Patents by Inventor Wen Su

Wen Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11792977
    Abstract: A semiconductor device includes a program word line and a read word line over an active region. Each of the program word line and the read word line extends along a line direction. Moreover, the program word line engages a first transistor channel and the read word line engages a second transistor channel. The semiconductor device also includes a first metal line over and electrically connected to the program word line and a second metal line over and electrically connected to the read word line. The semiconductor device further includes a bit line over and electrically connected to the first active region. Additionally, the program word line has a first width along a channel direction perpendicular to the line direction; the read word line has a second width along the channel direction; and the first width is less than the second width.
    Type: Grant
    Filed: May 13, 2021
    Date of Patent: October 17, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Wen Su, Shih-Hao Lin, Yu-Kuan Lin, Lien-Jung Hung, Ping-Wei Wang
  • Publication number: 20230326421
    Abstract: A light-emitting assembly includes a substrate and a plurality of light-emitting elements disposed on the substrate. The substrate includes a base material layer, a first electrical conductive layer and a protection layer in a sectional view. A thickness of the first electrical conductive layer is greater than a thickness of the protection layer. The thickness of the protection layer is greater than 0 ?m and less than 30 ?m. This disclosure can improve the non-uniform brightness issue (hotspots) or enhance the optical performance.
    Type: Application
    Filed: June 14, 2023
    Publication date: October 12, 2023
    Inventors: Chung-Chun KUO, Chun-Fang CHEN, Hui-Wen SU, Wei-Yuan CHEN, Chung-Yu CHENG
  • Patent number: 11777035
    Abstract: A device, structure, and method are provided whereby an insert layer is utilized to provide additional support for weaker and softer dielectric layer. The insert layer may be applied between two weaker dielectric layers or the insert layer may be used with a single layer of dielectric material. Once formed, trenches and vias are formed within the composite layers, and the insert layer will help to provide support that will limit or eliminate undesired bending or other structural motions that could hamper subsequent process steps, such as filling the trenches and vias with conductive material.
    Type: Grant
    Filed: June 27, 2022
    Date of Patent: October 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Yao-Jen Chang, Chih-Chien Chi, Chen-Yuan Kao, Hung-Wen Su, Kai-Shiang Kuo, Po-Cheng Shih, Jun-Yi Ruan
  • Publication number: 20230308483
    Abstract: A method, computer system, and a computer program product for smart SDN is provided. The present invention may include recording and clustering a pod's behavior to generate a behavior transition model for the pod. The present invention may include watching a behavior of the pod and comparing the behavior to the generated behavior transition model. The present invention may include triggering a network policy change based on determining that the behavior of the pod is a misbehavior.
    Type: Application
    Filed: March 22, 2022
    Publication date: September 28, 2023
    Inventors: Jeff Hsueh-Chang Kuo, June-Ray Lin, Ying-Chen Yu, Chih-Wen SU
  • Publication number: 20230275025
    Abstract: A semiconductor device and method of manufacture are provided which utilize an air gap to help isolate conductive structures within a dielectric layer. A first etch stop layer is deposited over the conductive structures, and the first etch stop layer is patterned to expose corner portions of the conductive structures. A portion of the dielectric layer is removed to form an opening. A second etch stop layer is deposited to line the opening, wherein the second etch stop layer forms a stepped structure over the corner portions of the conductive structures. Dielectric material is then deposited into the opening such that an air gap is formed to isolate the conductive structures.
    Type: Application
    Filed: May 5, 2023
    Publication date: August 31, 2023
    Inventors: Szu-Ping Tung, Chih-Chien Chi, Hung-Wen Su
  • Publication number: 20230275019
    Abstract: A semiconductor device includes an insulating layer, wherein the insulating layer has a via opening and a conductive line opening. The semiconductor device further includes a via in the via opening. The semiconductor device further includes a conductive line in the conductive line opening. The conductive line includes a first liner layer, wherein a first thickness of the first liner layer over the via is less than a second thickness of the first liner layer over the insulating layer, and a conductive fill, wherein the first liner layer surrounds the conductive fill.
    Type: Application
    Filed: May 4, 2023
    Publication date: August 31, 2023
    Inventors: Shu-Cheng CHIN, Yao-Min LIU, Hung-Wen SU, Chih-Chien CHI, Chi-Feng LIN
  • Patent number: 11742416
    Abstract: A semiconductor structure includes: a semiconductor substrate; a first source/drain feature and a second source/drain feature over the semiconductor substrate; and semiconductor layers extending longitudinally in a first direction and connecting the first source/drain feature and the second source/drain feature. The semiconductor layers are spaced apart from each other in a second direction perpendicular to the first direction. The semiconductor structure further includes inner spacers each between two adjacent semiconductor layers; metal oxide layers interposing between the inner spacers and the semiconductor layers; and a gate structure wrapping around the semiconductor layers and the metal oxide layers.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Hao Lin, Chia-Hung Chou, Chih-Hsuan Chen, Ping-En Cheng, Hsin-Wen Su, Chien-Chih Lin, Szu-Chi Yang
  • Patent number: 11742290
    Abstract: A method of manufacturing an interconnect structure includes forming an opening through a dielectric layer. The opening exposes a top surface of a first conductive feature. The method further includes forming a barrier layer on sidewalls of the opening, passivating the exposed top surface of the first conductive feature with a treatment process, forming a liner layer over the barrier layer, and filling the opening with a conductive material. The liner layer may include ruthenium.
    Type: Grant
    Filed: April 28, 2021
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shu-Cheng Chin, Ming-Yuan Gao, Chen-Yi Niu, Yen-Chun Lin, Hsin-Ying Peng, Chih-Hsiang Chang, Pei-Hsuan Lee, Chi-Feng Lin, Chih-Chien Chi, Hung-Wen Su
  • Patent number: 11737260
    Abstract: A memory device includes a substrate, an active region, a first gate structure, a second gate structure, a first word line, and a second word line. The active region protrudes from a top surface of the substrate. The active region has at least one ring structure, in which when viewed from above, the ring structure has a first linear portion, a second linear portion, a first curved portion, and a second curved portion, the first curved portion connects first sides of the first and second linear portions, and the second curved portion connects second sides of the first and second linear portions. The first gate structure and the second gate structure are over the substrate and cross the active region. The first word line and the second word line are electrically connected to the first gate structure and the second gate structure, respectively.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Yu-Kuan Lin, Lien-Jung Hung, Ping-Wei Wang, Chia-En Huang
  • Patent number: 11728432
    Abstract: A semiconductor device comprises a memory macro including a well pick-up (WPU) area oriented lengthwise along a first direction, and memory bit areas adjacent to the WPU area. In the WPU area, the memory macro includes n-type and p-type wells arranged alternately along the first direction with well boundaries between adjacent wells; gate structures over the wells and oriented lengthwise along the first direction; a first dielectric layer disposed at each of the well boundaries; first contact features disposed over one of the p-type wells; and second contact features disposed over one of the n-type wells. From a top view, the first dielectric layer extends along a second direction perpendicular to the first direction and separates all the gate structures in the first WPU area, the first contact features are disposed between the gate structures, and the second contact features are disposed between the gate structures.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Yu-Kuan Lin, Chih-Chuan Yang, Chang-Ta Yang, Shih-Hao Lin
  • Patent number: 11715433
    Abstract: A light-emitting assembly includes a substrate and a plurality of light-emitting elements. The substrate includes a component arrangement region and a planar region in a top view, and includes a base material layer, a filled layer and a protection layer in a sectional view. A thickness of the filled layer is greater than a thickness of the protection layer. The thickness of the protection layer is greater than 0 ?m and less than 30 ?m. The plurality of light-emitting elements are located on the component arrangement region. This disclosure can improve the non-uniform brightness issue (hotspots) or enhance the optical performance.
    Type: Grant
    Filed: February 9, 2022
    Date of Patent: August 1, 2023
    Assignee: INNOLUX CORPORATION
    Inventors: Chung-Chun Kuo, Chun-Fang Chen, Hui-Wen Su, Wei-Yuan Chen, Chung-Yu Cheng
  • Publication number: 20230225098
    Abstract: A method includes forming a first fin protruding from a substrate in a first region of the substrate and a second fin protruding from the substrate in a second region of the substrate, recessing a portion of the first fin, thereby forming a first recess, recessing a portion of the second fin, thereby forming a second recess, depositing a blocking layer in the second recess, growing a base epitaxial layer in the first recess, removing the blocking layer from the second recess, and growing a doped epitaxial layer in the first recess and the second recess. The base epitaxial layer is dopant free. The doped epitaxial layer abuts the first fin in the first region and the second fin in the second region.
    Type: Application
    Filed: June 4, 2022
    Publication date: July 13, 2023
    Inventors: Chih-Chuan Yang, Wen-Chun Keng, Shih-Hao Lin, Hsin-Wen Su, Yu-Kuan Lin, Ping-Wei Wang, Jing-Yi Lin
  • Publication number: 20230215807
    Abstract: A semiconductor structure with an improved metal structure is described. The semiconductor structure can include a substrate having an upper surface, an interconnect layer over the upper surface, and an additional structure deposited over the interconnect layer. The interconnect layer can include a patterned seed layer over the substrate, at least two metal lines over the seed layer, and a dielectric material between adjacent metal lines. A barrier layer can be deposited over the at least two metal lines. Methods of making the semiconductor structures are also described.
    Type: Application
    Filed: January 9, 2023
    Publication date: July 6, 2023
    Inventors: Wen-Jiun LIU, Chen-Yuan KAO, Hung-Wen SU, Ming-Hsing TSAI, Syun-Ming JANG
  • Publication number: 20230197802
    Abstract: A method according to the present disclosure includes forming a fin-shaped structure protruding from a substrate, forming a gate structure intersecting the fin-shaped structure, forming a gate spacer on a sidewall of the gate structure, and forming a conductive feature above the fin-shaped structure. The gate spacer is laterally between the gate structure and the conductive feature. The method also includes depositing a dielectric layer over the gate structure and the conductive feature, performing an etching process, thereby forming an opening through the dielectric layer and exposing top surfaces of the conductive feature and the gate structure, recessing the gate spacers through the opening, thereby exposing the sidewall of the gate structure, and forming a contact feature in the opening, wherein the contact feature is in contact with the conductive feature and has a bottom portion protruding downward to be in contact with the sidewall of the gate structure.
    Type: Application
    Filed: June 4, 2022
    Publication date: June 22, 2023
    Inventors: Jui-Lin Chen, Chao-Hsun Wang, Hsin-Wen Su, Yi-Feng Ting, Chi Hua Wang, I-Hung Li, Yuan-Tien Tu, Fu-Kai Yang, Mei-Yun Wang, Ping-Wei Wang, Lien Jung Hung
  • Publication number: 20230200041
    Abstract: A method includes forming a first semiconductor fin and a second semiconductor fin over a substrate; forming a first gate structure over the substrate and crossing the first semiconductor fin; forming a second gate structure over the substrate and crossing the second semiconductor fin; forming a first gate spacer on a sidewall of the first gate structure; and forming a second gate spacer on a sidewall of the second gate structure, wherein in a top view, an outer sidewall of the first gate spacer farthest from the first gate structure is coterminous with an outer sidewall of the second gate spacer farthest from the second gate structure, and an inner sidewall of the first gate spacer in contact with the first gate structure is misaligned with an inner sidewall of the second gate spacer in contact with the second gate structure.
    Type: Application
    Filed: January 13, 2023
    Publication date: June 22, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Chih-Chuan YANG, Shih-Hao LIN, Yu-Kuan LIN, Lien-Jung HUNG, Ping-Wei WANG
  • Patent number: 11682624
    Abstract: A semiconductor device and method of manufacture are provided which utilize an air gap to help isolate conductive structures within a dielectric layer. A first etch stop layer is deposited over the conductive structures, and the first etch stop layer is patterned to expose corner portions of the conductive structures. A portion of the dielectric layer is removed to form an opening. A second etch stop layer is deposited to line the opening, wherein the second etch stop layer forms a stepped structure over the corner portions of the conductive structures. Dielectric material is then deposited into the opening such that an air gap is formed to isolate the conductive structures.
    Type: Grant
    Filed: May 10, 2021
    Date of Patent: June 20, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Szu-Ping Tung, Chih-Chien Chi, Hung-Wen Su
  • Patent number: 11676898
    Abstract: A method includes forming an insulating layer over a conductive feature; etching the insulating layer to expose a first surface of the conductive feature; covering the first surface of the conductive feature with a sacrificial material, wherein the sidewalls of the insulating layer are free of the sacrificial material; covering the sidewalls of the insulating layer with a barrier material, wherein the first surface of the conductive feature is free of the barrier material, wherein the barrier material includes tantalum nitride (TaN) doped with a transition metal; removing the sacrificial material; and covering the barrier material and the first surface of the conductive feature with a conductive material.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: June 13, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Pang Kuo, Huan-Yu Shih, Wen-Hsuan Chen, Cheng-Lun Tsai, Ya-Lien Lee, Cheng-Hui Weng, Chun-Chieh Lin, Hung-Wen Su, Yao-Min Liu
  • Publication number: 20230153737
    Abstract: A method for evaluating the effectiveness of a transformer fire extinguishing system based on a natural language fuzzy analysis is provided, and a method and device for evaluating the fire extinguishing system are established. An expert fuzzy evaluation matrix is established by natural language fuzzifying and de-fuzzifying methods for the effectiveness of the fire extinguishing system. According to the relative influence of each index in the evaluation index system of the effectiveness of the fire extinguishing system, the weight comparison of each index is determined, and the index subjective weight is established based on the weight comparison of each index. A de-fuzzified matrix is obtained by de-fuzzifying an expert fuzzy evaluation matrix, and based on the de-fuzzified matrix, an objective weight is obtained by an entropy weight method. A comprehensive weight is obtained by combining the subjective and objective weights.
    Type: Application
    Filed: January 12, 2023
    Publication date: May 18, 2023
    Applicants: STATE GRID ANHUI ELECTRIC POWER RESEARCH INSTITUTE, STATE GRID CORPORATION OF CHINA
    Inventors: Jiaqing ZHANG, Fengju SHANG, Xiaodong ZHANG, Xinjie QIU, Dengfeng CHENG, Yifu ZHOU, Yi GUO, Yubiao HUANG, Wen SU, Rui LIU
  • Patent number: 11652044
    Abstract: A semiconductor device includes an insulating layer, wherein the insulating layer has a via opening and a conductive line opening. The semiconductor device further includes a via in the via opening, wherein the via includes a first conductive material. The semiconductor device further includes a conductive line in the conductive line opening. The conductive line includes a first liner layer, wherein a first thickness of the first liner layer over the via is less than a second thickness of the first liner layer over the insulating layer, and a conductive fill comprising a second conductive material different from the first conductive material.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: May 16, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shu-Cheng Chin, Yao-Min Liu, Hung-Wen Su, Chih-Chien Chi, Chi-Feng Lin
  • Patent number: D998678
    Type: Grant
    Filed: September 29, 2022
    Date of Patent: September 12, 2023
    Assignee: ARASHI VISION INC.
    Inventors: Wen Su, Jingkang Liu, Fei Gao, Meihua Cao