Patents by Inventor Wen Peng

Wen Peng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6241597
    Abstract: An apparatus for maintaining semiconductor is disclosed. The cleaning apparatus includes two parts of a maintaining apparatus and gas-absorbing apparatus The maintaining apparatus mainly comprises a container using for isolating poison gas outside and a inner vessel, both being shaped as a cylinder, having an absorption exit with hose extending. There are an entrance and an exit end for absorption exit of container as well. This absorption exit is formed as for receiving and passing toxic gas. The vessel is as like cylinder shape and which has a hole on the top, also a plurality of holes embodied on the vessel for gas exiting. A disk is provided for covering the vessel container, and also for isolating toxic gas and the natural atmosphere. A plurality of rollers is for providing both functions of loading and rotation of vessel. The gas-absorbing apparatus can provide a source for absorbing gas quickly as well.
    Type: Grant
    Filed: March 9, 1999
    Date of Patent: June 5, 2001
    Assignee: Mosel Vitelic Inc.
    Inventors: Wen-Peng Chiang, Wen-Pin Hsieh
  • Patent number: 6228776
    Abstract: A method used in some step of processing for ashing a photoresist resin film of a semiconductor wafer is disclosed. Generally the present method will conclude the following steps. Firstly adjusting Etch-Module-Asher endpoint is carried out. Then placing the substrate coated with the resist film in a vacuum chamber will be achieved. The next step is that positing silicon wafer into asher through the vacuum chamber having a wafer holding-set plate, it is for closely receiving and orderly stepped ranking the wafer. Here, the silicon wafer is pushed to the chamber. Finally, the last process is that adjusting second Etch-Module-Asher Endpoint. Simultaneously ashing the resist film by an oxygen plasma is carried out while heating the substrate to remove the resist film, therefore photoresist is peeled up a first end of the silicon wafer and the silicon wafer is cleaned up and the other end of the silicon wafer.
    Type: Grant
    Filed: December 7, 1999
    Date of Patent: May 8, 2001
    Assignee: Mosel Vitelic Inc.
    Inventor: Wen-Peng Chiang
  • Patent number: 6069088
    Abstract: The present invention relates to a method for prolonging life time of a dry etching chamber. A neck portion of the dry etching chamber, according to the present invention, is divided three sections, namely a first section, a second section and a third section in sequence from top of the neck portion to bottom thereof and each section has the same area. A first phase of a two-phase connection method, according to the present invention, then proceeds as the following. The first section is surrounded by an electrode coil connected to a rf power and the second section is surrounded by an electrode coil connected to the ground, not touching the electrode coil connected to the rf power, so that a plasma field within the dry etching chamber can be produced to perform a dry etching. The dry etching can be applied in production line until before life time of the first section comes to an end, i.e. about 95 % of life time of the dry etching chamber disclosed in prior art.
    Type: Grant
    Filed: March 11, 1999
    Date of Patent: May 30, 2000
    Assignee: Mosel Vitelic Incorporated
    Inventors: Wen-Peng Chiang, Wen-Pin Hsieh
  • Patent number: 5923138
    Abstract: A manually-operated handwheel interpolation generating device mainly makes use of a set-up of pulse adjuster to be used by the operators to perform smoothing dressing for the handwheel's pulse command when they are using handwheel to perform post-stage precision machining so as to upgrade the precision level and surface roughness of workpieces, and said pulse adjuster comprises a handwheel interpolation generator which mainly makes use of a pulse smoothing dresser to attain the object of smoothing dressing, thereby, the present invention can, under the condition of keeping the total output pulse amount unchanged, effectively improve the non-smooth phenomena of the handwheel's manually-operated machining work and the surface roughness of workpieces.
    Type: Grant
    Filed: September 18, 1998
    Date of Patent: July 13, 1999
    Assignee: Industrial Technology Research Institute
    Inventors: Lun-Yu Kuo, Wen-Peng Tseng, Hsin-Chuan Su
  • Patent number: 5733114
    Abstract: The present invention discloses a detachable torch for providing heat source for a horizontal quartz tube in the process of wet oxygen. The invention includes a combustion chamber, a heating pipe, an oxygen inlet pipe, a hydrogen inlet pipe, and a coupling device. The hydrogen inlet pipe is coupled to the heating pipe via a coupling device. The removal of the coupling device departs the hydrogen inlet pipe from the heating pipe. Thus, when the mouth of the hydrogen inlet pipe gets brittle due to tempering and needs replacement, we only need to replace the hydrogen inlet pipe instead of the entire torch.
    Type: Grant
    Filed: January 28, 1997
    Date of Patent: March 31, 1998
    Assignee: Mosel Vitelic, Inc.
    Inventors: Jyh-Wen Peng, Chang-Cheng Chen, Meng-Haw Huang, Matthew Luh
  • Patent number: 5379205
    Abstract: A mounting base structure for a swingable arm which is placed in an appropriate position of a wall sconce lamp, an upper and a lower securing adapters are used with a connecting member to pivotally connect the mounting base to a swingable arm. By inserting and fitting the square aperture of the adapter at one end of the swingable arm to a corresponding connecting body of a connecting member together, the assembly can be swung synchronously. By applying extrusion and stretching on both ends of the connecting body, the upper and the lower securing adapters can be integrated with the adapter on the swingable arm into a one-piece structure, preventing the electrical wiring from tangling and the swinging movement of the arm is secured and stable.
    Type: Grant
    Filed: October 8, 1993
    Date of Patent: January 3, 1995
    Inventor: Chih-Wen Peng
  • Patent number: 5342137
    Abstract: A swing arm is disclosed including a bottom curved tube, which has a first fitting with an inward bottom staking step and a second fitting with an inside chamber respectively at two opposite ends, a top straight tube, which has a first fitting with an inward bottom staking step and a second fitting with an external stop knob respectively formed at two opposite ends, and a connecting device to connect the first fitting of the top straight tube to the first fitting of the bottom curved tube through a hollow T-shaped rivet joint for permitting the top straight tube to be turned on the bottom curved tube for engaging the external stop knob of the second fitting of the top straight tube into or disconnecting it from the chamber of the second fitting of the bottom curved tube, a first washer retained between one head of the hollow rivet and one bottom staking step, a second washer retained between the other head of the hollow rivet and the other bottom staking step, and two friction washers retained between the sta
    Type: Grant
    Filed: January 11, 1993
    Date of Patent: August 30, 1994
    Inventor: Chih-Wen Peng