Patents by Inventor Wen Su

Wen Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230147512
    Abstract: An OTP memory capacitor structure includes a semiconductor substrate, a bottom electrode, a capacitor insulating layer and a metal electrode stack structure. The bottom electrode is provided on the semiconductor substrate. The capacitor insulating layer is provided on the bottom electrode. The metal electrode stack structure includes a metal layer, an insulating sacrificial layer and a capping layer stacked in sequence. The metal layer is provided on the capacitor insulating layer and is used as a top electrode. The insulating sacrificial layer is provided between the metal layer and the capping layer. A manufacturing method of the OTP memory capacitor structure is also provided. By the provision of the insulating sacrificial layer, the bottom electrode formed first can be prevented from being damaged by subsequent etching and other processes, so that the OTP memory capacitor structure has better electrical characteristics.
    Type: Application
    Filed: December 7, 2021
    Publication date: May 11, 2023
    Inventors: KUO-HSING LEE, Po-Wen Su, Chien-Liang Wu, Sheng-Yuan Hsueh
  • Patent number: 11640882
    Abstract: The invention provides an input device including a holder, a first wheel, a slider, and a first pressure part. The first wheel is disposed on the holder, and includes a side surface, a circle center, and a segment adjusting structure. The segment adjusting structure is disposed on the side surface in a manner of surrounding the circle center. The slider is disposed on the holder, and is movable relative to the holder to move toward or away from the circle center. The first pressure part includes two first ends. One of the first ends is connected to the slider, and as the slider moves toward or away from the circle center, interference between the other first end and the segment adjusting structure is increased or reduced.
    Type: Grant
    Filed: May 17, 2022
    Date of Patent: May 2, 2023
    Assignees: LITE-ON ELECTRONICS (GUANGZHOU) LIMITED, Lite-On Technology Corporation
    Inventors: Hsiao-Lung Chiang, Chih-Wen Su, Yu-Hsun Chen, Chin-Yuan Lin
  • Publication number: 20230107176
    Abstract: An interconnect structure and a method of forming an interconnect structure are disclosed. The interconnect structure includes a conductive plug over a substrate; a conductive feature over the conductive plug, wherein the conductive feature has a first sidewall, a second sidewall facing the first sidewall, and a bottom surface; and a carbon-containing barrier layer having a first portion along the first sidewall of the conductive feature, a second portion along the second sidewall of the conductive feature, and a third portion along the bottom surface of the conductive feature.
    Type: Application
    Filed: December 12, 2022
    Publication date: April 6, 2023
    Inventors: Rueijer Lin, Ya-Lien Lee, Chun-Chieh Lin, Hung-Wen Su
  • Publication number: 20230102890
    Abstract: A method for fabricating high electron mobility transistor (HEMT) includes the steps of: forming a buffer layer on a substrate; forming a patterned mask on the buffer layer; using the patterned mask to remove the buffer layer for forming ridges and a damaged layer on the ridges; removing the damaged layer; forming a barrier layer on the ridges; and forming a p-type semiconductor layer on the barrier layer.
    Type: Application
    Filed: December 6, 2022
    Publication date: March 30, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Ming-Hua Chang, Shui-Yen Lu
  • Publication number: 20230100904
    Abstract: A high electron mobility transistor (HEMT) includes a buffer layer on a substrate, ridges extending along a first direction on the buffer layer, gaps extending along the first direction between the ridges, a p-type semiconductor layer extending along a second direction on the ridges and inserted into the gaps, and a source electrode and a drain electrode adjacent to two sides of the p-type semiconductor layer. Preferably, the source electrode and the drain electrode are extending along the second direction and directly on top of the ridges.
    Type: Application
    Filed: December 6, 2022
    Publication date: March 30, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Ming-Hua Chang, Shui-Yen Lu
  • Publication number: 20230067988
    Abstract: A semiconductor structure includes a stack of semiconductor layers disposed over a protruding portion of a substrate, isolation features disposed over the substrate, wherein a top surface of the protruding portion of the substrate is separated from a bottom surface of the isolation features by a first distance, a metal gate stack interleaved with the stack of semiconductor layers, where a bottom portion of the metal gate stack is disposed on sidewalls of the protruding portion of the substrate and where thickness of the bottom portion of the metal gate stack is defined by a second distance that is less than the first distance, and epitaxial source/drain features disposed adjacent to the metal gate stack.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Inventors: Shih-Hao Lin, Chih-Chuan Yang, Hsin-Wen Su, Jing-Yi Lin, Shang-Rong Li, Chong-De Lien
  • Publication number: 20230068398
    Abstract: In some implementations, one or more semiconductor processing tools may form a via within a substrate of a semiconductor device. The one or more semiconductor processing tools may deposit a ruthenium-based liner within the via. The one or more semiconductor processing tools may deposit, after depositing the ruthenium-based liner, a copper plug within the via.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Inventors: Yao-Min LIU, Ming-Yuan GAO, Ming-Chou CHIANG, Shu-Cheng CHIN, Huei-Wen HSIEH, Kai-Shiang KUO, Yen-Chun LIN, Cheng-Hui WENG, Chun-Chieh LIN, Hung-Wen SU
  • Publication number: 20230059973
    Abstract: A method of forming an integrated circuit, including forming a n-type doped well (N-well) and a p-type doped well (P-well) disposed side by side on a semiconductor substrate, forming a first fin active region extruded from the N-well and a second fin active region extruded from the P-well, forming a first isolation feature inserted between and vertically extending through the N-well and the P-well, and forming a second isolation feature over the N-well and the P-well and laterally contacting the first and the second fin active regions.
    Type: Application
    Filed: November 7, 2022
    Publication date: February 23, 2023
    Inventors: Kuo-Hsiu Hsu, Yu-Kuan Lin, Feng-Ming Chang, Hsin-Wen Su, Lien Jung Hung, Ping-Wei Wang
  • Patent number: 11581226
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary method comprises forming first and second semiconductor fins in first and second regions of a substrate, respectively; forming first and second dummy gate stacks over the first and second semiconductor fins, respectively, and forming a spacer layer over the first and the second dummy gate stacks; forming a first pattern layer with a thickness along the spacer layer in the first region; form a first source/drain (S/D) trench along the first pattern layer and epitaxially growing a first epitaxial feature therein; removing the first pattern layer to expose the spacer layer; forming a second pattern layer with a different thickness along the spacer layer in the second region; form a second S/D trench along the second pattern layer and epitaxially growing a second epitaxial feature therein; and removing the second pattern layer to expose the spacer layer.
    Type: Grant
    Filed: July 24, 2020
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Hao Lin, Tzu-Hsiang Hsu, Chong-De Lien, Szu-Chi Yang, Hsin-Wen Su, Chih-Hsiang Huang
  • Patent number: 11573364
    Abstract: A backlight module and an electronic device including the same are provided. The electronic device includes: a panel; and a backlight module opposite to the panel and including: a light guide plate; a first optical unit disposed on the light guide plate and having a first prism structure; a second optical unit disposed on the first optical unit and having a second prism structure; and a third optical unit disposed on the second optical unit and having a third prism structure, wherein the first prism structure faces the light guide plate, and the second prism structure and the third prism structure face the panel.
    Type: Grant
    Filed: June 24, 2022
    Date of Patent: February 7, 2023
    Assignee: INNOLUX CORPORATION
    Inventors: Wei-Tsung Hsu, Hui-Wen Su
  • Publication number: 20230029867
    Abstract: A blocking material is selectively deposited on a bottom surface of a back end of line (BEOL) conductive structure such that a barrier layer is selectively deposited on sidewalls of the BEOL conductive structure but not the bottom surface. The blocking material is etched such that copper from a conductive structure underneath is exposed, and a ruthenium layer is deposited on the barrier layer but less ruthenium is deposited on the exposed copper. Accordingly, the barrier layer prevents diffusion of metal ions from the BEOL conductive structure and is substantially absent from the bottom surface as compared to the sidewalls in order to reduce contact resistance. Additionally, the ruthenium layer reduces surface roughness within the BEOL conductive structure and is thinner at the bottom surface as compared to the sidewalls in order to reduce contact resistance.
    Type: Application
    Filed: February 25, 2022
    Publication date: February 2, 2023
    Inventors: Shu-Cheng CHIN, Ming-Yuan GAO, Chun-Kai CHANG, Chen-Yi NIU, Hsin-Ying PENG, Chi-Feng LIN, Hung-Wen SU
  • Patent number: 11563557
    Abstract: An example operation may include one or more of configuring a blockchain network comprising first and second blockchain nodes, providing, by the first blockchain node, a data reference to the second blockchain node, accessing a document, by the second blockchain node, from the first blockchain node, and providing by the second blockchain node, a proof of receipt for the document to a shared blockchain ledger.
    Type: Grant
    Filed: April 24, 2018
    Date of Patent: January 24, 2023
    Assignee: International Business Machines Corporation
    Inventors: Chih-Hsiung Liu, Joey H. Y. Tseng, Chih-Wen Su, June-Ray Lin, Gary P. Noble
  • Patent number: 11563013
    Abstract: A memory device includes a substrate, first semiconductor fin, second semiconductor fin, first gate structure, second gate structure, first gate spacer, and a second gate spacer. The first gate structure crosses the first semiconductor fin. The second gate structure crosses the second semiconductor fin, the first gate structure extending continuously from the second gate structure, in which in a top view of the memory device, a width of the first gate structure is greater than a width of the second gate structure. The first gate spacer is on a sidewall of the first gate structure. The second gate spacer extends continuously from the first gate spacer and on a sidewall of the second gate structure, in which in the top view of the memory device, a width of the first gate spacer is less than a width of the second gate spacer.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: January 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Chih-Chuan Yang, Shih-Hao Lin, Yu-Kuan Lin, Lien-Jung Hung, Ping-Wei Wang
  • Publication number: 20230008532
    Abstract: A backlight module and an electronic device including the same are provided. The electronic device includes: a panel; and a backlight module opposite to the panel and including: a light guide plate; a first optical unit disposed on the light guide plate and having a first prism structure; a second optical unit disposed on the first optical unit and having a second prism structure; and a third optical unit disposed on the second optical unit and having a third prism structure, wherein the first prism structure faces the light guide plate, and the second prism structure and the third prism structure face the panel.
    Type: Application
    Filed: June 24, 2022
    Publication date: January 12, 2023
    Inventors: Wei-Tsung HSU, Hui-Wen SU
  • Patent number: 11552187
    Abstract: A method for fabricating high electron mobility transistor (HEMT) includes the steps of: forming a buffer layer on a substrate; forming a patterned mask on the buffer layer; using the patterned mask to remove the buffer layer for forming ridges and a damaged layer on the ridges; removing the damaged layer; forming a barrier layer on the ridges; and forming a p-type semiconductor layer on the barrier layer.
    Type: Grant
    Filed: March 4, 2020
    Date of Patent: January 10, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Wen Su, Ming-Hua Chang, Shui-Yen Lu
  • Patent number: 11552018
    Abstract: A semiconductor structure with an improved metal structure is described. The semiconductor structure can include a substrate having an upper surface, an interconnect layer over the upper surface, and an additional structure deposited over the interconnect layer. The interconnect layer can include a patterned seed layer over the substrate, at least two metal lines over the seed layer, and a dielectric material between adjacent metal lines. A barrier layer can be deposited over the at least two metal lines. Methods of making the semiconductor structures are also described.
    Type: Grant
    Filed: May 3, 2021
    Date of Patent: January 10, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Jiun Liu, Chen-Yuan Kao, Hung-Wen Su, Ming-Hsing Tsai, Syun-Ming Jang
  • Publication number: 20220415647
    Abstract: A method for fabricating a semiconductor device includes following steps: A patterned mask layer including a plurality of standing walls and a covering part is formed on a surface of a semiconductor substrate, wherein two adjacent standing walls define a first opening exposing a part of the surface, and the covering part blankets the surface. A first patterned photoresist layer is formed to partially cover the covering part. A first etching process is performed to form a first trench in the substrate, passing through the surface and aligning with the first opening. A portion of the patterned mask layer is removed to form a second opening exposing another portion of the surface. A second etching process is performed to form a second trench in the substrate and define an active area on the surface. The depth of the first trench is greater than that of the second trench.
    Type: Application
    Filed: July 27, 2021
    Publication date: December 29, 2022
    Inventors: Po-Wen SU, Cheng-Han LU
  • Patent number: 11535950
    Abstract: A method of plating a metal layer on a work piece includes exposing a surface of the work piece to a plating solution, and supplying a first voltage at a negative end of a power supply source to an edge portion of the work piece. A second voltage is supplied to an inner portion of the work piece, wherein the inner portion is closer to a center of the work piece than the edge portion. A positive end of the power supply source is connected to a metal plate, wherein the metal plate and the work piece are spaced apart from each other by, and are in contact with, the plating solution.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: December 27, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yuan Kao, Hung-Wen Su, Minghsing Tsai
  • Patent number: D975617
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: January 17, 2023
    Assignee: Gogoro Inc.
    Inventors: Shih-Yuan Lin, Kuang-I Yen, Hsin-Wen Su
  • Patent number: D982644
    Type: Grant
    Filed: February 7, 2021
    Date of Patent: April 4, 2023
    Assignee: ARASHI VISION INC.
    Inventors: Wen Su, Kehui He, Jingkang Liu, Fei Gao, Zhuo Guo