Patents by Inventor Wen Su

Wen Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11908697
    Abstract: An interconnect structure and a method of forming an interconnect structure are disclosed. The interconnect structure includes a conductive plug over a substrate; a conductive feature over the conductive plug, wherein the conductive feature has a first sidewall, a second sidewall facing the first sidewall, and a bottom surface; and a carbon-containing barrier layer having a first portion along the first sidewall of the conductive feature, a second portion along the second sidewall of the conductive feature, and a third portion along the bottom surface of the conductive feature.
    Type: Grant
    Filed: December 12, 2022
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
    Inventors: Rueijer Lin, Ya-Lien Lee, Chun-Chieh Lin, Hung-Wen Su
  • Patent number: 11898099
    Abstract: The present disclosure relates to a fracturing propping agent and a preparation method thereof. The fracturing propping agent comprises the following raw materials: dry sludge, quartz sand, coal ash, bauxite and clay.
    Type: Grant
    Filed: November 11, 2022
    Date of Patent: February 13, 2024
    Assignee: LIAONING HUAYE ENERGY TECHNOLOGY SERVICE CO., LTD.
    Inventors: Changming Su, Zhanqing Qu, Xinwu Zhu, Zuochen Li, Yuping Fan, Wei Liu, Wen Su, Kai Weng
  • Publication number: 20240042255
    Abstract: A multipurpose system of cooling and heating supply and firefighting servo-control based on energy-storage CO2 circulation and an operating method thereof are provided, the system based on the CO2 compression refrigeration circulation with three-stage compression and multi-stage energy storage, provides three-levels standing cool volume for the cool end, domestic hot water and heating for the hot end, and extinguishing agents CO2 for the firefighting end. By means of a new modular process design, the system realizes the independent operation and free combination of refrigeration circulation in multi-stages, so as to achieve the purpose of adjustable working conditions, flexible output and high efficiency of energy utilization. The multi-stage energy storage of liquid CO2 can realize the “flexibility” of system power consumption, and acts as a standing safety module for firefighting to be put into the safe operation of the energy system.
    Type: Application
    Filed: September 29, 2021
    Publication date: February 8, 2024
    Applicants: CHINA THREE GORGES CORPORATION, CENTRAL SOUTH UNIVERSITY
    Inventors: Xinxing LIN, Likun YIN, Lingli GU, Wen SU
  • Publication number: 20240036244
    Abstract: An electronic device includes a panel and a backlight module arranged corresponding to the panel. The backlight module includes a light guide plate, a first optical light module and a second optical module. The first optical element is arranged on the light guide plate, and has a first prism structure. The second optical element is arranged on the first optical element, and has a second prism structure. The first prism structure has a first vertex angle, and the second prism structure has a second vertex angle greater than the first vertex angle.
    Type: Application
    Filed: June 26, 2023
    Publication date: February 1, 2024
    Inventors: Hui-Wen SU, Wei-Tsung HSU
  • Patent number: 11881518
    Abstract: A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
    Type: Grant
    Filed: November 11, 2021
    Date of Patent: January 23, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Jie-Ning Yang, Wen-Tsung Chang, Po-Wen Su, Kuan-Ying Lai, Bo-Yu Su, Chun-Mao Chiou, Yao-Jhan Wang
  • Publication number: 20230420849
    Abstract: A wideband millimeter-wave antenna device includes an antenna radiation layer and a transparent metasurface layer. The antenna radiation layer is below a transparent panel of a display panel and maintains a spaced height from the transparent panel. The transparent metasurface layer is on an upper surface of the transparent panel. The antenna radiation layer includes a dielectric substrate, a radiating metal portion, and a ground plane. The dielectric substrate is below the transparent panel and includes a first surface and a second surface, and the first surface faces the transparent panel. The radiating metal portion is on the first surface. The ground plane is on the second surface. The transparent metasurface layer includes a transparent substrate and metasurface units. The transparent substrate is on the upper surface of the transparent panel. The metasurface units are on the transparent substrate. Each metasurface unit is formed by a diamond-grid metal wire.
    Type: Application
    Filed: November 16, 2022
    Publication date: December 28, 2023
    Inventors: Muhammad Idrees Magray, Saou-Wen Su
  • Patent number: 11856768
    Abstract: A memory device includes a substrate, a first transistor and a second transistor, a Schottky diode, a first word line, a second word line, and a bit line. The first transistor and the second transistor are over the substrate, wherein a first source/drain structure of the first transistor is electrically connected to a first source/drain structure of the second transistor. The Schottky diode is electrically connected to a gate structure of the first transistor. The first word line is electrically connected to the gate structure of the first transistor through the Schottky diode. The second word line is electrically connected to a gate structure of the second transistor. The bit line is electrically connected to a second source/drain structure of the second transistor.
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Chia-En Huang, Shih-Hao Lin, Lien-Jung Hung, Ping-Wei Wang
  • Patent number: 11851749
    Abstract: A semiconductor device is manufactured by modifying an electromagnetic field within a deposition chamber. In embodiments in which the deposition process is a sputtering process, the electromagnetic field may be modified by adjusting a distance between a first coil and a mounting platform. In other embodiments, the electromagnetic field may be adjusted by applying or removing power from additional coils that are also present.
    Type: Grant
    Filed: May 27, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jen-Chun Wang, Ya-Lien Lee, Chih-Chien Chi, Hung-Wen Su
  • Publication number: 20230395703
    Abstract: A semiconductor structure includes substrate, semiconductor layers, source/drain features, metal oxide layers, and a gate structure. The semiconductor layers extend in an X-direction and over the substrate. The semiconductor layers are spaced apart from each other in a Z-direction. The source/drain features are on opposite sides of the semiconductor layers in the X-direction. The metal oxide layers cover bottom surfaces of the semiconductor layers. The gate structure wraps around the semiconductor layers and the metal oxide layers. The metal oxide layers are in contact with the gate structure.
    Type: Application
    Filed: August 10, 2023
    Publication date: December 7, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Hao LIN, Chia-Hung CHOU, Chih-Hsuan CHEN, Ping-En CHENG, Hsin-Wen SU, Chien-Chih LIN, Szu-Chi YANG
  • Patent number: 11830742
    Abstract: Embodiments disclosed herein relate generally to capping processes and structures formed thereby. In an embodiment, a conductive feature, formed in a dielectric layer, has a metallic surface, and the dielectric layer has a dielectric surface. The dielectric surface is modified to be hydrophobic by performing a surface modification treatment. After modifying the dielectric surface, a capping layer is formed on the metallic surface by performing a selective deposition process. In another embodiment, a surface of a gate structure is exposed through a dielectric layer. A capping layer is formed on the surface of the gate structure by performing a selective deposition process.
    Type: Grant
    Filed: June 29, 2022
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Chien Chi, Pei-Hsuan Lee, Hung-Wen Su, Hsiao-Kuan Wei, Jui-Fen Chien, Hsin-Yun Hsu
  • Publication number: 20230378365
    Abstract: A method of fabricating a device includes providing a fin element in a device region and forming a dummy gate over the fin element. In some embodiments, the method further includes forming a source/drain feature within a source/drain region adjacent to the dummy gate. In some cases, the source/drain feature includes a bottom region and a top region contacting the bottom region at an interface interposing the top and bottom regions. In some embodiments, the method further includes performing a plurality of dopant implants into the source/drain feature. In some examples, the plurality of dopant implants includes implantation of a first dopant within the bottom region and implantation of a second dopant within the top region. In some embodiments, the first dopant has a first graded doping profile within the bottom region, and the second dopant has a second graded doping profile within the top region.
    Type: Application
    Filed: August 7, 2023
    Publication date: November 23, 2023
    Inventors: Shih-Hao LIN, Chih-Chuan YANG, Chih-Hsuan CHEN, Bwo-Ning CHEN, Cha-Hon CHOU, Hsin-Wen SU, Chih-Hsiang HUANG
  • Publication number: 20230369224
    Abstract: A structure includes a first conductive feature in a first dielectric layer; a second dielectric layer over the first dielectric layer; and a second conductive feature extending through the second dielectric layer to physically contact the first conductive feature, wherein the second conductive feature includes a metal adhesion layer over and physically contacting the first conductive feature; a barrier layer extending along sidewalls of the second dielectric layer; and a conductive filling material extending over the metal adhesion layer and the barrier layer, wherein a portion of the conductive filling material extends between the barrier layer and the metal adhesion layer.
    Type: Application
    Filed: July 25, 2023
    Publication date: November 16, 2023
    Inventors: Chia-Pang Kuo, Chih-Yi Chang, Ming-Hsiao Hsieh, Wei-Hsiang Chan, Ya-Lien Lee, Chien Chung Huang, Chun-Chieh Lin, Hung-Wen Su
  • Publication number: 20230369500
    Abstract: A device, structure, and method are provided whereby an insert layer is utilized to provide additional support for weaker and softer dielectric layer. The insert layer may be applied between two weaker dielectric layers or the insert layer may be used with a single layer of dielectric material. Once formed, trenches and vias are formed within the composite layers, and the insert layer will help to provide support that will limit or eliminate undesired bending or other structural motions that could hamper subsequent process steps, such as filling the trenches and vias with conductive material.
    Type: Application
    Filed: July 27, 2023
    Publication date: November 16, 2023
    Inventors: Yao-Jen Chang, Chih-Chien Chi, Chen-Yuan Kao, Hung-Wen Su, Kai-Shiang Kuo, Po-Cheng Shih, Jun-Yi Ruan
  • Publication number: 20230369496
    Abstract: A semiconductor device includes a memory macro having a middle strap area between edges of the memory macro and memory bit areas on both sides of the middle strap area. The memory macro includes n-type wells and p-type wells arranged alternately along a first direction with well boundaries between the adjacent n-type and p-type wells. The n-type and the p-type wells extend lengthwise along a second direction and extend continuously through the middle strap area and the memory bit areas. The memory macro includes a first dielectric layer disposed at the well boundaries in the middle strap area and the memory bit areas. From a top view, the first dielectric layer extends along the second direction and fully separates the n-type wells from the p-type wells in the middle strap area. From a cross-sectional view, the first dielectric layer vertically extends into the n-type or the p-type wells.
    Type: Application
    Filed: July 26, 2023
    Publication date: November 16, 2023
    Inventors: Hsin-Wen Su, Yu-Kuan Lin, Chih-Chuan Yang, Chang-Ta Yang, Shih-Hao Lin
  • Publication number: 20230371248
    Abstract: A method includes receiving a workpiece. The workpiece includes a first dummy gate, a second dummy gate adjacent the first dummy gate, a first gate spacer disposed along sidewalls of the first dummy gate, and a second gate spacer disposed along sidewalls of the second dummy gate. The method further includes removing the first dummy gate and the second dummy gate to form a first gate trench and a second gate trench, respectively, enlarging the first gate trench and the second gate trench, forming a first metal gate structure in the enlarged first gate trench, and forming a second metal gate structure in the enlarged second gate trench. The enlarged second gate trench is wider than the enlarged first gate trench.
    Type: Application
    Filed: July 24, 2023
    Publication date: November 16, 2023
    Inventors: Hsin-Wen Su, Shih-Hao Lin, Yu-Kuan Lin, Lien-Jung Hung, Ping-Wei Wang
  • Publication number: 20230361039
    Abstract: A method of manufacturing an interconnect structure includes forming an opening through a dielectric layer. The opening exposes a top surface of a first conductive feature. The method further includes forming a barrier layer on sidewalls of the opening, passivating the exposed top surface of the first conductive feature with a treatment process, forming a liner layer over the barrier layer, and filling the opening with a conductive material.
    Type: Application
    Filed: July 13, 2023
    Publication date: November 9, 2023
    Inventors: Shu-Cheng Chin, Ming-Yuan Gao, Chen-Yi Niu, Yen-Chun Lin, Hsin-Ying Peng, Chih-Hsiang Chang, Pei-Hsuan Lee, Chi-Feng Lin, Chih-Chien Chi, Hung-Wen Su
  • Patent number: 11810857
    Abstract: A structure includes a first conductive feature in a first dielectric layer; a second dielectric layer over the first dielectric layer; and a second conductive feature extending through the second dielectric layer to physically contact the first conductive feature, wherein the second conductive feature includes a metal adhesion layer over and physically contacting the first conductive feature; a barrier layer extending along sidewalls of the second dielectric layer; and a conductive filling material extending over the metal adhesion layer and the barrier layer, wherein a portion of the conductive filling material extends between the barrier layer and the metal adhesion layer.
    Type: Grant
    Filed: August 25, 2020
    Date of Patent: November 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Pang Kuo, Chih-Yi Chang, Ming-Hsiao Hsieh, Wei-Hsiang Chan, Ya-Lien Lee, Chien Chung Huang, Chun-Chieh Lin, Hung-Wen Su
  • Patent number: 11810786
    Abstract: A method for fabricating a semiconductor device includes following steps: A patterned mask layer including a plurality of standing walls and a covering part is formed on a surface of a semiconductor substrate, wherein two adjacent standing walls define a first opening exposing a part of the surface, and the covering part blankets the surface. A first patterned photoresist layer is formed to partially cover the covering part. A first etching process is performed to form a first trench in the substrate, passing through the surface and aligning with the first opening. A portion of the patterned mask layer is removed to form a second opening exposing another portion of the surface. A second etching process is performed to form a second trench in the substrate and define an active area on the surface. The depth of the first trench is greater than that of the second trench.
    Type: Grant
    Filed: July 27, 2021
    Date of Patent: November 7, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Cheng-Han Lu
  • Publication number: 20230345713
    Abstract: A memory device includes a substrate, an active region, a first gate structure, a second gate structure, a first word line, and a second word line. The active region protrudes from a top surface of the substrate. The active region has at least one ring structure, in which when viewed from above, the ring structure has a first linear portion, a second linear portion, a first curved portion, and a second curved portion, the first curved portion connects first sides of the first and second linear portions, and the second curved portion connects second sides of the first and second linear portions. The first gate structure and the second gate structure are over the substrate and cross the active region. The first word line and the second word line are electrically connected to the first gate structure and the second gate structure, respectively.
    Type: Application
    Filed: June 29, 2023
    Publication date: October 26, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Yu-Kuan LIN, Lien-Jung HUNG, Ping-Wei WANG, Chia-En HUANG
  • Publication number: 20230330104
    Abstract: A preservative-free ophthalmic pharmaceutical emulsion includes a nitric oxide-donating prostaglandin F2? derivative or a pharmaceutically acceptable salts or esters thereof as an active ingredient. A method applies promoting blood velocity of optic nerve head (ONH) for treating glaucoma patients and lowering risks for open angle glaucoma and retinal ischemia disease, such as retinal vein occlusion (RVO), including central retinal vein occlusion (CRVO) and branch retinal vein occlusion (BRVO), and retinal artery occlusion (RAO), including central retinal artery occlusion (CRAO) and branch retinal artery occlusion (BRAO).
    Type: Application
    Filed: April 12, 2023
    Publication date: October 19, 2023
    Inventors: Wei-Wen Su, Chien-Hung Lee