Patents by Inventor Wen Su

Wen Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230378365
    Abstract: A method of fabricating a device includes providing a fin element in a device region and forming a dummy gate over the fin element. In some embodiments, the method further includes forming a source/drain feature within a source/drain region adjacent to the dummy gate. In some cases, the source/drain feature includes a bottom region and a top region contacting the bottom region at an interface interposing the top and bottom regions. In some embodiments, the method further includes performing a plurality of dopant implants into the source/drain feature. In some examples, the plurality of dopant implants includes implantation of a first dopant within the bottom region and implantation of a second dopant within the top region. In some embodiments, the first dopant has a first graded doping profile within the bottom region, and the second dopant has a second graded doping profile within the top region.
    Type: Application
    Filed: August 7, 2023
    Publication date: November 23, 2023
    Inventors: Shih-Hao LIN, Chih-Chuan YANG, Chih-Hsuan CHEN, Bwo-Ning CHEN, Cha-Hon CHOU, Hsin-Wen SU, Chih-Hsiang HUANG
  • Publication number: 20230369224
    Abstract: A structure includes a first conductive feature in a first dielectric layer; a second dielectric layer over the first dielectric layer; and a second conductive feature extending through the second dielectric layer to physically contact the first conductive feature, wherein the second conductive feature includes a metal adhesion layer over and physically contacting the first conductive feature; a barrier layer extending along sidewalls of the second dielectric layer; and a conductive filling material extending over the metal adhesion layer and the barrier layer, wherein a portion of the conductive filling material extends between the barrier layer and the metal adhesion layer.
    Type: Application
    Filed: July 25, 2023
    Publication date: November 16, 2023
    Inventors: Chia-Pang Kuo, Chih-Yi Chang, Ming-Hsiao Hsieh, Wei-Hsiang Chan, Ya-Lien Lee, Chien Chung Huang, Chun-Chieh Lin, Hung-Wen Su
  • Publication number: 20230369500
    Abstract: A device, structure, and method are provided whereby an insert layer is utilized to provide additional support for weaker and softer dielectric layer. The insert layer may be applied between two weaker dielectric layers or the insert layer may be used with a single layer of dielectric material. Once formed, trenches and vias are formed within the composite layers, and the insert layer will help to provide support that will limit or eliminate undesired bending or other structural motions that could hamper subsequent process steps, such as filling the trenches and vias with conductive material.
    Type: Application
    Filed: July 27, 2023
    Publication date: November 16, 2023
    Inventors: Yao-Jen Chang, Chih-Chien Chi, Chen-Yuan Kao, Hung-Wen Su, Kai-Shiang Kuo, Po-Cheng Shih, Jun-Yi Ruan
  • Publication number: 20230371248
    Abstract: A method includes receiving a workpiece. The workpiece includes a first dummy gate, a second dummy gate adjacent the first dummy gate, a first gate spacer disposed along sidewalls of the first dummy gate, and a second gate spacer disposed along sidewalls of the second dummy gate. The method further includes removing the first dummy gate and the second dummy gate to form a first gate trench and a second gate trench, respectively, enlarging the first gate trench and the second gate trench, forming a first metal gate structure in the enlarged first gate trench, and forming a second metal gate structure in the enlarged second gate trench. The enlarged second gate trench is wider than the enlarged first gate trench.
    Type: Application
    Filed: July 24, 2023
    Publication date: November 16, 2023
    Inventors: Hsin-Wen Su, Shih-Hao Lin, Yu-Kuan Lin, Lien-Jung Hung, Ping-Wei Wang
  • Publication number: 20230369496
    Abstract: A semiconductor device includes a memory macro having a middle strap area between edges of the memory macro and memory bit areas on both sides of the middle strap area. The memory macro includes n-type wells and p-type wells arranged alternately along a first direction with well boundaries between the adjacent n-type and p-type wells. The n-type and the p-type wells extend lengthwise along a second direction and extend continuously through the middle strap area and the memory bit areas. The memory macro includes a first dielectric layer disposed at the well boundaries in the middle strap area and the memory bit areas. From a top view, the first dielectric layer extends along the second direction and fully separates the n-type wells from the p-type wells in the middle strap area. From a cross-sectional view, the first dielectric layer vertically extends into the n-type or the p-type wells.
    Type: Application
    Filed: July 26, 2023
    Publication date: November 16, 2023
    Inventors: Hsin-Wen Su, Yu-Kuan Lin, Chih-Chuan Yang, Chang-Ta Yang, Shih-Hao Lin
  • Publication number: 20230361039
    Abstract: A method of manufacturing an interconnect structure includes forming an opening through a dielectric layer. The opening exposes a top surface of a first conductive feature. The method further includes forming a barrier layer on sidewalls of the opening, passivating the exposed top surface of the first conductive feature with a treatment process, forming a liner layer over the barrier layer, and filling the opening with a conductive material.
    Type: Application
    Filed: July 13, 2023
    Publication date: November 9, 2023
    Inventors: Shu-Cheng Chin, Ming-Yuan Gao, Chen-Yi Niu, Yen-Chun Lin, Hsin-Ying Peng, Chih-Hsiang Chang, Pei-Hsuan Lee, Chi-Feng Lin, Chih-Chien Chi, Hung-Wen Su
  • Patent number: 11810786
    Abstract: A method for fabricating a semiconductor device includes following steps: A patterned mask layer including a plurality of standing walls and a covering part is formed on a surface of a semiconductor substrate, wherein two adjacent standing walls define a first opening exposing a part of the surface, and the covering part blankets the surface. A first patterned photoresist layer is formed to partially cover the covering part. A first etching process is performed to form a first trench in the substrate, passing through the surface and aligning with the first opening. A portion of the patterned mask layer is removed to form a second opening exposing another portion of the surface. A second etching process is performed to form a second trench in the substrate and define an active area on the surface. The depth of the first trench is greater than that of the second trench.
    Type: Grant
    Filed: July 27, 2021
    Date of Patent: November 7, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Cheng-Han Lu
  • Patent number: 11810857
    Abstract: A structure includes a first conductive feature in a first dielectric layer; a second dielectric layer over the first dielectric layer; and a second conductive feature extending through the second dielectric layer to physically contact the first conductive feature, wherein the second conductive feature includes a metal adhesion layer over and physically contacting the first conductive feature; a barrier layer extending along sidewalls of the second dielectric layer; and a conductive filling material extending over the metal adhesion layer and the barrier layer, wherein a portion of the conductive filling material extends between the barrier layer and the metal adhesion layer.
    Type: Grant
    Filed: August 25, 2020
    Date of Patent: November 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Pang Kuo, Chih-Yi Chang, Ming-Hsiao Hsieh, Wei-Hsiang Chan, Ya-Lien Lee, Chien Chung Huang, Chun-Chieh Lin, Hung-Wen Su
  • Publication number: 20230345713
    Abstract: A memory device includes a substrate, an active region, a first gate structure, a second gate structure, a first word line, and a second word line. The active region protrudes from a top surface of the substrate. The active region has at least one ring structure, in which when viewed from above, the ring structure has a first linear portion, a second linear portion, a first curved portion, and a second curved portion, the first curved portion connects first sides of the first and second linear portions, and the second curved portion connects second sides of the first and second linear portions. The first gate structure and the second gate structure are over the substrate and cross the active region. The first word line and the second word line are electrically connected to the first gate structure and the second gate structure, respectively.
    Type: Application
    Filed: June 29, 2023
    Publication date: October 26, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Yu-Kuan LIN, Lien-Jung HUNG, Ping-Wei WANG, Chia-En HUANG
  • Publication number: 20230330104
    Abstract: A preservative-free ophthalmic pharmaceutical emulsion includes a nitric oxide-donating prostaglandin F2? derivative or a pharmaceutically acceptable salts or esters thereof as an active ingredient. A method applies promoting blood velocity of optic nerve head (ONH) for treating glaucoma patients and lowering risks for open angle glaucoma and retinal ischemia disease, such as retinal vein occlusion (RVO), including central retinal vein occlusion (CRVO) and branch retinal vein occlusion (BRVO), and retinal artery occlusion (RAO), including central retinal artery occlusion (CRAO) and branch retinal artery occlusion (BRAO).
    Type: Application
    Filed: April 12, 2023
    Publication date: October 19, 2023
    Inventors: Wei-Wen Su, Chien-Hung Lee
  • Patent number: 11792977
    Abstract: A semiconductor device includes a program word line and a read word line over an active region. Each of the program word line and the read word line extends along a line direction. Moreover, the program word line engages a first transistor channel and the read word line engages a second transistor channel. The semiconductor device also includes a first metal line over and electrically connected to the program word line and a second metal line over and electrically connected to the read word line. The semiconductor device further includes a bit line over and electrically connected to the first active region. Additionally, the program word line has a first width along a channel direction perpendicular to the line direction; the read word line has a second width along the channel direction; and the first width is less than the second width.
    Type: Grant
    Filed: May 13, 2021
    Date of Patent: October 17, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Wen Su, Shih-Hao Lin, Yu-Kuan Lin, Lien-Jung Hung, Ping-Wei Wang
  • Publication number: 20230326421
    Abstract: A light-emitting assembly includes a substrate and a plurality of light-emitting elements disposed on the substrate. The substrate includes a base material layer, a first electrical conductive layer and a protection layer in a sectional view. A thickness of the first electrical conductive layer is greater than a thickness of the protection layer. The thickness of the protection layer is greater than 0 ?m and less than 30 ?m. This disclosure can improve the non-uniform brightness issue (hotspots) or enhance the optical performance.
    Type: Application
    Filed: June 14, 2023
    Publication date: October 12, 2023
    Inventors: Chung-Chun KUO, Chun-Fang CHEN, Hui-Wen SU, Wei-Yuan CHEN, Chung-Yu CHENG
  • Patent number: 11777035
    Abstract: A device, structure, and method are provided whereby an insert layer is utilized to provide additional support for weaker and softer dielectric layer. The insert layer may be applied between two weaker dielectric layers or the insert layer may be used with a single layer of dielectric material. Once formed, trenches and vias are formed within the composite layers, and the insert layer will help to provide support that will limit or eliminate undesired bending or other structural motions that could hamper subsequent process steps, such as filling the trenches and vias with conductive material.
    Type: Grant
    Filed: June 27, 2022
    Date of Patent: October 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Yao-Jen Chang, Chih-Chien Chi, Chen-Yuan Kao, Hung-Wen Su, Kai-Shiang Kuo, Po-Cheng Shih, Jun-Yi Ruan
  • Publication number: 20230308483
    Abstract: A method, computer system, and a computer program product for smart SDN is provided. The present invention may include recording and clustering a pod's behavior to generate a behavior transition model for the pod. The present invention may include watching a behavior of the pod and comparing the behavior to the generated behavior transition model. The present invention may include triggering a network policy change based on determining that the behavior of the pod is a misbehavior.
    Type: Application
    Filed: March 22, 2022
    Publication date: September 28, 2023
    Inventors: Jeff Hsueh-Chang Kuo, June-Ray Lin, Ying-Chen Yu, Chih-Wen SU
  • Publication number: 20230275025
    Abstract: A semiconductor device and method of manufacture are provided which utilize an air gap to help isolate conductive structures within a dielectric layer. A first etch stop layer is deposited over the conductive structures, and the first etch stop layer is patterned to expose corner portions of the conductive structures. A portion of the dielectric layer is removed to form an opening. A second etch stop layer is deposited to line the opening, wherein the second etch stop layer forms a stepped structure over the corner portions of the conductive structures. Dielectric material is then deposited into the opening such that an air gap is formed to isolate the conductive structures.
    Type: Application
    Filed: May 5, 2023
    Publication date: August 31, 2023
    Inventors: Szu-Ping Tung, Chih-Chien Chi, Hung-Wen Su
  • Publication number: 20230275019
    Abstract: A semiconductor device includes an insulating layer, wherein the insulating layer has a via opening and a conductive line opening. The semiconductor device further includes a via in the via opening. The semiconductor device further includes a conductive line in the conductive line opening. The conductive line includes a first liner layer, wherein a first thickness of the first liner layer over the via is less than a second thickness of the first liner layer over the insulating layer, and a conductive fill, wherein the first liner layer surrounds the conductive fill.
    Type: Application
    Filed: May 4, 2023
    Publication date: August 31, 2023
    Inventors: Shu-Cheng CHIN, Yao-Min LIU, Hung-Wen SU, Chih-Chien CHI, Chi-Feng LIN
  • Patent number: 11742290
    Abstract: A method of manufacturing an interconnect structure includes forming an opening through a dielectric layer. The opening exposes a top surface of a first conductive feature. The method further includes forming a barrier layer on sidewalls of the opening, passivating the exposed top surface of the first conductive feature with a treatment process, forming a liner layer over the barrier layer, and filling the opening with a conductive material. The liner layer may include ruthenium.
    Type: Grant
    Filed: April 28, 2021
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shu-Cheng Chin, Ming-Yuan Gao, Chen-Yi Niu, Yen-Chun Lin, Hsin-Ying Peng, Chih-Hsiang Chang, Pei-Hsuan Lee, Chi-Feng Lin, Chih-Chien Chi, Hung-Wen Su
  • Patent number: 11742416
    Abstract: A semiconductor structure includes: a semiconductor substrate; a first source/drain feature and a second source/drain feature over the semiconductor substrate; and semiconductor layers extending longitudinally in a first direction and connecting the first source/drain feature and the second source/drain feature. The semiconductor layers are spaced apart from each other in a second direction perpendicular to the first direction. The semiconductor structure further includes inner spacers each between two adjacent semiconductor layers; metal oxide layers interposing between the inner spacers and the semiconductor layers; and a gate structure wrapping around the semiconductor layers and the metal oxide layers.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Hao Lin, Chia-Hung Chou, Chih-Hsuan Chen, Ping-En Cheng, Hsin-Wen Su, Chien-Chih Lin, Szu-Chi Yang
  • Patent number: 11737260
    Abstract: A memory device includes a substrate, an active region, a first gate structure, a second gate structure, a first word line, and a second word line. The active region protrudes from a top surface of the substrate. The active region has at least one ring structure, in which when viewed from above, the ring structure has a first linear portion, a second linear portion, a first curved portion, and a second curved portion, the first curved portion connects first sides of the first and second linear portions, and the second curved portion connects second sides of the first and second linear portions. The first gate structure and the second gate structure are over the substrate and cross the active region. The first word line and the second word line are electrically connected to the first gate structure and the second gate structure, respectively.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Yu-Kuan Lin, Lien-Jung Hung, Ping-Wei Wang, Chia-En Huang
  • Patent number: D998678
    Type: Grant
    Filed: September 29, 2022
    Date of Patent: September 12, 2023
    Assignee: ARASHI VISION INC.
    Inventors: Wen Su, Jingkang Liu, Fei Gao, Meihua Cao