Patents by Inventor Wen Chun Huang
Wen Chun Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20160327854Abstract: The present disclosure provides a semiconductor lithography system. The lithography system includes a projection optics component. The projection optics component includes a curved aperture. The lithography system includes a photo mask positioned over the projection optics component. The photo mask contains a plurality of elongate semiconductor patterns. The semiconductor patterns each point in a direction substantially perpendicular to the curved aperture of the projection optics component. The present disclosure also provides a method. The method includes receiving a design layout for a semiconductor device. The design layout contains a plurality of semiconductor patterns each oriented in a given direction. The method includes transforming the design layout into a mask layout. The semiconductor patterns in the mask layout are oriented in a plurality of different directions as a function of their respective location.Type: ApplicationFiled: July 15, 2016Publication date: November 10, 2016Inventors: Ching-Hsu Chang, Nian-Fuh Cheng, Chih-Shiang Chou, Wen-Chun Huang, Ru-Gun Liu
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Publication number: 20160293422Abstract: The present disclosure provides a method of patterning a target material layer over a semiconductor substrate. The method includes steps of forming a spacer feature over the target material layer using a first sub-layout and performing a photolithographic patterning process using a second sub-layout to form a first feature. A portion of the first feature extends over the spacer feature. The method further includes steps of removing the portion of the first feature extending over the spacer feature and removing the spacer feature. Other methods and associated patterned semiconductor wafers are also provided herein.Type: ApplicationFiled: June 6, 2016Publication date: October 6, 2016Inventors: Tsong-Hua Ou, Ken-Hsien Hsieh, Shih-Ming Chang, Wen-Chun Huang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau
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Publication number: 20160275232Abstract: The present disclosure relates to a method of improving pattern density with a low OPC (optical proximity correction) cycle time, and an associated apparatus. In some embodiments, the method is performed by performing an initial data preparation process on an IC design including a graphical representation of a layout used to fabricate an integrated chip. The initial data preparation process is performed by using a data preparation element to generate a modified IC design having modified shapes that are modified forms of shapes within the IC design. One or more low-pattern-density areas of the modified IC design are identified using a local density checking element. One or more dummy shapes are added within the one or more low-pattern-density areas using a dummy shape insertion element. The one or more dummy shapes are separated from the modified shapes by a non-zero space.Type: ApplicationFiled: June 1, 2016Publication date: September 22, 2016Inventors: Hung-Chun Wang, Ming-Hui Chih, Ping-Chieh Wu, Chun-Hung Wu, Wen-Hao Liu, Cheng-Hsuan Huang, Cheng-Kun Tsai, Wen-Chun Huang, Ru-Gun Liu
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Patent number: 9418191Abstract: A method for writing a design to a material using an electron beam includes assigning a first dosage to a first polygonal shape. The first polygonal shape occupies a first virtual layer and includes a first set of pixels. The method also includes simulating a first write operation using the first polygonal shape to create the design, discerning an error in the simulated first write operation, and assigning a second dosage to a second polygonal shape to reduce the error. The second polygonal shape occupies a second virtual layer. The method further includes creating a data structure that includes the first and second polygonal shapes and saving the data structure to a non-transitory computer-readable medium.Type: GrantFiled: May 2, 2013Date of Patent: August 16, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hung-Chun Wang, Jeng-Horng Chen, Shy-Jay Lin, Chia-Ping Chiang, Cheng Kun Tsai, Wen-Chun Huang, Ru-Gun Liu
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Patent number: 9411924Abstract: The present disclosure relates to a method of improving pattern density with a low OPC (optical proximity correction) cycle time, and an associated apparatus. In some embodiments, the method is performed by forming an integrated chip (IC) design that is a graphical representation of an integrated chip. One or more low-pattern-density areas of the IC design are identified having a pattern density that results in a processing failure. The low-pattern-density areas are a subset of the IC design. The pattern density is adjusted within the low-pattern-density area by adding one or more dummy shapes within the low-pattern-density areas. A data preparation process is then performed on the IC design to modify shapes of the one or more dummy shapes within the low-pattern-density areas. By introducing dummy shapes into a local area, rather than into an entire integrated chip design, the demands of the subsequent data preparation process are reduced.Type: GrantFiled: October 11, 2013Date of Patent: August 9, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hung-Chun Wang, Ming-Hui Chih, Ping-Chieh Wu, Chun-Hung Wu, Wen-Hao Liu, Cheng-Hsuan Huang, Cheng-Kun Tsai, Wen-Chun Huang, Ru-Gun Liu
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Patent number: 9395618Abstract: The present disclosure provides a semiconductor lithography system. The lithography system includes a projection optics component. The projection optics component includes a curved aperture. The lithography system includes a photo mask positioned over the projection optics component. The photo mask contains a plurality of elongate semiconductor patterns. The semiconductor patterns each point in a direction substantially perpendicular to the curved aperture of the projection optics component. The present disclosure also provides a method. The method includes receiving a design layout for a semiconductor device. The design layout contains a plurality of semiconductor patterns each oriented in a given direction. The method includes transforming the design layout into a mask layout. The semiconductor patterns in the mask layout are oriented in a plurality of different directions as a function of their respective location.Type: GrantFiled: July 24, 2015Date of Patent: July 19, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ching-Hsu Chang, Nian-Fuh Cheng, Chih-Shiang Chou, Wen-Chun Huang, Ru-Gun Liu
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Patent number: 9390217Abstract: A method for performing optical proximity correction (OPC) and evaluating OPC solutions is disclosed. An exemplary method includes receiving a design database corresponding to an IC circuit mask. A first OPC modification to a mask feature of the design database is made by performing a first OPC process. The OPC process includes: dividing the mask feature into child shapes and adjusting an attribute of a child shape based on an edge placement error (EPE) factor. A first lithography simulation is performed utilizing a first set of performance indexes after making the first OPC modification, and a second OPC modification to the mask feature is made based on a result of the first lithography simulation. A second lithography simulation of the mask feature is performed utilizing a second set of performance indexes to verify the first and second OPC modifications, and the design database is provided for manufacturing.Type: GrantFiled: December 30, 2013Date of Patent: July 12, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Chun Wang, Ming-Hui Chih, Yu-Po Tang, Chia-Ping Chiang, Feng-Ju Chang, Cheng Kun Tsai, Wen-Chun Huang, Ru-Gun Liu
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Patent number: 9390223Abstract: A method of determining whether a layout is colorable includes assigning nodes to polygon features of the layout. The method includes designating nodes as being adjacent nodes for nodes separated by less than a minimum pitch. The method includes iteratively removing nodes having less than three adjacent nodes from consideration to identify a node arrangement, wherein all nodes in the node arrangement have at least three adjacent nodes. The method includes determining whether the layout is colorable based on the node arrangement. Determining whether the layout is colorable includes independently assessing each internal node of node arrangement to determine whether each internal node of the node arrangement is colorable. The method includes generating a colored layout design for fabrication of the semiconductor device if each internal node of the node arrangement is colorable; and modifying the layout if at least one internal node of the node arrangement is not colorable.Type: GrantFiled: October 1, 2015Date of Patent: July 12, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wen-Li Cheng, Ming-Hui Chih, Chia-Ping Chiang, Ken-Hsien Hsieh, Tsong-Hua Ou, Wen-Chun Huang, Ru-Gun Liu
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Publication number: 20160162627Abstract: Provided is an integrated circuit (IC) manufacturing method. The method includes receiving an IC design layout, wherein the IC design layout includes multiple IC regions and each of the IC regions includes an initial IC pattern. The method further includes performing a correction process to a first IC region, thereby modifying the initial IC pattern in the first IC region to result in a first corrected IC pattern in the first IC region, wherein the correction process includes location effect correction. The method further includes replacing the initial IC pattern in a second IC region with the first corrected IC pattern.Type: ApplicationFiled: February 15, 2016Publication date: June 9, 2016Inventors: Hung-Chun Wang, Ching-Hsu Chang, Chun-Hung Wu, Cheng Kun Tsai, Feng-Ju Chang, Feng-Lung Lin, Ming-Hsuan WU, Ping-Chieh Wu, Ru-Gun Liu, Wen-Chun Huang, Wen-Hao Liu
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Patent number: 9362119Abstract: The present disclosure provides a method of patterning a target material layer over a semiconductor substrate. The method includes steps of: forming a plurality of first features over the target material layer using a first sub-layout, with each first feature having sidewalls; forming a plurality of spacer features, with each spacer feature conforming to the sidewalls of one of the first features and having a spacer width; and forming a plurality of second features over the target material layer using a second sub-layout. The method further includes steps of removing the plurality of spacer features from around each first feature and patterning the target material layer using the plurality of first features and the plurality of second features. Other methods and associated patterned semiconductor wafers are also provided herein.Type: GrantFiled: April 25, 2014Date of Patent: June 7, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tsong-Hua Ou, Ken-Hsien Hsieh, Shih-Ming Chang, Wen-Chun Huang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau
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Patent number: 9336986Abstract: The present disclosure provides for many different embodiments of a charged particle beam data storage system and method. In an example, a method includes dividing a design layout into a plurality of units; creating a lookup table that maps each of the plurality of units to its position within the design layout and a data set, wherein the lookup table associates any repeating units in the plurality of units to a same data set; and exposing an energy sensitive layer to a charged particle beam based on the lookup table.Type: GrantFiled: September 19, 2014Date of Patent: May 10, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Chun Wang, Pei-Shiang Chen, Tzu-Chin Lin, Faruk Krecinic, Jeng-Horng Chen, Wen-Chun Huang, Ru-Gun Liu
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Patent number: 9298083Abstract: An extreme ultraviolet photomask comprises a reflective layer over a substrate, a capping layer over the reflective layer, a hard mask layer over the capping layer, and an absorber. The absorber is in the hard mask layer, the capping layer and the reflective layer.Type: GrantFiled: May 16, 2014Date of Patent: March 29, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ching-Hsu Chang, Hung-Chun Wang, Boren Luo, Wen-Chun Huang, Ru-Gun Liu
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Patent number: 9280041Abstract: A method of photolithography including coupling a first aperture to a lithography system, then performing a first illumination process to form a first pattern on a layer of a substrate using the first aperture, thereafter coupling a second aperture to the lithography system, and performing a second illumination process to form a second pattern on the layer of the substrate using the second aperture. The first aperture includes a first pair and a second pair of radiation-transmitting regions. The second aperture includes a second plate having a third pair and a fourth pair of radiation-transmitting regions.Type: GrantFiled: March 8, 2013Date of Patent: March 8, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsien-Cheng Wang, Hung Chang Hsieh, Shih-Che Wang, Ping Chieh Wu, Wen-Chun Huang, Ming-Chang Wen
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Publication number: 20160063169Abstract: A method of determining colorability of a layout includes generating a conflict diagram based on circuit information. The conflict diagram includes a plurality of nodes, each node of the plurality of nodes is connected to at least another node of the plurality of nodes by a link, and each node of the plurality of nodes has a degree equal to a number of links connected to the node. The method includes setting a degree of each anchor node within the conflict diagram to a value of n, where n is equal to a number of mask usable to manufacture the layout. The method further includes excluding, using a processor, nodes having a degree less than n from the conflict diagram. The method further includes performing a color status check on the conflict diagram after the excluding; and determining whether the layout is colorable based on the performed color status check.Type: ApplicationFiled: August 28, 2014Publication date: March 3, 2016Inventors: Nien-Yu TSAI, Chin-Chang HSU, Wen-Chun HUANG, Wen-Ju YANG
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Patent number: 9262578Abstract: Provided is an integrated circuit (IC) manufacturing method. The method includes receiving a design layout of an IC, wherein the design layout includes a plurality of non-overlapping IC regions and each of the IC regions includes a same initial IC pattern. The method further includes dividing the IC regions into a plurality of groups based on a location effect analysis such that all IC regions in a respective one of the groups are to have substantially same location effect. The method further includes performing a correction to one IC region in each of the groups using a correction model that includes location effect; and copying the corrected IC region to other IC regions in the respective group. The method further includes storing the corrected IC design layout in a tangible computer-readable medium for use by a further IC process stage.Type: GrantFiled: June 2, 2014Date of Patent: February 16, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Chun Wang, Ching-Hsu Chang, Feng-Ju Chang, Chun-Hung Wu, Ping-Chieh Wu, Wen-Hao Liu, Ming-Hsuan Wu, Feng-Lung Lin, Cheng Kun Tsai, Wen-Chun Huang, Ru-Gun Liu
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Publication number: 20160019333Abstract: A method of determining whether a layout is colorable includes assigning nodes to polygon features of the layout. The method includes designating nodes as being adjacent nodes for nodes separated by less than a minimum pitch. The method includes iteratively removing nodes having less than three adjacent nodes from consideration to identify a node arrangement, wherein all nodes in the node arrangement have at least three adjacent nodes. The method includes determining whether the layout is colorable based on the node arrangement. Determining whether the layout is colorable includes independently assessing each internal node of node arrangement to determine whether each internal node of the node arrangement is colorable. The method includes generating a colored layout design for fabrication of the semiconductor device if each internal node of the node arrangement is colorable; and modifying the layout if at least one internal node of the node arrangement is not colorable.Type: ApplicationFiled: October 1, 2015Publication date: January 21, 2016Inventors: Wen-Li CHENG, Ming-Hui CHIH, Chia-Ping CHIANG, Ken-Hsien HSIEH, Tsong-Hua OU, Wen-Chun HUANG, Ru-Gun LIU
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Patent number: 9209048Abstract: Embodiments of the present disclosure include semiconductor packages and methods of forming the same. An embodiment is a method including mounting a die to a top surface of a substrate to form a device, encapsulating the die and top surface of the substrate in a mold compound, the mold compound having a first thickness over the die, and removing a portion, but not all, of the thickness of the mold compound over the die. The method further includes performing further processing on the device, and removing the remaining thickness of the mold compound over the die.Type: GrantFiled: May 13, 2014Date of Patent: December 8, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wen-Chun Huang, Chien-Chen Li, Kuo-Chio Liu, Ruey-Yun Shiue, Hsi-Kuei Cheng, Chih-Hsien Lin, Jing-Cheng Lin, Hsiang-Tai Lu, Tzi-Yi Shieh
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Publication number: 20150331333Abstract: The present disclosure provides a semiconductor lithography system. The lithography system includes a projection optics component. The projection optics component includes a curved aperture. The lithography system includes a photo mask positioned over the projection optics component. The photo mask contains a plurality of elongate semiconductor patterns. The semiconductor patterns each point in a direction substantially perpendicular to the curved aperture of the projection optics component. The present disclosure also provides a method. The method includes receiving a design layout for a semiconductor device. The design layout contains a plurality of semiconductor patterns each oriented in a given direction. The method includes transforming the design layout into a mask layout. The semiconductor patterns in the mask layout are oriented in a plurality of different directions as a function of their respective location.Type: ApplicationFiled: July 24, 2015Publication date: November 19, 2015Inventors: Ching-Hsu Chang, Nian-Fuh Cheng, Chih-Shiang Chou, Wen-Chun Huang, Ru-Gun Liu
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Patent number: 9189588Abstract: Methods and systems for design of integrated circuits including performing OPC are discussed. In one embodiment, design data having a geometric feature is provided. A base feature is formed from the geometric feature, which has a substantially linear edge. A pseudo dissection point is determined on the base feature. Add or trim a polygon from the base feature to form a modified feature. An OPC process is performed on the modified feature to generate an output design. The output design is used to fabricate a semiconductor device on a semiconductor substrate.Type: GrantFiled: December 10, 2013Date of Patent: November 17, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wen-Li Cheng, Ming-Hui Chih, Yu-Po Tang, Chia-Ping Chiang, Cheng-Lung Tsai, Sheng-Wen Lin, Kuei-Liang Lu, Wen-Chun Huang, Ru-Gun Liu
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Patent number: 9176373Abstract: A system and method of decomposing a single photoresist mask pattern to three photoresist mask patterns. The system and method assign nodes to polygon features on the single photoresist mask pattern, designate nodes as being adjacent nodes for those nodes that are less than a predetermined distance apart, iteratively remove nodes having 2 or less adjacent nodes until no nodes having 2 or less adjacent nodes remain, identify one or more internal nodes, map photoresist mask pattern designations (colors) to the internal nodes, and replace and map a color to each of the nodes removed by the temporarily removing nodes, such that each node does not have an adjacent node of the same color.Type: GrantFiled: July 31, 2013Date of Patent: November 3, 2015Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wen-Li Cheng, Ming-Hui Chih, Chia-Ping Chiang, Ken-Hsien Hsieh, Tsong-Hua Ou, Wen-Chun Huang, Ru-Gun Liu