Abstract: In performing a programmed-point inspection of a circuit pattern using a review SEM, stable inspection can be performed while suppressing the generation of a false report even when a variation in a circuit pattern to be inspected is large. SEM images that are obtained by sequentially imaging a predetermined circuit pattern using the review SEM are stored into a storage unit. Images that meet a set condition are selected from the stored SEM images, and averaged to create an average image (GP image). By performing pattern check by GP comparison using this GP image, an inspection can be performed while suppressing the generation of a false report even when a variation in the circuit patterns is large.

Abstract: Provided are an optical disc recording device and a recording signal generating device which enable to correct displacement between a reproducing position of a reproduction signal from a concave-convex mark preformed in an optical disc, and a recording position of second information to be recorded in synchronism with the reproduction signal, and stably and speedily record the second information. A digital signal processor (202) specifies a reproducing position in the concave-convex mark, using a reproduction signal and a channel clock. A recording signal generator (211) generates a recording signal alternately including a plurality of additionally recordable data, each of which includes second information and has a predetermined length, and a plurality of dummy data.

Abstract: An optical disc recording apparatus (10) is provided with a tracking servo (13) for tracking a spiral track of concave and convex marks, an analog signal processor (14) for extracting a reproduction signal corresponding to the concave and convex marks, a digital signal processor (15) for extracting a channel clock synchronized with a channel bit length of the concave and convex marks, and a sub-information recording section (30) for recording sub-information by irradiating laser light based on the tracking to the spiral track. The sub-information recording section (30) records all the sub-information by repeating a process of recording a part of the sub-information by discretely irradiating laser light at a specified interval and with a specified frequency in synchronism with a channel clock by one tracking to form recordable marks on a reflective film a plurality of times.

Abstract: With the objective of achieving defect kind training in a short period of time to teach classification conditions of defects detected as a result of inspecting a thin film device, according to one aspect of the present invention, there is provided a visual inspection method, and an apparatus therefor, comprising the steps of: detecting defects based on inspection images acquired by optical or electronic defect detection means, and at the same time calculating features of the defects; and classifying the defects according to classification conditions set beforehand, wherein said classification condition setting step further includes the steps of: collecting defect features over a large number of defects acquired beforehand from the defect detection step; sampling defects based on the distribution of the collected defect features over the large number of defects; and setting defect classification conditions based on the result of reviewing the sampled defects.

Abstract: To record specific information to a disk-shaped record medium and reproduce the recorded specific information without any influence on the error correction capability. Copy protection information (CPID) having an error correction code appended thereto, shuffled and otherwise treated is sent as a CPID bit block to an EDC rewrite circuit (14). The EDC rewrite circuit (14) rewrites an error detection code appended to user data in each sector in accordance with bit information in the CPID bit block. Thereafter, the data in each sector is scrambled, and an ECC block including a plurality of sectors is modulated with an error correction code and sync signal appended thereto. The modulated signal is recorded in a reserve area of a lead-in area of the disk-shaped record medium. During reproduction, CPID is restored based on the result of error detection of each sector.

Abstract: Provided is a technique for a wafer inspection conducted by simple operation, which is useful even when the inspection covers a variety of items and the inspection items are changed frequently with time like in a start-up period of a semi-conductor process. According to the technique, inspection images are collected, and then a template is prepared from the inspection images. A plurality of regions are defined on the template, and inspection methods and output indexes are registered in correspondence with the respective regions. In the inspection, by reference to the template images corresponding to the derived inspection images, the inspection is conducted based on the inspection information registered therein and the quantitative output levels are calculated.

Abstract: A composite hose is constructed to have an outer peripheral portion and an inner peripheral portion. The outer peripheral portion includes an elastic layer and a reinforcing layer provided on an outer periphery of the elastic layer. The inner peripheral portion includes a corrugated metal tube which is provided with a corrugated portion formed with corrugation hills and corrugation valleys. A distance between the reinforcing layer and tops of the corrugation hills of the corrugated metal tube is designed 0.27 mm or less.

Abstract: An information recording device, an information reproducing device, and an information recording medium securely protect copyright of main information, and prevent illegal access to the recorded main information. The information recording device includes a medium unique information generating section that generates second sub information by data-converting stamper unique information based on disc identification information that differs for each optical disc after transferring main information and first sub information from a stamper having the main information and the first sub information recorded thereon onto an optical disc, and a medium unique information recording section that records the second sub information on the optical disc having recorded thereon in advance the main information and the first sub information in a form different from the forms of the main information and the first sub information.

Abstract: Provided is an optical disk reproduction apparatus capable of preventing information that is different from the original sub information from being subjected to error correction erroneously, and of stably reproducing the sub information. The optical disk reproduction apparatus (1) has an optical head (301) for reading a reproduction signal including main information and sub information based on a recording mark formed on an optical disk (300), a main information extraction unit (4) for extracting the main information from the reproduction signal, and a sub information extraction unit (2) for extracting the sub information from the reproduction signal.

Abstract: A pattern data examination method and system capable of accurately and speedily examining a circuit pattern without failing to extract pattern contour data are provided. While pattern comparison is ordinarily made by using a secondary electron image, a contour of a pattern element is extracted by using a backscattered electron image said to be suitable for observation and examination of a three dimensional configuration of a pattern element, and pattern inspection is executed by using the extracted contour of the pattern element. More specifically, pattern inspection is executed by comparing a contour of a pattern element with design data such as CAD data to measure a difference between the contour and the data, and by computing, for example, the size of the circuit pattern element from the contour of a pattern.

Abstract: An end mill including multiple spiral flutes in a helical shape around an axis that are formed in a periphery of the top portion of an end mill body which rotates on the axis. Cutting edges are formed at peripheral side ridge portions of wall surfaces of the flutes facing a front side in an end mill rotating direction. Honing is applied along each peripheral cutting edge such that the cutting edge has a variable honing width in the direction of the axis.

Abstract: A defect is efficiently and effectively classified by accurately determining the state of overlap between a design layout pattern and the defect. This leads to simple identification of a systematic defect. A defective image obtained through defect inspection or review of a semiconductor device is automatically pattern-matched with design layout data. A defect is superimposed on a design layout pattern for at least one layer of a target layer, a layer immediately above the target layer, and a layer immediately below the target layer. The state of overlap of the defect is determined as within the pattern, over the pattern, or outside the pattern, and the defect is automatically classified.

Abstract: An inspection method, including: illuminating a light on a wafer on which plural chips having identical patterns are formed; imaging corresponding areas of two chips formed on the wafer to obtain inspection images and reference images with an image sensor; and processing the obtained inspection image and the reference image to produce a difference image which indicates a difference between the inspection image and the reference image and detect a defect by comparing the difference image with a threshold, wherein a threshold applied to a difference image which is produced by comparing the inspection image and the reference image obtained by imaging peripheral portion of the wafer is different from a threshold applied to a difference image which is produced by comparing the inspection image and the reference image obtained by imaging central portion of the wafer.

Abstract: Provided is an optical disk reproduction apparatus capable of preventing information that is different from the original sub information from being subjected to error correction erroneously, and of stably reproducing the sub information. The optical disk reproduction apparatus (1) has an optical head (301) for reading a reproduction signal including main information and sub information based on a recording mark formed on an optical disk (300), a main information extraction unit (4) for extracting the main information from the reproduction signal, and a sub information extraction unit (2) for extracting the sub information from the reproduction signal.

Abstract: The present invention relates to semiconductor inspection and provides a technology capable of efficiently detecting a systematic defect. In the present system, with regard to the process (S7, S8) of matching hot spot (HS) points that can be simulated in advance and defect points obtained as a result of a visual inspection each other and the unmatched defect points, a process (S6, S9) of classifying the defect points into groups based on similarity of pattern layout at the defect points to determine the defects belonging to a pattern layout where defects frequently occur, thereby reliably detecting the systematic defect. Also, with a process (S11) of acquiring an uneven distribution in a defect occurrence distribution on a wafer, the systematic defect occurring due to topography of the wafer can also be detected.

Abstract: Provided are an optical disc recording device and a recording signal generating device which enable to correct displacement between a reproducing position of a reproduction signal from a concave-convex mark preformed in an optical disc, and a recording position of second information to be recorded in synchronism with the reproduction signal, and stably and speedily record the second information. A digital signal processor (202) specifies a reproducing position in the concave-convex mark, using a reproduction signal and a channel clock. A recording signal generator (211) generates a recording signal alternately including a plurality of additionally recordable data, each of which includes second information and has a predetermined length, and a plurality of dummy data.

Abstract: In a process for manufacturing a semiconductor wafer, defect distribution state analysis is performed so as to facilitate identification of the defect cause including a device cause and a process cause by classifying the defect distribution state according to the defect position coordinates detected by the inspection device, into one of the distribution characteristic categories: repeated defects, clustered defects, arc-shaped regional defects, radial regional defects, line type regional defects, ring and blob type regional defects, and random defects.

Abstract: Arrangements for inspecting a specimen on which plural patterns are formed; capturing a first image of a first area; capturing a second image of a second area in which patterns which are essentially the same with the patterns formed in the first area; creating data relating to corresponding pixels of the first and second images, for each pixel; determining a threshold for each pixel for detecting defects directly in accordance with the first and second images; and detecting defects on the specimen by processing the first and second images by using the threshold for each pixel and information of a scattered diagram of brightness of the first and second images, wherein the threshold is determined by using information of brightness of a local region of at least one of the first and second images, with the local region including an aimed pixel and peripheral pixels of the aimed pixel.

Abstract: The distribution states of defects are analyzed on the basis of the coordinates of defects detected by an inspection apparatus to classify them into a distribution feature category, or any one of repetitive defect, congestion defect, linear distribution defect, ring/lump distribution defect and random defect. In the manufacturing process for semiconductor substrates, defect distribution states are analyzed on the basis of defect data detected by an inspection apparatus, thereby specifying the cause of defect in apparatus or process.

Abstract: To provide an optical disk device, an optical disk control method and an integrated circuit, which are capable of writing a recordable mark by changing the reflectance ratio of a reflective film formed on concave-convex pits without using an industrial special device or a high-power laser light source. A data reproduction controller (103) sets a first rotation speed in a disk rotation speed switching unit (108) and a first laser power in a laser power switching unit (107) when reproducing the concave-convex pits. When writing the recordable mark, a mark recording controller (104) sets in the disk rotation speed switching unit (108) a second rotation speed that is slower than the first rotation speed and the lowest rotation speed at which the concave-convex pits can be reproduced, and sets a second laser power greater than the first laser power in the laser power switching unit (107) in accordance with the emission timing.