Patents by Inventor Zhiqiang Wu

Zhiqiang Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9966436
    Abstract: A semiconductor device includes a first channel having a first linear surface and a first non-linear surface. The semiconductor device includes a first dielectric region surrounding the first channel. The semiconductor device includes a second channel having a third linear surface and a third non-linear surface. The semiconductor device includes a second dielectric region surrounding the second channel. The semiconductor device includes a gate electrode surrounding the first dielectric region and the second dielectric region.
    Type: Grant
    Filed: March 22, 2016
    Date of Patent: May 8, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Xiaomeng Chen, Chien-Hong Chen, Shih-Chang Liu, Zhiqiang Wu
  • Publication number: 20180102419
    Abstract: A semiconductor device includes a substrate and a fin feature over the substrate. The fin feature includes a first portion having a first semiconductor material and a second portion having a second semiconductor material over the first portion. The second semiconductor material is different from the first semiconductor material. The semiconductor device further includes an isolation feature over the substrate and over sides of the fin feature; a semiconductor oxide feature including the first semiconductor material and disposed on sidewalls of the first portion; and a gate stack disposed on the fin feature and the isolation feature. The gate stack includes a gate dielectric layer extending into recesses that are into a top portion of the semiconductor oxide feature and below the second portion of the fin feature.
    Type: Application
    Filed: December 12, 2017
    Publication date: April 12, 2018
    Inventors: Kuo-Cheng Ching, Carlos H. Diaz, Chih-Hao Wang, Zhiqiang Wu
  • Patent number: 9941406
    Abstract: A device includes a semiconductor substrate, and isolation regions extending into the semiconductor substrate. A semiconductor fin is between opposite portions of the isolation regions, wherein the semiconductor fin is over top surfaces of the isolation regions. A gate stack overlaps the semiconductor fin. A source/drain region is on a side of the gate stack and connected to the semiconductor fin. The source/drain region includes an inner portion thinner than the semiconductor fin, and an outer portion outside the inner portion. The semiconductor fin and the inner portion of the source/drain region have a same composition of group IV semiconductors.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: April 10, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Zhiqiang Wu
  • Patent number: 9941404
    Abstract: A Fin Field-Effect Transistor (FinFET) includes a semiconductor layer over a substrate, wherein the semiconductor layer forms a channel of the FinFET. A first silicon germanium oxide layer is over the substrate, wherein the first silicon germanium oxide layer has a first germanium percentage. A second silicon germanium oxide layer is over the first silicon germanium oxide layer. The second silicon germanium oxide layer has a second germanium percentage greater than the first germanium percentage. A gate dielectric is on sidewalls and a top surface of the semiconductor layer. A gate electrode is over the gate dielectric.
    Type: Grant
    Filed: July 27, 2016
    Date of Patent: April 10, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jean-Pierre Colinge, Kuo-Cheng Ching, Gwan Sin Chang, Zhiqiang Wu, Chih-Hao Wang, Carlos H. Diaz
  • Patent number: 9929269
    Abstract: Embodiments of the present disclosure include a semiconductor device, a FinFET device, and methods for forming the same. An embodiment is a semiconductor device including a first semiconductor fin extending above a substrate, the first semiconductor fin having a first lattice constant, an isolation region surrounding the first semiconductor fin, and a first source/drain region in the first semiconductor fin, the first source/drain having a second lattice constant different from the first lattice constant. The semiconductor device further includes a first oxide region along a bottom surface of the first source/drain region, the first oxide region extending into the isolation region.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: March 27, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng Ching, Chih-Hao Wang, Ching-Wei Tsai, Zhiqiang Wu, Jean-Pierre Colinge
  • Publication number: 20180076097
    Abstract: Various methods are disclosed herein for fabricating non-planar circuit devices having strain-producing features. An exemplary method includes forming a fin structure that includes a first portion that includes a first semiconductor material and a second portion that includes a second semiconductor material that is different than the first semiconductor material. The method further includes forming a masking layer over a source region and a drain region of the fin structure, forming a strain-producing feature over the first portion of the fin structure in a channel region, removing the masking layer and forming an isolation feature over the strain-producing feature, forming an epitaxial feature over the second portion of the fin structure in the source region and the drain region, and performing a gate replacement process to form a gate structure over the second portion of the fin structure in the channel region.
    Type: Application
    Filed: November 7, 2017
    Publication date: March 15, 2018
    Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Zhiqiang Wu
  • Publication number: 20180029031
    Abstract: The present invention provides an apparatus for detecting the analyte in liquid sample, including a channel for arranging the test strip, with one end opened and the other closed, wherein the channel includes an anti-flooding structure where the cross sectional area of the channel is reduced. The apparatus provided in the present invention can prevent the flooding phenomenon of the test strip, and reduce the error rate.
    Type: Application
    Filed: July 7, 2017
    Publication date: February 1, 2018
    Inventors: Zhiqiang WU, Yangyu Zhu, Liang Hong
  • Patent number: 9882032
    Abstract: A method includes forming isolation features on a substrate, thereby defining an active region on the semiconductor substrate; recessing the active region to form a fin trench; forming a fin feature on the fin trench by growing a first semiconductor layer on the substrate and a second semiconductor layer on the first semiconductor layer; performing a first recessing process; forming a dummy gate stack over the fin feature and the isolation feature; performing a thermal oxidation process to selectively oxidize the first semiconductor layer to form a semiconductor oxide feature on sidewalls of the first semiconductor layer; performing a second recessing process such that a portion of the isolation feature is recessed to below the second semiconductor layer, resulting in a dented void overlying the semiconductor oxide feature and underlying the second semiconductor layer; and forming a gate stack including a gate dielectric layer extending to the dented void.
    Type: Grant
    Filed: January 9, 2017
    Date of Patent: January 30, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Kuo-Cheng Ching, Chih-Hao Wang, Zhiqiang Wu, Carlos H Diaz
  • Publication number: 20180019325
    Abstract: A finFET device having a substrate and a fin disposed on the substrate. The fin includes a passive region, a stem region overlying the passive region, and an active region overlying the stem region. The stem region has a first width and the active region has a second width. The first width is less than the second width. The stem region and the active region also have different compositions. A gate structure is disposed on the active region.
    Type: Application
    Filed: August 14, 2017
    Publication date: January 18, 2018
    Inventors: Jean-Pierre COLINGE, Kuo-Cheng CHING, Zhiqiang WU
  • Patent number: 9871141
    Abstract: A method includes performing a first epitaxy to grow a silicon germanium layer over a semiconductor substrate, performing a second epitaxy to grow a silicon layer over the silicon germanium layer, and performing a first oxidation to oxidize the silicon germanium layer, wherein first silicon germanium oxide regions are generated. A strain releasing operation is performed to release a strain caused by the first silicon germanium oxide regions. A gate dielectric is formed on a top surface and a sidewall of the silicon layer. A gate electrode is formed over the gate dielectric.
    Type: Grant
    Filed: April 4, 2016
    Date of Patent: January 16, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Carlos H. Diaz, Chih-Hao Wang, Gwan Sin Chang, Jean-Pierre Colinge, Kuo-Cheng Ching, Zhiqiang Wu
  • Publication number: 20180012989
    Abstract: A device includes a semiconductor substrate, and isolation regions extending into the semiconductor substrate. A semiconductor fin is between opposite portions of the isolation regions, wherein the semiconductor fin is over top surfaces of the isolation regions. A gate stack overlaps the semiconductor fin. A source/drain region is on a side of the gate stack and connected to the semiconductor fin. The source/drain region includes an inner portion thinner than the semiconductor fin, and an outer portion outside the inner portion. The semiconductor fin and the inner portion of the source/drain region have a same composition of group IV semiconductors.
    Type: Application
    Filed: September 8, 2017
    Publication date: January 11, 2018
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Zhiqiang Wu
  • Publication number: 20170373066
    Abstract: The present disclosure describes a fin-like field-effect transistor (FinFET). The device includes one or more fin structures over a substrate, each with source/drain (S/D) features and a high-k/metal gate (HK/MG). A first HK/MG in a first gate region wraps over an upper portion of a first fin structure, the first fin structure including an epitaxial silicon (Si) layer as its upper portion and an epitaxial growth silicon germanium (SiGe), with a silicon germanium oxide (SiGeO) feature at its outer layer, as its middle portion, and the substrate as its bottom portion. A second HK/MG in a second gate region, wraps over an upper portion of a second fin structure, the second fin structure including an epitaxial SiGe layer as its upper portion, an epitaxial Si layer as it upper middle portion, an epitaxial SiGe layer as its lower middle portion, and the substrate as its bottom portion.
    Type: Application
    Filed: September 11, 2017
    Publication date: December 28, 2017
    Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Chih-Sheng Chang, Zhiqiang Wu
  • Patent number: 9853150
    Abstract: A method of fabricating epitaxial gate dielectric includes forming a SrxBayMzTiO3 gate dielectric on a fin, and 0?x, y and z?1, x+y+z=1, and M is calcium or magnesium. One of x and y is not 0. The SrxBayMzTiO3 gate dielectric includes a plurality of SrxBayMzTiO3 dielectric films. Each of the SrxBayMzTiO3 dielectric films has different ratio of x, y, and z. The fin is then oxidized to form a silicon oxide in between the SrxBayMzTiO3 gate dielectric and the fin. A dielectric layer is disposed on the SrxBayMzTiO3 gate dielectric. Subsequently a metal gate layer is deposited on the dielectric layer.
    Type: Grant
    Filed: August 15, 2016
    Date of Patent: December 26, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jean-Pierre Colinge, Ken-Ichi Goto, ZhiQiang Wu
  • Patent number: 9837321
    Abstract: A nonplanar circuit device having a strain-producing structure disposed under the channel region is provided. In an exemplary embodiment, the integrated circuit device includes a substrate with a first fin structure and a second fin structure disposed on the substrate. An isolation feature trench is defined between the first fin structure and the second fin structure. The circuit device also includes a strain feature disposed on a horizontal surface of the substrate within the isolation feature trench. The strain feature may be configured to produce a strain on a channel region of a transistor formed on the first fin structure. The circuit device also includes a fill dielectric disposed on the strain feature within the isolation feature trench. In some such embodiments, the strain feature is further disposed on a vertical surface of the first fin structure and on a vertical surface of the second fin structure.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: December 5, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Zhiqiang Wu
  • Publication number: 20170330884
    Abstract: A method includes providing a substrate having an n-type fin-like field-effect transistor (NFET) region and forming a fin structure in the NFET region. The fin structure includes a first layer having a first semiconductor material, and a second layer under the first layer and having a second semiconductor material different from the first semiconductor material. The method further includes forming a patterned hard mask to fully expose the fin structure in gate regions of the NFET region and partially expose the fin structure in at least one source/drain (S/D) region of the NFET region. The method further includes oxidizing the fin structure not covered by the patterned hard mask, wherein the second layer is oxidized at a faster rate than the first layer. The method further includes forming an S/D feature over the at least one S/D region of the NFET region.
    Type: Application
    Filed: July 31, 2017
    Publication date: November 16, 2017
    Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Chih-Sheng Chang, Zhiqiang Wu
  • Patent number: 9812252
    Abstract: A rolled iron core traction transformer, comprising an iron core (1); the iron core (1) is formed by splicing two symmetrical annealed iron-core closed single frames (1-1); each iron-core closed single frame (1-1) is formed by sequentially coiling continuous silicon steel sheets; the iron-core closed single frame (1-1) has two iron core column single bodies (1-1-1) having approximately semicircular cross sections; the iron core (1) has two iron core columns (1-2) thereon spliced by the iron core column single bodies (1-1-1) and having approximately circular cross sections; each iron core column (1-2) is sequentially provided with a low-voltage T winding (6), a low-voltage F winding (5) and a high-voltage winding (4) thereon from inside to outside; two sides of each high-voltage winding (4) are respectively provided with a first tapping area and a second tapping area; the first tapping area is provided with low-voltage side high-voltage tapping outgoing lines (16); the second lapping area is provided with high
    Type: Grant
    Filed: April 20, 2015
    Date of Patent: November 7, 2017
    Assignees: CHANGZHOU PACIFIC ELECTRIC POWER EQUIPMENT GROUP CO., LTD., SOUTHWEST JIAOTONG UNIVERSITY, CHINA RAILWAY CORPORATION
    Inventors: Shibin Gao, Baoguo Wang, Zhiqiang Wu, Mindong Gao
  • Patent number: 9797478
    Abstract: An electrically powered gear box for a semitrailer stabilizer, comprising a gear box housing; the housing is internally provided with a drive gear (10), a power output shaft (2), and a clutch mechanism ensuring transmission connection or disengagement between the drive gear (10) and the power output shaft (2); the housing is externally provided with a motor (20); and the shaft of the motor is in a transmission connection with the drive gear (10). The electrically powered gear box for the semitrailer stabilizer can be manually or electrically controlled. In the case of electrical control, the clutch mechanism causes the drive gear (10) to be in a transmission connection with the power output shaft (2); upon activating the motor (20), the motor (20) drives the power output shaft (2) to rotate via the drive gear (10) and the clutch mechanism, thus ensuring easy operation.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: October 24, 2017
    Inventor: Zhiqiang Wu
  • Publication number: 20170301588
    Abstract: The present disclosure provides an embodiment of a fin-like field-effect transistor (FinFET) device. The device includes a substrate having a first gate region, a first fin structure over the substrate in the first gate region. The first fin structure includes an upper semiconductor material member, a lower semiconductor material member, surrounded by an oxide feature and a liner wrapping around the oxide feature of the lower semiconductor material member, and extending upwards to wrap around a lower portion of the upper semiconductor material member. The device also includes a dielectric layer laterally proximate to an upper portion of the upper semiconductor material member. Therefore the upper semiconductor material member includes a middle portion that is neither laterally proximate to the dielectric layer nor wrapped by the liner.
    Type: Application
    Filed: June 29, 2017
    Publication date: October 19, 2017
    Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Chih-Sheng Chang, Zhiqiang Wu
  • Patent number: 9768297
    Abstract: The present disclosure relates to a transistor device having an epitaxial carbon layer and/or a carbon implantation region that provides for a low variation of voltage threshold, and an associated method of formation. In some embodiments, the transistor device has an epitaxial region arranged within a recess within a semiconductor substrate. The epitaxial region has a carbon doped silicon epitaxial layer and a silicon epitaxial layer disposed onto the carbon doped silicon epitaxial layer. A gate structure is arranged over the silicon epitaxial layer. The gate structure has a gate dielectric layer disposed onto the silicon epitaxial layer and a gate electrode layer disposed onto the gate dielectric layer. A source region and a drain region are arranged on opposing sides of a channel region disposed below the gate structure.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: September 19, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Hsing Yu, Chia-Wen Liu, Yeh Hsu, Shih-Syuan Huang, Ken-Ichi Goto, Zhiqiang Wu
  • Patent number: 9761586
    Abstract: The present disclosure describes a fin-like field-effect transistor (FinFET). The device includes one or more fin structures over a substrate, each with source/drain (S/D) features and a high-k/metal gate (HK/MG). A first HK/MG in a first gate region wraps over an upper portion of a first fin structure, the first fin structure including an epitaxial silicon (Si) layer as its upper portion and an epitaxial growth silicon germanium (SiGe), with a silicon germanium oxide (SiGeO) feature at its outer layer, as its middle portion, and the substrate as its bottom portion. A second HK/MG in a second gate region, wraps over an upper portion of a second fin structure, the second fin structure including an epitaxial SiGe layer as its upper portion, an epitaxial Si layer as it upper middle portion, an epitaxial SiGe layer as its lower middle portion, and the substrate as its bottom portion.
    Type: Grant
    Filed: September 2, 2016
    Date of Patent: September 12, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Ching, Ka-Hing Fung, Chih-Sheng Chang, Zhiqiang Wu