Patents by Inventor Zhenyu Hu

Zhenyu Hu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230061482
    Abstract: The disclosure provides a lateral bipolar transistor structure with a base layer over a semiconductor buffer, and related methods. A lateral bipolar transistor structure may include an emitter/collector (E/C) layer over an insulator. The E/C layer has a first doping type. A semiconductor buffer is adjacent the insulator. A base layer is on the semiconductor buffer and adjacent the E/C layer, the base layer including a lower surface below the E/C layer and an upper surface above the E/C layer. The base layer has a second doping type opposite the first doping type.
    Type: Application
    Filed: November 17, 2021
    Publication date: March 2, 2023
    Inventors: Hong Yu, Jagar Singh, Zhenyu Hu, John J. Pekarik
  • Publication number: 20230066963
    Abstract: In a disclosed semiconductor structure, a lateral bipolar junction transistor (BJT) has a base positioned laterally between a collector and an emitter. The base includes a semiconductor fin with a first portion that extends from a substrate through an isolation layer, a second portion on the first portion, and a third portion on the second portion. The collector and emitter are on the isolation layer and positioned laterally immediately adjacent to opposing sidewalls of the second portion of the semiconductor fin. In some embodiments, the BJT is a standard BJT where the semiconductor fin (i.e., the base), the collector, and the emitter are made of the same semiconductor material. In other embodiments, the BJT is a heterojunction bipolar transistor (HBT) where a section of the semiconductor fin (i.e., the base) is made of a different semiconductor material for improved performance. Also disclosed is a method of forming the structure.
    Type: Application
    Filed: November 30, 2021
    Publication date: March 2, 2023
    Applicant: GlobalFoundries U.S. Inc.
    Inventors: Hong Yu, Judson R. Holt, Zhenyu Hu
  • Publication number: 20230061219
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. A structure includes: an intrinsic base comprising semiconductor material in a channel region of a semiconductor substrate; an extrinsic base vertically above the intrinsic base; a raised collector region on the semiconductor substrate and laterally connected to the intrinsic base; and a raised emitter region on the semiconductor substate and laterally connected to the intrinsic base.
    Type: Application
    Filed: October 25, 2021
    Publication date: March 2, 2023
    Inventors: Haiting Wang, Alexander Derrickson, Jagar Singh, Vibhor Jain, Andreas Knorr, Alexander Martin, Judson R. Holt, Zhenyu Hu
  • Patent number: 11264470
    Abstract: One illustrative device disclosed herein includes a semiconductor substrate and a bipolar junction transistor (BJT) device that comprises a collector region, a base region and an emitter region. In this example, the device also includes a field effect transistor and at least one base conductive contact structure that conductively and physically contacts the base region.
    Type: Grant
    Filed: February 27, 2020
    Date of Patent: March 1, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Haiting Wang, Tamilmani Ethirajan, Zhenyu Hu, Tung-Hsing Lee
  • Publication number: 20210367060
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to single fin structures and methods of manufacture. The structure includes: an active single fin structure; a plurality of dummy fin structures on opposing sides of the active single fin structure; source and drain regions formed on the active single fin structure and the dummy fin structures; recessed shallow trench isolation (STI) regions between the dummy fin structures and the active single fin structure and below a surface of the dummy fin structures; and contacts formed on the source and drain regions of the active single fin structure with a spacing of at least two dummy fin structures on opposing sides of the contacts.
    Type: Application
    Filed: August 10, 2021
    Publication date: November 25, 2021
    Inventors: Haiting Wang, Hong Yu, Zhenyu Hu
  • Patent number: 11127842
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to single fin structures and methods of manufacture. The structure includes: an active single fin structure; a plurality of dummy fin structures on opposing sides of the active single fin structure; source and drain regions formed on the active single fin structure and the dummy fin structures; recessed shallow trench isolation (STI) regions between the dummy fin structures and the active single fin structure and below a surface of the dummy fin structures; and contacts formed on the source and drain regions of the active single fin structure with a spacing of at least two dummy fin structures on opposing sides of the contacts.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Haiting Wang, Hong Yu, Zhenyu Hu
  • Publication number: 20210273061
    Abstract: One illustrative device disclosed herein includes a semiconductor substrate and a bipolar junction transistor (BJT) device that comprises a collector region, a base region and an emitter region. In this example, the device also includes a field effect transistor and at least one base conductive contact structure that conductively and physically contacts the base region.
    Type: Application
    Filed: February 27, 2020
    Publication date: September 2, 2021
    Inventors: Haiting Wang, Tamilmani Ethirajan, Zhenyu Hu, Tung-Hsing Lee
  • Publication number: 20210151581
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to single fin structures and methods of manufacture. The structure includes: an active single fin structure; a plurality of dummy fin structures on opposing sides of the active single fin structure; source and drain regions formed on the active single fin structure and the dummy fin structures; recessed shallow trench isolation (STI) regions between the dummy fin structures and the active single fin structure and below a surface of the dummy fin structures; and contacts formed on the source and drain regions of the active single fin structure with a spacing of at least two dummy fin structures on opposing sides of the contacts.
    Type: Application
    Filed: November 19, 2019
    Publication date: May 20, 2021
    Inventors: Haiting WANG, Hong YU, Zhenyu HU
  • Patent number: 10957578
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a single diffusion break device and methods of manufacture. The structure includes a single diffusion break structure with a fill material between sidewall spacers of the single diffusion break structure and a channel oxidation below the fill material.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: March 23, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Wei Hong, Hui Zang, Hsien-Ching Lo, Zhenyu Hu, Liu Jiang
  • Patent number: 10833067
    Abstract: A structure includes a first dielectric over a trench silicide (TS) contact and over a gate structure, and at least one cavity in the first dielectric. A metal resistor layer is on a bottom and sidewalls of the at least one cavity and extends over the first dielectric. A first contact is on the metal resistor layer over the first dielectric; and a second contact is on the metal resistor layer over the first dielectric. The metal resistor layer is over the TS contact and over the gate structure. Where a plurality of cavities are provided in the dielectric, a resistor structure formed by the metal resistor layer may have an undulating cross-section over the plurality of cavities and the dielectric.
    Type: Grant
    Filed: July 23, 2019
    Date of Patent: November 10, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Haiting Wang, Sipeng Gu, Jiehui Shu, Scott H. Beasor, Zhenyu Hu
  • Patent number: 10825897
    Abstract: One illustrative method disclosed herein may include forming a first straight sidewall spacer adjacent a gate structure of a transistor, forming a recessed layer of sacrificial material adjacent the first straight sidewall spacer and forming a second straight sidewall spacer on a portion of the outer surface of the first straight sidewall spacer and above the recessed layer of sacrificial material. The method may also include removing the recessed layer of sacrificial material so as to expose a first vertical portion of the outer surface of the first straight sidewall spacer and forming an epi material on and above the substrate, wherein an edge of the epi material engages the first straight sidewall spacer.
    Type: Grant
    Filed: January 30, 2019
    Date of Patent: November 3, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Wei Hong, George R. Mulfinger, Hui Zang, Liu Jiang, Zhenyu Hu
  • Patent number: 10777642
    Abstract: One illustrative method disclosed herein may include forming a first straight sidewall spacer adjacent a gate structure of a transistor, forming a second straight sidewall spacer on the first straight sidewall spacer and forming a recessed layer of sacrificial material adjacent the second straight sidewall spacer such that the recessed layer of sacrificial material covers an outer surface of a first vertical portion of the second straight sidewall spacer while exposing a second vertical portion of the second straight sidewall spacer. In this example, the method may also include removing the second vertical portion of the second straight sidewall spacer, removing the recessed layer of sacrificial material and forming an epi material such that an edge of the epi material engages the outer surface of the first vertical portion of the second straight sidewall spacer.
    Type: Grant
    Filed: January 30, 2019
    Date of Patent: September 15, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Wei Hong, George R. Mulfinger, Hui Zang, Liu Jiang, Zhenyu Hu
  • Publication number: 20200273953
    Abstract: One illustrative integrated circuit product disclosed herein includes a short-channel transistor device and a long-channel transistor device formed above a semiconductor substrate, wherein a first gate structure for the short-channel transistor device includes a short-channel WFM layer with a first upper surface that is positioned at a first distance above an upper surface of the semiconductor substrate, and wherein a second gate structure for the long-channel transistor device includes a long-channel WFM layer with a second upper surface that is positioned at a second distance above the upper surface of the semiconductor substrate, wherein the first distance is greater than the second distance.
    Type: Application
    Filed: February 27, 2019
    Publication date: August 27, 2020
    Inventors: Tao Chu, Wei Ma, Jae Gon Lee, Hong Yu, Zhenyu Hu, Srikanth Balaji Samavedam
  • Publication number: 20200243646
    Abstract: One illustrative method disclosed herein may include forming a first straight sidewall spacer adjacent a gate structure of a transistor, forming a second straight sidewall spacer on the first straight sidewall spacer and forming a recessed layer of sacrificial material adjacent the second straight sidewall spacer such that the recessed layer of sacrificial material covers an outer surface of a first vertical portion of the second straight sidewall spacer while exposing a second vertical portion of the second straight sidewall spacer. In this example, the method may also include removing the second vertical portion of the second straight sidewall spacer, removing the recessed layer of sacrificial material and forming an epi material such that an edge of the epi material engages the outer surface of the first vertical portion of the second straight sidewall spacer.
    Type: Application
    Filed: January 30, 2019
    Publication date: July 30, 2020
    Inventors: Wei Hong, George R. Mulfinger, Hui Zang, Liu Jiang, Zhenyu Hu
  • Publication number: 20200243645
    Abstract: One illustrative method disclosed herein may include forming a first straight sidewall spacer adjacent a gate structure of a transistor, forming a recessed layer of sacrificial material adjacent the first straight sidewall spacer and forming a second straight sidewall spacer on a portion of the outer surface of the first straight sidewall spacer and above the recessed layer of sacrificial material. The method may also include removing the recessed layer of sacrificial material so as to expose a first vertical portion of the outer surface of the first straight sidewall spacer and forming an epi material on and above the substrate, wherein an edge of the epi material engages the first straight sidewall spacer.
    Type: Application
    Filed: January 30, 2019
    Publication date: July 30, 2020
    Inventors: Wei Hong, George R. Mulfinger, Hui Zang, Liu Jiang, Zhenyu Hu
  • Patent number: 10692039
    Abstract: System and method that improves cargo logistics may be presented. For instance, shipping capacity in cargo logistics may be best utilized based on providing pricing and scheduling solutions that are jointly optimized and prices differentiated based on flexibility of service request. Scheduled service and pricing may be transmitted as a signal to control execution of the cargo logistics.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: June 23, 2020
    Assignee: International Business Machines Corporation
    Inventors: Pawan R. Chowdhary, Markus R. Ettl, Zhenyu Hu, Roger D. Lederman, Zhengliang Xue
  • Patent number: 10643900
    Abstract: Methods of reducing the SC GH on a FinFET device while protecting the LC devices and the resulting devices are provided. Embodiments include forming an ILD over a substrate of a FinFET device, the ILD having a SC region and a LC region; forming a SC gate and a LC gate within the SC and LC regions, respectively, an upper surface of the SC and LC gates being substantially coplanar with an upper surface of the ILD; forming a lithography stack over the LC region; recessing the SC gate; stripping the lithography stack; forming a SiN cap layer over the SC and LC regions; forming a TEOS layer over the SiN cap layer; and planarizing the TEOS layer.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: May 5, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Xinyuan Dou, Hong Yu, Zhenyu Hu, Xing Zhang
  • Publication number: 20200105584
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a single diffusion break device and methods of manufacture. The structure includes a single diffusion break structure with a fill material between sidewall spacers of the single diffusion break structure and a channel oxidation below the fill material.
    Type: Application
    Filed: September 28, 2018
    Publication date: April 2, 2020
    Inventors: Wei HONG, Hui ZANG, Hsien-Ching LO, Zhenyu HU, Liu JIANG
  • Patent number: 10559656
    Abstract: Described herein are nanosheet-FET structures having a wrap-all-around contact where the contact wraps entirely around the S/D epitaxy structure, thereby increasing contact area and ultimately allowing for improved S/D contact resistance. Other aspects described include nanosheet-FET structures having an air gap as a bottom isolation area to reduce parasitic S/D leakage to the substrate.
    Type: Grant
    Filed: May 2, 2018
    Date of Patent: February 11, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Emilie M. S. Bourjot, Julien Frougier, Yi Qi, Ruilong Xie, Hui Zang, Hsien-Ching Lo, Zhenyu Hu
  • Publication number: 20200020770
    Abstract: Structures for field-effect transistors and methods for forming field-effect transistors. A sidewall spacer is arranged adjacent to a sidewall of a gate structure. The sidewall spacer includes a first section and a second section arranged over the first section. The first section of the sidewall spacer is composed of a first dielectric material, and the second section of the sidewall spacer is composed of a second dielectric material different from the first dielectric material. A source/drain region includes a first section arranged adjacent to the first section of the sidewall spacer and a second section arranged adjacent to the second section of the sidewall spacer. The second section of the source/drain region is spaced by a gap from the second section of the sidewall spacer.
    Type: Application
    Filed: July 12, 2018
    Publication date: January 16, 2020
    Inventors: Yi Qi, Hsien-Ching Lo, Xusheng Wu, Hui Zang, Zhenyu Hu, George R. Mulfinger