Abstract: In the fabrication of an active matrix substrate, when forming a contact hole in an inter-layer insulating film made of a thermosetting resin and hardening the inter-layer insulating film by heat, the temperature gradient in raising the temperature from room temperature to a baking temperature is arranged to be larger than 10.degree. C./minute. As a result, the tilt angle of the slant face of the contact hole is controlled to be within a range of 45.degree. to 60.degree..

Abstract: The transmission type liquid crystal display device of this invention includes: gate lines; source lines; and switching elements each arranged near a crossing of each gate line and each source line, a gate electrode of each switching element being connected to the gate line, a source electrode of the switching element being connected to the source line, and a drain electrode of the switching element being connected to a pixel electrode for applying a voltage to a liquid crystal layer, wherein an interlayer insulating film formed of an organic film with high transparency is provided above the switching element, the gate line, and the source line, and wherein the pixel electrode formed of a transparent conductive film is provided on the interlayer insulating film.

Abstract: A method for producing a liquid crystal display device includes: a pair of insulating substrates; a liquid crystal layer interposed between the pair of insulating substrates; switching elements arranged in a matrix on one of the pair of the insulating substrates; gate lines and data lines, arranged to intersect each other, for controlling the switching elements; and pixel electrodes provided above the gate lines and the data lines with an organic insulating film therebetween. The method includes the steps of forming a transparent conductive film on the organic insulating film at a first temperature; annealing the transparent conductive film at a second temperature equal to or lower than the first temperature; and patterning the transparent conductive film to form the pixel electrodes after the step of annealing.

Abstract: The transmission type liquid crystal display device of this invention includes: gate lines; source lines; and switching elements each arranged near a crossing of each gate line and each source line, a gate electrode of each switching element being connected to the gate line, a source electrode of the switching element being connected to the source line, and a drain electrode of the switching element being connected to a pixel electrode for applying a voltage to a liquid crystal layer, wherein an interlayer insulating film formed of an organic film with high transparency is provided above the switching element, the gate line, and the source line, and wherein the pixel electrode formed of a transparent conductive film is provided on the interlayer insulating film.

Abstract: In the fabrication of an active matrix substrate, when forming a contact hole in an inter-layer insulating film made of a thermosetting resin and hardening the inter-layer insulating film by heat, the temperature gradient in raising the temperature from room temperature to a baking temperature is arranged to be larger than 10.degree. C./minute. As a result, the tilt angle of the slant face of the contact hole is controlled to be within a range of 45.degree. to 60.degree..

Abstract: A method for forming a transparent conductive film includes the steps of: forming an ITO film on a substrate by sputtering a target including oxygen atoms, indium atoms, and tin atoms under an inert gas atmosphere; patterning the ITO film by selectively removing a prescribed portion of the ITO film using an etching method; and doping the patterned ITO film with oxygen using an ion shower doping method, thereby forming the transparent conductive film from the ITO film.