Abstract: Embodiments of the invention provide a semiconductor structure including a finFET having an epitaxial semiconductor region in direct physical contact with a plurality of fins, wherein the epitaxial semiconductor region traverses an insulator layer and is in direct physical contact with the semiconductor substrate. The gate of the finFET is disposed over an insulator layer, such as a buried oxide layer. Methods of forming the semiconductor structure are also included.

Abstract: A process and device are provided for a high-k gate-dielectric operating as a built-in e-fuse. Embodiments include: providing first and second active regions of a transistor, separated by a gate region of the transistor, on a substrate; forming an interfacial layer on the gate region; minimizing the interfacial layer; forming a high-k gate dielectric layer on the interfacial layer to operate as an e-fuse element, the high-k gate dielectric layer and interfacial layer having a combined breakdown voltage less than three times a circuit operating voltage associated with the transistor; and forming a metal gate on the high-k gate dielectric layer.

Abstract: Tunneling field effect transistors and fabrication methods thereof are provided, which include: obtaining a gate structure disposed over a substrate structure; and providing a source region and a drain region within the substrate structure separated by a channel region, the channel region underlying, at least partially, the gate structure, and the providing including: modifying the source region to attain a narrowed source region bandgap; and modifying the drain region to attain a narrowed drain region bandgap, the narrowed source region bandgap and the narrowed drain region bandgap facilitating quantum tunneling of charge carriers from the source region or the drain region to the channel region. Devices including digital modulation circuits with one or more tunneling field effect transistor(s) are also provided.

Abstract: A process and device are provided for a high-k gate-dielectric operating as a built-in e-fuse. Embodiments include: providing first and second active regions of a transistor, separated by a gate region of the transistor, on a substrate; forming an interfacial layer on the gate region; minimizing the interfacial layer; forming a high-k gate dielectric layer on the interfacial layer to operate as an e-fuse element, the high-k gate dielectric layer and interfacial layer having a combined breakdown voltage less than three times a circuit operating voltage associated with the transistor; and forming a metal gate on the high-k gate dielectric layer.

Abstract: Methods for forming stacking faults in sources, or sources and drains, of TFETs to improve tunneling efficiency and the resulting devices are disclosed. Embodiments may include designating areas within a substrate that will subsequently correspond to a source region and a drain region, selectively forming a stacking fault within the substrate corresponding to the source region, and forming a tunneling field-effect transistor incorporating the source region and the drain region.

Abstract: One illustrative device disclosed herein includes a transistor comprising a gate electrode and a drain region formed in a semiconducting substrate, an isolation structure formed in the substrate, wherein the isolation structure is laterally positioned between the gate electrode and the drain region, and a Faraday shield that is positioned laterally between the gate electrode and the drain region and above the isolation structure, wherein the Faraday shield has a long axis that is oriented substantially vertically relative to an upper surface of the substrate.

Abstract: There is set forth herein in one embodiment a FinFET semiconductor device having a fin extending from a bulk silicon substrate, wherein there is formed wrapped around a portion of the fin a gate, and wherein proximate a channel area of the fin aligned to the gate there is formed a local buried oxide region aligned to the gate. In one embodiment, the local buried oxide region is formed below a channel area of the fin.

Abstract: Embodiments of the invention provide a semiconductor structure including a finFET having an epitaxial semiconductor region in direct physical contact with a plurality of fins, wherein the epitaxial semiconductor region traverses an insulator layer and is in direct physical contact with the semiconductor substrate. The gate of the finFET is disposed over an insulator layer, such as a buried oxide layer. Methods of forming the semiconductor structure are also included.

Abstract: Approaches for enabling epitaxial growth of silicon fins in a device (e.g., a fin field effect transistor device (FinFET)) are provided. Specifically, approaches are provided for forming a set of silicon fins for a FinFET device, the FinFET device comprising: a set of gate structures formed over a substrate, each of the set of gate structures including a capping layer and a set of spacers; an oxide fill formed over the set of gate structures; a set of openings formed in the device by removing the capping layer and the set of spacers from one or more of the set of gate structures; a silicon material epitaxially grown within the set of openings in the device and then planarized; and wherein the oxide fill is etched to expose the silicon material and form the set of fins.

Abstract: Methods and apparatus are provided for an integrated circuit with a programmable electrical connection. The apparatus includes an inactive area with a memory line passing over the inactive area. The memory line includes a programmable layer. An interlayer dielectric is positioned over the memory line and the inactive area, and an extending member extends through the interlayer dielectric. The extending member is electrically connected to the programmable layer of the memory line at a point above the inactive area.

Abstract: An OTP anti-fuse memory array without additional selectors and a manufacturing method are provided. Embodiments include forming wells of a first polarity in a substrate, forming a bitline of the first polarity in each well, and forming plural metal gates across each bitline, wherein no source/drain regions are formed between the metal gates.

Abstract: A semiconductor device is formed with extended STI regions. Embodiments include implanting oxygen under STI trenches prior to filling the trenches with oxide and subsequently annealing. An embodiment includes forming a recess in a silicon substrate, implanting oxygen into the silicon substrate below the recess, filling the recess with an oxide, and annealing the oxygen implanted silicon. The annealed oxygen implanted silicon extends the STI region, thereby reducing leakage current between N+ diffusions and N-well and between P+ diffusions and P-well, without causing STI fill holes and other defects.

Abstract: Approaches for enabling epitaxial growth of silicon fins in a device (e.g., a fin field effect transistor device (FinFET)) are provided. Specifically, approaches are provided for forming a set of silicon fins for a FinFET device, the FinFET device comprising: a set of gate structures formed over a substrate, each of the set of gate structures including a capping layer and a set of spacers; an oxide fill formed over the set of gate structures; a set of openings formed in the device by removing the capping layer and the set of spacers from one or more of the set of gate structures; a silicon material epitaxially grown within the set of openings in the device and then planarized; and wherein the oxide fill is etched to expose the silicon material and form the set of fins.

Abstract: Integrated circuits that have a FinFET and methods of fabricating the integrated circuits are provided herein. In an embodiment, a method of fabricating an integrated circuit having a FinFET includes providing a substrate comprising fins. The fins include semiconductor material. A first metal oxide layer is formed over sidewall surfaces of the fins. The first metal oxide layer includes a first metal oxide. The first metal oxide layer is recessed to a depth below a top surface of the fins to form a recessed first metal oxide layer. The top surface and sidewall surfaces of the fins at a top portion of the fins are free from the first metal oxide layer. A gate electrode structure is formed over the top surface and sidewall surfaces of the fins at the top portion of the fins. The recessed first metal oxide layer is recessed beneath the gate electrode structure.

Abstract: A semiconductor structure with an improved shallow trench isolation (STI) region and method of fabrication is disclosed. The STI region comprises a lower portion filled with oxide and an upper portion comprising a high Young's modulus (HYM) liner disposed on the lower portion and trench sidewalls and filled with oxide. The HYM liner is disposed adjacent to source-drain regions, and serves to reduce stress relaxation within the shallow trench isolation (STI) oxide, which has a relatively low Young's modulus and is soft. Hence, the HYM liner serves to increase the desired stress imparted by the embedded stressor source-drain regions, which enhances carrier mobility, thus increasing semiconductor performance.

Abstract: There is set forth herein a semiconductor device fabricated on a bulk wafer having a local buried oxide region underneath a channel region of a MOSFET. In one embodiment the local buried oxide region can be self-aligned to a gate, and a source/drain region can be formed in a bulk substrate. A local buried oxide region can be formed in a semiconductor device by implantation of oxygen into a bulk region of the semiconductor device followed by annealing.

Abstract: Methods and apparatus are provided for an integrated circuit with a programmable electrical connection. The apparatus includes an inactive area with a memory line passing over the inactive area. The memory line includes a programmable layer. An interlayer dielectric is positioned over the memory line and the inactive area, and an extending member extends through the interlayer dielectric. The extending member is electrically connected to the programmable layer of the memory line at a point above the inactive area.

Abstract: Methods for forming stacking faults in sources, or sources and drains, of TFETs to improve tunneling efficiency and the resulting devices are disclosed. Embodiments may include designating areas within a substrate that will subsequently correspond to a source region and a drain region, selectively forming a stacking fault within the substrate corresponding to the source region, and forming a tunneling field-effect transistor incorporating the source region and the drain region.

Abstract: One illustrative device includes a source region and a drain region formed in a substrate, wherein the source/drain regions are doped with a first type of dopant material, a gate structure positioned above the substrate that is laterally positioned between the source region and the drain region and a drain-side well region positioned in the substrate under a portion, but not all, of the entire lateral width of the drain region, wherein the drain-side well region is also doped with the first type of dopant material. The device also includes a source-side well region positioned in the substrate under an entire width of the source region and under a portion, but not all, of the drain region and a part of the extension portion of the drain region is positioned under a portion of the gate structure.

Abstract: One illustrative method disclosed herein involves forming an integrated circuit product comprised of first and second N-type transistors formed in and above first and second active regions, respectively. The method generally involves performing a common threshold voltage adjusting ion implantation process on the first and second active regions, forming the first and second transistors, performing an amorphization ion implantation process to selectively form regions of amorphous material in the first active region but not in the second active region, after performing the amorphization ion implantation process, forming a capping material layer above the first and second transistors and performing a re-crystallization anneal process to convert at least portions of the regions of amorphous material to a crystalline material. In some cases, the capping material layer may be formed of a material having a Young's modulus of at least 180 GPa.