second dielectric layer and disposed over the first conductive island. A second conductive island is formed in a third dielectric layer and disposed over the first via array. A bonding pad is disposed over the second conductive island. The first conductive island, the first via array, and the second conductive island are electrically connected to the bonding pad. The first via array is connected to no other conductive island in the first dielectric layer except the first conductive island. No other conductive island in the third dielectric layer is connected to the first via array except the second conductive island.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: May 26, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Han Tsai, Jung-Chi Jeng, Yueh-Ching Chang, Volume Chien, Huang-Ta Huang, Chi-Cherng Jeng
  • Publication number: 20150132884
    Abstract: A method of forming an image sensor device where the method includes forming a first dielectric layer on a substrate. The method further includes patterning the first dielectric layer to define an area for a reflective shield, where the area defined for the reflective shield is above a photodiode. Additionally, the method includes forming the reflective shield on the substrate by filling the defined area with a high reflectivity material, and the high reflective material comprises a polymer.
    Type: Application
    Filed: January 22, 2015
    Publication date: May 14, 2015
    Inventors: Yu-Hao SHIH, Szu-Ying CHEN, Hsing-Lung CHEN, Jen-Cheng LIU, Dun-Nian YAUNG, Volume CHIEN
  • Publication number: 20150123225
    Abstract: A backside illuminated image sensor device with a shielding layer and a manufacturing method thereof are provided. In the backside illuminated image senor device, a patterned conductive shielding layer is formed on a dielectric layer on a backside surface of a semiconductor substrate and surrounding a pixel array on a front side surface of the semiconductor substrate.
    Type: Application
    Filed: November 6, 2013
    Publication date: May 7, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Volume CHIEN, Su-Hua CHANG, Chia-Yu WEI, Zen-Fong HUANG, Chi-Cherng JENG
  • Patent number: 9024369
    Abstract: A backside illumination image sensor structure comprises an image sensor formed adjacent to a first side of a semiconductor substrate, wherein an interconnect layer is formed over the first side of the semiconductor substrate, a backside illumination film formed over a second side of the semiconductor substrate, a metal shielding layer formed over the backside illumination film and a via embedded in the backside illumination film and coupled between the metal shielding layer and the semiconductor substrate.
    Type: Grant
    Filed: December 18, 2012
    Date of Patent: May 5, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shiu-Ko JangJian, Chi-Cherng Jeng, Volume Chien, Ying-Lang Wang
  • Patent number: 8962375
    Abstract: A method of creating a reflective shield for an image sensor device includes depositing a first dielectric layer on a substrate, wherein a photodiode is on the substrate. The method further includes removing surface topography by performing chemical mechanical polishing (CMP) on the first dielectric layer. The method further includes patterning the substrate to define an area on a surface of the first dielectric layer, wherein the area is directly above the photodiode. The method further includes depositing a layer of a material with high reflectivity on the substrate, wherein the material fills the area on the surface of the first dielectric layer. The method further includes removing excess material with high reflectivity, wherein the reflective shield is formed and is embedded in the first dielectric layer. The method further includes depositing a second dielectric material on the substrate, wherein the second dielectric material covers the reflective shield.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: February 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Hao Shih, Szu-Ying Chen, Hsing-Lung Chen, Jen-Cheng Liu, Dun-Nian Yaung, Volume Chien
  • Publication number: 20150048518
    Abstract: A semiconductor device includes a first layer including a number of first layer metal pads, a second layer formed on top of the first layer, the second layer including a number of second layer metal pads, and vias connecting the first layer metal pads to the second layer metal pads. A surface area overlap between the first layer metal pads and the second layer metal pads is below a defined threshold.
    Type: Application
    Filed: October 21, 2013
    Publication date: February 19, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: I-Chih Chen, Ying-Hao Chen, Chi-Cheng Jeng, Volume Chien, Fu-Tsun Tsai, Kun-Huei Lin
  • Publication number: 20150049229
    Abstract: An image sensor comprises an image sensing substrate that in turns includes an image sensing device, a first sensor pixel, a second sensor pixel, and a divider. The divider is between the first sensor pixel and the second sensor pixel.
    Type: Application
    Filed: August 16, 2013
    Publication date: February 19, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: YI-SHENG LIU, YUN-WEI CHENG, VOLUME CHIEN, CHI-CHERNG JENG, HSIN-CHI CHEN
  • Publication number: 20150044810
    Abstract: A die includes a first plurality of edges, and a semiconductor substrate in the die. The semiconductor substrate includes a first portion including a second plurality of edges misaligned with respective ones of the first plurality of edges. The semiconductor substrate further includes a second portion extending from one of the second plurality of edges to one of the first plurality of edges of the die. The second portion includes a first end connected to the one of the second plurality of edges, and a second end having an edge aligned to the one of the first plurality of edges of the die.
    Type: Application
    Filed: October 28, 2014
    Publication date: February 12, 2015
    Inventors: I-I Cheng, Chih-Mu Huang, Pin Chia Su, Chi-Cherng Jeng, Volume Chien, Chih-Kang Chao
  • Publication number: 20150014802
    Abstract: A light guide grid can include a grid structure having a plurality of intersecting grid lines, each grid line having a width w, and a plurality of openings for photosensor elements between intersecting grid lines. The grid structure has a diagonal grid width between two adjacent ones of the plurality of openings in a diagonal direction. The diagonal grid width has a value exceeding approximately ?3 w. An image sensor can include a light guide grid having a grid structure as described above and further include a micro-lens such as a sinking micro-lens and a color filter. A method of fabricating a light guide grid can include forming a grid above at least one photo sensor, the grid having intersecting grid lines of width w and a diagonal grid width in a diagonal direction having a value exceeding approximately ?3 w.
    Type: Application
    Filed: July 8, 2013
    Publication date: January 15, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yun-Wei CHENG, Volume Chien, I-I Cheng, Chi-Cherng Jeng
  • Publication number: 20150001658
    Abstract: A semiconductor device including a light sensing region disposed on a substrate is provided that includes a bond structure having one or more patterned layers underlying the pad element. The pad element may be coupled to the light sensing region and may be formed in a first metal layer disposed on the substrate. A second metal layer of the device has a first bond region, a region of the second metal layer that underlies the pad element. This first bond region of the second metal layer includes a pattern of a plurality of conductive lines interposed by dielectric. A via connects the pad element and the second metal layer.
    Type: Application
    Filed: June 27, 2013
    Publication date: January 1, 2015
    Inventors: Shang-Yen Wu, I-Chih Chen, Yi-Sheng Liu, Volume Chien, Fu-Tsun Tsai, Chi-Cherng Jeng, Ying-Hao Chen
  • Publication number: 20150003777
    Abstract: The present disclosure provides an integrated circuit device comprising a substrate having a back surface and a sensing region disposed in the substrate and being operable to sense radiation projected towards the back surface of the substrate. The device further includes a waveguide disposed over the back surface of the substrate. The waveguide is aligned with the sensing region such that the waveguide is operable to transmit the radiation towards the aligned sensing region. The waveguide includes a waveguide wall, and an inner region disposed adjacent to the waveguide wall. A diffractive index of the waveguide wall is less than a diffractive index of the inner region.
    Type: Application
    Filed: June 28, 2013
    Publication date: January 1, 2015
    Inventors: Allen Tseng, Che-Min Lin, Zen-Fong Huang, Volume Chien, Chi-Cherng Jeng